CN1848402A - Electrostatic chuck mounting and dismounting tool - Google Patents
Electrostatic chuck mounting and dismounting tool Download PDFInfo
- Publication number
- CN1848402A CN1848402A CN 200510126277 CN200510126277A CN1848402A CN 1848402 A CN1848402 A CN 1848402A CN 200510126277 CN200510126277 CN 200510126277 CN 200510126277 A CN200510126277 A CN 200510126277A CN 1848402 A CN1848402 A CN 1848402A
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- China
- Prior art keywords
- electrostatic chuck
- abutment sleeve
- dismounting tool
- chuck mounting
- supporting bracket
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to an electrostatic chuck mounting and dismounting tool. It includes a fixed supporting component and a mounting motion component mounted on the fixed supporting component. The described fixed supporting component includes a supporting plate and four supporting bars equidistantly mounted on the supporting plate, and the described mounting motion component includes electrostatic chuck mounting frame, a turnable handle with screw rod is connected in the centre of electrostatic chuck mounting frame, the described screw rod is passed through the supporting plate and connected with said supporting plate by means of screw threads.
Description
Technical field
The present invention relates to the mounting and dismounting tool in the semiconductor microelectronics industry, the mounting and dismounting tool of electrostatic chuck (ESC) in particularly a kind of etching machine (Etch) reative cell.
Background technology
Equipment is quite accurate complicated in the microelectronic industry, and especially electrostatic chuck (ESC) structure is extremely complicated, and its manufacture process requirement is very high.In dry etch process, electrostatic chuck 1 is positioned at etching machine reative cell 2 centers, sees Fig. 1, and it act as in technical process to blow by electrostatic interaction clamping silicon chip (Wafer) and by the helium back of the body and silicon chip is carried out temperature accurately controls.Electrostatic chuck 1 in its installing/dismounting process, must the special messenger use specific method to carry out as the core component of etching machine.
Along with the continuous development of etching technics and silicon chip technology, silicon chip develops into 12 inches 300mm by 8 in2 00mm, and corresponding electrostatic chuck (12 inches 300mm) is also to come into operation.Along with the increasing of electrostatic chuck size, higher specification requirement has been proposed the attendant.The present invention produces at this actual demand.
The etching machine has experienced 6 inches, 8 inches, 12 inches development course, and before 12 inches silicon chip erosion machines were used, the installing/dismounting of 8 inches etching machine electrostatic chucks mainly relied on the service engineer of specialty.Because etching machine reative cell 2 service clearances are narrow and small; Electrostatic chuck and appurtenances complex structure thereof, the positioning requirements height; In the installing/dismounting process, very easily cause electrostatic chuck 1 or silicon chip up-down pin equivalent damage.There is following shortcoming in this kind mode:
1. service engineer's technical merit is had relatively high expectations, must be through strict training;
2. in the installing/dismounting process, contacted many with the electrostatic chuck card, easily produce particle contamination;
3. in the installing/dismounting process, electrostatic chuck 1 is complicated with electrostatic chuck base location, installs repeatedly and easily produces particle contamination;
Summary of the invention
For achieving the above object, the present invention adopts following technical scheme:
Electrostatic chuck mounting and dismounting tool of the present invention, comprise fixed support part and the mounted movable parts that are installed on the fixed support part, described fixed support part comprises supporting bracket and equidistantly is installed in support bar on the supporting bracket, described mounted movable parts comprise the electrostatic chuck installing rack, be connected with rotary handle at the center of installing rack with screw rod, described screw rod pass supporting bracket and with supporting bracket by being threaded.
Described support bar is 3～6, its lower end be with reative cell in the screw thread of guard ring threads engaged,
Avoid being provided with resin mass under the described electrostatic chuck installing rack by ESC.
Electrostatic chuck mounting and dismounting tool described in the utility model also has at least two cover positioners, every cover positioner comprises guide post and abutment sleeve, on supporting bracket, guide post passes abutment sleeve to described abutment sleeve by screw, and guide post and abutment sleeve adopt tight fit.
Described abutment sleeve is that the resin material with self-lubricating is made.
(3) beneficial effect
The advantage and the good effect of electrostatic chuck mounting and dismounting tool of the present invention are:
The present invention can be widely used in effectively having overcome the defective of original technology in semiconductor equipment or other equipment, and its major advantage is:
1. simple in structure, safe and reliable;
2. operating personnel only need can carry out the installing/dismounting of electrostatic chuck through simple training;
3. can effectively control the particle contamination degree in the electrostatic chuck installing/dismounting process;
4. improved the installing/dismounting stability of electrostatic chuck.
Description of drawings
Fig. 1 is that electrostatic chuck is positioned at etching machine reative cell center situation figure;
Fig. 2 is that mounting and dismounting tool of the present invention is installed in the state diagram on the etching machine;
Fig. 3 is the structural representation of electrostatic chuck mounting and dismounting tool of the present invention;
Fig. 4 is the mounted movable modular construction schematic diagram of electrostatic chuck mounting and dismounting tool shown in Figure 3;
Fig. 5 is a positioning device structure schematic diagram shown in Figure 3.
Among the figure: 1. electrostatic chuck; 2. reative cell; 3. rotary handle; 4. support bar; 5. supporting bracket; 6.ESC installing rack 6; 7. electrostatic chuck (ESC) resin cushion block; 8. guide post; 9. connecting screw rod 9; 10. abutment sleeve; 11. electrostatic chuck mounting and dismounting tool.
Below in conjunction with accompanying drawing, further describe the embodiment of electrostatic chuck mounting and dismounting tool of the present invention, but be not used for limiting protection scope of the present invention.
Embodiment
Referring to Fig. 2 and Fig. 3, electrostatic chuck mounting and dismounting tool 11 of the present invention comprises fixed support part and the mounted movable parts that are installed on the fixed support part.Described fixed support part comprises supporting bracket 5 and equidistantly is installed in a plurality of support bars 4 on the supporting bracket 5.Described support bar 4 lower ends are and the screw thread of reative cell 2 interior guard ring threads engaged, earlier support bar 4 are fixed on during use on the reative cell 2 interior guard rings.Described support bar 4 is excellent with 3～6.
Referring to Fig. 4, described mounted movable parts comprise electrostatic chuck (ESC) installing rack 6, are connected with the rotary handle 3 with screw rod 9 at the center of ESC installing rack 6, described screw rod 9 pass supporting bracket 5 and with supporting bracket 5 by being threaded.During use, ESC installing rack 6 is fixed on the electrostatic chuck 1 by ESC resin mass 7, and when rotating rotary handle 3, connecting screw rod 9 pumps, thereby drives ESC installing rack 6 and electrostatic chuck 1 reciprocating motion, finishes the installation and removal of electrostatic chuck.
Be the hi-Fix that guarantees that electrostatic chuck 1 pumps, the present invention also is provided with at least two cover positioners.Referring to Fig. 5, every cover positioner comprises guide post 8 and abutment sleeve 10.On supporting bracket 5, guide post 8 passes abutment sleeve 10 to described abutment sleeve 10 by screw; Guide post 8 adopts tight fit with abutment sleeve 10, and abutment sleeve adopts the high-intensity resin material with self-lubricating, has the advantage wear-resistant, that particle contamination is little.
More than be preferred forms of the present invention, according to content disclosed by the invention, some identical, replacement schemes that those of ordinary skill in the art can expect apparently all should fall into the scope of protection of the invention.
Claims (7)
1. electrostatic chuck mounting and dismounting tool, it is characterized in that comprising fixed support part and the mounted movable parts that are installed on the fixed support part, described fixed support part comprises supporting bracket (5) and equidistantly is installed in support bar (4) on the supporting bracket (5), described mounted movable parts comprise electrostatic chuck installing rack (6), be connected with the have screw rod rotary handle (3) of (9) at the center of installing rack (6), described screw rod (9) pass supporting bracket (5) and with supporting bracket (5) by being threaded.
2. electrostatic chuck mounting and dismounting tool according to claim 1 is characterized in that described support bar (4) is 3～6, its lower end be with reative cell (2) in the screw thread of guard ring threads engaged.
3. electrostatic chuck mounting and dismounting tool according to claim 1 and 2 is characterized in that avoiding being provided with by ESC resin mass (7) under the described electrostatic chuck installing rack (6).
4. electrostatic chuck mounting and dismounting tool according to claim 1 and 2, it is characterized in that also having at least two cover positioners, every cover positioner comprises guide post (8) and abutment sleeve (10), described abutment sleeve (10) by screw on supporting bracket (5), guide post (8) passes abutment sleeve (10), and guide post (8) adopts tight fit with abutment sleeve (10).
5. electrostatic chuck mounting and dismounting tool according to claim 3, it is characterized in that also having at least two cover positioners, every cover positioner comprises guide post (8) and abutment sleeve (10), described abutment sleeve (10) by screw on supporting bracket (5), guide post (8) passes abutment sleeve (10), and guide post (8) adopts tight fit with abutment sleeve (10).
6. electrostatic chuck mounting and dismounting tool according to claim 4 is characterized in that described abutment sleeve (10) is that the resin material with self-lubricating is made.
7. electrostatic chuck mounting and dismounting tool according to claim 5 is characterized in that described abutment sleeve (10) is that the resin material with self-lubricating is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510126277XA CN100373581C (en) | 2005-12-02 | 2005-12-02 | Electrostatic chuck mounting and dismounting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510126277XA CN100373581C (en) | 2005-12-02 | 2005-12-02 | Electrostatic chuck mounting and dismounting tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1848402A true CN1848402A (en) | 2006-10-18 |
| CN100373581C CN100373581C (en) | 2008-03-05 |
Family
ID=37077894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200510126277XA Active CN100373581C (en) | 2005-12-02 | 2005-12-02 | Electrostatic chuck mounting and dismounting tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100373581C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103419145A (en) * | 2012-05-24 | 2013-12-04 | 上海宏力半导体制造有限公司 | Method for mounting or detaching electrostatic sucker by aid of positioning device |
| CN104044112A (en) * | 2014-06-16 | 2014-09-17 | 杨振波 | Ring thread fastening device |
| CN110931413A (en) * | 2018-09-20 | 2020-03-27 | 北京华卓精科科技股份有限公司 | Electrostatic chuck separating device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2147147Y (en) * | 1992-11-07 | 1993-11-24 | 宋明 | Combined tool for dismantle of automobile ac generator |
| CN2168745Y (en) * | 1993-04-10 | 1994-06-15 | 兰庆忠 | Wheel tyre detacher |
| CN2176220Y (en) * | 1993-04-12 | 1994-09-07 | 陈永康 | Multifunctional wheel puller |
| CN2325174Y (en) * | 1998-01-10 | 1999-06-23 | 刘裕德 | Hydraulic device for inserting or withdrawing sleeve or bearing race |
| CN2501649Y (en) * | 2001-10-18 | 2002-07-24 | 石油大学(华东) | Novel extractor |
-
2005
- 2005-12-02 CN CNB200510126277XA patent/CN100373581C/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103419145A (en) * | 2012-05-24 | 2013-12-04 | 上海宏力半导体制造有限公司 | Method for mounting or detaching electrostatic sucker by aid of positioning device |
| CN104044112A (en) * | 2014-06-16 | 2014-09-17 | 杨振波 | Ring thread fastening device |
| CN104044112B (en) * | 2014-06-16 | 2016-02-03 | 瑞安市富日包装机械有限公司 | A kind of ring threaded fastening device |
| CN110931413A (en) * | 2018-09-20 | 2020-03-27 | 北京华卓精科科技股份有限公司 | Electrostatic chuck separating device |
| CN110931413B (en) * | 2018-09-20 | 2022-03-04 | 北京华卓精科科技股份有限公司 | Electrostatic chuck separating device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100373581C (en) | 2008-03-05 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone, 100176 Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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| CP03 | Change of name, title or address |