CN201171088Y - Connecting parts, earthing structure, heater and apparatus containing the connecting parts - Google Patents

Connecting parts, earthing structure, heater and apparatus containing the connecting parts Download PDF

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Publication number
CN201171088Y
CN201171088Y CNU2007203065291U CN200720306529U CN201171088Y CN 201171088 Y CN201171088 Y CN 201171088Y CN U2007203065291 U CNU2007203065291 U CN U2007203065291U CN 200720306529 U CN200720306529 U CN 200720306529U CN 201171088 Y CN201171088 Y CN 201171088Y
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China
Prior art keywords
earth terminal
link
bend
clamping part
ground connection
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Chinese (zh)
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李盛玟
崔正德
崔在夏
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KOH MI DOO KK
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KOH MI DOO KK
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/46—Bases; Cases
    • H01R13/53—Bases or cases for heavy duty; Bases or cases for high voltage with means for preventing corona or arcing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R24/00—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure
    • H01R24/38—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts
    • H01R24/40—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts specially adapted for high frequency

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Resistance Heating (AREA)

Abstract

The utility model relates to a ground structure, and comprises a ground base, a ground end and a connecting part. The ground end is movably inserted into the ground base. The connecting part electrically connects a conducting clamp with the ground base. In addition, according to the heat expansion of the ground end, the connecting part bends along the length direction of the ground end. The connecting part can comprise a clamping part which is used to clamp the ground end, a fixing part which is used to fix the ground base and a bending part which is connected between the clamping part and the fixing part. The being part is bent and used to allow the clamping part to move along the length direction of the ground end.

Description

Link, ground structure, heater and the device that comprises this link
The cross reference of related application
According to 35USC § 119, the application requires the priority to the 2007-107927 korean patent application of Korea S Department of Intellectual Property (KIPO) submission on October 25th, 2007, and the full content of this application is incorporated this paper by reference into.
Technical field
The device that is used to handle substrate that illustrative embodiments of the present utility model relates to link, ground structure, heater and comprises described link.More specifically, illustrative embodiments of the present utility model relates to and is used for the device that is used to handle substrate that earth terminal is connected in link, ground structure, the heater of ground connection base and comprises described link.
Background technology
Generally speaking, the manufacturing process that semiconductor device can be by being used on Semiconductor substrate forming circuit, be used for semiconductor test electrical characteristics fulgurite core screening (ESD) technology and be used to utilize epoxy resin that semiconductor device is encapsulated and the packaging technology that Semiconductor substrate cuts into semiconductor chip made.
Manufacturing process can comprise and is used for cambial depositing operation on Semiconductor substrate, be used to make layer smooth chemico-mechanical polishing (CMP) technology, be used on layer, forming the photoetching process of photoengraving pattern, the etching process of the pattern that is used on layer, forming with electrical characteristics, be used for impurity is injected the ion implantation technology of Semiconductor substrate, be used to remove the cleaning of foreign matter on the Semiconductor substrate, be used for making the drying process of the Semiconductor substrate drying after the cleaning and be used for detection layers or the test technology of the defective of pattern.
At present, plasma enhanced chemical vapor deposition (PECVD) device can be widely used in the manufacturing process, its can with handle gas excite into plasmoid with cambium layer or pattern.Traditional PECVD device can comprise treatment chamber, and treatment chamber has the space that can handle Semiconductor substrate therein, be arranged in the electrode that reacting gas that treatment chamber is used for heating the heater of Semiconductor substrate and is used for being incorporated into treatment chamber forms plasma gas.Heater can comprise heat block, be implemented in the heating electrode in the heat block and be implemented in ground structure in the heat block.A kind of embodiment of this ground structure is disclosed in No. 0420693 Korean Utility Model registration.
Fig. 1 shows the perspective view of traditional ground structure, and Fig. 2 shows the conductive sheet in the ground structure of Fig. 1 and the perspective view of anchor clamps.
See figures.1.and.2, ground structure 1 comprise the anchor clamps that are used for clamping earth terminal 20 and be connected in anchor clamps 30 and ground connection pedestal 10 between to form the conductive sheet 40 of grounded circuit.Use screw 50 respectively anchor clamps 30 and conductive sheet 40 and conductive sheet 40 and ground connection pedestal 10 to be interfixed.
Yet,, therefore between anchor clamps 30 and conductive sheet 40 and conductive sheet 40 and ground connection pedestal 10, may produce loose contact owing to use screw 50 that anchor clamps 30, conductive sheet 40 and ground connection pedestal 10 are assembled together.Therefore, between anchor clamps 30 and conductive sheet 40 and conductive sheet 40 and ground connection pedestal 10, can produce electric arc.
In addition, because conductive sheet 40 is U-shapeds, therefore, is used for and handles the bend that high frequency power that gas is converted into plasma may concentrate on conductive sheet 40.Therefore, the high frequency power of Ji Zhonging may be cut the bend of conductive sheet 40.
The utility model content
Illustrative embodiments of the present utility model provides a kind of link that earth terminal stably can be connected in the ground connection base.
Illustrative embodiments of the present utility model also provides a kind of ground structure that comprises above-mentioned link.
Illustrative embodiments of the present utility model also provides a kind of heater that comprises above-mentioned link.
Illustrative embodiments of the present utility model also provides a kind of device that is used to handle substrate that comprises above-mentioned link.
According to the link of one aspect of the invention, comprise clamping part, fixed part and bend.Clamping part clamping earth terminal.Fixed part is fixed in the ground connection base.Bend is connected between clamping part and the fixed part.Bend is crooked, is used to allow clamping part to move along the length direction of earth terminal.
According to an illustrative embodiments, clamping part, fixed part and bend can wholely form.
According to another illustrative embodiments, clamping part, fixed part and bend can comprise essentially identical conductive material.
According to another illustrative embodiments, clamping part, fixed part and bend can have the uneven part that forms at its surface portion.
According to another illustrative embodiments, bend can have writing board shape, runs through described writing board shape and forms a plurality of holes.
In addition, bend can have the thickness of about 1mm to about 3mm.
In addition, bend can have uneven surface.
According to another illustrative embodiments, between bend and the fixed part and the connecting portion between bend and the clamping part can be round-shaped.
In addition, circular connection can have the radius of about 0.5mm to about 3mm.
According to another illustrative embodiments, clamping part can comprise two flat boards and twisted plate, and described twisted plate is connected between two flat boards, to be formed for holding the accommodation hole of earth terminal.
In addition, link can comprise screw, and described screw inserts in the plate so that earth terminal is fixed in the accommodation hole.
According to the ground structure of another aspect of the utility model, comprise ground connection base, earth terminal and link.Earth terminal is inserted in the ground connection base movably.Link will conduct clamper and be electrically connected on the ground connection base.In addition, according to the thermal expansion of earth terminal, link is along the length direction bending of earth terminal.
According to an illustrative embodiments, link can comprise the clamping part that is used for the clamping earth terminal, be fixed in the fixed part of ground connection base and be connected in clamping part and fixed part between bend.Bend is crooked, is used to allow clamping part to move along the length direction of earth terminal.
According to another illustrative embodiments, the ground connection base can further comprise the insulating element that is inserted between ground connection base and the clamping part.
According to another illustrative embodiments, the ground connection base can have the spatial accommodation that is used to hold link.In addition, spatial accommodation can be covered by the insulation cover cap.
According to the utility model ground structure on the other hand, comprise ground connection base, earth terminal, link and insulating element.The ground connection base has spatial accommodation.Earth terminal is inserted in the ground connection base movably, and exposes by spatial accommodation.Link is electrically connected on the ground connection base with earth terminal.The fixed part of the side that link comprises the clamping part that is used for clamping earth terminal flexibly, be fixed in spatial accommodation and be connected in clamping part and fixed part between bend.Clamping part has writing board shape, runs through described writing board shape and forms a plurality of holes.Bend is crooked, is used to allow clamping part to move along the length direction of earth terminal.Insulating element is inserted between ground connection base and the clamping part.
According to an illustrative embodiments, ground structure can further comprise the insulation cover cap that is used to cover spatial accommodation.
According to another illustrative embodiments, clamping part, fixed part and bend are whole to be formed.
According to another illustrative embodiments, between bend and the fixed part and bend and clamping part between connecting portion can be round-shaped.
According to the heater of another aspect of the utility model, comprise heat block, heating element, electrode, ground connection base, earth terminal and link.Heating element is implemented in the heat block.Electrode is implemented in the heat block.The ground connection base is installed on the heat block.Earth terminal is inserted in the ground connection base movably.In addition, earth terminal is electrically connected on electrode.Link will conduct clamper and be electrically connected on the ground connection base.In addition, according to the thermal expansion of earth terminal, link is along the length direction bending of earth terminal.
The device that is used to handle substrate according to another aspect of the utility model comprises that chamber, heater, reacting gas provide parts and top electrode.The chamber housing substrate.Heater is arranged at the lower space of chamber, with heated substrate.The upper space that reacting gas provides parts to be positioned at chamber is to be provided to reacting gas on the substrate.Top electrode is arranged in the chamber, to form plasma by reacting gas.Heater comprises heat block, heating element, bottom electrode, ground connection base, earth terminal and link.Heating element is implemented in the heat block.Bottom electrode is implemented in the heat block.The ground connection base is installed on the heat block.Earth terminal is inserted in the ground connection base movably.In addition, earth terminal is electrically connected on bottom electrode.Link will conduct clamper and be electrically connected on the ground connection base.In addition, according to the thermal expansion of earth terminal, link is along the length direction bending of earth terminal.
According to the utility model, link can have a main body, earth terminal is electrically connected on the ground connection base.Like this, owing to can between each parts of link, not produce loose contact, therefore can not produce electric arc.
In addition, between bend and the fixed part and bend and clamping part between connecting portion can have round-shaped.Like this, although high frequency power may concentrate on connecting portion, bend can not be cut yet.
Description of drawings
By the detailed description below in conjunction with accompanying drawing, above-mentioned and other features of the present utility model and advantage will be more readily apparent from.Wherein:
Fig. 1 shows the perspective view of traditional ground structure;
Fig. 2 shows the anchor clamps in the ground structure of Fig. 1 and the perspective view of conductive sheet;
Fig. 3 shows the perspective view according to the ground structure of illustrative embodiments of the present utility model;
Fig. 4 shows the perspective view of the link in the ground structure of Fig. 3;
Fig. 5 to Fig. 7 shows the perspective view according to the link of other illustrative embodiments of the utility model;
Fig. 8 shows the cutaway view according to the heater of illustrative embodiments of the present utility model; And
Fig. 9 shows the perspective view according to device illustrative embodiments of the present utility model, that be used to handle substrate.
Embodiment
Hereinafter the utility model is described more all sidedly with reference to the accompanying drawing of execution mode of the present utility model shown in it.Yet, can implement the utility model by different forms, and the utility model should not be interpreted as being subjected to the restriction of this paper execution mode.On the contrary, the purpose that these execution modes are provided is to make the disclosure thoroughly complete, and will pass on scope of the present utility model fully to those skilled in the art.In the accompanying drawings, may amplify the size and the relative size in layer and zone for clarity.
Should be appreciated that it can be located immediately at, is connected to or is coupled on other elements or the layer, perhaps may have the element or the layer of insertion when speaking of element or layer " being positioned at ", " being connected to " or " being coupled to " another element or layer and go up.On the contrary, element " is located immediately at " when speaking of, when " being connected directly to " or " coupling directly to " another element or layer are gone up, then do not have the element or the layer of insertion.Identical label refers to components identical in full.Term used herein " and/or " comprise that the one or more combination in any in the cited relevant item makes up with whole.
Can be used for describing various elements, assembly, zone, layer and/or part in this article though should be appreciated that first, second grade of term, these elements, assembly, zone, layer and/or part should not be limited to these projects.These terms only are used for an element, assembly, zone, layer and/or part and another zone, layer or part are distinguished.Thereby hereinafter first element of Tao Luning, assembly, zone, layer or part also can be called second element, assembly, zone, layer or part, and do not deviate from instruction of the present utility model.
Relative term on herein can usage space, for example " ... under ", " .... the below ", " below ", " top ", " top " etc. so that describe the relativeness of element shown in the accompanying drawing or feature and other elements or feature.Should be appreciated that term relative on the space is intended to comprise equipment and is using or the difference location except the location described in accompanying drawing during operation.For example, if the upset of the equipment in the accompanying drawing, the element that is described as " below other elements or feature " or " under other elements or feature " will be oriented to " being positioned at other elements or feature top ".Thereby, exemplary term " ... the below " can comprise top direction and below direction.Described equipment can be otherwise directed (rotate 90 degree or be in other orientation), thereby relative description language on the space of correspondingly using in the herein interpreted.
Term used herein only is intended to describe specific execution mode and unrestricted the utility model.When using in this article, " a " of singulative, " an " and " the " also are intended to comprise plural form, unless offer some clarification in addition in the context.Also can further understand, when using in this manual, term " comprises " that (includes and/or including) expression exists described feature, integral body, step, operation, element and/or assembly, but do not get rid of to exist or add one or more further features, integral body, step, operation, element, assembly and/or its combination is not arranged.
Unless otherwise defined, all terms used herein (comprising technology and scientific terminology) are identical with the common implication of understanding of the utility model those of ordinary skill in the field.Further be further appreciated that such as defined those terms in the common dictionary should be interpreted as having with its association area in the corresponding to implication of implication, unless and this paper define clearly, can not make an explanation to it with idealized or too regular mode.
Ground structure
Fig. 3 is the perspective view that illustrates according to the ground structure of illustrative embodiments of the present utility model.
With reference to Fig. 3, the ground structure 100 in this illustrative embodiments comprises ground connection base 110, earth terminal 120, link 130, insulating element 140 and cover cap 150.
Ground connection base 110 can have columniform shape.In this illustrative embodiments, ground connection base 110 can comprise for example conductive material of aluminium.Ground connection base 110 has the spatial accommodation 112 and first hole 114.
Spatial accommodation 112 is formed on the side of ground connection base 110.Spatial accommodation 112 exposes by the upper surface of ground connection base 110.In this illustrative embodiments, spatial accommodation 112 can have the cross section of quadrant shape.In addition, the second hole (not shown) that is connected to spatial accommodation 112 can pass ground connection base 110 and is vertically formed.
First hole 114 is passed ground connection base 110 and is vertically formed.The heating element (not shown) of heater (not shown) and be used for being contained in first hole 114 to the cable (not shown) of electrode (not shown) supply of current.
Earth terminal 120 inserts in described second hole.Earth terminal 120 in second hole stretches in the spatial accommodation 112.In this illustrative embodiments, the diameter of earth terminal 120 can be less than the diameter in second hole.Like this, earth terminal 120 passes described second hole, vertically places movably.Earth terminal 120 can comprise nickel.Further, earth terminal 120 can connect the electrode (not shown) that technology is connected to heater by brazing.
Link 130 is arranged in spatial accommodation 112.Link 130 is electrically connected on earth terminal 120 with ground connection base 110.
Fig. 4 is the perspective view that the link in the ground structure of Fig. 3 is shown.
With reference to Fig. 3 and Fig. 4, link 130 comprises clamping part 132, fixed part 134, bend 136, first screw 138 and second screw 139.
Clamping part 132 is arranged in spatial accommodation 112.Clamping part 132 can have thin elastic plate.Clamping part 132 can be the U-shaped of pars intermedia bending.In this illustrative embodiments, clamping part 132 comprises two vertical panel 132a and 132b and twisted plate 132c.Two vertical panel 132a and 132b have the first screw hole 132e respectively.Twisted plate 132c is connected between the side of vertical panel 132a and 132b, so that vertical panel 132a and 132b interconnect.Twisted plate 132c is formed for holding the accommodation hole 132d of earth terminal 120.Like this, accommodation hole 132d can have and the essentially identical diameter of the diameter of earth terminal 120.Therefore, clamping part 132 surrounds the outer surface that is contained in the earth terminal in the accommodation hole 132d.
First screw 138 is fixed two vertical panel 132a and 132b by the first screw hole 132e.Like this, clamping part 132 dead earth ends 120.In addition, the inner surface of clamping part 132 contacts with the intimate of earth terminal 120.
Like this, because therefore the last diameter of earth terminal 120, does not unclamp first screw 138 greater than the diameter of the accommodation hole 132d of clamping part 132, earth terminal 120 just can not break away from from clamping part 132.
Fixed part 134 is arranged in spatial accommodation 112.Fixed part 134 contacts with ground connection base 110.Like this, because fixed part 134 has the shape of vertical flat board, therefore enlarged the contact area between fixed part 134 and the ground connection base 110.In addition, fixed part 134 has the second screw hole 134a.
Second screw 139 is fixed to one another with fixed part 134 and ground connection base 110 by the second screw hole 134a.Like this, fixed part 134 closely contacts with ground connection base 110.
Bend 136 is connected between clamping part 132 and the fixed part 134.In this illustrative embodiments, bend 136 can be connected in the upper end of fixed part 134 with in the upper end of two vertical panel 132a in the clamping part 132 and 132b any one.For example, bend 136 can have writing board shape, runs through described dull and stereotyped a plurality of the 3rd hole 136a of formation.In addition, the 3rd hole 136a can have different shape, for example quadrangle, circle, ellipticalness etc.Like this, because bend 136 has the 3rd hole 136a, so bend 136 can be easily crooked.As a kind of selection, bend 136 can have the writing board shape that does not have the hole.
In this illustrative embodiments, bend 136 can have the thickness of about 1mm to about 3mm.When being used for that the high frequency power that reacting gas is converted into plasma put on bend 136, the thickness of bend 136 can provide durability to bend 136.In addition, bend 136 is crooked, thereby makes under the situation of earth terminal 120 thermal expansions, and the clamping part 132 that clamps earth terminal 120 moves along the length direction of earth terminal 120.In addition, as mentioned above,, therefore limited the thermal expansion of the earth terminal 120 that the high temperature owing to heater causes because clamping part 132 moves in a longitudinal direction.Therefore, can not cut the earth terminal 120 that is welded in heater.
Herein, when the thickness of bend 136 during less than about 1mm, bend 136 may be owing to high frequency power ruptures.Otherwise when the thickness of bend 136 during greater than about 3mm, bend 136 will be not easy bending.
In addition, between bend 136 and the fixed part 134 and the connecting portion between bend 136 and the clamping part 132 can have circular shape.Like this, high frequency power can concentrate on the connecting portion.Therefore, circular connection can have thick thickness, bears high frequency power to allow connecting portion.In this illustrative embodiments, circular connection can have the radius R of about 0.5mm to about 3mm.
Herein, when radius R during less than about 0.5mm, connecting portion may rupture owing to high frequency power.Otherwise when radius during greater than about 3mm, bend 136 may be not easy bending because connecting portion is too thick.
In this illustrative embodiments, clamping part 132, fixed part 134 and bend 136 can have uneven surface.The uneven surface of clamping part 132, fixed part 134 and bend 136 can be used for increasing the surface area of link 130.
High frequency power is by the surface transmission of link 130.It is big that the increase of the surface area of the transmission path of high frequency power and link 130 becomes pro rata.Therefore, high frequency power can be transmitted dispersedly, and being thus connected parts 130 can not be damaged, thereby prolongs the useful life of link 130.Can form the uneven surface of link 130 by bead-blast technology, the technology that sandblasts, chemical etching process etc.
As a kind of selection, high frequency power can be by bend 136 transmission.Like this, uneven part can only form on the surface of bend 136.Therefore, high frequency power can be transmitted dispersedly, and bend 136 can not be damaged thus, thereby prolongs the useful life of link 130.
In addition, clamping part 132, fixed part 134 and bend 136 can wholely form.Like this, can not produce loose contact between clamping part 132 and the bend 136 and between fixed part 134 and the bend 136, so that can not produce electric arc.
In this illustrative embodiments, clamping part 132, fixed part 134 and bend 136 can comprise essentially identical conductive material.The example of conductive material can comprise beryllium (Be), copper (Cu) and alloy thereof etc.
Fig. 5 is the cutaway view that illustrates according to the link of other illustrative embodiments of the present utility model to Fig. 7.
Except the connecting portion of bend, the link 130 among Fig. 5 to Fig. 7 comprise with Fig. 3 in link 130 essentially identical elements.Therefore, identical reference numbers components identical, and, omit further specifying to these similar elements at this for for simplicity.
With reference to Fig. 5, bend 136 is connected in the lower end of fixed part 134 with in the lower end of two plate 132a of clamping part 132 and 132b any one.
With reference to Fig. 6, bend 136 is connected in the front end of fixed part 134 with in the front end of two plate 132a of clamping part 132 and 132b any one.
With reference to Fig. 7, bend 136 is connected in the middle end face of fixed part 134 with in the middle end face of two plate 132a of clamping part 132 and 132b any one.
Referring again to Fig. 3 and Fig. 4, insulating element 140 is inserted between the clamping part 132 of ground connection base 110 and link 130, so that ground connection base 110 and clamping part 132 electric insulations.Insulating element 140 comprises first insulator 142 and second insulator 144.
First insulator 142 is arranged between the side and clamping part 132 of ground connection base 110,, is positioned at the side of spatial accommodation 112 that is.Second insulator 144 is arranged between the bottom surface and clamping part 132 of ground connection base,, is positioned at the bottom surface of spatial accommodation 112 that is.
Cover cap 150 covers spatial accommodation 112.Cover cap 150 prevents that earth terminal 120 and link 130 are exposed to the outside.In this illustrative embodiments, cover cap 150 can comprise insulating material.Like this, can not produce electric arc between earth terminal 120 and the cover cap 150 and between link 130 and the cover cap 150.
According to this illustrative embodiments, first screw, 138 fixed clamp portions 132 are so that clamping part 132 closely contacts with earth terminal 120.Like this, between earth terminal 120 and link 130, just can not produce electric arc.In addition, because clamping part 132, fixed part 134 and bend 136 whole formation, therefore can not occur owing between clamping part 132 and the bend 136 and the electric arc that produces of the loose contact between fixed part 134 and the bend 136 yet.
In addition, because the existence of bend 136, clamping part 132 can easily move in the vertical direction, so that the thermal expansion of earth terminal 120 can not be restricted.Like this, earth terminal 120 just can not be cut.
In addition, between clamping part 132 and the bend 136 and the connecting portion between fixed part 134 and the bend 136 can have circular shape.Like this, although high frequency power just concentrates on connecting portion, bend 136 can not be cut.
Heater
Fig. 8 is the cutaway view that illustrates according to the heater of an illustrative embodiments of the utility model.
With reference to Fig. 8, the heater 200 of this illustrative embodiments comprises heat block 210, heating element 220, electrode 230 and ground structure 100.
Heat block 210 comprises the circular slab that is placed with Semiconductor substrate on it, and the vertical rod that is connected to the lower central part of circular slab.In this illustrative embodiments, heat block 210 can comprise pottery.The embodiment of pottery can comprise Al 2O 3, Y 2O 3, Al 2O 3/ Y 2O 3, ZrO 2, AlC, TiN, AlN, TiC, MgO, CaO, CeO 2, TiO 2, BxCy, BN, SiO 2, SiC, YAG, mullite, AlF 3Deng, above material can use separately or use with the form of combination.
Heating element 220 is implemented in the heat block 210.In this illustrative embodiments, heating element 220 can the concentric circles pattern be arranged in the circular slab of heat block 210.Heat block 220 produces the heat that is used to heat Semiconductor substrate.Heat block 220 can comprise metal.The example of described metal can comprise tungsten (W), molybdenum (Mo), tantalum (Ta), titanium (Ti), its alloy, siderochrome (Fe-Cr) alloy, nickel chromium triangle (Ni-Cr) alloy etc.
Electrode 230 is implemented in the heat block 210.For example, electrode 230 can be connected in high frequency electric source.Like this, electrode 230 can be directed to Semiconductor substrate with the plasma that is used to handle Semiconductor substrate.As a kind of selection, electrode 230 can be connected in direct current (DC) power supply.Like this, electrode 230 can produce static, is used for fixing Semiconductor substrate.
Ground structure 100 comprises ground connection base, earth terminal, link and cover cap.Here, ground structure 100 is basic identical with the ground structure among Fig. 3 to Fig. 7.Therefore, for for simplicity, omit at this any of ground structure further specified.
The ground connection base of ground structure 100 is installed on the lower end of the vertical rod of heat block 210.The earth terminal of ground structure 100 is electrically connected on electrode 230.
Be used to handle the device of substrate
Fig. 9 is the cutaway view that illustrates according to a device illustrative embodiments of the present utility model, that be used to handle substrate.
With reference to Fig. 9, the device 300 of this illustrative embodiments comprises that chamber 310, gas provide parts 320, injector head 330, top electrode 340 and heater 200.
Chamber 310 has the space of loading and handling Semiconductor substrate.
Gas provides parts 320 to be connected in the upper surface of chamber 310.Gas provides parts 320 to be provided for handling the reacting gas of Semiconductor substrate in chamber 310.
Injector head 330 is arranged at the upper space of chamber 310.Injector head 330 provides reacting gas equably to Semiconductor substrate.
Top electrode 340 is connected in injector head 330.Top electrode 340 applies high voltage to reacting gas, so that reacting gas is converted into plasma.
Heater 200 comprises heat block, heating element, bottom electrode and ground structure.Here, heater 200 is basic identical with the heater among Fig. 8.Therefore, for for simplicity, omit at this any of heater 200 further specified.
Heater 200 is arranged at the lower space of chamber 310.Semiconductor substrate is arranged on the heat block of heater 200.
Thickness assessment link according to bend
Table 1
Figure Y20072030652900171
As shown in table 1, with 200W, 500W, 1,000W, 1,500W, 2,000W, 2,500W and 3, the high frequency power level of 000W puts on the electrode that bend thickness changes.Be not less than 3 when the electrode that to bend thickness is 0.5mm applies, during the high frequency power level of 000W, bend is cut.In addition, be not less than 2 when the electrode that to bend thickness is 3.5mm applies, during the high frequency power level of 500W, when the earth terminal thermal expansion, bend is not crooked, thereby makes the earth terminal bending.Be not less than 1 when the electrode that to bend thickness is 4mm applies, during the high frequency power level of 500W, bend and earth terminal damage.
Therefore, should be noted that the thickness of bend advantageously is that about 1mm is to about 3mm.Bend with above-mentioned thickness can be owing to high frequency power is damaged.In addition, bend can be easily crooked, so that earth terminal can not damage.
Radius assessment link according to circular connecting portion
Table 2
Figure Y20072030652900181
As shown in table 2, with 200W, 500W, 1,000W, 1,500W, 2,000W, 2,500W and 3, the high frequency power level of 000W puts on the electrode of the radius change of circular connecting portion.Herein, bend has the thickness of 2mm to 2.5mm.Be not less than 1 when the electrode that to the connecting portion radius is 0mm (that is, connecting portion does not have round-shaped) applies, during the high frequency power level of 500W, high frequency power concentrates on connecting portion, thereby bend is cut.In addition, be not less than 3 when the electrode that to the connecting portion radius is 3.5mm or 4.0mm applies, during the high frequency power level of 000W, when the earth terminal thermal expansion, bend is not crooked, thereby makes the earth terminal bending.
Therefore, should be noted that the radius of connecting portion advantageously is that about 0.5mm is to about 3mm.Connecting portion with above-mentioned radius can be owing to high frequency power is damaged.In addition, bend can be easily crooked, so that earth terminal can not damage.
According to the utility model, the link place being used for earth terminal is connected in the ground connection base can not produce electric arc, so that connecting portion can not damage.Therefore, ground structure, heater and comprise that the device that is used to handle substrate of link can not damage, thus have long useful life.
Though described preferred implementation of the present utility model, should be noted that those skilled in the art can carry out variations and modifications according to above-mentioned instruction.Therefore, should be appreciated that under the situation of the scope and spirit of the present utility model that do not depart from claims and limited, can change disclosed specific implementations of the present utility model.

Claims (22)

1. the link of ground structure comprises:
Clamping part is used for the earth terminal of the described ground structure of clamping;
Fixed part, it is fixed in the ground connection base of described ground structure; And
Bend, it is connected between described clamping part and the described fixed part, and described bend is crooked, is used to allow described clamping part to move along the length direction of described earth terminal.
2. link as claimed in claim 1, wherein, described clamping part, described fixed part and described bend are whole to be formed.
3. link as claimed in claim 1, wherein, described clamping part, described fixed part and described bend comprise essentially identical conductive material.
4. link as claimed in claim 1, wherein, described clamping part, described fixed part and described bend have uneven surface respectively.
5. link as claimed in claim 1, wherein, described bend has writing board shape, runs through described writing board shape and is formed with a plurality of holes.
6. link as claimed in claim 1, wherein, the thickness of described bend is that about 1mm is to about 3mm.
7. link as claimed in claim 1, wherein, described bend has uneven surface.
8. link as claimed in claim 1, wherein, between described bend and the described clamping part and the connecting portion between described bend and the described fixed part have round-shaped.
9. link as claimed in claim 8, wherein, the radius of described circular connecting portion is that about 0.5mm is to about 3mm.
10. link as claimed in claim 1, wherein, described clamping part comprises:
Two flat boards; And
Twisted plate, it is connected between the described flat board, to be formed for holding the accommodation hole of described earth terminal.
11. link as claimed in claim 10, wherein, described clamping part further comprises screw, and it is inserted in the described flat board with fixing described earth terminal.
12. a ground structure comprises:
The ground connection base;
Earth terminal, it is inserted in the described ground connection base movably; And
Link, it is used for the described earth terminal of clamping, and described earth terminal is electrically connected on described ground connection base, according to the thermal expansion of described earth terminal, described link is along the length direction bending of described earth terminal.
13. ground structure as claimed in claim 12, wherein, described link comprises:
Clamping part is used for the described earth terminal of clamping;
Fixed part, it is fixed in described ground connection base; And
Bend, it is connected between described clamping part and the described fixed part, and described bend is crooked, is used to allow described clamping part to move along the length direction of described earth terminal.
14. ground structure as claimed in claim 13, wherein, described link further comprises insulating element, and described insulating element inserts between described ground connection base and the described clamping part.
15. ground structure as claimed in claim 12, wherein, described ground connection base has the spatial accommodation that is used to hold described link.
16. ground structure as claimed in claim 15 further comprises the insulation cover cap that is used to cover described spatial accommodation.
17. a ground structure comprises:
Ground connection base with spatial accommodation;
Earth terminal, it is inserted in the described ground connection base movably, and exposes by described spatial accommodation;
Link, it is electrically connected between described earth terminal and the described ground connection base, described link comprise the clamping part that is used for the described earth terminal of resilient clamp, be fixed in the fixed part of described spatial accommodation side and be connected in described clamping part and described fixed part between bend, described bend is crooked, is used to allow described clamping part to move along the length direction of described earth terminal; And
Insulating element, it is inserted between described ground connection base and the described clamping part.
18. ground structure as claimed in claim 17 further comprises the insulation cover cap that is used to cover described spatial accommodation.
19. ground structure as claimed in claim 17, wherein, described clamping part, described fixed part and described bend are whole to be formed.
20. ground structure as claimed in claim 17, wherein, between described bend and the described clamping part and the connecting portion between described bend and the described fixed part have round-shaped.
21. a heater comprises:
Heat block;
Heating element, it is implemented in the described heat block;
Electrode, it is implemented in the described heat block;
The ground connection base, it is installed on the described heat block;
Earth terminal, it is inserted in the described ground connection base movably, and is connected in described electrode; And
Link is used for the described earth terminal of clamping, and described earth terminal is connected in described ground connection base, according to the thermal expansion of described earth terminal, described link is along the length direction bending of described earth terminal.
22. be used to handle the device of substrate, comprise:
Chamber is used to hold described substrate;
Heater is arranged at the lower space of described chamber, to heat described substrate;
Gas provides parts, is arranged at the upper space of described chamber, to provide reacting gas to described substrate; And
Top electrode is arranged in the described chamber, to form plasma by described reacting gas;
Wherein, described heater comprises heat block, be implemented in heating element in the described heat block, be implemented in electrode in the described heat block, be installed in ground connection base on the described heat block, be inserted in the described ground connection base movably and the earth terminal that is connected with described electrode and be used for the described earth terminal of clamping described earth terminal is connected in the link of described ground connection base, according to the thermal expansion of described earth terminal, described link is along the length direction bending of described earth terminal.
CNU2007203065291U 2007-10-25 2007-12-19 Connecting parts, earthing structure, heater and apparatus containing the connecting parts Expired - Lifetime CN201171088Y (en)

Applications Claiming Priority (2)

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KR1020070107927 2007-10-25
KR1020070107927A KR100933432B1 (en) 2007-10-25 2007-10-25 Connection member, grounding structure having same, heater and substrate processing apparatus

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CN103700965A (en) * 2013-12-24 2014-04-02 华为技术有限公司 Earthing terminal, earthing structure and electronic equipment
CN109690729A (en) * 2016-09-28 2019-04-26 美科股份有限公司 It is grounded clamping device and the substrate support including it

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KR101415552B1 (en) * 2009-12-21 2014-07-07 주식회사 미코 Ground structure, and heater and chemical vapor deposition apparatus including the same
KR101208700B1 (en) 2012-06-25 2012-12-06 (주)보부하이테크 Ceramic heater having strap for ground
KR101950439B1 (en) * 2012-12-28 2019-02-21 주식회사 원익아이피에스 apparatus for susceptor and processing substrate

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JP3364471B2 (en) 2000-06-07 2003-01-08 北川工業株式会社 Clamp
KR100358491B1 (en) 2000-07-29 2002-10-30 메카텍스 (주) The grounding structure for dry etching apparatus
KR200420693Y1 (en) 2005-11-23 2006-07-06 세레테크 세미콘덕터, 인코포레이티드 Radio frequency grounding apparatus
KR100963481B1 (en) * 2006-11-23 2010-06-17 주식회사 코미코 Ground structure, and heater and chemical vapor deposition apparatus including the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103700965A (en) * 2013-12-24 2014-04-02 华为技术有限公司 Earthing terminal, earthing structure and electronic equipment
CN103700965B (en) * 2013-12-24 2016-08-17 华为技术有限公司 Ground terminal, ground structure and electronic equipment
CN109690729A (en) * 2016-09-28 2019-04-26 美科股份有限公司 It is grounded clamping device and the substrate support including it

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KR20090042050A (en) 2009-04-29
KR100933432B1 (en) 2009-12-23
TWI360834B (en) 2012-03-21
SG152109A1 (en) 2009-05-29
TW200919539A (en) 2009-05-01

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