CN108505011B - Rotary hanging rack for surface treatment of high-precision metal piece - Google Patents
Rotary hanging rack for surface treatment of high-precision metal piece Download PDFInfo
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- CN108505011B CN108505011B CN201810470975.9A CN201810470975A CN108505011B CN 108505011 B CN108505011 B CN 108505011B CN 201810470975 A CN201810470975 A CN 201810470975A CN 108505011 B CN108505011 B CN 108505011B
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- sleeve
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Engineering & Computer Science (AREA)
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- Organic Chemistry (AREA)
- Gears, Cams (AREA)
- Chemically Coating (AREA)
Abstract
The invention discloses a rotary hanging frame for surface treatment of a high-precision metal piece, which comprises a rotary chassis, a rotating rod, a mounting plate and a rotary motor, wherein the mounting plate is arranged above the rotary chassis along the circumferential direction, the rotary motor is arranged on the upper surface of the rotary chassis and is positioned below the mounting plate, the rotating rod is embedded in the connecting seat and is fixedly mounted with the connecting seat, a workpiece to be processed is arranged on the workpiece rack, the connecting seat further comprises a base plate, an outer sleeve and an inner sleeve, the outer sleeve is positioned on the upper surface of the base plate, the inner sleeve is embedded in the outer sleeve, the wall of the outer sleeve is provided with at least one group of oppositely arranged grooves, the lower ends of the rotating rod and the sleeve are provided with positioning through holes, and a pin passes through the grooves of the outer sleeve, the pin holes of the inner sleeve, the positioning through. The invention ensures that the working procedure of dismounting the workpiece can be carried out while the equipment is running, greatly shortens the downtime and improves the processing efficiency.
Description
Technical Field
The invention relates to a rotary hanging frame for surface treatment of a high-precision metal piece, and belongs to the field of high-precision machining.
Background
The PVD coating technology is applied to a plurality of aspects of surface treatment and thin film material preparation, such as hard coatings on the surfaces of dies, protective coatings on the surfaces of various parts, surface modified coatings, conductive and light-transmitting coatings and the like.
The vacuum coating machine is used for coating a workpiece in vacuum, and comprises a vacuum chamber, wherein a rotating frame device is arranged in the vacuum chamber, and the rotating frame device can be driven to rotate by a driving device, so that the workpiece can rotate. Because the space of the vacuum chamber is limited, how to reasonably and effectively utilize the space of the vacuum chamber and improve the production efficiency is a problem to be solved.
Disclosure of Invention
The invention aims to provide a rotary hanging frame for surface treatment of a high-precision metal piece, which enables the process of assembling and disassembling the workpiece to be carried out while equipment is running, greatly shortens the downtime and improves the machining efficiency.
In order to achieve the purpose, the invention adopts the technical scheme that: a rotary hanging frame for surface treatment of a high-precision metal piece comprises a rotary chassis, a rotating rod, a mounting plate and a rotary motor, wherein the mounting plate is arranged above the rotary chassis along the circumferential direction;
two sides of the gear are respectively provided with at least one driven gear, the gear is meshed with adjacent driven gears, the adjacent driven gears are meshed, the lower surface of the gear is provided with a circular groove, a bearing is embedded into the circular groove and is fixedly connected with the mounting plate through a connecting seat, the upper surface of the driven gear is fixedly provided with the connecting seat, and the rotating rod is embedded into the connecting seat;
a sleeve is sleeved outside the rotating rod, the lower end of the sleeve is embedded into the connecting seat and is fixedly installed with the connecting seat, a plurality of workpiece racks are sleeved outside the sleeve, and workpieces to be processed are installed on the workpiece racks;
the connecting seat further comprises a base plate, an outer sleeve and an inner sleeve, the outer sleeve is located on the upper surface of the base plate, the inner sleeve is embedded into the outer sleeve, at least one group of grooves which are arranged oppositely is formed in the wall of the outer sleeve, at least one group of pin holes corresponding to the grooves of the outer sleeve are formed in the wall of the inner sleeve, positioning through holes are formed in the lower ends of the rotating rod and the sleeve, and a pin penetrates through the grooves of the outer sleeve, the pin holes of the inner sleeve, the positioning through holes of the rotating rod and the positioning through holes of the sleeve to fix the rotating rod and the sleeve.
The further improved scheme in the technical scheme is as follows:
1. in the scheme, the base plate of the connecting seat is arranged on the upper surface of the gear through a plurality of screws.
2. In the above scheme, the workpiece frame is a spring body, a plurality of spring wires of the spring body extend outwards to form a first convex ring, a plurality of spring wires of the spring body extend out to one side opposite to the first convex ring to form a second convex ring, and the first convex ring and the second convex ring are in contact connection with the inner wall of the workpiece.
3. In the scheme, the upper part of the connecting seat is embedded into the central positioning through hole of the bearing and is fixedly connected with the inner ring of the bearing, and the lower part of the connecting seat is embedded into the mounting plate and is fixed with the mounting plate through a screw.
4. In the scheme, the number of the at least one driven gear is 2-4.
5. In the above scheme, a driving mechanism is arranged below the rotary chassis, and the output end of the driving mechanism is fixedly connected with the lower surface of the rotary chassis.
6. In the scheme, the two adjacent mounting plates are fixedly connected through the connecting plate arranged on the lower surfaces of the mounting plates.
7. In the above scheme, the rotary connecting device is further provided with a top plate, the outer edge of the top plate is circumferentially provided with a positioning through hole for embedding the upper end of the rotary rod, the lower end of the rotary rod is embedded into the connecting seat, and the upper end of the rotary rod penetrates through the positioning through hole of the top plate and is connected with the top plate in an installing mode.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
1. according to the rotary hanging frame for surface treatment of the high-precision metal piece, disclosed by the invention, a workpiece arranged on the rotating rod is subjected to film coating processing through revolution of the rotary chassis and rotation of the rotating rod, so that the uniformity and stability of film coating of the workpiece are ensured, and the film coating quality is improved; secondly, its gear both sides are provided with at least one driven gear respectively, gear and adjacent driven gear meshing, meshing between the adjacent driven gear, open gear lower surface has a circular recess, and a bearing embedding is in this circular recess and through a connecting seat and mounting panel fixed connection, driven gear upper surface is fixed with the connecting seat, the embedding has in this connecting seat the bull stick drives driven gear and rotates through the rotation of gear to the rotation of bull stick in the last mounting seat of drive driven gear, drives many bull sticks through a rotating electrical machines simultaneously and rotates promptly, and structure is ingenious, and has improved the efficiency to the work piece processing greatly, has increased the productivity, guarantees the quality to work piece surface treatment simultaneously.
2. According to the rotary hanging frame for surface treatment of the high-precision metal piece, the sleeve is sleeved outside the rotating rod, the lower end of the sleeve is embedded into the connecting seat and is fixedly installed with the connecting seat, the sleeve is arranged, the sleeve can be conveniently detached from equipment, and a workpiece arranged on the sleeve workpiece frame is detached and installed, so that the workpiece detaching and installing process can be carried out while the equipment is running, the downtime is greatly shortened, and the machining efficiency is improved; secondly, its work rest is the spring body, and a plurality of spring wires of this spring body stretch out to the outside and form first bulge loop, a plurality of spring wires of the spring body stretch out to one side that is carried on the back of the body in the first bulge loop and form the second bulge loop, and this first bulge loop, second bulge loop are connected with the contact of work piece inner wall, and the setting of spring body work rest, the structure is ingenious and have certain elasticity space, both made things convenient for its installation itself, the dismouting to the work piece of convenience again can protect the work piece not to be hurt by wearing and tearing simultaneously.
3. The rotary hanging rack for surface treatment of high-precision metal pieces comprises a base plate, an outer sleeve and an inner sleeve, wherein the outer sleeve is positioned on the upper surface of the base plate, the inner sleeve is embedded into the outer sleeve, at least one group of oppositely arranged grooves are formed in the wall of the outer sleeve, at least one group of pin holes corresponding to the grooves of the outer sleeve are formed in the wall of the inner sleeve, positioning through holes are formed in the lower ends of a rotating rod and the sleeve, a pin penetrates through the grooves of the outer sleeve, the pin holes of the inner sleeve, the positioning through holes of the rotating rod and the positioning through holes of the sleeve, the rotating rod and the sleeve are fixed in the connecting seat, the connecting seat plays a role in fixing the rotating rod and the sleeve, simultaneously ensures that the rotating rod and the sleeve are convenient to disassemble and assemble, can quickly replace the rotating rod which is broken, or replace the rotating rod and the, the universality of the device is improved; the pin and the pinhole on the inner skleeve set up, then can carry on spacingly to bull stick, sleeve in level and vertical direction, prevent that the bull stick from taking place the circumstances such as skew dislocation, guarantee the processing quality to the work piece.
Drawings
FIG. 1 is a schematic structural view of a rotary hanger for surface treatment of a high-precision metal piece according to the present invention;
FIG. 2 is a schematic exploded view of a partial structure of a rotary hanger for surface treatment of a high-precision metal part according to the present invention;
FIG. 3 is an exploded view of the bushing mechanism of the rotary hanger of the present invention;
fig. 4 is an exploded view of the gear mechanism of the rotary hanger of the present invention.
In the above drawings: 1. rotating the chassis; 2. a rotating rod; 3. mounting a plate; 4. a rotating electric machine; 5. a drive mechanism; 6. a connecting plate; 7. a strip-shaped positioning through hole; 8. mounting holes; 9. a gear; 10. a connecting seat; 11. a substrate; 12. an outer sleeve; 13. an inner sleeve; 14. a groove; 15. a pin hole; 16. positioning the through hole; 17. a pin; 18. a driven gear; 19. a circular groove; 20. a bearing; 21. a connecting seat; 22. a workpiece; 23. a top plate; 24. a sleeve; 25. a workpiece holder; 251. a first convex ring; 252. a second convex ring.
Detailed Description
The invention is further described with reference to the following figures and examples:
example 1: a rotary hanging frame for surface treatment of a high-precision metal piece comprises a rotary chassis 1, a rotary rod 2, a mounting plate 3 and a rotary motor 4, wherein the mounting plate 3 is arranged above the rotary chassis 1 along the circumferential direction, the rotary motor 4 is arranged on the upper surface of the rotary chassis 1 and is positioned below the mounting plate 3, an output shaft 8 of the rotary motor 4 penetrates through the mounting plate 3 and is connected with a gear 9 in an installing manner, a connecting seat 10 is fixed on the upper surface of the gear 9, and the rotary rod 2 is embedded into the connecting seat 10 and is fixedly installed with the connecting seat 10;
two sides of the gear 9 are respectively provided with at least one driven gear 18, the gear 9 is meshed with the adjacent driven gears 18, the adjacent driven gears 18 are meshed, the lower surface of the gear 9 is provided with a circular groove 19, a bearing 20 is embedded into the circular groove 19 and is fixedly connected with the mounting plate 3 through a connecting seat 21, the upper surface of the driven gear 18 is fixedly provided with the connecting seat 10, and the rotating rod 2 is embedded into the connecting seat 10;
a sleeve 24 is sleeved outside the rotating rod 2, the lower end of the sleeve 24 is embedded into the connecting seat 10 and is fixedly installed with the connecting seat 10, a plurality of workpiece supports 25 are sleeved outside the sleeve 24, and workpieces 22 to be processed are installed on the workpiece supports 25;
the connecting seat 10 further comprises a base plate 11, an outer sleeve 12 and an inner sleeve 13, the outer sleeve 12 is located on the upper surface of the base plate 11, the inner sleeve 13 is embedded into the outer sleeve 12, at least one group of grooves 14 which are oppositely arranged are formed in the wall of the outer sleeve 12, at least one group of pin holes 15 corresponding to the grooves 14 of the outer sleeve 12 are formed in the wall of the inner sleeve 13, positioning through holes 16 are formed in the lower ends of the rotating rod 2 and the sleeve 24, and a pin 17 penetrates through the grooves 14 of the outer sleeve 12, the pin holes 15 of the inner sleeve 13, the positioning through holes 16 of the rotating rod 2 and the positioning through holes 16 of the sleeve 24 to fix the rotating rod 2 and the sleeve 24 in.
The base plate 11 of the connecting base 10 is mounted on the upper surface of the gear 9 through a plurality of screws; the workpiece holder 25 is a spring body, a plurality of spring wires of the spring body extend outwards to form a first convex ring 251, a plurality of spring wires of the spring body extend out to one side opposite to the first convex ring 251 to form a second convex ring 252, and the first convex ring 251 and the second convex ring 252 are in contact connection with the inner wall of the workpiece 22;
the upper part of the connecting base 21 is inserted into the central positioning through hole of the bearing 20 and is fixedly connected with the inner ring of the bearing 20, and the lower part of the connecting base 21 is inserted into the mounting plate 3 and is fixed with the mounting plate 3 through a screw.
Example 2: a rotary hanging frame for surface treatment of a high-precision metal piece comprises a rotary chassis 1, a rotary rod 2, a mounting plate 3 and a rotary motor 4, wherein the mounting plate 3 is arranged above the rotary chassis 1 along the circumferential direction, the rotary motor 4 is arranged on the upper surface of the rotary chassis 1 and is positioned below the mounting plate 3, an output shaft 8 of the rotary motor 4 penetrates through the mounting plate 3 and is connected with a gear 9 in an installing manner, a connecting seat 10 is fixed on the upper surface of the gear 9, and the rotary rod 2 is embedded into the connecting seat 10 and is fixedly installed with the connecting seat 10;
two sides of the gear 9 are respectively provided with at least one driven gear 18, the gear 9 is meshed with the adjacent driven gears 18, the adjacent driven gears 18 are meshed, the lower surface of the gear 9 is provided with a circular groove 19, a bearing 20 is embedded into the circular groove 19 and is fixedly connected with the mounting plate 3 through a connecting seat 21, the upper surface of the driven gear 18 is fixedly provided with the connecting seat 10, and the rotating rod 2 is embedded into the connecting seat 10;
a sleeve 24 is sleeved outside the rotating rod 2, the lower end of the sleeve 24 is embedded into the connecting seat 10 and is fixedly installed with the connecting seat 10, a plurality of workpiece supports 25 are sleeved outside the sleeve 24, and workpieces 22 to be processed are installed on the workpiece supports 25;
the connecting seat 10 further comprises a base plate 11, an outer sleeve 12 and an inner sleeve 13, the outer sleeve 12 is located on the upper surface of the base plate 11, the inner sleeve 13 is embedded into the outer sleeve 12, at least one group of grooves 14 which are oppositely arranged are formed in the wall of the outer sleeve 12, at least one group of pin holes 15 corresponding to the grooves 14 of the outer sleeve 12 are formed in the wall of the inner sleeve 13, positioning through holes 16 are formed in the lower ends of the rotating rod 2 and the sleeve 24, and a pin 17 penetrates through the grooves 14 of the outer sleeve 12, the pin holes 15 of the inner sleeve 13, the positioning through holes 16 of the rotating rod 2 and the positioning through holes 16 of the sleeve 24 to fix the rotating rod 2 and the sleeve 24 in.
The number of the at least one driven gear 18 is 3; a driving mechanism 5 is arranged below the rotating chassis 1, and the output end of the driving mechanism 5 is fixedly connected with the lower surface of the rotating chassis 1;
the two adjacent mounting plates 3 are fixedly connected through a connecting plate 6 arranged on the lower surface of the mounting plate 3; the connecting seat is also provided with a top plate 23, the outer edge of the top plate 23 is circumferentially provided with a positioning through hole for embedding the upper end of the rotating rod 2, the lower end of the rotating rod 2 is embedded into the connecting seat 10, and the upper end of the rotating rod 2 penetrates through the positioning through hole of the top plate 23 and is connected with the top plate 23 in an installing mode.
When the rotary hanging frame for surface treatment of the high-precision metal piece is adopted, the workpiece arranged on the rotating rod is subjected to film coating processing through revolution of the rotary chassis and rotation of the rotating rod, so that the uniformity and stability of film coating of the workpiece are ensured, and the film coating quality is improved; secondly, the driven gear is driven to rotate through the rotation of the gear, so that the rotating rods in the mounting seat on the driven gear are driven to rotate, namely, a rotating motor is used for driving a plurality of rotating rods to rotate simultaneously, the structure is ingenious, the workpiece processing efficiency is greatly improved, the productivity is increased, and the quality of workpiece surface treatment is ensured; thirdly, the sleeve can be conveniently disassembled from the equipment, and the workpiece arranged on the sleeve workpiece frame is disassembled and installed, so that the workpiece disassembling and assembling process can be carried out while the equipment is running, the downtime is greatly shortened, and the processing efficiency is improved; and the spring body workpiece frame is ingenious in structure and has a certain elastic space, so that the spring body workpiece frame is convenient to mount and dismount the workpiece, and meanwhile, the workpiece can be protected from being damaged by abrasion.
3. The rotary hanging rack for surface treatment of high-precision metal pieces comprises a base plate, an outer sleeve and an inner sleeve, wherein the outer sleeve is positioned on the upper surface of the base plate, the inner sleeve is embedded into the outer sleeve, at least one group of oppositely arranged grooves are formed in the wall of the outer sleeve, at least one group of pin holes corresponding to the grooves of the outer sleeve are formed in the wall of the inner sleeve, positioning through holes are formed in the lower ends of a rotating rod and the sleeve, a pin penetrates through the grooves of the outer sleeve, the pin holes of the inner sleeve, the positioning through holes of the rotating rod and the positioning through holes of the sleeve, the rotating rod and the sleeve are fixed in the connecting seat, the connecting seat plays a role in fixing the rotating rod and the sleeve, simultaneously ensures that the rotating rod and the sleeve are convenient to disassemble and assemble, can quickly replace the rotating rod which is broken, or replace the rotating rod and the, the universality of the device is improved; the pin and the pinhole on the inner skleeve set up, then can carry on spacingly to bull stick, sleeve in level and vertical direction, prevent that the bull stick from taking place the circumstances such as skew dislocation, guarantee the processing quality to the work piece.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (7)
1. The utility model provides a high-accuracy metalwork surface treatment is with rotatory stores pylon which characterized in that: the rotary type electric fan comprises a rotary chassis (1), a rotating rod (2), a mounting plate (3) and a rotary motor (4), wherein the mounting plate (3) is arranged above the rotary chassis (1) along the circumferential direction, the rotary motor (4) is arranged on the upper surface of the rotary chassis (1) and is positioned below the mounting plate (3), an output shaft (8) of the rotary motor (4) penetrates through the mounting plate (3) and is in mounting connection with a gear (9), a connecting seat (10) is fixed on the upper surface of the gear (9), and the rotating rod (2) is embedded into the connecting seat (10) and is fixedly mounted with the connecting seat (10);
two sides of the gear (9) are respectively provided with at least one driven gear (18), the gear (9) is meshed with the adjacent driven gears (18), the adjacent driven gears (18) are meshed, the lower surface of the gear (9) is provided with a circular groove (19), a bearing (20) is embedded into the circular groove (19) and is fixedly connected with the mounting plate (3) through a connecting seat (21), the upper surface of the driven gear (18) is fixedly provided with the connecting seat (10), and the rotating rod (2) is embedded into the connecting seat (10);
a sleeve (24) is sleeved outside the rotating rod (2), the lower end of the sleeve (24) is embedded into the connecting seat (10) and is fixedly installed with the connecting seat (10), a plurality of workpiece racks (25) are sleeved outside the sleeve (24), and workpieces (22) to be processed are installed on the workpiece racks (25);
the connecting seat (10) further comprises a base plate (11), an outer sleeve (12) and an inner sleeve (13), the outer sleeve (12) is located on the upper surface of the base plate (11), the inner sleeve (13) is embedded into the outer sleeve (12), at least one group of oppositely arranged grooves (14) are formed in the wall of the outer sleeve (12), at least one group of pin holes (15) corresponding to the grooves (14) of the outer sleeve (12) are formed in the wall of the inner sleeve (13), positioning through holes (16) are formed in the lower ends of the rotating rod (2) and the sleeve (24), a pin (17) penetrates through the grooves (14) of the outer sleeve (12), the pin holes (15) of the inner sleeve (13), the positioning through holes (16) of the rotating rod (2) and the positioning through holes (16) of the sleeve (24), the rotating rod (2) and the sleeve (24) are fixed in the connecting seat (10), the workpiece holder (25) is a, a plurality of spring wires of the spring body extend outwards to form a first convex ring (251), a plurality of spring wires of the spring body extend out to one side opposite to the first convex ring (251) to form a second convex ring (252), and the first convex ring (251) and the second convex ring (252) are in contact connection with the inner wall of the workpiece (22).
2. The rotary hanger for surface treatment of high-precision metal parts according to claim 1, wherein: and a base plate (11) of the connecting seat (10) is arranged on the upper surface of the gear (9) through a plurality of screws.
3. The rotary hanger for surface treatment of high-precision metal parts according to claim 1, wherein: the upper part of the connecting seat (21) is embedded into a central positioning through hole of the bearing (20) and is fixedly connected with an inner ring of the bearing (20), and the lower part of the connecting seat (21) is embedded into the mounting plate (3) and is fixed with the mounting plate (3) through a screw.
4. The rotary hanger for surface treatment of high-precision metal parts according to claim 1, wherein: the number of the at least one driven gear (18) is 2-4.
5. The rotary hanger for surface treatment of high-precision metal parts according to claim 1, wherein: a driving mechanism (5) is arranged below the rotating chassis (1), and the output end of the driving mechanism (5) is fixedly connected with the lower surface of the rotating chassis (1).
6. The rotary hanger for surface treatment of high-precision metal parts according to claim 1, wherein: and the two adjacent mounting plates (3) are fixedly connected through a connecting plate (6) arranged on the lower surface of the mounting plate (3).
7. The rotary hanger for surface treatment of high-precision metal parts according to claim 1, wherein: the rotary connecting device is characterized by further comprising a top plate (23), a positioning through hole for embedding the upper end of the rotary rod (2) is formed in the outer edge of the top plate (23) along the circumferential direction, the lower end of the rotary rod (2) is embedded into the connecting seat (10), and the upper end of the rotary rod (2) penetrates through the positioning through hole of the top plate (23) and is connected with the top plate (23) in an installing mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810470975.9A CN108505011B (en) | 2018-05-17 | 2018-05-17 | Rotary hanging rack for surface treatment of high-precision metal piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810470975.9A CN108505011B (en) | 2018-05-17 | 2018-05-17 | Rotary hanging rack for surface treatment of high-precision metal piece |
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| CN108505011A CN108505011A (en) | 2018-09-07 |
| CN108505011B true CN108505011B (en) | 2020-08-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810470975.9A Active CN108505011B (en) | 2018-05-17 | 2018-05-17 | Rotary hanging rack for surface treatment of high-precision metal piece |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109714929B (en) * | 2019-01-17 | 2023-06-30 | 浙江建设职业技术学院 | Offline cache terminal and method for intelligent campus management system |
| EP4400626A2 (en) * | 2020-07-24 | 2024-07-17 | FOx Biosystems NV | Sputter deposition system |
| CN114990515B (en) * | 2022-06-28 | 2023-09-26 | 集美大学 | Tool for tool film coating |
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| CN2848874Y (en) * | 2005-11-04 | 2006-12-20 | 夏建业 | Rotary plating object frame for vacuum film plating |
| CN201793727U (en) * | 2010-08-03 | 2011-04-13 | 深圳市振恒昌实业有限公司 | Planet gear mouse cage type work rest |
| CN203569179U (en) * | 2013-12-02 | 2014-04-30 | 上海沃家真空设备科技有限公司 | Rotating stand device of vacuum coating machine |
| CN206328456U (en) * | 2016-11-24 | 2017-07-14 | 超微中程纳米科技（苏州）有限公司 | Rotary plating frame in a kind of coating machine room |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201226609A (en) * | 2010-12-24 | 2012-07-01 | Hon Hai Prec Ind Co Ltd | Sputtering device |
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2018
- 2018-05-17 CN CN201810470975.9A patent/CN108505011B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2848874Y (en) * | 2005-11-04 | 2006-12-20 | 夏建业 | Rotary plating object frame for vacuum film plating |
| CN201793727U (en) * | 2010-08-03 | 2011-04-13 | 深圳市振恒昌实业有限公司 | Planet gear mouse cage type work rest |
| CN203569179U (en) * | 2013-12-02 | 2014-04-30 | 上海沃家真空设备科技有限公司 | Rotating stand device of vacuum coating machine |
| CN206328456U (en) * | 2016-11-24 | 2017-07-14 | 超微中程纳米科技（苏州）有限公司 | Rotary plating frame in a kind of coating machine room |
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