CN201162061Y - Crystal growing furnace guide shell - Google Patents
Crystal growing furnace guide shell Download PDFInfo
- Publication number
- CN201162061Y CN201162061Y CNU2008200524420U CN200820052442U CN201162061Y CN 201162061 Y CN201162061 Y CN 201162061Y CN U2008200524420 U CNU2008200524420 U CN U2008200524420U CN 200820052442 U CN200820052442 U CN 200820052442U CN 201162061 Y CN201162061 Y CN 201162061Y
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- CN
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- Prior art keywords
- guide shell
- carbon
- density
- crystal furnace
- carbon compound
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Abstract
The utility model discloses a single crystal furnace guide shell which is processed by carbon/carbon compound materials, which is characterized in that the guide shell is processed by the carbon/carbon compound materials, and comprises a high-density carbon/carbon compound material surface layer [3] and a low-density carbon/carbon compound material inner layer [2], since the surface layer [3] of the guide shell is the carbon/carbon compound material with high density (1.2g/cm3-1.7g/cm3), the transverse strength is about 110MPa, the thermal conductivity factor is only about 10W/mK, and the inner layer [2] is the carbon/carbon compound material with low density (0.4g/cm3-0.9/cm3), and the thermal conductivity factor is only about 0.8W/mK, and therefore the guide shell has excellent integrity, which not only has enough intensity and abradability, but also has better heat resistance property and thermal insulation property. Meanwhile compared with a graphite guide shell, the single crystal furnace guide shell reduces the thickness of the guide shell wall, lightens the mass of the guide shell, and reduces the energy dissipation thereof.
Description
Technical field:
The utility model relates to a kind of thermal field of single crystal furnace part, specifically a kind of single-crystal furnace guide shell.
Background technology:
During single crystal growing furnace pulling monocrystal silicon rod; the quartz crucible of raw materials such as splendid attire polysilicon block is put into the plumbago crucible holder that is positioned on the crucible holder; heat fused in protective atmosphere; regulate and control behind technological temperature; seed crystal inserts in the fusion polysilicon liquid through guide shell; do retrograde rotation with crucible and upwards promote, make polysilicon liquid become silicon single crystal rod by the Siliciumatom of the seed crystal crystallization and freezing that puts in order.Single-crystal furnace guide shell is generally made by graphite at present, in the silicon single crystal rod pulling process, plays a part the high-temperature gas water conservancy diversion.Both required it to have good heat-resistant and mechanical property, certain heat-insulating property had been arranged again, with the temperature difference of silicon single crystal rod district and fused polysilicon liquid zone in the maintenance guide shell.Because graphite product intensity is low, its folding strength is about 13MPa, and thermal conductivity is that thermal shock resistance is relatively poor about 140W/mK, and work-ing life is shorter; The shaping of large size guide shell is difficult in addition, and consumptive material is more, is difficult to satisfy the needs of monocrystalline silicon production development.Carbon/carbon composite is that a kind of net tire that the charcoal fiber is made and net tire or charcoal cloth and charcoal cloth or net tire and charcoal cloth are compound, form through density, charing and graphitization processing again, have high specific strength, high ratio modulus, high temperature resistant, anti-ablation, little, the anti-rapid heat cycle of thermal expansivity and indeformable premium properties such as do not ftracture, be adapted to the high temperature field especially, now become or will progressively become one of the important foundation material in fields such as aerospace, metallurgy, new forms of energy.
Summary of the invention:
The purpose of this utility model provides a kind of single-crystal furnace guide shell that adopts carbon/carbon composite to be processed into.
The utility model is to adopt following technical scheme to realize its goal of the invention, a kind of single-crystal furnace guide shell, and its guide shell is processed into by carbon/carbon composite.
Guide shell described in the utility model comprises top layer and nexine, and the apparent density on top layer is 1.2g/cm
3～1.7g/cm
3, the apparent density of nexine is 0.4g/cm
3～0.9g/cm
3
The utility model is adding man-hour, for slowing down the density speed of nexine, makes the apparent density of top layer and nexine occur being provided with slow infiltration layer than big-difference between top layer and nexine.
Slow infiltration layer described in the utility model is expanded graphite paper or template, combines with nexine closely, firmly for making the top layer, is provided with the hole on expanded graphite paper or template.
Because adopt technique scheme, the utility model has been realized goal of the invention preferably, because of the guide shell top layer is high-density (1.2g/cm
3～1.7g/cm
3) carbon/carbon composite, its folding strength is about 110MPa, thermal conductivity only is about 10W/mK, and nexine is low density (0.4g/cm
3～0.9g/cm
3) carbon/carbon composite, thermal conductivity only is about 0.8W/mK, therefore, the guide shell good combination property had both had enough intensity and wear resistance, had heat-shock resistance and heat-insulating property preferably again; Simultaneously,, reduced the guide shell wall thickness, alleviated the guide shell quality, himself consumed energy and also reduce than the graphite guide shell.
Description of drawings:
Accompanying drawing is a structural representation of the present utility model.
Embodiment:
The utility model is described in further detail below in conjunction with accompanying drawing.
By accompanying drawing as can be known, a kind of single-crystal furnace guide shell, its guide shell is processed into by carbon/carbon composite.
Guide shell described in the utility model comprises top layer 3 and nexine 2, and the apparent density on top layer 3 is 1.2g/cm
3～1.7g/cm
3(present embodiment is 1.3g/cm
3), the apparent density of nexine 2 is 0.4g/cm
3～0.9g/cm
3(present embodiment is 0.7g/cm
3).
The utility model is adding man-hour, for slowing down the density speed of nexine 2, the top layer 3 and the apparent density of nexine 2 is occurred than big-difference, is provided with slow infiltration layer 1 between top layer 3 and nexine 2.Like this, the density on its guide shell top layer 3 is higher, the intensity height, and the density of nexine 2 is less, good heat preservation performance; Make it both have enough intensity and wear resistance, have heat-shock resistance and heat-insulating property preferably again.
Slow infiltration layer 1 described in the utility model is expanded graphite paper or template, combines closely at the acupuncture compound tense with nexine 2, firmly for making top layer 3, is provided with the hole on expanded graphite paper or template.
Claims (5)
1, a kind of single-crystal furnace guide shell is characterized in that guide shell is processed into by carbon/carbon composite.
2, single-crystal furnace guide shell according to claim 1 is characterized in that described guide shell comprises top layer [3] and nexine [2], and the apparent density of top layer [3] is 1.2g/cm
3～1.7g/cm
3, the apparent density of nexine [2] is 0.4g/cm
3～0.9g/cm
3
3, single-crystal furnace guide shell according to claim 2 is characterized in that being provided with slow infiltration layer [1] between top layer [3] and the nexine [2].
4, single-crystal furnace guide shell according to claim 3 is characterized in that described slow infiltration layer [1] is expanded graphite paper or template.
5, single-crystal furnace guide shell according to claim 4 is characterized in that expanded graphite paper or template are provided with the hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200524420U CN201162061Y (en) | 2008-03-03 | 2008-03-03 | Crystal growing furnace guide shell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200524420U CN201162061Y (en) | 2008-03-03 | 2008-03-03 | Crystal growing furnace guide shell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201162061Y true CN201162061Y (en) | 2008-12-10 |
Family
ID=40183002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200524420U Expired - Lifetime CN201162061Y (en) | 2008-03-03 | 2008-03-03 | Crystal growing furnace guide shell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201162061Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101717992B (en) * | 2009-11-25 | 2011-11-09 | 蒋建纯 | Carbon-carbon composite guide cylinder of CZ silicon crystal growing furnace and preparation method thereof |
| CN104630880A (en) * | 2015-02-15 | 2015-05-20 | 英利集团有限公司 | Czochralski system for forming single crystal bar and technology method of growing single crystal bar |
-
2008
- 2008-03-03 CN CNU2008200524420U patent/CN201162061Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101717992B (en) * | 2009-11-25 | 2011-11-09 | 蒋建纯 | Carbon-carbon composite guide cylinder of CZ silicon crystal growing furnace and preparation method thereof |
| CN104630880A (en) * | 2015-02-15 | 2015-05-20 | 英利集团有限公司 | Czochralski system for forming single crystal bar and technology method of growing single crystal bar |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee after: Hunan gold carbon Limited by Share Ltd Address before: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee before: Hunan KBCarbon Composite Science and Technology Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20081210 |
|
| CX01 | Expiry of patent term |