CN1866736A - Piezoelectric substrate and method of manufacturing the same - Google Patents
Piezoelectric substrate and method of manufacturing the same Download PDFInfo
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- CN1866736A CN1866736A CNA2006100802915A CN200610080291A CN1866736A CN 1866736 A CN1866736 A CN 1866736A CN A2006100802915 A CNA2006100802915 A CN A2006100802915A CN 200610080291 A CN200610080291 A CN 200610080291A CN 1866736 A CN1866736 A CN 1866736A
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- piezoelectric substrate
- base plate
- quartz base
- quartz
- jut
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Abstract
The disclosed piezoelectric plate for thick shear vibrator with high Q value comprises an integral projection on plate center with given size and a top surface formed a sphere form together with plate edge. The corresponding manufacture method comprises: photo-etching and etching the plate to form a table-form plate, putting the plate and grinding agent together into container to rotate and obtain the table-chamfer quartz plate.
Description
Technical field
The present invention relates to piezoelectric substrate and manufacture method thereof, particularly improve Q value and the piezoelectric substrate that is suitable for producing in batches and the manufacture method thereof of small-sized piezoelectric oscillator.
Background technology
Piezoelectric vibrator is small-sized because of it, timeliness change little, can easily obtain the frequency of high accuracy and high stable etc., be widely used in from the communication equipment to the electronic equipment.Particularly, be used for several MHz to hundreds of MHz frequency band with thickness shear pattern (thickness-shear mode) as the quartz vibrator of principal oscillation more.As with the quartz base plate of thickness shear pattern as the quartz vibrator of principal oscillation, the known AT of having cuts, BT cuts, FC cuts, IT cuts, SC cuts, NY cuts etc. (for example, with reference to patent documentation 1).Wherein, frequency-temperature characterisitic AT of being cubic curve cuts quartz vibrator and is used for mobile phone etc. more.
It is such as everyone knows that AT cuts the vibration mode of quartz vibrator, is thickness shear vibration, and the frequency and the thickness of oscillator are inversely proportional to.That is, along with the frequency gets higher of quartz vibrator, the thickness attenuation of quartz base plate, each characteristic of quartz vibrator depends on the size of electrode and the frequency slippage that is caused by electrode to a great extent.With respect to this, if the frequency of quartz vibrator descends, then the overall size (being called the limit ratio) with respect to quartz base plate thickness becomes key factor, how suitably to set the limit and recently avoids the contour vibration of high order to become the main points of design.
Fig. 3 is the figure of the structure of the discoideus quartz base plate of expression, (a) is profile, (b) is vertical view.When the frequency of quartz vibrator was low, the diameter D of quartz base plate 11 diminished than the value of D/t with respect to ratio, the limit of thickness t, can not concentrate on central portion fully as the vibrational energy distribution of the thickness shear pattern of principal oscillation, and reach to the end.The vibrational energy that arrives the end evokes the flexural vibrations of contour vibration, for example high order, high order face shear-vibration etc., consequently, causes the Q value deterioration of principal oscillation, becomes the many quartz vibrators of parasitism (spurious).Therefore, shown in Fig. 3 (a), grind, add chamfering 12, the vibrational energy of principal oscillation can be concentrated on central portion by both ends to quartz base plate.The design of quartz vibrator be how to design the limit of quartz base plate 11 than the width W of D/t, chamfering 12, hold thick d, realize the oscillator that the Q value is high, parasitic few.
Fig. 4 is the profile of expression plano-convex (plano convex) type quartz base plate, and it is an interarea to be ground to form lenticular (dome shape) make the vibrational energy of principal oscillation concentrate on the quartz base plate of substrate center portion, is mainly used in the high stable quartz vibrator.By another interarea is made as the plane, can keep the cut-out angle of substrate, therefore the quartz vibrator that uses the planoconvex quartz base plate to constitute is characterised in that the Q value is big and has good frequency-temperature characteristic.
In addition, Fig. 5 is the profile of expression biconvex (Double convex) type quartz base plate, though can obtain to have the quartz vibrator of high Q value, because the precision of sphere processing produces some deviations sometimes on frequency-temperature characteristic.
Recently, require the further miniaturization and the low price of quartz vibrator,, the mesa quartz base plate that the interarea of quartz base plate is processed into mesa shaped is arranged as the method that satisfies this requirement.Fig. 6 (a) and (b) are profiles of expression mesa quartz base plate, use photoetching technique and engraving methods by the quartz base plate 20 to flat board, and the oblique line portion of this figure (a) is carried out etching, form the mesa quartz base plate as this figure (b).Such quartz base plate is because of utilizing photoetching technique and the engraving method can be in a large number and make small-sized quartz base plate at an easy rate.This small-sized quartz base plate is characterised in that, the vibrational energy of principal oscillation can be concentrated on table top portion, so can constitute the high quartz vibrator of Q value.
[patent documentation 1]: Japanese kokai publication hei 10-284978 communique
[non-patent literature 1]: waterfall Ching husband work " ying of synthetic quartz と そ Electricity mood is used ", daily magazine industry are published, in May, 49 distribution
[non-patent literature 2]: V.E.Bottom work, " Introduction to Quartz Crystal UnitDesign ", Van Nostrand publishes, distribution in January nineteen eighty-two
But, even suitably set size d, the vibration section of overall size D, the vibration section of the mesa quartz base plate shown in Fig. 6 (b) thickness t, hold the thickness t 4 of thick t3, etched part, also because the deviation of the size of formed quartz base plate still exists the Q value of quartz vibrator deviation to occur and parasitic problem takes place.
Summary of the invention
The piezoelectric substrate of first invention of the present invention is characterised in that, the central authorities that constitute at flat piezoelectric substrate form the jut of opposed pre-sizing up and down, and the face of the circumference of the upper surface of this jut and flat board forms same dome shape.
The piezoelectric substrate of second invention is characterised in that, in the described piezoelectric substrate of first invention, described piezoelectric substrate be shaped as circle.
The piezoelectric substrate of the 3rd invention is characterised in that, in the described piezoelectric substrate of first invention, described piezoelectric substrate be shaped as rectangle.
The manufacture method of the piezoelectric substrate of the 4th invention is characterised in that, use photoetching technique and engraving method, the central portion that keeps the piezoelectric substrate of predetermined thickness, periphery is carried out the etching of predetermined thickness, the central authorities that are formed on flat part have formed the mesa piezoelectric substrate of opposed jut about substrate, this mesa piezoelectric substrate is put into cylindrical vessel with grinding agent, make container according to predetermined rotary speed rotation, thus the circumference of flat board and the upper surface of described jut are ground to form same dome shape.
The advantage of piezoelectric substrate of the present invention is, because the meas structure of central authorities and the circumference of substrate have been processed into dome shape, therefore the vibrational energy of principal oscillation can be enclosed in central portion, avoid combining between the contour vibration with high order, use the Q value of the piezoelectric vibrator that this piezoelectric substrate constitutes big, and can realize the piezoelectric vibrator that parasitism is few.
Description of drawings
Fig. 1 (a) and (b), (c), (d) represent the structure of quartz base plate of the present invention (table top-chamfering type quartz base plate), (a) are vertical view, (b) are profiles.
Fig. 2 (a) and (b), (c) are the profiles that the process of quartz base plate of the present invention (table top-chamfering type quartz base plate) is made in expression.
Fig. 3 is the figure of the existing chamfer machining quartz base plate of expression, (a) is profile, (b) is vertical view.
Fig. 4 is the profile of the structure of expression plano-convex quartz base plate.
Fig. 5 is the profile of the structure of expression biconvex quartz base plate.
Fig. 6 (a) and (b) are profiles of the structure of expression mesa quartz base plate.
Embodiment
Fig. 1 is the figure of the execution mode of expression quartz base plate of the present invention, and this figure (a) is a vertical view, and this figure (b) is a profile.It constitutes, the central portion of cutting quartz base plate 1 at flat AT forms the jut (table top portion) 3 of opposed pre-sizing up and down, and the face of the circumference (chamfered section) 4 of the upper surface of this jut 3 and the flat board that is connected with jut 3 forms same dome shape.
Use profile shown in Figure 2, the manufacture method of quartz base plate of the present invention (below, be called table top-chamfering type quartz base plate) is described.At first, shown in Fig. 2 (a), use photoetching technique and engraving method, the AT that keeps predetermined thickness cuts dull and stereotyped 1 central portion 3, periphery 5 is carried out the etching of predetermined thickness, and the central authorities at flat part 2 of formation shown in this Fig. 2 (b) have formed the quartz base plate (mesa quartz base plate) of opposed jut 3 about substrate.Then, this mesa quartz base plate is put into container cylindraceous with grinding agent, make container, circumference 4 with the flat board of the inside side walls butt of container is ground and become wedge-like according to predetermined rotary speed rotation.When further carrying out the grinding of circumference 4, the upper surface of the jut 3 that forms in the central authorities of quartz base plate 1 contacts with the sidewall of cylindrical vessel, is ground away by rubbing.That is, the face of the circumference 4 of the upper surface of jut 3 and flat board is duplicated into the inboard shape of cylindrical vessel, forms dome shape.
The quartz vibrator that uses above-mentioned table top-chamfering type quartz base plate to constitute is characterised in that, its Q value is higher than the Q value of the quartz vibrator that uses mesa quartz base plate or chamfering type quartz base plate to constitute, and lacks than the quartz vibrator that uses mesa, chamfering type quartz base plate is parasitic.Its reason is, table top-chamfering type quartz base plate not only the upper surface of its table top portion is processed to dome shape, and also the circumference of substrate has been implemented the chamfer machining of dome shape, therefore, can make the vibrational energy of principal oscillation more concentrate on central portion, make the vibrational energy that evokes the high order contour vibration in the end little.
The polished amount of the circumference of quartz base plate is determined by the deadweight of quartz base plate and the rotary speed of cylindrical vessel substantially.Therefore, quartz base plate diminishes, weight reduction if the miniaturization by quartz vibrator makes, and then causes the increase of chamfer machining time.And, if carry out long chamfer machining, then because quartz base plate freely moves in cylindrical vessel, therefore, often appearance particularly forms the phenomenon of the angle of quartz base plate being ground too much, the phenomenon that becomes the shape different with the curvature of cylindrical vessel etc.Table top of the present invention-chamfering type quartz base plate is because of making the vibrational energy adequate closure of principal oscillation can reduce the chamfer machining amount of circumference in table top portion by the jut (table top portion) that is processed into dome shape.For example, during as shown in Figure 5 quartz base plate, with respect in many situations of amount of grinding in the chamfer machining like that shown in Fig. 1 (c) bend, to the amount of grinding of the quartz base plate that is processed into mesa in advance as shown in Fig. 1 (d) bend like that, significantly reduce.Because the minimizing of chamfer machining time can obtain shape more near the quartz base plate of design shape, also can obtain the also good quartz base plate of each characteristic.And, owing to can shorten the chamfer machining time, therefore, be all little quartz base plate of deviation of deviation or each characteristic of quartz vibrator of chamfering no matter can obtain.
More than illustrated after using circular flat board to form the mesa quartz base plate, in cylindrical vessel, carried out chamfer machining, formed the step of table top-chamfering type quartz base plate, but, use the flat board of rectangle also can similarly constitute table top-chamfering type quartz base plate certainly.In addition, when making small-sized table top-chamfering type quartz base plate in large quantities, the technology of following mode is suitable for producing in batches: use photoetching technique and engraving method, cut at the big AT of predetermined thickness and to form a plurality of mesa structures on the substrate rectangularly, utilize cutting machine to cut off, form individuality, then, use cylindrical vessel that table top portion and dull and stereotyped circumference are implemented sphere processing.
The invention is not restricted to above-mentioned execution mode, can be in its technical scope to the various changes/distortion and implementing in addition of above-mentioned execution mode.For example, the present invention not only can be applied to AT and cut quartz base plate, can also be applied to the quartz base plate that principal oscillation is the thickness shear pattern (for example, BT cuts, FC cuts, IT cuts, SC cuts, NY cuts etc. quartz base plate).And, if principal oscillation is the thickness shear pattern, then also can be applied to quartz base plate piezoelectric substrate (for example, the piezoelectric substrate of lithium niobate substrate, lithium tantalate substrate, lithium tetraborate substrate, Lan Kesai (langasite) substrate, piezoelectric ceramic substrate etc.) in addition.
Claims (4)
1. a piezoelectric substrate is characterized in that,
The central authorities that constitute at flat piezoelectric substrate form the jut of opposed pre-sizing up and down, and the face of the circumference of the upper surface of this jut and flat board forms same dome shape.
2. piezoelectric substrate according to claim 1 is characterized in that,
Described piezoelectric substrate be shaped as circle.
3. piezoelectric substrate according to claim 1 is characterized in that,
Described piezoelectric substrate be shaped as rectangle.
4. the manufacture method of a piezoelectric substrate is characterized in that,
Use photoetching technique and engraving method, keep the central portion of the piezoelectric substrate of predetermined thickness, periphery is carried out the etching of predetermined thickness, the central authorities that are formed on flat part have formed the mesa piezoelectric substrate of opposed jut about substrate,
This mesa piezoelectric substrate is put into cylindrical vessel with grinding agent, make container, thus the circumference of flat board and the upper surface of described jut are ground to form same dome shape according to predetermined rotary speed rotation.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005143160 | 2005-05-16 | ||
| JP2005143160 | 2005-05-16 | ||
| JP2006036078 | 2006-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1866736A true CN1866736A (en) | 2006-11-22 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006100802915A Pending CN1866736A (en) | 2005-05-16 | 2006-05-16 | Piezoelectric substrate and method of manufacturing the same |
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| JP (1) | JP5435060B2 (en) |
| CN (1) | CN1866736A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110379916A (en) * | 2019-07-05 | 2019-10-25 | 中国科学院物理研究所 | The preparation method of piezo ceramic element |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9503045B2 (en) | 2015-01-19 | 2016-11-22 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic apparatus, and moving object |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5845205B2 (en) * | 1974-08-23 | 1983-10-07 | セイコーエプソン株式会社 | Manufacturing method of mesa crystal resonator |
| JPS5327384A (en) * | 1976-08-25 | 1978-03-14 | Seiko Instr & Electronics Ltd | Supporting structure of thickness slide crystal vibrator |
| JPS5769921A (en) * | 1980-10-20 | 1982-04-30 | Matsushita Electric Ind Co Ltd | Thickness slip quartz oscillator |
| JPS5847316A (en) * | 1981-09-16 | 1983-03-19 | Seikosha Co Ltd | Thickness slip piezoelectric oscillator and its production |
| JPS58141022A (en) * | 1982-02-16 | 1983-08-22 | Matsushita Electric Ind Co Ltd | Thickness sliding crystal oscillator |
| JPH03263908A (en) * | 1989-12-20 | 1991-11-25 | Victor Co Of Japan Ltd | Thickness skid crystal resonator for voltage controlled crystal oscillator |
| JPH10107580A (en) * | 1996-09-25 | 1998-04-24 | Daishinku Co | Thickness-slide crystal vibrator |
| JP2001085970A (en) * | 1999-09-10 | 2001-03-30 | Toyo Commun Equip Co Ltd | Resonator for high stable piezo-oscillator |
-
2006
- 2006-05-16 CN CNA2006100802915A patent/CN1866736A/en active Pending
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2012
- 2012-03-26 JP JP2012068950A patent/JP5435060B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110379916A (en) * | 2019-07-05 | 2019-10-25 | 中国科学院物理研究所 | The preparation method of piezo ceramic element |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012135043A (en) | 2012-07-12 |
| JP5435060B2 (en) | 2014-03-05 |
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