CN201364880Y - 硅片单片清洗工艺腔体结构 - Google Patents
硅片单片清洗工艺腔体结构 Download PDFInfo
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- CN201364880Y CN201364880Y CNU2008201401540U CN200820140154U CN201364880Y CN 201364880 Y CN201364880 Y CN 201364880Y CN U2008201401540 U CNU2008201401540 U CN U2008201401540U CN 200820140154 U CN200820140154 U CN 200820140154U CN 201364880 Y CN201364880 Y CN 201364880Y
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Application Number | Priority Date | Filing Date | Title |
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CNU2008201401540U CN201364880Y (zh) | 2008-10-15 | 2008-10-15 | 硅片单片清洗工艺腔体结构 |
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CNU2008201401540U CN201364880Y (zh) | 2008-10-15 | 2008-10-15 | 硅片单片清洗工艺腔体结构 |
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CN201364880Y true CN201364880Y (zh) | 2009-12-16 |
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CNU2008201401540U Expired - Lifetime CN201364880Y (zh) | 2008-10-15 | 2008-10-15 | 硅片单片清洗工艺腔体结构 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102211095A (zh) * | 2010-04-02 | 2011-10-12 | 中芯国际集成电路制造(上海)有限公司 | 一种晶片清洗方法 |
CN104064500A (zh) * | 2014-06-24 | 2014-09-24 | 北京七星华创电子股份有限公司 | 用于薄片盘状物的清洗装置及方法 |
CN107093567A (zh) * | 2016-02-18 | 2017-08-25 | 顶程国际股份有限公司 | 环状液体收集装置 |
-
2008
- 2008-10-15 CN CNU2008201401540U patent/CN201364880Y/zh not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102211095A (zh) * | 2010-04-02 | 2011-10-12 | 中芯国际集成电路制造(上海)有限公司 | 一种晶片清洗方法 |
CN102211095B (zh) * | 2010-04-02 | 2013-11-06 | 中芯国际集成电路制造(上海)有限公司 | 一种晶片清洗方法 |
CN104064500A (zh) * | 2014-06-24 | 2014-09-24 | 北京七星华创电子股份有限公司 | 用于薄片盘状物的清洗装置及方法 |
CN104064500B (zh) * | 2014-06-24 | 2017-06-13 | 北京七星华创电子股份有限公司 | 用于薄片盘状物的清洗装置及方法 |
CN107093567A (zh) * | 2016-02-18 | 2017-08-25 | 顶程国际股份有限公司 | 环状液体收集装置 |
CN107093567B (zh) * | 2016-02-18 | 2019-08-06 | 顶程国际股份有限公司 | 环状液体收集装置 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: BEIJING GIGASOLAR TECHNOLOGY CO., LTD. Free format text: FORMER NAME: CHINA UNITED CLEANING TECHNOLOGY CO., LTD., BEIJING |
|
CP01 | Change in the name or title of a patent holder |
Address after: 100012 No. 40 Beiyuan Road, Chaoyang District, Beijing (Beijing Institute of nonferrous metals and rare earth applications) Patentee after: GIGA solar holding Co., Ltd. Address before: 100012 No. 40 Beiyuan Road, Chaoyang District, Beijing (Beijing Institute of nonferrous metals and rare earth applications) Patentee before: China United Cleaning Technology Co., Ltd., Beijing |
|
DD01 | Delivery of document by public notice |
Addressee: GIGA solar holding Co., Ltd. Document name: Notification to Pay the Fees |
|
DD01 | Delivery of document by public notice |
Addressee: GIGA solar holding Co., Ltd. Document name: Notification of Termination of Patent Right |
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DD01 | Delivery of document by public notice |
Addressee: GIGA solar holding Co., Ltd. Document name: Notification to Go Through Formalities Rectification of Restoration of Right |
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DD01 | Delivery of document by public notice |
Addressee: GIGA solar holding Co., Ltd. Document name: Notification to Pay the Fees Addressee: GIGA solar holding Co., Ltd. Document name: Notification of Decision on Request for Restoration of Right |
|
DD01 | Delivery of document by public notice |
Addressee: GIGA solar holding Co., Ltd. Document name: Notification that Application Deemed not to be Proposed |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20091216 |