CN1930917A - 用于维持电加热器的恒定功率操作的反馈控制系统和方法 - Google Patents

用于维持电加热器的恒定功率操作的反馈控制系统和方法 Download PDF

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Publication number
CN1930917A
CN1930917A CNA2005800081258A CN200580008125A CN1930917A CN 1930917 A CN1930917 A CN 1930917A CN A2005800081258 A CNA2005800081258 A CN A2005800081258A CN 200580008125 A CN200580008125 A CN 200580008125A CN 1930917 A CN1930917 A CN 1930917A
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China
Prior art keywords
electrical power
centerdot
resistance
sensing device
delta
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Pending
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CNA2005800081258A
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English (en)
Chinese (zh)
Inventor
陈英欣
杰弗里·W·诺伊纳
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Advanced Technology Materials Inc
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Advanced Technology Materials Inc
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Publication of CN1930917A publication Critical patent/CN1930917A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/0288—Applications for non specified applications

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Feedback Control In General (AREA)
CNA2005800081258A 2004-02-09 2005-02-08 用于维持电加热器的恒定功率操作的反馈控制系统和方法 Pending CN1930917A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/775,473 US7193187B2 (en) 2004-02-09 2004-02-09 Feedback control system and method for maintaining constant resistance operation of electrically heated elements
US10/775,473 2004-02-09

Publications (1)

Publication Number Publication Date
CN1930917A true CN1930917A (zh) 2007-03-14

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ID=34827209

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800081258A Pending CN1930917A (zh) 2004-02-09 2005-02-08 用于维持电加热器的恒定功率操作的反馈控制系统和方法

Country Status (8)

Country Link
US (3) US7193187B2 (ja)
EP (1) EP1714527A2 (ja)
JP (1) JP4707680B2 (ja)
KR (2) KR100951736B1 (ja)
CN (1) CN1930917A (ja)
SG (1) SG135180A1 (ja)
TW (1) TWI415506B (ja)
WO (1) WO2005077020A2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102244946A (zh) * 2010-03-12 2011-11-16 W.E.T.汽车系统股份公司 用于复杂造型表面的加热装置
CN102265703A (zh) * 2008-10-24 2011-11-30 万科仪器公司 自适应温度控制器
CN106558960A (zh) * 2015-09-30 2017-04-05 发那科株式会社 机械学习装置以及线圈通电加热装置
US10324069B2 (en) 2017-02-24 2019-06-18 Valco Instruments Company, L.P. Chromatographic system temperature control system

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8029454B2 (en) 2003-11-05 2011-10-04 Baxter International Inc. High convection home hemodialysis/hemofiltration and sorbent system
US7193187B2 (en) * 2004-02-09 2007-03-20 Advanced Technology Materials, Inc. Feedback control system and method for maintaining constant resistance operation of electrically heated elements
JP4758145B2 (ja) * 2005-06-03 2011-08-24 シチズンホールディングス株式会社 接触燃焼式ガスセンサ
TW200725686A (en) * 2005-10-03 2007-07-01 Advanced Tech Materials Systems and methods for determination of endpoint of chamber cleaning processes
JP4580405B2 (ja) * 2007-03-30 2010-11-10 エフアイエス株式会社 水素ガスセンサ
US7874724B2 (en) * 2007-04-11 2011-01-25 Trane International Inc. Method for sensing the liquid level in a compressor
US8078333B2 (en) 2007-07-05 2011-12-13 Baxter International Inc. Dialysis fluid heating algorithms
US8596108B2 (en) * 2007-10-01 2013-12-03 Scott Technologies, Inc. Gas measuring device and method of operating the same
US20090084160A1 (en) * 2007-10-01 2009-04-02 Scott Technologies, Inc. Gas measuring device and method of manufacturing the same
US10670556B2 (en) * 2014-05-16 2020-06-02 Teledyne Detcon, Inc. Electrochemical gas sensor biasing module
DE102015200217A1 (de) * 2015-01-09 2016-07-14 Robert Bosch Gmbh Sensorvorrichtung und Verfahren zum Erfassen zumindest eines gasförmigen Analyten sowie Verfahren zum Herstellen einer Sensorvorrichtung
MY193180A (en) * 2015-03-10 2022-09-26 Japan Tobacco Inc Method of manufacturing atomizing unit, non-combustion type flavor inhaler, atomizing unit and atomizing unit package
ES2629446B1 (es) * 2015-10-02 2018-05-29 Universitat Politécnica de Catalunya Método de control para sensores químicos de gases y sistema de detección de gases

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1143549A (ja) * 1965-03-19
US4305724A (en) * 1980-08-04 1981-12-15 Delphian Partners Combustible gas detection system
DE3174435D1 (en) * 1980-12-19 1986-05-22 Matsushita Electric Ind Co Ltd Sensor element and method for fabricating same
US4587104A (en) * 1983-12-21 1986-05-06 Westinghouse Electric Corp. Semiconductor oxide gas combustibles sensor
US4533520A (en) * 1984-07-02 1985-08-06 Mine Safety Appliances Company Circuit for constant temperature operation of a catalytic combustible gas detector
US4685325A (en) * 1986-02-03 1987-08-11 Aluminum Company Of America Measurement of gas content in molten metal using a constant current source
US4829819A (en) * 1987-07-21 1989-05-16 Environmental Instruments, Inc. In-line dual element fluid flow probe
US5081869A (en) * 1989-02-06 1992-01-21 Alcan International Limited Method and apparatus for the measurement of the thermal conductivity of gases
US5012432A (en) * 1989-06-13 1991-04-30 Gas Research Institute Microcalorimeter sensor for the measurement of heat content of natural gas
DE4221922C1 (de) * 1992-07-03 1994-01-13 Bosch Gmbh Robert Wärmetönungssensor
US5535614A (en) * 1993-11-11 1996-07-16 Nok Corporation Thermal conductivity gas sensor for measuring fuel vapor content
GB9501461D0 (en) * 1994-06-20 1995-03-15 Capteur Sensors & Analysers Detection of ozone
KR960031987A (ko) * 1995-02-24 1996-09-17 구자홍 가스(gas) 센싱소자의 구조 및 제조방법
JP3494508B2 (ja) * 1995-06-26 2004-02-09 日本碍子株式会社 可燃性ガスセンサ、可燃性ガス濃度の測定方法及び触媒劣化検知方法
CN1044833C (zh) 1996-07-16 1999-08-25 昆明贵金属研究所 二氧化锡酒敏元件及其制备方法
US5834627A (en) * 1996-12-17 1998-11-10 Sandia Corporation Calorimetric gas sensor
JPH11176815A (ja) * 1997-12-15 1999-07-02 Ricoh Co Ltd ドライエッチングの終点判定方法およびドライエッチング装置
JP3469448B2 (ja) * 1997-12-27 2003-11-25 株式会社山武 酸素検出素子の温度制御装置の調整方法
JP3985590B2 (ja) * 2001-07-27 2007-10-03 株式会社デンソー ガス濃度センサのヒータ制御装置
CA2470716A1 (en) * 2002-01-18 2003-07-31 The Board Of Trustees Of The University Of Illinois Microscale out-of-plane anemometer
DE20380265U1 (de) * 2002-06-04 2005-06-09 Scott Technologies, Inc., Beachwood Meßgerät für brennbares Gas
US20040163445A1 (en) * 2002-10-17 2004-08-26 Dimeo Frank Apparatus and process for sensing fluoro species in semiconductor processing systems
US7228724B2 (en) * 2002-10-17 2007-06-12 Advanced Technology Materials, Inc. Apparatus and process for sensing target gas species in semiconductor processing systems
US7080545B2 (en) * 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
US7296458B2 (en) * 2002-10-17 2007-11-20 Advanced Technology Materials, Inc Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same
US7036982B2 (en) * 2002-10-31 2006-05-02 Delphi Technologies, Inc. Method and apparatus to control an exhaust gas sensor to a predetermined termperature
US6888467B2 (en) * 2002-12-10 2005-05-03 Industrial Scientific Corporation Gas detection instrument and method for its operation
US7193187B2 (en) * 2004-02-09 2007-03-20 Advanced Technology Materials, Inc. Feedback control system and method for maintaining constant resistance operation of electrically heated elements

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8642931B2 (en) 2006-03-13 2014-02-04 Valco Instruments Company, L.P. Adaptive temperature controller
US8772680B2 (en) 2006-03-13 2014-07-08 Valco Instruments Company, L.P. Adaptive temperature controller
CN102265703A (zh) * 2008-10-24 2011-11-30 万科仪器公司 自适应温度控制器
CN102244946A (zh) * 2010-03-12 2011-11-16 W.E.T.汽车系统股份公司 用于复杂造型表面的加热装置
CN102244946B (zh) * 2010-03-12 2014-12-31 W.E.T.汽车系统股份公司 用于复杂造型表面的加热装置
CN106558960A (zh) * 2015-09-30 2017-04-05 发那科株式会社 机械学习装置以及线圈通电加热装置
US10324069B2 (en) 2017-02-24 2019-06-18 Valco Instruments Company, L.P. Chromatographic system temperature control system
US10481136B2 (en) 2017-02-24 2019-11-19 Valco Instruments Company, L.P. Chromatographic system temperature control system
US10481137B2 (en) 2017-02-24 2019-11-19 Valco Instruments Company, L.P. Chromatographic system temperature control system
US10502721B2 (en) 2017-02-24 2019-12-10 Valco Instruments Company, L.P. Chromatographic system temperature control system

Also Published As

Publication number Publication date
KR100990595B1 (ko) 2010-10-29
US20060219698A1 (en) 2006-10-05
EP1714527A2 (en) 2006-10-25
TWI415506B (zh) 2013-11-11
SG135180A1 (en) 2007-09-28
US20100139369A1 (en) 2010-06-10
JP2007522458A (ja) 2007-08-09
US20050173407A1 (en) 2005-08-11
TW200536424A (en) 2005-11-01
KR20090102879A (ko) 2009-09-30
US7193187B2 (en) 2007-03-20
KR20060129446A (ko) 2006-12-15
WO2005077020A3 (en) 2005-11-24
WO2005077020A2 (en) 2005-08-25
JP4707680B2 (ja) 2011-06-22
US7655887B2 (en) 2010-02-02
KR100951736B1 (ko) 2010-04-08

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Open date: 20070314