CN1966394A - Touch sensor and its manufacture method - Google Patents
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- CN1966394A CN1966394A CN 200610104952 CN200610104952A CN1966394A CN 1966394 A CN1966394 A CN 1966394A CN 200610104952 CN200610104952 CN 200610104952 CN 200610104952 A CN200610104952 A CN 200610104952A CN 1966394 A CN1966394 A CN 1966394A
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Abstract
The invention relates to a method for producing touch sensor, wherein said sensor comprises touch contact layer 1, space layer 2, and substrate layer 3 while they are made from flexible material; the touch contact layer 1 has micro cam array above; the space layer 2 is between the layers 2 and 3, while it has chamber array relative to the micro cam array; the contact faces between layers 1, 3 and 2 have several parallel row electrodes 4 and longitudinal electrodes 5 while they are vertical to each other; each crossed part has one switch sensitive unit; when the force of units are different, it will generate different switch signals to represent the surface state of matter. The invention has simple structure, high spatial resolution, and low cost.
Description
Technical field
The invention belongs to electromechanical integration technology area, particularly a kind of touch sensor that is applied to the electromechanical integration measuring technique also relates to its preparation method.
Background technology
Sense of touch is the comprehensive of mechanical stimulus sensations such as contact, impact, compressing.Touch sensor is the device of a kind of measurement autosensitization face and external object interaction parameter (sense of touch, pressure sensation, power feels, slidingly feel, heat is felt etc.), and sensitive area comprises a lot of tactile sensing unit, and arranges with the form of array.Touch sensor can be used for carrying out the distributed contact measurement of curved surface, shape identification, apparent height fluctuating differentiation, active haptics perception etc.
The tradition touch sensor is subjected to the restriction of material and technology, is difficult to commercialization always.Hard material such as silicon, metal lacks compliance, is the main cause that traditional touch sensor is difficult to compare with human skin, therefore selects flexible material to make touch sensor and receives much attention.
The Yue Hong of Hebei University of Technology, people such as Li Tiejun are in the utility model patent of 97203692.X in the patent No. of in January, 1997 application, a kind of robot touch sensor with filling ERF (ERF) foam pad is provided, this touch sensor is formed by three layers: the upper strata is the silastic-layer that has the stripe shape conductive rubber electrode, this is by special process, the whole rubber film of making by designing requirement; The intermediate layer is the polyamine fat foam pad that is full of ERF, the dielectric material of the capacitor that this one deck will form as upper/lower electrode; The 3rd layer of sensor is the printed circuit board (PCB) that has column electrode.Bar shaped conductive rubber electrode on the silastic-layer and the every column electrode on the printed circuit board (PCB) be arranged vertical spatially, and each infall forms an electric capacity as a sensing unit.
The foam pad of filling ERF is easily deformable under effect of electric field, after object contacts, and according to the variation of its capacitance signal, can the recognition object surface configuration, thus grasping is accurate.The contact-making surface of this sensor and object is a flexible face, can produce moderate finite deformation under less contact force, but its base material is the printed circuit board (PCB) of hard, therefore is difficult for being attached at curved surface and measures.Because the conductive rubber electrode layer adopts special process to make, manufacture difficulty is bigger, is difficult to realize producing in batches, and its spatial resolution also is subjected to certain limitation, and the spatial resolution of this sensor is 2.5mm.
Summary of the invention
The present invention can not be attached at deficiencies such as curved surface is measured, manufacture difficulty is big, spatial resolution is low for the hard substrates that overcomes existing touch sensor, MEMS (MEMS) technology and flexible material are combined, proposed simple, high efficiency, low cost method that a kind of flexible switch declines touch sensor and makes a kind of like this touch sensor.
The touch sensor that the present invention proposes comprises sense of touch contact layer 1, wall 2, substrate layer 3, column electrode 4 and row electrode 5.Sense of touch contact layer 1, wall 2, substrate layer 3 all adopt flexible polymeric materials to make, and sense of touch contact layer 1 upper surface has miniature boss array.Each miniature boss is the sensitive spot that sensor contacts with testee.Wall 2 is between sense of touch contact layer 1 and substrate layer 3, and it is not a pantostrat, but forms array of cavities on the position corresponding with the miniature boss of sense of touch contact layer 1 upper surface.The periphery of miniature boss can have concave ring structure, thereby makes miniature boss more be easy to generate distortion, improves susceptibility.
The column electrode 4 that some non-intersect arrangements are arranged on the direct contact surface of sense of touch contact layer 1 and wall 2, the row electrode 5 that some non-intersect arrangements are arranged on the direct contact surface of substrate layer 3 and wall 2, column electrode 4 and row electrode 5 are interlaced on the locus, and each infall forms a switch sensing unit.The infall position of column electrode 4 and row electrode 5 is corresponding with the miniature lug boss position of sense of touch contact layer 1 upper surface, wherein each infall of column electrode 4 and row electrode 5 part is respectively as the upper and lower electrode of each switch element, in order to improve susceptibility, column electrode 4 and row electrode 5 are not wide bar shapeds usually, but partly wide than other part outline as the infall of upper and lower electrode.
As preferred version of the present invention, the material of described sense of touch elastic layer is any one of silicon rubber or polyimides.
As preferred version of the present invention, the material of described wall is any one of silicon rubber or polyimides.
As preferred version of the present invention, the material of described substrate layer is any one of silicon rubber or polyimides.
Because each layer of this touch sensor all is to adopt flexible material to make, and therefore is subjected to the time spent of doing of power when sensor, the spacing between the upper/lower electrode reduces, and the stressed of each switch sensing unit varies in size, and whether also different the contact of upper/lower electrode is.To each switch sensing unit procession scanning, obtain the different make-and-break signal in each unit by scanning circuit, thus the concave-convex surface pattern of reflection object.
The concrete processing step of the touch sensor that the present invention proposes is:
(1) in substrate, etches pit array;
(2) in the substrate that etches pit array, make sacrifice layer;
(3) on sacrifice layer, apply flexible material, solidify, form sense of touch contact layer 1;
(4) spin coating photoresist on sense of touch contact layer 1, exposure is developed, and splash-proofing sputtering metal is made column electrode 4 then;
(5) remove sacrifice layer, the overall flexibility film is separated from substrate;
(6) in another sheet substrate, make sacrifice layer;
(7) the coating flexible material solidifies, and forms substrate layer 3;
(8) spin coating photoresist on substrate layer 3, exposure is developed, and splash-proofing sputtering metal is made row electrode 5 then;
(9) apply flexible material again, row electrode 5 is covered, solidify, form wall 2;
(10) etching flexible material forms cavity, exposes row electrode 5;
(11) the overall flexibility film is separated from substrate;
(12) fexible film of two parts up and down structure that step (5) and step (11) are separated is aimed at, and is bonded together then.
The invention has the beneficial effects as follows: because the present invention combines flexible material and MEMS processing technology, the touch sensor very thin thickness of making has good flexibility and elasticity, and similar people's real skin can be attached at arbitrary surface and measure.The MEMS process technology is dwindled size sensor, and spatial resolution can reach 1.5mm, even littler, and can obtain clear, a sharp keen contact-making surface image boundary; This touch sensor is simple in structure, has strengthened the robustness of detection and use, and can produce in batches, has reduced cost.
The present invention is further described below in conjunction with drawings and Examples.
Description of drawings
Fig. 1: the touch sensor unit cutaway view that the present invention proposes;
Fig. 2: 8 * 8 touch sensor vertical view;
The A-A of Fig. 3: Fig. 2 is to cutaway view;
The B-B of Fig. 4: Fig. 3 is to cutaway view;
The C-C of Fig. 5: Fig. 3 is to cutaway view;
Fig. 6: 7 * 10 have a touch sensor vertical view that round boss and boss periphery have annular scrobicular ring;
Fig. 7: have the touch sensor unit cutaway view that round boss and boss periphery have annular scrobicular ring;
Fig. 8: the making flow chart of the touch sensor that the present invention proposes.
Among the figure: 1-sense of touch contact layer 2-wall 3-substrate layer 4-column electrode 5-row electrode
The specific embodiment
Embodiment one:
Referring to Fig. 2, Fig. 3, Fig. 4, Fig. 5, present embodiment is a flexible switch that contains 8 * 8 the sensing unit arrays touch sensor that declines, and comprises sense of touch contact layer 1, wall 2, substrate layer 3.The material of sense of touch contact layer 1 and substrate layer 3 all is a silicon rubber, and the material of wall 2 is polyimides.Sense of touch contact layer 1 upper surface has 8 * 8 miniature boss array, and each miniature boss is the sensitive spot that sensor contacts with testee.Wall 2 is between sense of touch contact layer 1 and substrate layer 3, and it forms one 8 * 8 array of cavities on the position corresponding with the miniature boss of sense of touch contact layer 1 upper surface.
The column electrode 4 that on the direct contact surface of sense of touch contact layer 1 and wall 2, has 8 row to be arranged in parallel, the row electrode 5 that on the direct contact surface of substrate layer 3 and wall 2, has 8 row to be arranged in parallel, column electrode 4 and row electrode 5 arranged vertical on the locus, each infall forms a switch sensing unit.The infall position of column electrode 4 and row electrode 5 is corresponding with the miniature lug boss position of sense of touch contact layer 1 upper surface, wherein each infall part of column electrode 4 is as the top electrode of each switch element, each infall part of row electrode 5 is as the bottom electrode of each switch element, it is to be noted, in order to improve susceptibility, column electrode 4 and row electrode 5 are not wide bar shapeds, but partly wide than other part outline as the infall of upper and lower electrode.
Referring to Fig. 8, the decline concrete processing step of touch sensor of this flexible switch is:
(1) method that adopts anisotropic wet etch is as the square pit that etches 8 * 8 on the silicon chip of substrate, referring to 8 (a);
(2) on the silicon chip of etching, form silicon dioxide sacrificial layer, referring to 8 (b) by thermal oxide;
(3) spin coating dimethyl silicone polymer (PDMS) on silicon dioxide sacrificial layer solidify to form sense of touch contact layer 1, referring to 8 (c);
(4) spin coating photoresist on sense of touch contact layer 1, exposure is developed, and sputter copper is made column electrode 4 then; Photoresist with on the acetone removal sense of touch contact layer 1 exposes column electrode 4, referring to 8 (d);
(5) silicon slice placed of making is soaked a few minutes in hydrofluoric acid, then the overall structure on the silicon chip is separated from silicon chip, referring to 8 (e);
(6) be used as spin coating photoresist on the silicon chip of substrate at another sheet, exposure is referring to 8 (f);
(7) spin coating PDMS on the photoresist that had exposed solidify to form substrate layer 3, referring to 8 (g);
(8) spin coating photoresist on substrate layer 3, exposure is developed, and sputter copper is made row electrode 5 then; With acetone the photoresist on the substrate layer 3 is removed, expose row electrode 5, referring to 8 (h);
(9) spin coating PDMS covers row electrode 5, solidifies, and forms wall 2, referring to 8 (i);
(10) spin coating photoresist on wall 2, exposure is developed, and goes out cavity with plasma etching, exposes row electrode 5, referring to 8 (j);
(11) silicon slice placed of making is soaked a few minutes in acetone, then the overall structure on the silicon chip is separated from silicon chip, referring to 8 (k);
(12) fexible film of two parts up and down structure that step (5) and step (11) are separated is aimed at, and is bonded together then, referring to 8 (l).
Embodiment two:
Referring to Fig. 6, Fig. 7, present embodiment is a flexible switch that contains 7 * 10 the sensing unit arrays touch sensor that declines, and comprises sense of touch contact layer 1, wall 2, substrate layer 3.The material of sense of touch contact layer 1, wall 2 and substrate layer 3 all is a polyimides.Sense of touch contact layer 1 upper surface has 7 * 10 miniature boss array, and each miniature boss is the sensitive spot that sensor contacts with testee.Wall 2 is between sense of touch contact layer 1 and substrate layer 3, and it forms one 7 * 10 array of cavities on the position corresponding with the miniature boss of sense of touch contact layer 1 upper surface.The periphery of each miniature boss has a circle scrobicular ring, and this concave ring structure makes miniature boss more be easy to generate distortion, thereby improves susceptibility.
The column electrode 4 that on the direct contact surface of sense of touch contact layer 1 and wall 2, has 7 row to be arranged in parallel, the row electrode 5 that on the direct contact surface of substrate layer 3 and wall 2, has 10 row to be arranged in parallel, column electrode 4 becomes 30 degree angle of cut diamond arraies with row electrode 5 on the locus, each infall forms a switch sensing unit.The infall position of column electrode 4 and row electrode 5 is corresponding with the miniature lug boss position of sense of touch contact layer 1 upper surface, wherein each infall part of column electrode 4 is as the top electrode of each switch element, and each infall part of row electrode 5 is as the bottom electrode of each switch element.
Referring to Fig. 8, the decline concrete processing step of touch sensor of this flexible switch is:
(1) method that adopts the isotropism wet etching is as the circular pit that etches 7 * 10 on the sheet glass of substrate, referring to 8 (a);
(2) spin coating photoresist on the sheet glass of etching is graphical, referring to 8 (b);
(3) spin-on polyimide on the photoresist on graphically solidify to form sense of touch contact layer 1, referring to 8 (c);
(4) spin coating photoresist on sense of touch contact layer 1, exposure is developed, and sputter platinum is made column electrode 4 then; With acetone the photoresist on the sense of touch contact layer 1 is removed, expose column electrode 4, referring to 8 (d);
(5) sheet glass of making is placed in the acetone soaks a few minutes, then the overall structure on the sheet glass is separated from sheet glass, referring to 8 (e);
(6) be used as spin coating photoresist on the sheet glass of substrate at another sheet, exposure is referring to 8 (f);
(7) spin-on polyimide on the photoresist that had exposed solidify to form substrate layer 3, referring to 8 (g);
(8) spin coating photoresist on substrate layer 3, exposure is developed, and sputter platinum is made row electrode 5 then; With acetone the photoresist on the substrate layer 3 is removed, expose row electrode 5, referring to 8 (h);
(9) spin-on polyimide covers row electrode 5, solidifies, and forms wall 2, referring to 8 (i);
(10) spin coating photoresist on wall 2, exposure is developed; Adopt the method for wet etching, polyimides is etched cavity, expose row electrode 5, referring to 8 (j);
(11) sheet glass of making is placed in the acetone soaks a few minutes, then the overall structure on the sheet glass is separated from sheet glass, referring to 8 (k);
(12) fexible film of two parts up and down structure that step (5) and step (11) are separated is aimed at, and is bonded together then, referring to 8 (l).
Claims (7)
1, a kind of touch sensor, comprise sense of touch contact layer (1), wall (2), substrate layer (3), column electrode (4) and row electrode (5), it is characterized in that: sense of touch contact layer (1), wall (2), substrate layer (3) all adopt flexible polymeric materials to make, and sense of touch contact layer (1) upper surface has miniature boss array; Wall (2) is positioned between sense of touch contact layer (1) and the substrate layer (3), forms array of cavities on the position corresponding with the miniature boss of sense of touch contact layer (1) upper surface; The column electrode (4) that some non-intersect arrangements are arranged on the direct contact surface of sense of touch contact layer (1) and wall (2), the row electrode (5) that some non-intersect arrangements are arranged on the direct contact surface of substrate layer (3) and wall (2), column electrode (4) and row electrode (5) are interlaced on the locus, and the infall position of column electrode (4) and row electrode (5) is corresponding with the miniature lug boss position of sense of touch contact layer 1 upper surface.
2, according to utilizing the described a kind of touch sensor of claim 1, it is characterized in that: the periphery of described miniature boss has bowl configurations.
3, according to utilizing the described a kind of touch sensor of claim 1, it is characterized in that: the material of described sense of touch elastic layer (1) is any one of silicon rubber or polyimides.
4, according to utilizing the described a kind of touch sensor of claim 1, it is characterized in that: the material of described wall (2) is a polyimides.
5, according to utilizing the described a kind of touch sensor of claim 1, it is characterized in that: the material of described substrate layer (3) is any one of silicon rubber or polyimides.
6, according to described any one touch sensor of claim 1-7, it is characterized in that: described column electrode (4) and row electrode (5) are partly wide than other part outline at both infalls.
7, a kind of method for preparing the described touch sensor of claim 1 is characterized in that comprising the steps:
(a) in substrate, etch pit array;
(b) in the substrate that etches pit array, make sacrifice layer;
(c) on sacrifice layer, apply flexible material, solidify, form sense of touch contact layer (1);
(d) go up the spin coating photoresist at sense of touch contact layer (1), exposure is developed, and splash-proofing sputtering metal is made column electrode (4) then;
(e) remove sacrifice layer, the overall flexibility film is separated from substrate;
(f) in another sheet substrate, make sacrifice layer;
(g) the coating flexible material solidifies, and forms substrate layer (3);
(h) go up the spin coating photoresist at substrate layer (3), exposure is developed, and splash-proofing sputtering metal is made row electrodes (5) then;
(i) apply flexible material again, row electrode (5) is covered, solidify, form wall (2);
(j) etching flexible material forms cavity, exposes row electrode (5);
(k) the overall flexibility film is separated from substrate;
(l) fexible film of two parts up and down structure that step (e) and step (k) are separated is aimed at, and is bonded together then.
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| CNB2006101049523A CN100436306C (en) | 2006-11-23 | 2006-11-23 | Touch sensor and its manufacture method |
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| CNB2006101049523A CN100436306C (en) | 2006-11-23 | 2006-11-23 | Touch sensor and its manufacture method |
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| CN1966394A true CN1966394A (en) | 2007-05-23 |
| CN100436306C CN100436306C (en) | 2008-11-26 |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102236460A (en) * | 2010-04-28 | 2011-11-09 | 周正三 | Sensing device, mini-touch control device and producing method of sensing device |
| CN102374843A (en) * | 2010-08-02 | 2012-03-14 | 索尼公司 | Geometry sensor and information input device |
| CN102589759A (en) * | 2012-02-20 | 2012-07-18 | 浙江大学 | Bionic flexible touch sense sensing array based on piezoresistive type and capacitance type combination |
| CN103364123A (en) * | 2012-04-02 | 2013-10-23 | 宏达国际电子股份有限公司 | Force sensor and detector for user identification module card contact pin |
| CN106547343A (en) * | 2015-09-23 | 2017-03-29 | 崇实大学校产学协力团 | Sensor integration formula haptic apparatus and its manufacture method |
| CN107329436A (en) * | 2017-08-10 | 2017-11-07 | 苏州大学 | Flexible touch sensation sensor and robotic handling systems |
| CN108007617A (en) * | 2017-12-05 | 2018-05-08 | 浙江大学 | Pressure resistance type flexible touch sensation sensor and its manufacture method with micro- frustum of a cone substrate |
| CN109883584A (en) * | 2017-12-06 | 2019-06-14 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible bionic touch sensor based on micro-structure and preparation method thereof |
| CN110054148A (en) * | 2019-04-03 | 2019-07-26 | 华东师范大学 | A kind of cavity type pressure sensor and preparation method thereof |
| CN112816107A (en) * | 2020-12-31 | 2021-05-18 | 武汉大学 | Variable-range capacitive flexible pressure sensor and preparation method thereof |
| CN114512153A (en) * | 2022-01-17 | 2022-05-17 | 浙江大学 | Audio-visual touch data acquisition terminal for garbage |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4634917A (en) * | 1984-12-26 | 1987-01-06 | Battelle Memorial Institute | Active multi-layer piezoelectric tactile sensor apparatus and method |
| US5528452A (en) * | 1994-11-22 | 1996-06-18 | Case Western Reserve University | Capacitive absolute pressure sensor |
| CN2292274Y (en) * | 1997-01-21 | 1998-09-23 | 河北工业大学 | Robot contact sensor with filling current converter foam pad |
| JPH10247844A (en) * | 1997-03-04 | 1998-09-14 | Toshiba Corp | Touch sensor |
| US7481120B2 (en) * | 2002-12-12 | 2009-01-27 | Danfoss A/S | Tactile sensor element and sensor array |
| CN1280069C (en) * | 2003-11-01 | 2006-10-18 | 中国科学院合肥智能机械研究所 | Flexible tactile sensor and method for detecting infomation of tactile sensation |
| CN1796954A (en) * | 2004-12-22 | 2006-07-05 | 中国科学院合肥智能机械研究所 | Flexible 3D force-touch sensor |
-
2006
- 2006-11-23 CN CNB2006101049523A patent/CN100436306C/en not_active Expired - Fee Related
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| CN102236460A (en) * | 2010-04-28 | 2011-11-09 | 周正三 | Sensing device, mini-touch control device and producing method of sensing device |
| CN102236460B (en) * | 2010-04-28 | 2013-11-27 | 周正三 | Sensing device, mini-touch control device and producing method of sensing device |
| CN102374843A (en) * | 2010-08-02 | 2012-03-14 | 索尼公司 | Geometry sensor and information input device |
| CN102374843B (en) * | 2010-08-02 | 2016-02-03 | 索尼公司 | Geometric configuration sensor and message input device |
| CN102589759A (en) * | 2012-02-20 | 2012-07-18 | 浙江大学 | Bionic flexible touch sense sensing array based on piezoresistive type and capacitance type combination |
| CN103364123A (en) * | 2012-04-02 | 2013-10-23 | 宏达国际电子股份有限公司 | Force sensor and detector for user identification module card contact pin |
| CN103364123B (en) * | 2012-04-02 | 2016-04-27 | 宏达国际电子股份有限公司 | Force sensor and detector for user identification module card contact pin |
| CN106547343B (en) * | 2015-09-23 | 2020-05-29 | 崇实大学校产学协力团 | Sensor-integrated haptic device and method of manufacturing the same |
| CN106547343A (en) * | 2015-09-23 | 2017-03-29 | 崇实大学校产学协力团 | Sensor integration formula haptic apparatus and its manufacture method |
| CN107329436A (en) * | 2017-08-10 | 2017-11-07 | 苏州大学 | Flexible touch sensation sensor and robotic handling systems |
| CN108007617A (en) * | 2017-12-05 | 2018-05-08 | 浙江大学 | Pressure resistance type flexible touch sensation sensor and its manufacture method with micro- frustum of a cone substrate |
| CN109883584A (en) * | 2017-12-06 | 2019-06-14 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible bionic touch sensor based on micro-structure and preparation method thereof |
| CN110054148A (en) * | 2019-04-03 | 2019-07-26 | 华东师范大学 | A kind of cavity type pressure sensor and preparation method thereof |
| CN110054148B (en) * | 2019-04-03 | 2021-05-07 | 华东师范大学 | Cavity type pressure sensor and preparation method thereof |
| CN112816107A (en) * | 2020-12-31 | 2021-05-18 | 武汉大学 | Variable-range capacitive flexible pressure sensor and preparation method thereof |
| CN112816107B (en) * | 2020-12-31 | 2023-08-22 | 武汉大学 | Variable range capacitive flexible pressure sensor and preparation method thereof |
| CN114512153A (en) * | 2022-01-17 | 2022-05-17 | 浙江大学 | Audio-visual touch data acquisition terminal for garbage |
| CN114512153B (en) * | 2022-01-17 | 2022-12-23 | 浙江大学 | Audio-visual touch data acquisition terminal for garbage |
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Granted publication date: 20081126 Termination date: 20111123 |