CN201161240Y - 一种晶圆清洗机台清洗液泄漏的自动处理装置 - Google Patents
一种晶圆清洗机台清洗液泄漏的自动处理装置 Download PDFInfo
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- CN201161240Y CN201161240Y CNU2008200556597U CN200820055659U CN201161240Y CN 201161240 Y CN201161240 Y CN 201161240Y CN U2008200556597 U CNU2008200556597 U CN U2008200556597U CN 200820055659 U CN200820055659 U CN 200820055659U CN 201161240 Y CN201161240 Y CN 201161240Y
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CNU2008200556597U CN201161240Y (zh) | 2008-02-22 | 2008-02-22 | 一种晶圆清洗机台清洗液泄漏的自动处理装置 |
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CNU2008200556597U CN201161240Y (zh) | 2008-02-22 | 2008-02-22 | 一种晶圆清洗机台清洗液泄漏的自动处理装置 |
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CNU2008200556597U Expired - Lifetime CN201161240Y (zh) | 2008-02-22 | 2008-02-22 | 一种晶圆清洗机台清洗液泄漏的自动处理装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102069081A (zh) * | 2010-12-17 | 2011-05-25 | 广汽本田汽车有限公司 | 自动机三联阀、溶剂阀及喷枪的冲洗和检测系统 |
EA015361B1 (ru) * | 2009-07-02 | 2011-06-30 | Александр Владимирович Рудик | Механическая система для контроля и предотвращения протечки воды |
CN111799196A (zh) * | 2020-07-17 | 2020-10-20 | 中国科学院微电子研究所 | 一种半导体清洗设备及半导体清洗设备的紧急排水方法 |
-
2008
- 2008-02-22 CN CNU2008200556597U patent/CN201161240Y/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EA015361B1 (ru) * | 2009-07-02 | 2011-06-30 | Александр Владимирович Рудик | Механическая система для контроля и предотвращения протечки воды |
CN102069081A (zh) * | 2010-12-17 | 2011-05-25 | 广汽本田汽车有限公司 | 自动机三联阀、溶剂阀及喷枪的冲洗和检测系统 |
CN111799196A (zh) * | 2020-07-17 | 2020-10-20 | 中国科学院微电子研究所 | 一种半导体清洗设备及半导体清洗设备的紧急排水方法 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130306 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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TR01 | Transfer of patent right |
Effective date of registration: 20130306 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CX01 | Expiry of patent term |
Granted publication date: 20081210 |
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CX01 | Expiry of patent term |