CN201272828Y - Quick-dismantling structure for inner-transmission rotating shaft unit - Google Patents

Abstract

The utility model discloses a quick-released structure for inner transmission rotating shaft units, which includes a frame for vacuum sputtering and a plurality of rotating shaft units. The rotating shaft units are in fixed pin-joint with the frame, positions for pin joint of the rotating shaft units on the frame form a plurality open accommodating notches, two sides of the accommodating notches form a plurality of through holes for screws to penetrate through, the rotating shaft units are disposed across a plurality of transversely parallel accommodating notches, a plurality of equally spaced rollers are sleeved to the accommodating notches while a plurality of bearing blocks are positioned at proper positions corresponding to the accommodating notches, inner edges of the bearing blocks are used for accommodating bearings, outsides of the bearing blocks form screw holes corresponding to the through holes, and the screw holes are used for locking screws and fixing the rotating shaft units. The quick-released structure for inner transmission rotating shaft units not only is convenient for assembly and disassembly of the rotating shaft units, but also is capable of guaranteeing the mounting stability of the bearings.

Description

Transmission rotating shaft unit quick-disassembly structure in a kind of

Technical field

The utility model relates to a kind of packaging assembly of fast quick-detach, refers in particular to a kind of quick-disassembly structure that is applied to the cavity rotating shaft unit of vacuum splashing and plating.

Background technology

The vacuum splashing and plating technology is application important technology quite widely in the vacuum thin film manufacture process, oneself replaces modes such as spray electric conduction paint or metallide gradually in recent years, extensive application becomes considerable process for treating surface in industries such as photoelectricity, communication and semi-conductors.

Consult shown in Figure 1, general vacuum splashing and plating technology, utilize magnetron sputtering cathode plate 11, Ionized gas molecule 13 is excited plating material 18 to bombard at a high speed, make plated film molecule 12 uniformly dispersings each corner in vacuum cavity 10, again by the potential difference high-speed sputtering on plated body 19 surfaces, and then reach the purpose of plated film.

And in response to vacuum splashing and plating processing procedure application day wide, for increasing the industrial competitiveness of relevant plated film product, existing at present most of sputtering equipment is a continous way multi-cavity build formula, to replace the conventional batch type or the wafer formula mode of production.As shown in Figure 2, continous way transmission work flow is as can generally being divided into intake zone, sputter district and three zones of discharge zone.Each zone all is made up of a vacuum cavity 10 at least, utilizes transport sector plated body 19 to be delivered in the vacuum cavity 10 of different zones again and carries out every procedure operation.And general its automatization transport sector of continuous vacuum sputtering equipment all limit of utilization switch and tribology principle are finished transmission sequence between the different cavitys.

Please consult Fig. 3 again, each cavity has first wheel shaft 14 that a servomotor 13 drives vacuum cavity 10 bottom front respectively, drive latter half of wheel shaft 14 by chain 17 again, 12 on pallet places glue ring 16 tops of wheel shaft 14 both sides, under the start by frictional force between pallet 12 and the glue ring 16, pallet 12 is driven to next vacuum cavity 10, reach the operation purpose of continous way.

Carrying out between the sputter operational period, vacuum cavity 10 some internal contamination thing are unavoidable, plated film molecule 12 uniformly dispersings that bombardment excites as quilt are around vacuum cavity 10, the successful sputter of a part reaches the purpose of plated film on plated body 19 surfaces, and certain partly is dispersed in the plated film molecule 12 in other corner, just can be deposited on vacuum cavity 10 bottoms and transport sector such as wheel shaft 14, chain 17 surfaces etc. gradually.For some time gets off; residual plated film molecule 12 settlings of vacuum cavity 10 inwalls meeting; this settling volatilization will cause the vacuum cavity internal contamination; for keeping the requirement of plated film high quality; sputtering equipment is maintenance downtime regularly; dismounting vacuum cavity 10 internalies, strike off polishing vacuum cavity 10 inner wall surface plated film molecule 1s 2 settlings after, can reconfigure vacuum cavity 10 and reuse.

Yet, as shown in Figure 3, generally be mounted on the wheel shaft 14 in this vacuum cavity 10, when its two end is incorporated into 15 of two relative wheel shaft permanent seats, these wheel shaft 14 body of rod ends are passed wheel shaft permanent seat 15 corresponding circular holes after, utilize mode such as screw lock to fix again.So damage and to change as a certain wheel shaft 14, or user's desire is when removing settling, must be with wheel shaft permanent seat 15 from its position dismounting, wheel shaft 14 can be taken out and do to remove operation, and can't keep in repair with regard to single wheel shaft 14, or the cleaning of demolition, reduce the mobility and the rate of utilization of equipment greatly, and the necessity that is improved is arranged.

The utility model content

Main purpose of the present utility model, be to solve the above problems and provide a kind of in transmission rotating shaft unit quick-disassembly structure, the rotating shaft unit that it makes vacuum splashing and plating be used to carry load plate can have fast quick-detach, be installed in the characteristics on the framework.

For achieving the above object, transmission rotating shaft unit quick-disassembly structure is applied to the equipment of vacuum splashing and plating in of the present utility model, by a cavity, and be mounted on the intravital framework in this chamber, a plurality of rotating shaft unit, a load plate, a servomotor, and member such as two guide units is formed.With these rotating shaft unit uniformly-spaced the pivot group on this framework, and this framework is for the solid position of these rotating shaft unit pivots, form the storage tank of a plurality of openings, and in an outer ledge moulding one of the adjacent storage tank locating slot than the great circle footpath, and respectively the suitable place of this storage tank side forms a plurality of through holes that wear for screws in addition.And respectively this rotating shaft unit is cross-placed on that this framework is a plurality of to be on the laterally parallel storage tank, on it except that equidistantly being arranged with a plurality of rollers, and in correspondence respectively this storage tank appropriate location be provided with a plurality of bearing supports, respectively this bearing support inner edge can install for bearing, an outside lateral process is provided with a protruding axial region, and two are relative screw portion.In the time of in rotating shaft unit is arranged in these storage tanks, respectively this protruding axial region just can be placed in the corresponding locating slot, again two-screw pass respectively this logical after, screw lock, reaches precisely and the assembling effect of strong fix to fix this rotating shaft unit in the lockhole portion of this bearing support.Secondly, this load plate is positioned on the roller of these rotating shaft unit, and these rotating shaft unit each other, can pass through a plurality of belts, and this servomotor is done transmission and linked.And this two guide unit is located at two sides of corresponding load plate position in this cavity, and respectively this guide unit is by two wheel stands, a plurality of guide wheel and pivot, and member such as a cover plate is formed.Respectively be formed with a plurality of holes of taking turns on this wheel stand, and respectively this wheel hole is cutd open inboard that should load plate and is established a breach, when respectively this guide wheel utilized pivot pivot group in the wheel hole, the wheel face of these guide wheels protruded from this breach, is covered on this two wheel stands upper surface by this cover plate again and fixes.With when this load plate is transferred displacement on these rollers, can avoid generation to be offset situation improperly by the path of this its conveying of two guide units correcting.

Description of drawings

Fig. 1: vacuum splashing and plating principle schematic.

Fig. 2: existing continous way is spattered and is crossed the work flow synoptic diagram.

Fig. 3: existing vacuum cavity three-dimensional exploded view.

Fig. 4: three-dimensional exploded view of the present utility model.

Fig. 5: the local three-dimensional exploded view that amplifies of the utility model.

Fig. 6: the simple and easy synoptic diagram that the utility model guide unit is used.

Wherein, Reference numeral:

Cavity: 20 frameworks: 30

Storage tank: 31 locating slots: 32

Through hole: 33 rotating shaft unit: 40

Roller: 41 bearing supports: 42

Screw portion: 421 protruding axial regions: 422

Bearing: 43 load plates: 50

Servomotor: 60 transmission shafts: 61

Guide unit: 70 wheel stands: 71

Wheel hole: 711 breach: 712

Guide wheel: 72 pivots: 73

Cover plate: 74 screws: 81

Embodiment

For enabling further to understand structure design of the present utility model and technology, sincerely cooperate graphic giving again to be illustrated in the back:

Consult Fig. 4～shown in Figure 6, of the present utility model in transmission rotating shaft unit quick-disassembly structure, by the cavity 20 that constitutes vacuum splashing and plating equipment, framework 30, a plurality of rotating shaft unit 40, a load plate 50, servomotor 60, and member such as two guide units 70 forms, wherein:

These cavity 20 inner edge hollows can supply this framework 30, rotating shaft unit 40, load plate 50, servomotor 60, and member such as guide unit 70 is ccontaining.Because of this cavity 20 is an existing structure, repeats no more.

This framework 30 is a rectangular frame, on its two side and the intermediary deckle board, uniformly-spaced be formed with into and a plurality ofly be connected and be open storage tank 31 and locating slot 32, and order respectively this locating slot 32 be slightly larger than storage tank 31.Respectively the suitable place of these storage tank 31 sides forms a plurality of through holes 33, supplies the screw 81 of locking usefulness to wear.

These rotating shaft unit 40 are cross-placed on a plurality of of this framework 30 and are on the horizontal parallel storage tank 31.These rotating shaft unit 40 outer rims respectively, except that equidistantly being arranged with a plurality of rollers 41, and in correspondence respectively these storage tank 31 appropriate locations be provided with a plurality of bearing supports 42.Respectively these bearing support 42 inner edges can install for bearing 43, and are formed with the screw portion 421 of corresponding these through holes 33 in two sides, and axially to outer side that should locating slot 32, then are equipped with a protruding axial region 422.When respectively this rotating shaft unit 40 was arranged in these laterally parallel storage tanks 31 respectively, respectively this protruding axial region 422 just can be placed in the corresponding locating slot 32, reaches accurate and firm location.Making respectively again, this screw 81 wears through hole 33 back screw locks in screw portion 421, to fix this rotating shaft unit 40.

This load plate 50 is the rectangle plate body, is positioned on the roller 41 of these rotating shaft unit 40.And this servomotor 60 is fixedly arranged on the foot rest (not shown) side that cavity 10 is put, and its transmission shaft 61 combines with the rotating shaft unit 40 in mid-way.These rotating shaft unit 40 can be done transmission by a plurality of belt (not shown) and link each other simultaneously, when these servomotor 60 runnings, can drive these rotating shaft unit 40 rotations, and carry displacement by these rotating shaft unit 40 synchronous these load plates 50 that drive.Because this load plate 50 and servomotor 60 are existing structure, repeat no more.

This two guide unit 70 is fixedly arranged on this load plate 50 relatively and is positioned at cavity 10 outside adjoiners.Respectively this guide unit 70 is wheel stand 71 of directly being separated by, a plurality of guide wheel 72 and pivot 73 by two, and member such as a cover plate 74 is formed.Wherein respectively be formed with on this wheel stand 71 and a plurality ofly take turns hole 711, and the inboard that respectively 711 pairs in this wheel hole should load plate 50 cuts open and establish a breach 712, when respectively this guide wheel 72 utilized pivot 73 pivot groups in wheel hole 711, the wheel face of these guide wheels 72 protruded from outside this breach 712.And this cover plate 74 is covered on this two wheel stands, 71 upper surfaces, in order to the fixing guide wheel 72 of pivot group.When this load plate 50 is transferred displacement on these rollers 41, can conflict with the side of load plate 50 by the guide wheel 72 of this two guide unit 70, and the path of its conveying of correcting produces improper or excessive skew situation when avoiding carrying.

In view of the above, form by above-mentioned member, utilize these pivot unit 40 to distinguish and assemble fast and dismantle in the structure design of framework 30, dismounting or assembling efficiency when not only the lifting mechanism part cleans or keeps in repair also can be guaranteed the steadiness that bearing 43 is installed.By the setting of this two guide unit 70, more can guarantee the stationarity of load plate 50 conveying displacements simultaneously.

The above only is a preferred implementation of the present utility model; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; can also make a plurality of improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.

Claims (3)

1. transmission rotating shaft unit quick-disassembly structure in a kind comprises the framework that is applied to vacuum splashing and plating, and a plurality of pivot is fixed in the rotating shaft unit on this framework, it is characterized in that:

This solid position of framework confession rotating shaft unit pivot forms the storage tank of a plurality of openings, and respectively this storage tank side is formed with a plurality of through holes that supply screw to wear;

Rotating shaft unit is cross-placed on a plurality of of this framework and is on the horizontal parallel storage tank, on the storage tank except that equidistantly being arranged with a plurality of rollers, and respectively be provided with a plurality of bearing supports in the appropriate location of this storage tank in correspondence, respectively this bearing support inner edge is for bearing is set, outside then be formed with being used for of corresponding respectively this through hole for respectively this screw locking, to fix the screw portion of this rotating shaft unit.

2. transmission rotating shaft unit quick-disassembly structure in according to claim 1, it is characterized in that, when respectively this storage tank is formed on the framework, its adjacent outer ledge forms a locating slot in addition, respectively a protruding axial region then is equipped with in the corresponding outside of this bearing support simultaneously, when rotating shaft unit was arranged in these storage tanks, respectively this protruding axial region was placed in the corresponding locating slot.

3. transmission rotating shaft unit quick-disassembly structure in according to claim 1, it is characterized in that, this framework and a plurality of rotating shaft unit are mounted in the cavity, and appropriate location that should the load plate dual side-edge is provided with two guide units in addition in this cavity, respectively this guide unit is by two wheel stands, a plurality of guide wheels and pivot, and one cover plate form, respectively be formed with a plurality of holes of taking turns on this wheel stand, and respectively this wheel hole is cutd open inboard that should load plate and is established a breach, when respectively this guide wheel utilizes pivot pivot group in the wheel hole, the wheel face of guide wheel protrudes from this breach, and this cover plate is covered on this two wheel stands upper surface.

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