CN201381279Y

CN201381279Y - Etching equipment

Info

Publication number: CN201381279Y
Application number: CN200920006951U
Authority: CN
Inventors: 李玟澄; 陈麒文; 朱德铭
Original assignee: Manz Taiwan Ltd
Current assignee: Manz Taiwan Ltd
Priority date: 2009-03-16
Filing date: 2009-03-16
Publication date: 2010-01-13
Anticipated expiration: 2019-03-16

Abstract

The utility model discloses etching equipment, which is mainly characterized in that a plurality of spray sources are uniformly arranged above a soaking tank, and a liquid medicine working tank supplies liquid medicine to the spray sources; both sides of the inner surface of the soaking tank are respectively provided with a feed floating wheel and a discharge floating wheel, and the floating wheels are respectively overlapped on a platform; and in addition, wind knives are respectively arranged at positions on the outer side of the soaking tank which correspond to the floating wheels. When a glass substrate goes through the feed floating wheel, the wind knife supplies high-speed strong wind to restrict the liquid medicine in the soaking tank from overflowing; after the glass substrate fully enters the soaking tank, the feed guiding wheel is controlled to drive the substrate to move back and froth within a small range to be soaked, and simultaneously, the spray sources spray the liquid medicine to the substrate; and consequently, the surface of the glass substrate uniformly contacts with the liquid medicine, and the time for the surface of the substrate to receive the liquid medicine is the same.

Description

Etching machines

Technical field

The utility model relates to a kind of etching machines, particularly a kind of etching chamber of etching machines improvement, with the two ends that solve glass substrate because of carrying out etching and the asynchronism(-nization) of accepting to wash, the not good situation of the etch uniformity that produces.

Background technology

With reference to figure 2, be a kind of etching machines of the prior art, this etching machines includes a feeding district A, an etching chamber B, a preliminary chamber C of cleaning, main chamber D, a kiln E, the discharge zone F of cleaning, be provided with a successive feeding guide wheel G between the working spaces, this feeding guide wheel G is by an outside electric control chamber (figure does not show) control.Wherein this etching chamber comprises a soaking compartment B1, the also external soup work nest H of this soaking compartment B1, this soup work nest H comprise basically one soak pump H1 as the propulsion source supply of chemical to soaking compartment B1, and the member of control soups such as resistance detecting meter H3, potential of hydrogen detecting meter H2, temperature detecting device H4, heater H 5, spiral coil cooling tube H6.Glass substrate I delivers into etching chamber B soaking compartment B1 by feeding district A by conveying guide wheel G, roller is out of service, soak pump H1 and squeeze into soup to soaking compartment B1, make the soup cover glass substrate I in the soaking compartment B1, after glass substrate I soaks for some time, feeding guide wheel G starts, and glass substrate I is transported to the preliminary chamber C of cleaning.Glass substrate I one end (to call head end in the following text) is introduced into the preliminary chamber C of cleaning and cleans, and the other end (to call end in the following text) is also entered the preliminary chamber C of cleaning by feeding guide wheel G drive and accepts cleaning thereafter, and soup and the secondary resultant that remains on the substrate tentatively washed out.

Because etching process is to wait for that substrate enters soaking compartment fully in the prior art, and is statically placed on the feeding guide wheel, just supply of chemical has so just prolonged the time of substrate in etch phase to soaking compartment; On the other hand, etching process, it is the soup immersion that substrate is accepted soaking compartment comprehensively synchronously, soak the back and leave soaking compartment earlier by the substrate head end, end also is soaked in the groove simultaneously, such transmission operation can cause the asynchronism(-nization) of glass substrate head, last two end in contact soups, and causes etching degree difference, makes etching result inhomogeneous.In immersion process, must constantly upgrade the concentration that soup can be kept soup again.

The utility model content

At the etch process of prior art, need treat that glass substrate is statically placed in soaking compartment fully after, the side begins to carry out the etching operation, can cause the long problem in man-hour of etch phase, so the utility model main purpose, provides a kind of etching machines that can save etching period.

In etched process, substrate head, end contact the asynchronism(-nization) of soup at glass substrate, can cause the situation of etching inequality, so another purpose of the utility model provide a kind of substrate that can make by the etching machines of uniform etching.

Soaking at glass substrate in the process of soup, do not change soup fully, the material that etching is produced down may influence liquor strength, and fluid temperature also can be influenced with the etching period growth, so the another purpose of the utility model is to make the plate surface can simultaneously and contact new soup uniformly everywhere.

In order to achieve the above object, the utility model provides a kind of etching machines, and this equipment comprises:

One soaking compartment, its inner face both sides are respectively equipped with a pan feeding floating roller and a discharging floating roller;

One feeding guide wheel in order to carry a substrate, makes this substrate enter this soaking compartment by this pan feeding floating roller;

One sprays system, it is the outer welding system of this soaking compartment, the a plurality of sprays source that includes a soup work nest and accept this soup work nest supply soup, spray source are average are provided with and corresponding to this soaking compartment top, link to each other with supply or released liquor with pipeline between this soup work nest and this soaking compartment;

This sprinkling system is controlled by the electric control part in the etching machines with this feeding guide wheel.

Two of the arranged outside of described soaking compartment are respectively corresponding to the air-out apparatus of described pan feeding floating roller and this discharging floating roller.

This air-out apparatus can discharge compressed-air actuated air knife for having long and narrow slit.

Described pan feeding floating roller and described discharging floating roller are to be overlapped on the platform, and can vertically move slight distance with respect to this platform.

The utility model etching program is just to have contacted soup when making substrate enter soaking compartment, so can save etching period.Again, cooperating the operation of feeding guide wheel, making the head end of substrate be introduced into soaking compartment and touch soup, when etching finishes, also be that head end by substrate leaves soaking compartment earlier, so just can make the time of substrate head, last two end in contact soups identical, can obtain uniform etching degree.Moreover in the etching process of soaking compartment, it is forward and backward mobile that the feeding guide wheel drives the machine plate, cooperating the constantly new soup of ejection of spray source, makes contacting new soup everywhere simultaneously and can making the blooming of substrate surface etched uniformly of substrate surface.

Description of drawings

Fig. 1 is the synoptic diagram of etching machines among the utility model embodiment.

Fig. 2 is a kind of etching machines of the prior art.

Embodiment

Below cooperation is graphic does more detailed description to embodiment of the present utility model, and those of ordinary skill in the art can be implemented after studying this specification sheets carefully according to this.

With reference to figure 1, be the preferred embodiment synoptic diagram of the utility model etching machines.Etching chamber 10 connects to be established one and passes to inner air extractor 1.Etching chamber 10 inside are provided with a soaking compartment 2, these soaking compartment 2 both sides are respectively equipped with a pan feeding floating roller 31 and a discharging floating roller 32, two floating rollers are overlapped in respectively on the platform 3, and can vertically move slight distance with respect to this platform 3, the outside, soaking compartment 2 both sides is provided with the air-out apparatus 4 corresponding to this pan feeding floating roller 31 and this discharging floating roller 32 respectively, this air-out apparatus can be a kind of air knife that long and narrow slit can spray gas that has, and air-out apparatus 4 is to link with a compressed air source (figure does not show).Soaking compartment 2 bottoms have wherein one section portion of a successive feeding guide wheel 5 to pass through.Soaking compartment 2 external sprinkling systems 6, it includes a row's spray source 61 and a soup work nest 62 that links to each other with pipeline, and this spray source 61 is meant nozzle, and nozzle is on average to be arranged on soaking compartment 2 tops, and respectively corresponding to soaking compartment 2 everywhere.This soup work nest 62 is to be arranged in etching chamber 10 outsides, and with soaking compartment 2 between have pipeline to link to each other to reclaim or supply of chemical, soup work nest inside includes an amount of liquid medicine of soaking in the pump 621 control soaking compartments 2, and a spray pump 627, as the propulsion source supply of chemical to each spray source 61; Soup work nest 62 still includes the member that resistance detecting meter 623, one potential of hydrogen detecting meter 622, one temperature detecting device 624, a well heater 625, a spiral coil cooling tube 626 .. etc. control fluid temperature or concentration.

The running of etching machines, be to soak pump 621 first supply of chemical to etching bath 2, controlling driving feeding guide wheel 5 by an electric control chamber (figure does not show) makes glass substrate 7 enter etching chamber 10 with feeding guide wheel 5, glass substrate 7 up pushes away pan feeding floating roller 31 by soaking compartment 2, the ejection gas of Lin Jin air-out apparatus semi-finals power simultaneously, overflow soaking compartment 2 with the soup in the restriction soaking compartment 2 because of the rising of pan feeding floating roller 31, glass substrate 7 head, the two ends, end successively enter soaking compartment 2 and contact soup, treat that glass substrate 7 enters soaking compartment 2 fully, pan feeding floating roller 31 just drops to contact platform 3 positions, form a similar barrier wall, prevent that soaking compartment 2 inner liquid medicines from flowing out, when glass substrate 7 soaks soup, the spray pump 627 control spray source 61 that is unlocked sprays soup, before feeding guide wheel 5 is then controlled in the watch-keeping cubicle, after move repeatedly, glass substrate 7 on feeding guide wheel 5 must along with feeding guide wheel 5 a little before, after move back and forth, make glass substrate 7 not only be immersed in the groove, also accept spray source 61 spray liquids on one side, make the full and uniform new soup of contact of substrate surface energy, keep the liquor strength on glass substrate 7 surfaces, can make the blooming on glass substrate 7 surfaces etched uniformly; 1 of described air extractor can make and keep negative pressure in the etching chamber 10, medicine gas can spill and leakage to soaking compartment 2.After etching reaches a scheduled time, electric control chamber control feeding guide wheel 5 is toward the running of discharging floating roller 32 directions, glass substrate 7 is by discharging floating roller 32, another air-out apparatus 4 corresponding discharging floating roller 32 ejection gases, the soup that limits in the soaking compartment 2 overflows soaking compartment 2 because of the rising of floating roller on the one hand, residual liquor on the substrate can be blown down on the other hand, treat that glass substrate 7 leaves soaking compartment 2 fully, discharging floating roller 32 just drops to contact platform 3 and forms a similar barrier wall, prevent that soaking compartment 2 inner liquid medicines from flowing out, glass substrate 7 promptly enters the preliminary flushing program of etching machines.After substrate left soaking compartment 2, the soup in the soaking compartment 2 just was back to soup work nest 62 through after the filtration treatment.

The design of the utility model etching machines is to make the glass substrate head end be introduced into soaking compartment contact soup, also is to leave soaking compartment earlier by head end, and the total time of glass substrate head like this, last two ends (comprehensively) contact soup is just identical, can produce uniform etching degree.And be just to have contacted soup when making substrate enter soaking compartment, can save the time of etch phase.Again, in the etching process of soaking compartment, it is forward and backward mobile that the feeding guide wheel drives the machine plate, cooperating the constantly new soup of ejection of spray source, and what make substrate surface can contact new soup simultaneously everywhere uniformly, keeps the liquor strength of substrate surface.

The above only is in order to explain preferred embodiment of the present utility model; be not that attempt is done any pro forma restriction to the utility model according to this; therefore; all have in that identical utility model spirit is following do relevant any modification of the present utility model or change, all must be included in the category of the utility model intention protection.

Claims

1. an etching machines is characterized in that, this equipment comprises:

2. etching machines as claimed in claim 1 is characterized in that, two of the arranged outside of described soaking compartment are respectively corresponding to the air-out apparatus of described pan feeding floating roller and this discharging floating roller.

3. etching machines as claimed in claim 2 is characterized in that, this air-out apparatus can discharge compressed-air actuated air knife for having long and narrow slit.

4. etching machines as claimed in claim 1 or 2 is characterized in that, described pan feeding floating roller and described discharging floating roller are to be overlapped on the platform, and can vertically move slight distance with respect to this platform.