CN1877867B - 固体摄像器件及摄像机 - Google Patents
固体摄像器件及摄像机 Download PDFInfo
- Publication number
- CN1877867B CN1877867B CN2006100917092A CN200610091709A CN1877867B CN 1877867 B CN1877867 B CN 1877867B CN 2006100917092 A CN2006100917092 A CN 2006100917092A CN 200610091709 A CN200610091709 A CN 200610091709A CN 1877867 B CN1877867 B CN 1877867B
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- China
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- light
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 178
- 239000000463 material Substances 0.000 claims abstract description 166
- 230000005540 biological transmission Effects 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 68
- 239000004065 semiconductor Substances 0.000 claims abstract description 63
- 239000007787 solid Substances 0.000 claims description 190
- 239000011248 coating agent Substances 0.000 claims description 22
- 238000000576 coating method Methods 0.000 claims description 22
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 20
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 18
- 229910000484 niobium oxide Inorganic materials 0.000 claims description 15
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 15
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 15
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 15
- 230000035945 sensitivity Effects 0.000 abstract description 83
- 239000010410 layer Substances 0.000 description 125
- 239000011229 interlayer Substances 0.000 description 109
- 230000004888 barrier function Effects 0.000 description 42
- 229910052751 metal Inorganic materials 0.000 description 33
- 239000002184 metal Substances 0.000 description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 29
- 230000015572 biosynthetic process Effects 0.000 description 23
- 230000000694 effects Effects 0.000 description 22
- 238000000034 method Methods 0.000 description 21
- 230000000903 blocking effect Effects 0.000 description 14
- 229910052814 silicon oxide Inorganic materials 0.000 description 13
- 229910000449 hafnium oxide Inorganic materials 0.000 description 12
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 12
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 241001062009 Indigofera Species 0.000 description 7
- 238000005452 bending Methods 0.000 description 6
- 239000003086 colorant Substances 0.000 description 6
- 230000000295 complement effect Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 239000012535 impurity Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 244000170916 Paeonia officinalis Species 0.000 description 1
- 235000006484 Paeonia officinalis Nutrition 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Blocking Light For Cameras (AREA)
Applications Claiming Priority (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP168726/2005 | 2005-06-08 | ||
| JP2005168724A JP2006344753A (ja) | 2005-06-08 | 2005-06-08 | 固体撮像装置およびカメラ |
| JP2005168701A JP4713953B2 (ja) | 2005-06-08 | 2005-06-08 | 固体撮像装置及びそれを用いたカメラ |
| JP2005168726A JP2006344755A (ja) | 2005-06-08 | 2005-06-08 | 固体撮像装置及びそれを用いたカメラ |
| JP168725/2005 | 2005-06-08 | ||
| JP168724/2005 | 2005-06-08 | ||
| JP168701/2005 | 2005-06-08 | ||
| JP2005168725A JP2006344754A (ja) | 2005-06-08 | 2005-06-08 | 固体撮像装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1877867A CN1877867A (zh) | 2006-12-13 |
| CN1877867B true CN1877867B (zh) | 2010-07-21 |
Family
ID=37510229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100917092A Expired - Fee Related CN1877867B (zh) | 2005-06-08 | 2006-06-08 | 固体摄像器件及摄像机 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2006344754A (fr) |
| CN (1) | CN1877867B (fr) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009044076A (ja) * | 2007-08-10 | 2009-02-26 | Toshiba Corp | パターン形成方法および半導体装置の製造方法 |
| WO2011055344A1 (fr) * | 2009-11-05 | 2011-05-12 | Hiok Nam Tay | Reseau de guides de lumiere optimise pour un capteur d'images |
| JPWO2011148574A1 (ja) | 2010-05-28 | 2013-07-25 | パナソニック株式会社 | 固体撮像装置 |
| JP2012043939A (ja) * | 2010-08-18 | 2012-03-01 | Sony Corp | 撮像素子および撮像装置 |
| JP5197823B2 (ja) * | 2011-02-09 | 2013-05-15 | キヤノン株式会社 | 光電変換装置 |
| JP2015012043A (ja) * | 2013-06-26 | 2015-01-19 | 株式会社東芝 | 撮像装置およびその製造方法 |
| JP2016096163A (ja) * | 2014-11-12 | 2016-05-26 | ソニー株式会社 | 固体撮像装置および製造方法、並びに電子機器 |
| WO2017057277A1 (fr) * | 2015-09-30 | 2017-04-06 | 株式会社ニコン | Élément d'imagerie et dispositif d'imagerie |
| EP3358621A4 (fr) * | 2015-09-30 | 2019-11-27 | Nikon Corporation | Élément d'imagerie et dispositif d'imagerie |
| JP6646830B2 (ja) * | 2016-03-30 | 2020-02-14 | パナソニックＩｐマネジメント株式会社 | 光検出装置および光検出システム |
| JP6393293B2 (ja) * | 2016-06-15 | 2018-09-19 | キヤノン株式会社 | 撮像素子及び撮像装置 |
| KR102375989B1 (ko) | 2017-08-10 | 2022-03-18 | 삼성전자주식회사 | 화소 사이의 신호 차이를 보상하는 이미지 센서 |
| CN110349987B (zh) * | 2019-07-15 | 2022-04-01 | 德淮半导体有限公司 | 相位检测自动对焦像素元件及其形成方法，图像传感器及其形成方法 |
| JP2023061622A (ja) * | 2021-10-20 | 2023-05-02 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555622A (ja) * | 1991-08-23 | 1993-03-05 | Fujitsu Ltd | 半導体受光装置 |
| JP2003197897A (ja) * | 2001-12-28 | 2003-07-11 | Fuji Film Microdevices Co Ltd | 半導体光電変換装置 |
-
2005
- 2005-06-08 JP JP2005168725A patent/JP2006344754A/ja active Pending
-
2006
- 2006-06-08 CN CN2006100917092A patent/CN1877867B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006344754A (ja) | 2006-12-21 |
| CN1877867A (zh) | 2006-12-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CI01 | Publication of corrected invention patent application |
Correction item: Drawings Correct: Figures 17 and 18 False: There are 2 copies in Figure 18 Number: 29 Volume: 26 |
|
| CI03 | Correction of invention patent |
Correction item: Drawings Correct: Figures 17 and 18 False: There are 2 copies in Figure 18 Number: 29 Page: Description Volume: 26 |
|
| ERR | Gazette correction |
Free format text: CORRECT: FIGURE OF DESCRIPTION; FROM: FIGURE 2 COPIES OF FIG. 18 TO: FIGURE 17, FIG. 18 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100721 Termination date: 20140608 |
|
| EXPY | Termination of patent right or utility model |