CN201249404Y - Grinding positioning ring - Google Patents

Grinding positioning ring Download PDF

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Publication number
CN201249404Y
CN201249404Y CNU2008201273701U CN200820127370U CN201249404Y CN 201249404 Y CN201249404 Y CN 201249404Y CN U2008201273701 U CNU2008201273701 U CN U2008201273701U CN 200820127370 U CN200820127370 U CN 200820127370U CN 201249404 Y CN201249404 Y CN 201249404Y
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CN
China
Prior art keywords
grinding
base portion
locating ring
grind section
ring according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNU2008201273701U
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Chinese (zh)
Inventor
黄瑞堂
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Individual
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Individual
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Priority to CNU2008201273701U priority Critical patent/CN201249404Y/en
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Publication of CN201249404Y publication Critical patent/CN201249404Y/en
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Expired - Lifetime legal-status Critical Current

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Abstract

The utility model discloses a grinding positioning ring mainly comprising a base part and a grinding part. The base part is provided with a locking surface and a combining surface, an annular groove is formed on the combining surface, and the annular groove is provided with a joining hole for jointing a jointing component. The grinding part is provided with a combining surface and a grinding surface, an annular projection is formed on the combining surface, and the annular projection is provided with a guide-in hole with a female dovetail. During the combination, the combining surfaces of the base part and the grinding part are respectively coated with adhesive glue, and meanwhile, with the assistance of the jointing component locked in the jointing hole of the base part, the jointing component is positioned in the guide-in hole of the grinding part and clamped in the female dovetail so as to form a double-fixing structure, therefore, the combination between the base part and the grinding part is reinforced, and the service life of the grinding positioning ring is prolonged.

Description

Grind locating ring
Technical field
The utility model is about a kind of grinding locating ring, more detailed it, be meant a kind of grinding locating ring that is applied to circle location grinding operation especially.
Background technology
At present, general industry is applied to grind the structure of the grinding locating ring of crystal operation, normally constitute by the grinding ring body of the base portion ring body of metal and the macromolecular material institute that mutually combines, grind locating ring when using, the length in its life-span, abrasion speed except the grinding ring body that depends on this macromolecular material, the base portion ring body of metal and the fastness of grinding integrated structure between the ring body, it also is a key factor, because grind locating ring in the attrition process process, produce the violent rubbing action of continuation between meeting and crystal and the processing parts, the reversal of stress that it produced, then can produce destructive effects to base portion ring body that grinds locating ring and the integrated structure that grinds ring body, in case during the phenomenon that generation is loosening or disengagement is peeled off between base portion ring body and the grinding ring body, mean that also this grinding locating ring scraps, and need change in addition.
The base portion ring body of known grinding locating ring and the fixed form that combines of grinding ring body, roughly adopt as " mode of following of cyrstal sphere grinding ring " of No. the 470690th, tw Taiwan patent announcement as described in content, this patent is mainly carried out flame treatment earlier disclosing the commissure will grind locating ring, handle base portion ring body and the commissure wiping of grinding ring body clean again, and then it is fixing to utilize epoxy resin that the two is adhered, and makes the base portion ring body reach the fixing state that combines with the grinding ring body.
But, because the commissure of aforesaid base portion ring body and grinding ring body, on the whole be planar structure, therefore this combination by adhesion also can't effectively overcome the reversal of stress that is produced when crystal grinds, the vibrations or the high-temperature digestion that are produced during easily because of the grinding crystal, make epoxy resin lose bonding effectiveness, thereby the base portion ring body that causes grinding locating ring produces the phenomenon that comes off or peel off with the grinding ring body, by this bonding mode, this base portion ring body and the bond strength of grinding between the ring body still have weak point like this.
The utility model content
In view of this, main purpose of the present utility model is to provide a kind of grinding locating ring, can the efficient hardening base portion with grind section between combine, prevent to grind locating ring and produce easily and peel off or come off, and then prolong the service life of this grinding locating ring.
In order to achieve the above object, the technical solution of the utility model is achieved in that a kind of grinding locating ring, and it includes:
Base portion, described pedestal is structure ringwise, and first side of described base portion is a locking face, and described locking face is provided with locating hole; Second side of described base portion is a faying face, and described faying face is provided with conjugate foramen, and described conjugate foramen connects to be established locking conjugative component arranged;
Grind section, described grind section is structure ringwise, and first side of described grind section is a faying face, and described faying face is provided with entrance hole; Second side of described grind section is an abradant surface;
On the described faying face of described base portion and described grind section, be coated with adhesion glue respectively, the described conjugative component of described conjugate foramen that is locked on described base portion can clip when described base portion combines with described grind section in the described entrance hole of described grind section, form the double fixed structure.
Design according to aforementioned structure, grinding locating ring of the present utility model is for can reach dual combination fixing structure, make between base portion and the grind section and can form more firm bonding state, thereby improve the intensity of grinding locating ring opposing stress of the present utility model, reduce the probability of grinding the locating ring distortion or producing slight crack, and then prolong the Acceptable life that grinds locating ring, reduce the cost that insider's attrition process is made.
Description of drawings
Fig. 1 is the schematic perspective view that grinds locating ring in the utility model;
Fig. 2 A is the decomposing schematic representation () that grinds locating ring in the utility model, shows the structure for amplifying of dovetail groove and entrance hole among this figure simultaneously;
Fig. 2 B is the decomposing schematic representation (two) that grinds locating ring in the utility model;
Fig. 3 A is the cross-sectional schematic () when grinding the locating ring installing in the utility model;
Fig. 3 B is the cross-sectional schematic (two) when grinding the locating ring installing in the utility model;
Fig. 4 A is the local elevational schematic view () when grinding the locating ring installing in the utility model;
Fig. 4 B is the local elevational schematic view (two) when grinding the locating ring installing in the utility model;
Schematic diagram when Fig. 5 is provided with groove for grinding locating ring in the utility model.
Description of reference numerals
1 grinds locating ring 11A faying face
10 base portion 11B abradant surfaces
10A locking face 110 annular protrusion
10B faying face 111 entrance holes
100 locating holes, 1110 dovetail grooves
101 annular grooves, 112 grooves
102 conjugate foramens, 2 adhesion glue
103 conjugative components
11 grind section
The specific embodiment
Please cooperate and consult Fig. 1, Fig. 2 A and Fig. 2 B, wherein, Fig. 1 is the schematic perspective view that grinds locating ring in the utility model, and Fig. 2 A and Fig. 2 B are the decomposing schematic representation that grinds locating ring in the utility model.
Grinding locating ring 1 of the present utility model, consist predominantly of base portion 10 and grind section 11, as shown in Figure 1, base portion 10 is the loop configuration with predetermined thickness and specific inside and outside footpath, it adopts stainless steel (for example SUS series stainless steel sheet material) or the metal alloy with preferable rigidity, processes its mode of appearance of type by turning; Grind section 11 is structure ringwise also, and it adopts high temperature resistant, abrasion performance and corrosion resistant macromolecule plastic material, for example polyphenylene sulfide (Polyphenylene Sulfide, PPS), polyethers diketone (Polyetheretherketone, PEEK) etc. material is made by ejection formation, wherein:
Shown in Fig. 2 A, first side of base portion 10 is locking face 10A, locking face 10A is provided with two or more and is the locating hole 100 that the equal angles circular row is provided with, in order to be combined in chemical-mechanical grinding device (Chemical Mechanical Polishing, the actuator on grinding head CMP) (Polishing Head); Second side of base portion 10 is faying face 10B, shown in Fig. 2 B, be arranged with on the faying face 10B and be formed with annular groove 101, annular groove 101 is provided with two or more and is the conjugate foramen 102 that the equal angles circular row is provided with, and conjugate foramen 102 is established locking conjugative component 103 in order to connect; Wherein, conjugative component 103 is roughly tack (Pancake head) screw or the countersunk bolts of predetermined dimension, simultaneously, and when conjugative component 103 is locked on conjugate foramen 102, between the outer edge surface of the top of conjugative component 103 and conjugate foramen 102, can be formed with appropriate gap.
First side of grind section 11 is faying face 11A, shown in Fig. 2 A, faying face 11A goes up that prominent establishing is formed with annular protrusion 110 corresponding to the mode of appearance of the annular groove 101 of base portion 10, on the annular protrusion 110 and be provided with two or more entrance holes 111 that the equal angles circular row is provided with that are, and entrance hole 111 is followed the axle veer of grinding locating ring 1, and in outer rim one side of entrance hole 111, extend to form out dovetail groove 1110 again, enable with base portion 10 on conjugative component 103 mutual clips, borrow base portion 10 is combined with grind section 11; Second side of grind section 11 then is abradant surface 11B, in order to crystal is carried out attrition process, shown in Fig. 2 B.
Please cooperate and consult Fig. 3 A, Fig. 3 B, Fig. 4 A and Fig. 4 B, wherein, Fig. 3 A and Fig. 3 B are the cross-sectional schematic when grinding the locating ring installing in the utility model, and Fig. 4 A and Fig. 4 B are the partial bottom view schematic diagram when grinding the locating ring installing in the utility model.
According to by aforesaid structural design, grinding locating ring 1 provided by the utility model carries out combination in the following manner:
As shown in Figure 3A, when base portion 10 is combined with grind section 11, conjugative components such as flat head screw 103 are locked in the conjugate foramen 102 of base portion 10, and make between the outer edge surface of conjugative component 103 tops and conjugate foramen 102 and be formed with appropriate gap; On the faying face 11A of the faying face 10B of base portion 10 and grind section 11, be coated with the adhesion glue 2 of class such as epoxy resin, and make adhesion glue 2 can evenly be covered with the annular protrusion 110 and entrance hole 111 of annular groove 101 with conjugate foramen 102 and the faying face 11A of faying face 10B, relend by the annular groove 101 of base portion 10 and the annular protrusion 110 mutual designation contraposition mutually of grind section 11, with the faying face 10B of base portion 10 with grind section 11,11A fits, make the entrance hole 111 of grind section 11 correspond to conjugative component 103 in base portion 10 conjugate foramens 102 simultaneously, conjugative component 103 tops are stretched place entrance hole 111, shown in Fig. 3 B; Afterwards as shown in Fig. 4 A, Fig. 4 B, grind section 11 is rotated according to the axle veer, conjugative component 103 tops that place entrance hole 111 are able to by the gap between itself and conjugate foramen 102 outer edge surfaces, and relatively slippage is embedded in and carries out clip in the dovetail groove 1110, thereby finishes combining of base portion 10 and grind section 11.
See also shown in Figure 5ly, it is the schematic diagram of grinding locating ring of the present utility model when being provided with groove.
Grinding locating ring 1 of the present utility model is at the abradant surface 11B place of grind section 11, can offer two or more grooves 112 that are radial equidistant configuration, groove 112 has certain depth, and the interior outer peripheral edges that run through grind section 11, be able to when grinding operation, help lapping liquid to flow into and contact with crystal, simultaneously can be so as to outwards throw away the abrasion discarded object that grind section 11 is produced when grinding.
Comprehensive above-described architectural feature, grinding locating ring 1 of the present utility model mainly utilizes conjugative components 103 such as flat head screw to go ahead of the rest in the sealed conjugate foramen 102 of being located at base portion 10, and make between the outer edge surface of conjugative component 103 tops and conjugate foramen 102, be formed with appropriate gap, simultaneously at the faying face 11B of base portion 10 with grind section 11, be coated with the adhesion glue 2 of class such as epoxy resin on the 11A, again base portion 10 and grind section 11 are fitted, and the entrance hole 111 that makes grind section 11 corresponds to the conjugative component 103 in base portion 10 conjugate foramens 102, conjugative component 103 tops are stretched place entrance hole 111, to grind base portion 10 afterwards and rotate, and make conjugative component 103 tops get relative slippage and embed clip in the dovetail groove 1110 according to the axle veer; In view of the above, grinding locating ring 1 of the present utility model is able to by adhesion glue 2 bonding, simultaneously make clip effect with entrance hole 111 and dovetail groove 1110 by conjugative components such as flat head screw or countersunk bolts 103, reach the fixation of double fixed combination, make between the base portion 10 of grinding locating ring 1 of the present utility model and the grind section 11 and can form more firm bonding state, and thereby energy be able to effectively improve the ability of the opposing stress of grinding locating ring 1 of the present utility model, reduce the probability of grinding the locating ring distortion or producing slight crack, can and then prolong the Acceptable life that grinds locating ring like this, thereby reduce the cost that insider's attrition process is made.
The above is a preferred embodiment of the present utility model only, is not to be used for limiting to claim of the present utility model, and the equivalent structure that all utilization the utility model specifications and accompanying drawing content are done changes, and all in like manner is contained in the scope of the present utility model.

Claims (10)

1, a kind of grinding locating ring is characterized in that it includes:
Base portion, described pedestal is structure ringwise, and first side of described base portion is a locking face, and described locking face is provided with locating hole; Second side of described base portion is a faying face, and described faying face is provided with conjugate foramen, and described conjugate foramen connects to be established locking conjugative component arranged;
Grind section, described grind section is structure ringwise, and first side of described grind section is a faying face, and described faying face is provided with entrance hole; Second side of described grind section is an abradant surface;
On the described faying face of described base portion and described grind section, be coated with adhesion glue respectively, the described conjugative component of described conjugate foramen that is locked on described base portion can clip when described base portion combines with described grind section in the described entrance hole of described grind section, form the double fixed structure.
2, grinding locating ring according to claim 1 is characterized in that, also is formed with annular groove on the described faying face of described base portion, and described conjugate foramen is arranged on the described annular groove; The corresponding described base portion of described grind section also is formed with annular protrusion on the described faying face of described grind section, described entrance hole is arranged on the described annular protrusion.
3, grinding locating ring according to claim 1 and 2 is characterized in that, described entrance hole has extended to form dovetail groove according to the axle veer of described grinding locating ring in outer rim one side of described entrance hole.
4, grinding locating ring according to claim 1 is characterized in that, the described abradant surface of described grind section also offers groove, and described groove has certain depth and runs through the interior outer peripheral edges of described grind section.
5, grinding locating ring according to claim 1 is characterized in that, described conjugative component is a flat head screw.
6, grinding locating ring according to claim 1 is characterized in that, described conjugative component is a countersunk bolts.
7, grinding locating ring according to claim 1 is characterized in that, the material of described base portion is a stainless steel.
8, grinding locating ring according to claim 1 is characterized in that, the material of described base portion is a metal alloy.
9, grinding locating ring according to claim 1 is characterized in that, the material of described grind section is a polyphenylene sulfide.
10, grinding locating ring according to claim 1 is characterized in that, the material of described grind section is the polyethers diketone.
CNU2008201273701U 2008-07-25 2008-07-25 Grinding positioning ring Expired - Lifetime CN201249404Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2008201273701U CN201249404Y (en) 2008-07-25 2008-07-25 Grinding positioning ring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2008201273701U CN201249404Y (en) 2008-07-25 2008-07-25 Grinding positioning ring

Publications (1)

Publication Number Publication Date
CN201249404Y true CN201249404Y (en) 2009-06-03

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2008201273701U Expired - Lifetime CN201249404Y (en) 2008-07-25 2008-07-25 Grinding positioning ring

Country Status (1)

Country Link
CN (1) CN201249404Y (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101934495A (en) * 2010-07-30 2011-01-05 清华大学 Embedded retaining ring for chemical mechanical polishing
CN104290023A (en) * 2014-09-30 2015-01-21 上海华力微电子有限公司 Retaining ring steel ring device for chemical machinery grinding equipment
CN106965078A (en) * 2016-01-14 2017-07-21 孙建忠 Grinding positioning ring for chemical mechanical grinding process of semiconductor wafer
CN112338796A (en) * 2019-08-08 2021-02-09 力晶积成电子制造股份有限公司 Fixing ring

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101934495A (en) * 2010-07-30 2011-01-05 清华大学 Embedded retaining ring for chemical mechanical polishing
CN104290023A (en) * 2014-09-30 2015-01-21 上海华力微电子有限公司 Retaining ring steel ring device for chemical machinery grinding equipment
CN106965078A (en) * 2016-01-14 2017-07-21 孙建忠 Grinding positioning ring for chemical mechanical grinding process of semiconductor wafer
CN112338796A (en) * 2019-08-08 2021-02-09 力晶积成电子制造股份有限公司 Fixing ring

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CX01 Expiry of patent term
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Granted publication date: 20090603