CN201226081Y - Glue-spreading developing apparatus with star-shaped structure - Google Patents
Glue-spreading developing apparatus with star-shaped structure Download PDFInfo
- Publication number
- CN201226081Y CN201226081Y CNU2008200136514U CN200820013651U CN201226081Y CN 201226081 Y CN201226081 Y CN 201226081Y CN U2008200136514 U CNU2008200136514 U CN U2008200136514U CN 200820013651 U CN200820013651 U CN 200820013651U CN 201226081 Y CN201226081 Y CN 201226081Y
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- module
- gluing
- box station
- unit
- heat treatment
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a structure of a gluing image development technique processing device which is used to obtain a uniform photoresist and a photoresist graph on a semiconductor wafer. The device includes a box station module, a first gluing or image development module, a second gluing or image development module, a first thermal processing module, a second thermal processing module, and a transmission robot; the box station module consists of two box station units and a centralizing adjusting unit; the thermal processing module consists of a thermal processing tower frame and a plurality of thermal processing units inserted into the tower frame; the two box station units, the two thermal processing modules and the two gluing or image development modules are respectively arranged on the six sides of a hexagon; one transmission robot is arranged in the center of the hexagon. The structure of a gluing image development technique processing device has the characteristics of good technical expansibility, high maintainability, low cost and investment.
Description
Technical field
The utility model relates to the semiconductor wafer glue-spreading development equipment, particularly a kind of structure that obtains the gluing developing process treatment facility of uniform photoresist and photoresist figure on semiconductor wafer.
Background technology
Production environment in the semiconductor production factory requires very high, in facility work when operation that guarantees this production environment, is very expensive, is one of big expense expenditure of factory, in order to reduce this expenditure, during purchase of equipment, the machine floor area is an important examination technical indicator.This makes machine develop to high direction, and it is the trend of technical development that technical module piles up placement.
Glue-spreading development equipment in the semiconductor manufacturing factory yellow light area is that the centrifugal spin coating and the visualization way of application of known realizes basically.The production that gluing develops is carried out continuously according to its distinctive technological requirement, and for the continuous gluing production process of wafer be: discharging-high temperature is coated with tackify film-cooling-wafer position correction-resist coating film-high-temperature heating treatment-cooling; Continuous development production process for wafer is: discharging-wafer position correction-development treatment-high-temperature heating treatment-cooling, for guaranteeing the realization of its technology, hardware cell generally is designed to module or cell cube.From the characteristics of structure, two kinds of American-European style and Japanisms are arranged.The glue-spreading development equipment volume of American-European style is bigger, function singleness, and system's stable and reliable operation, the unit production capacity is moderate, is suitable for medium and small factory and laboratory more and uses.The glue-spreading development equipment product floor area of Japanism is little, powerful, system stability, and the unit production capacity is big, is suitable for use of large-scale production.
Along with the structure of glue-spreading development equipment to modularization, high integration, the vertical height direction develops, press for the excellent of a kind of America and Europe of taking in concurrently and Japanism, be fit to the glue-spreading development equipment of middle-size and small-size production line market, China's Mainland the demand of explained hereafter quality, production capacity, technique extension and the maintainability of this product.
The utility model content
For addressing the above problem, glue-spreading development equipment of the present utility model is structurally adjusted, mainly be each module, cell cube, transfer robot to be arranged by ad hoc fashion place, satisfy in the gluing development production explained hereafter quality, production capacity, technique extension and maintainable needs.
Function of the present utility model is achieved in that
A kind of structure of glue-spreading development equipment is made up of box station module, first gluing or visualization module, second gluing or visualization module, first heat treatment module, second heat treatment module, transfer robot; Described box station module is made up of 2 unit, box station and 1 centering adjustment unit; Unit, described 2 box stations, 2 heat treatment module, 2 gluings or visualization module are separately positioned on six hexagonal limits, 1 transfer robot is in hexagonal centre, and such hexagonal module layout has been formed star-like glue-spreading development equipment structure of arranging.
Described first heat treatment module is adjacent with second heat treatment module, is arranged on the offside of box station module.
In the module of described box station, the centering adjustment unit is below unit, box station.
Described gluing or visualization module are arranged on the robot both sides, can all be the gluing modules, can all be visualization module also, can also be the modules that gluing develops and mixes.
Described heat treatment module is made up of heat treatment tower frame and a plurality of thermal treatment unit body that is inserted in the pylon.
Described thermal treatment unit body can be pulled out outside the machine, to maintain easily.
Described gluing or visualization module are piled up placement.
The quantity of thermal treatment unit is (to comprise 3) more than 3 in the described heat treatment module.
Angle between described first unit, box station and unit, the second box station is the 110-130 degree.
Advantage of the present utility model and beneficial effect are:
1, technical module of the present utility model and thermal treatment unit body are standardized modular design products, be convenient to load and dismounting, the technical module of difference in functionality and thermal treatment unit body matched combined just can be finished different production technologies like this, and the technique extension sex expression of board is outstanding.
2, the thermal treatment unit body can be pulled out outside the machine easily, is convenient to maintenance, and also return rapidly after the maintenance has significantly reduced servicing time of machine, and the equipment that makes has good maintainability.
3, use structural device of the present utility model, each technical module piles up placement, makes the machine floor area reduce greatly, only is 1.7 square metres, has reduced the cost of investment of equipment effectively.
Description of drawings
Fig. 1 is the utility model structural representation;
Fig. 2, Fig. 3 are the utility model structural perspective.
Wherein, CA is that centering adjustment unit, CS1 are that unit, the first box station, CS2 are that unit, the second box station, ROBOT are that transfer robot, DEV are that visualization module, COAT are that gluing module, AD are that tackify thermal treatment unit body, HP1 are that the first heat-transfer sheet modules body, HP2 are that the second heat-transfer sheet modules body, HP3 are that the 3rd heat-transfer sheet modules body, CP1 are that the first cold drawing cell cube, CP2 are the second cold drawing cell cube.
Embodiment
Below in conjunction with accompanying drawing the utility model is described in detail.
As shown in Figure 1, the first box station unit CS1 and the second box station unit CS2 are placed on the flat board with the 110-130 degree, and centering adjustment unit CA is installed in below this flat board, and the three forms a box station module; Gluing module COAT is the independent functional units body, and visualization module DEV also is the independent functional units body, and tackify thermal treatment unit body AD, the first heat-transfer sheet modules body HP1, the first cold drawing cell cube CP1 are inserted into a heat treatment tower frame and form first heat treatment module; The second heat-transfer sheet modules body HP2, the 3rd heat-transfer sheet modules body HP3, the second cold drawing cell cube CP2 are inserted into another heat treatment tower frame and form second heat treatment module; Transfer robot ROBOT be can be rotated, the robot module of the transmission wafer of lifting and telescopic arm.
The ROBOT of robot is positioned over each module centers, and each module is arranged around it.The first box station unit CS1 and the second box station unit CS2 are placed on the flat board with the 110-130 degree, first heat treatment module and second heat treatment module also are placed on the flat board with the 110-130 degree, and gluing module COAT and visualization module DEV module are placed on the robot both sides.Unit, described 2 box stations, 2 heat treatment module, 2 gluings or visualization module are separately positioned on six hexagonal limits, 1 transfer robot is in hexagonal centre, and such hexagonal module layout has been formed star-like glue-spreading development equipment structure of arranging.
For satisfying the different procedure for producing process requirements of semiconductor production factory, as: the wafer gluing technological process of production is: CS1/CS2-AD-CP1-CA-COAT-HP1/HP2-CP1/CP2-CA-CS1/CS2; The wafer development technological process of production is: CS1/CS2-CA-DEV-HP2/HP3-CP1/CP2-CS1/CS2.Module in the glue-spreading development equipment and configuration of cells also will adapt to different variations, glue-spreading development equipment of the present utility model can be two gluing module COAT, also can be double-developing module DEV, can also be visualization module DEV of a gluing module COAT, this variation can make the configuration of thermal treatment unit bodies such as heat treatment module interior AD, HP, CP change, mainly be the number and the riding position adjustment of difference in functionality heat treatment module, but general structure can not change, and each module all is to arrange according to star-like mode.
Claims (9)
1, a kind of structure of glue-spreading development equipment is characterized in that: equipment is made up of box station module, first gluing or visualization module, second gluing or visualization module, first heat treatment module, second heat treatment module, transfer robot; Described box station module is made up of 2 unit, box station and 1 centering adjustment unit; Unit, described 2 box stations, 2 heat treatment module, 2 gluings or visualization module are separately positioned on six hexagonal limits, 1 transfer robot is in hexagonal centre, and such hexagonal module layout has been formed star-like glue-spreading development equipment structure of arranging.
2. by the described structure of claim 1, it is characterized in that: described first heat treatment module is adjacent with second heat treatment module, is arranged on the offside of box station module.
3, by the described structure of claim 1, it is characterized in that: in the module of described box station, the centering adjustment unit is below unit, box station.
4, by the described structure of claim 1, it is characterized in that: described gluing or visualization module are arranged on the robot both sides, can all be the gluing modules, can all be visualization module also, can also be the modules that gluing develops and mixes.
5, by the described structure of claim 1, it is characterized in that: described heat treatment module is made up of heat treatment tower frame and a plurality of thermal treatment unit body that is inserted in the pylon.
6. by the described structure of claim 1, it is characterized in that: described thermal treatment unit body can be pulled out outside the machine.
7. by the described structure of claim 1, it is characterized in that: described gluing or visualization module are piled up placement.
8. by the described structure of claim 1, it is characterized in that: the quantity of thermal treatment unit is (to comprise 3) more than 3 in the described heat treatment module.
9. by the described structure of claim 1, it is characterized in that: the angle between described first unit, box station and unit, the second box station is the 110-130 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200136514U CN201226081Y (en) | 2008-06-25 | 2008-06-25 | Glue-spreading developing apparatus with star-shaped structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200136514U CN201226081Y (en) | 2008-06-25 | 2008-06-25 | Glue-spreading developing apparatus with star-shaped structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201226081Y true CN201226081Y (en) | 2009-04-22 |
Family
ID=40598977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200136514U Expired - Lifetime CN201226081Y (en) | 2008-06-25 | 2008-06-25 | Glue-spreading developing apparatus with star-shaped structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201226081Y (en) |
-
2008
- 2008-06-25 CN CNU2008200136514U patent/CN201226081Y/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090422 |
|
| CX01 | Expiry of patent term |