CN1896877B - 决定方法及曝光方法 - Google Patents

决定方法及曝光方法 Download PDF

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Publication number
CN1896877B
CN1896877B CN2006101063747A CN200610106374A CN1896877B CN 1896877 B CN1896877 B CN 1896877B CN 2006101063747 A CN2006101063747 A CN 2006101063747A CN 200610106374 A CN200610106374 A CN 200610106374A CN 1896877 B CN1896877 B CN 1896877B
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CN
China
Prior art keywords
pattern
exposure
reticle
representative
optimization
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Expired - Fee Related
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CN2006101063747A
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English (en)
Chinese (zh)
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CN1896877A (zh
Inventor
辻田好一郎
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Publication of CN1896877A publication Critical patent/CN1896877A/zh
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/706843—Metrology apparatus
    • G03F7/706849—Irradiation branch, e.g. optical system details, illumination mode or polarisation control

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN2006101063747A 2005-07-15 2006-07-14 决定方法及曝光方法 Expired - Fee Related CN1896877B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005207527 2005-07-15
JP2005207527A JP4336671B2 (ja) 2005-07-15 2005-07-15 露光パラメータの決定をコンピュータに実行させるプログラム、露光パラメータを決定する決定方法、露光方法及びデバイス製造方法。
JP2005-207527 2005-07-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201010243740XA Division CN101916048B (zh) 2005-07-15 2006-07-14 曝光参数的决定方法以及曝光方法

Publications (2)

Publication Number Publication Date
CN1896877A CN1896877A (zh) 2007-01-17
CN1896877B true CN1896877B (zh) 2010-12-29

Family

ID=37609419

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2006101063747A Expired - Fee Related CN1896877B (zh) 2005-07-15 2006-07-14 决定方法及曝光方法
CN201010243740XA Expired - Fee Related CN101916048B (zh) 2005-07-15 2006-07-14 曝光参数的决定方法以及曝光方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201010243740XA Expired - Fee Related CN101916048B (zh) 2005-07-15 2006-07-14 曝光参数的决定方法以及曝光方法

Country Status (5)

Country Link
US (1) US8339579B2 (cg-RX-API-DMAC7.html)
JP (1) JP4336671B2 (cg-RX-API-DMAC7.html)
KR (1) KR100878613B1 (cg-RX-API-DMAC7.html)
CN (2) CN1896877B (cg-RX-API-DMAC7.html)
TW (1) TWI314754B (cg-RX-API-DMAC7.html)

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JP2009302206A (ja) * 2008-06-11 2009-12-24 Canon Inc 露光パラメータの決定方法、露光パラメータを決定するためのプログラム、露光方法及びデバイス製造方法
JP5215812B2 (ja) * 2008-10-29 2013-06-19 キヤノン株式会社 照明条件の決定方法、プログラム、露光方法及びデバイス製造方法
JP2011049232A (ja) * 2009-08-25 2011-03-10 Renesas Electronics Corp 露光装置、露光方法及び半導体装置の製造方法
JP5574749B2 (ja) * 2010-02-24 2014-08-20 キヤノン株式会社 露光条件及びマスクパターンのうち少なくとも一方を決定する決定方法及びプログラム、情報処理装置
JP5835968B2 (ja) * 2011-07-05 2015-12-24 キヤノン株式会社 決定方法、プログラム及び露光方法
JP5656905B2 (ja) * 2012-04-06 2015-01-21 キヤノン株式会社 決定方法、プログラム及び情報処理装置
JP6108693B2 (ja) * 2012-06-08 2017-04-05 キヤノン株式会社 パターン作成方法
US8815498B2 (en) * 2012-08-22 2014-08-26 Nanya Technology Corp. Method of forming tight-pitched pattern
CN109683447B (zh) * 2019-02-18 2021-01-22 中国科学院微电子研究所 一种光源掩模协同优化初始光源的确定方法及装置
CN111367148B (zh) * 2020-04-10 2022-04-12 联合微电子中心有限责任公司 曲线图形光学邻近修正方法
CN111694227B (zh) * 2020-06-03 2023-03-21 长沙麓邦光电科技有限公司 光控系统及方法

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CN1129852A (zh) * 1994-12-29 1996-08-28 现代电子产业株式会社 用于半导体器件中的曝光掩模
US5705299A (en) * 1992-12-16 1998-01-06 Texas Instruments Incorporated Large die photolithography
CN1570769A (zh) * 2003-04-07 2005-01-26 Asml荷兰有限公司 装置制造方法,掩模组,数据组,掩模图案化方法及程序

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JP3330648B2 (ja) 1992-10-06 2002-09-30 富士通株式会社 光源形状の最適化方法
US5465220A (en) 1992-06-02 1995-11-07 Fujitsu Limited Optical exposure method
US5591958A (en) * 1993-06-14 1997-01-07 Nikon Corporation Scanning exposure method and apparatus
US5680588A (en) 1995-06-06 1997-10-21 International Business Machines Corporation Method and system for optimizing illumination in an optical photolithography projection imaging system
US5723233A (en) * 1996-02-27 1998-03-03 Lsi Logic Corporation Optical proximity correction method and apparatus
US6453452B1 (en) * 1997-12-12 2002-09-17 Numerical Technologies, Inc. Method and apparatus for data hierarchy maintenance in a system for mask description
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JP3718058B2 (ja) * 1998-06-17 2005-11-16 株式会社ルネサステクノロジ 半導体集積回路装置の製造方法
SE517345C2 (sv) * 1999-01-18 2002-05-28 Micronic Laser Systems Ab Metod och system för tillverkande av stora skärmpaneler med förbättrad precision
TW552561B (en) 2000-09-12 2003-09-11 Asml Masktools Bv Method and apparatus for fast aerial image simulation
JP2002134396A (ja) * 2000-10-25 2002-05-10 Sony Corp 半導体装置の製造方法および半導体パターン自動調節装置
JP2002190443A (ja) * 2000-12-20 2002-07-05 Hitachi Ltd 露光方法およびその露光システム
JP4436029B2 (ja) 2001-02-13 2010-03-24 株式会社ニコン 投影光学系の製造方法及び調整方法、露光装置及びその製造方法、デバイス製造方法、並びにコンピュータシステム
TW591694B (en) 2001-02-13 2004-06-11 Nikon Corp Specification determining method, making method and adjusting method of projection optical system, exposure apparatus and making method thereof, and computer system
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US7355673B2 (en) 2003-06-30 2008-04-08 Asml Masktools B.V. Method, program product and apparatus of simultaneous optimization for NA-Sigma exposure settings and scattering bars OPC using a device layout
JP4599048B2 (ja) * 2003-10-02 2010-12-15 川崎マイクロエレクトロニクス株式会社 半導体集積回路のレイアウト構造、半導体集積回路のレイアウト方法、およびフォトマスク
JP4351928B2 (ja) * 2004-02-23 2009-10-28 株式会社東芝 マスクデータの補正方法、フォトマスクの製造方法及びマスクデータの補正プログラム

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US5705299A (en) * 1992-12-16 1998-01-06 Texas Instruments Incorporated Large die photolithography
CN1129852A (zh) * 1994-12-29 1996-08-28 现代电子产业株式会社 用于半导体器件中的曝光掩模
CN1570769A (zh) * 2003-04-07 2005-01-26 Asml荷兰有限公司 装置制造方法,掩模组,数据组,掩模图案化方法及程序

Non-Patent Citations (2)

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JP特开2001-244191A 2001.09.07
US 5705299 ,说明书全文.

Also Published As

Publication number Publication date
CN101916048A (zh) 2010-12-15
JP2007027418A (ja) 2007-02-01
KR20070009417A (ko) 2007-01-18
US8339579B2 (en) 2012-12-25
US20070013896A1 (en) 2007-01-18
KR100878613B1 (ko) 2009-01-15
JP4336671B2 (ja) 2009-09-30
CN1896877A (zh) 2007-01-17
TWI314754B (en) 2009-09-11
TW200715372A (en) 2007-04-16
CN101916048B (zh) 2012-05-23

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Granted publication date: 20101229