CN201120610Y - Robot device with integrated fetching, delivering, aligning functions - Google Patents
Robot device with integrated fetching, delivering, aligning functions Download PDFInfo
- Publication number
- CN201120610Y CN201120610Y CNU2007200119389U CN200720011938U CN201120610Y CN 201120610 Y CN201120610 Y CN 201120610Y CN U2007200119389 U CNU2007200119389 U CN U2007200119389U CN 200720011938 U CN200720011938 U CN 200720011938U CN 201120610 Y CN201120610 Y CN 201120610Y
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- CN
- China
- Prior art keywords
- centering
- cylinder
- robot
- wafer
- sides
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a transferring mechanism for the wafer in a rail type spin-coating developing machine, in particular to an integrated robot device with the functions of taking, transferring and centering, solving the problems of single function and excessive operational working procedures found in the robot in the prior art; a centering mechanism is arranged on the robot; the centering mechanism comprises two moving centering parts and a cylinder; the moving centering parts driven by the cylinder are arranged on both sides of the cylinder symmetrically; the opposite lateral sides of the two moving centering parts adopt the semicircular structure matched with the shape of the wafer; columns are arranged on the opposite lateral sides of the two moving centering parts; damping retaining blocks are arranged on both sides of the cylinder; the transferring mechanism improves the original operation process; the centering mechanism is added to the robot; the centering function is realized on the robot; the wafer bearing platform of the centering unit in the prior art can be avoided; thereby, the procedures and mechanical parts are reduced and the time is saved.
Description
Technical field
The utility model relates to the transfer mechanism of wafer in the even glue/developing machine of rail mounted, be specially a kind ofly fetch and deliver, centering function integration robot device.
Background technology
Present robot finger got will be put on the independent centering unit behind the wafer and finished the centering function.As shown in Figure 1, former robot is provided with robot fixed platform 3 and the finger 1 that is installed on the robot fixed platform 3, former robot can only play the effect of fetching and delivering wafer, its course of work is that finger is got wafer from film magazine earlier, deliver to the centering unit, after the action of centering unit execution centering, be sent to other unit again.Its weak point is: the robot function is comparatively single, and operational sequence is more.
The utility model content
The purpose of this utility model is to provide a kind of and fetches and delivers, centering function integration robot device, solves problems such as the robot function is comparatively single, operational sequence is more.
The technical solution of the utility model is:
A kind ofly fetch and deliver, centering function integration robot device, centering body is set in the robot.
Described centering body can comprise mobile centering portion and cylinder, is symmetricly set in the both sides of cylinder by the mobile centering portion of air cylinder driven, and the opposite flank of two mobile centering portion is the semicircular structure with the wafer shape coupling.
Described two relative sides of mobile centering portion are equipped with cylinder.
Described cylinder both sides are equipped with the vibration damping block.
Advantage of the present utility model and beneficial effect are:
1, the utility model is changed the former course of work, has increased centering body in robot, and the centering function is realized in robot, and the wafer-supporting platform of former centering unit can be cancelled, and has reduced link and mechanical part, has saved the time.
2, the utility model can be applicable to I type and Y type finger simultaneously.
Description of drawings
Robot device's schematic diagram in Fig. 1 prior art.
Fig. 2 the utility model robot device schematic diagram.
Among the figure, 1 finger; 2 wafers; 3 robot fixed platforms; 4 centering bodies; 41 move centering portion; 42 cylinders; 43 cylinders; 44 cylinder travellers; 45 vibration damping blocks.
The specific embodiment
As shown in Figure 2, on robot fixed platform 3, increased centering body 4, thereby the centering function has been realized in robot.In the present embodiment, centering body 4 comprises mobile centering portion 41 and cylinder 42, and mobile centering portion 41 is symmetricly set in the both sides of cylinder 42, drives by cylinder traveller 44; The opposite flank of two mobile centering portion 41 is the semicircular structure that mates with wafer shape, the side of this mobile centering portion 41 is equipped with cylinder 43, be used for adjusting wafer centering position by contacting with wafer 2, cylinder 43 is polypropylene (PP) material, and cylinder 42 both sides are equipped with vibration damping block 45.
Operation principle of the present utility model is:
Utilize earlier vacuum suction to take out wafer 2 from wafer case, the finger 1 that will get wafer then moves to the top, cylinder 42 positions of the centering body 4 above the robot fixed platform 3; Close vacuum, 44 actions of cylinder traveller, centering body 4 action under cylinder traveller 44 drives is moved to wafer position, by adjusting the vibration damping block 45 of cylinder 42 both sides, controls the displacement of mobile centering portion 41; When the cylinder 43 of two mobile centering portion 41 sides contacts with wafer 2, can adjust wafer 2 positions, realize the centering function of wafer.After the centering action is finished, open vacuum again, wafer 2 is adsorbed on the finger 1, after finger 1 rises, wafer can be moved to other unit.
Claims (1)
- One kind fetch and deliver, centering function integration robot device, it is characterized in that: centering body is set in the robot; Described centering body comprises mobile centering portion and cylinder, is symmetricly set in the both sides of cylinder by the mobile centering portion of air cylinder driven, and the opposite flank of two mobile centering portion is the semicircular structure with the wafer shape coupling; Described two relative sides of mobile centering portion are equipped with cylinder; Described cylinder both sides are equipped with the vibration damping block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200119389U CN201120610Y (en) | 2007-04-30 | 2007-04-30 | Robot device with integrated fetching, delivering, aligning functions |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200119389U CN201120610Y (en) | 2007-04-30 | 2007-04-30 | Robot device with integrated fetching, delivering, aligning functions |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201120610Y true CN201120610Y (en) | 2008-09-24 |
Family
ID=40007830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200119389U Expired - Lifetime CN201120610Y (en) | 2007-04-30 | 2007-04-30 | Robot device with integrated fetching, delivering, aligning functions |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201120610Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104626167A (en) * | 2013-11-11 | 2015-05-20 | 沈阳芯源微电子设备有限公司 | Wireless communication wafer system and method for automatic demonstration |
| CN109262635A (en) * | 2018-09-17 | 2019-01-25 | 北京机械设备研究所 | A kind of robot arm end effector |
-
2007
- 2007-04-30 CN CNU2007200119389U patent/CN201120610Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104626167A (en) * | 2013-11-11 | 2015-05-20 | 沈阳芯源微电子设备有限公司 | Wireless communication wafer system and method for automatic demonstration |
| CN109262635A (en) * | 2018-09-17 | 2019-01-25 | 北京机械设备研究所 | A kind of robot arm end effector |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20080924 |
|
| CX01 | Expiry of patent term |