CN217007403U - Mask and wafer detection clamp - Google Patents
Mask and wafer detection clamp Download PDFInfo
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- CN217007403U CN217007403U CN202123231015.3U CN202123231015U CN217007403U CN 217007403 U CN217007403 U CN 217007403U CN 202123231015 U CN202123231015 U CN 202123231015U CN 217007403 U CN217007403 U CN 217007403U
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- support piece
- mask
- sliding support
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- wafer
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Abstract
The utility model discloses a mask and wafer detection clamp which comprises a base, a square positioning table, a fixed support piece fixed on the base, a sliding support piece arranged on the base in a sliding mode, a moving driving mechanism arranged between the base and the sliding support piece and suitable for driving the sliding support piece to move towards the fixed support piece so that the fixed support piece and the sliding support piece clamp a square mask plate or the positioning table together, and a wafer clamp fixed on the upper end face of the positioning table and suitable for positioning a wafer. The utility model is suitable for the detection of masks and wafers, and has two functions so as to reduce the equipment cost.
Description
Technical Field
The utility model relates to a mask and a wafer detection clamp.
Background
With the rapid development of the semiconductor industry in China, the development and research of masks and wafers are more and more, more and more mechanisms are put into use, and because the masks and the wafers are different in shape, at present, two different clamps need to be prepared for the detection of the masks and the wafers, so that a plurality of machines are needed, the equipment cost is high, and the occupied space is large.
Disclosure of Invention
The utility model aims to overcome the defects of the prior art and provides a mask and wafer detection clamp which is suitable for detecting masks and wafers and has two functions so as to reduce the equipment cost.
In order to solve the technical problem, the technical scheme of the utility model is as follows: a mask and wafer inspection jig comprising:
a base;
a positioning table in a square shape;
a fixed support fixed to the base;
the sliding support is slidably matched on the base;
the moving driving mechanism is arranged between the base and the sliding support piece and is suitable for driving the sliding support piece to move towards the fixed support piece so that the fixed support piece and the sliding support piece clamp the square mask plate or the positioning table together;
and the wafer clamp is fixed on the upper end surface of the positioning table and is suitable for positioning the wafer.
Furthermore, the base is provided with two parallel guide rails, the sliding support piece is provided with guide grooves corresponding to the guide rails one to one, and the guide grooves are matched on the corresponding guide rails in a sliding manner.
There is further provided a concrete structure of a movement driving mechanism, the movement driving mechanism including:
a screw rod rotatably supported on the base;
the nut block is in threaded connection with the screw rod and is fixed on the sliding support piece;
and the motor is connected with the screw rod to drive the screw rod to rotate.
Furthermore, the sliding support piece is fixed on the nut block through a connecting plate, one end of the connecting plate is fixedly connected with the nut block, and the other end of the connecting plate is fixedly connected with the sliding support piece.
Furthermore, at least one supporting part suitable for supporting the mask plate or the positioning table is respectively arranged on the fixed supporting part and the sliding supporting part.
Furthermore, in order to better position the mask plate or the positioning table, the sliding support piece and the fixed support piece are respectively provided with an angle positioning part suitable for positioning the angle of the mask plate or the positioning table.
Furthermore, at least one supporting part is respectively arranged on two edges of the sliding supporting part forming the angle positioning part.
Further, the sliding support piece is arranged on the base in a sliding mode along one diagonal direction of the mask plate.
Further, the wafer clamp comprises a disc fixed on the positioning table, and a vacuum adsorption area suitable for vacuum adsorption of the wafer is arranged on the disc.
After the technical scheme is adopted, the utility model has the following beneficial effects:
1. the utility model drives the sliding support piece to move towards the fixed support piece through the movement driving mechanism, so that the sliding support piece and the fixed support piece clamp the mask together, the mask clamp is suitable for mask plates with different specifications, the positioning table is set to be square, the shape of the positioning table is consistent with that of the mask plate, the positioning table can be clamped together through the sliding support piece and the fixed support piece, and then the wafer is positioned through a wafer clamp on the positioning table;
2. according to the utility model, the motor is matched with the structure of the screw rod nut to drive the sliding support piece to move, the sliding support piece moves to a specified size, the size can be easily placed into a mask or a positioning table, the motor drives the screw rod to rotate, the nut block drives the sliding support piece to move, and then the mask or the positioning table is clamped, so that the control precision is high;
3. according to the utility model, the mask is supported by the supporting part, the contact area between the mask and the whole detection clamp is small, and the damage to the mask in the detection process is reduced as much as possible;
4. the wafer clamp disclosed by the utility model positions the wafer in a vacuum adsorption mode, is suitable for wafers of different specifications, and has strong universality.
Drawings
FIG. 1 is a schematic structural diagram of a mask and wafer inspection fixture according to the present invention;
FIG. 2 is a schematic structural diagram of the mask and the wafer inspection jig of the present invention during the process of fixing the mask.
Detailed Description
In order that the present invention may be more readily and clearly understood, a more particular description of the utility model briefly described above will be rendered by reference to specific embodiments that are illustrated in the appended drawings.
As shown in fig. 1 and 2, a mask and wafer inspecting jig includes:
a base 1;
a positioning table 4 in a square shape;
a fixed support 2 fixed on the base 1;
a sliding support 3 sliding fitted on the base 1;
a moving driving mechanism which is arranged between the base 1 and the sliding support 3 and is suitable for driving the sliding support 3 to move towards the fixed support 2 so that the fixed support 2 and the sliding support 3 jointly clamp the square mask or the positioning table 4;
and the wafer clamp is fixed on the upper end surface of the positioning table 4 and is suitable for positioning the wafer.
Specifically, the utility model drives the sliding support piece 3 to move towards the fixed support piece 2 through the movement driving mechanism, so that the sliding support piece 3 and the fixed support piece 2 clamp the mask together, the utility model is suitable for mask plates with different specifications, the positioning table 4 is arranged in a square shape, the shape of the positioning table 4 is consistent with that of the mask plate, the positioning table 4 can be clamped together through the sliding support piece 3 and the fixed support piece 2, and then the wafer is positioned through a wafer clamp on the positioning table 4.
As shown in fig. 1 and 2, two parallel guide rails 5 are arranged on the base 1, and guide grooves corresponding to the guide rails 5 one to one are arranged on the sliding support 3, and the guide grooves are slidably fitted on the corresponding guide rails 5.
As shown in fig. 1 and 2, the movement driving mechanism includes:
a screw rod rotatably supported on the base 1;
a nut block 6 which is screwed with the screw rod and fixed on the sliding support 3;
and the motor 7 is connected with the screw rod to drive the screw rod to rotate.
Specifically, the motor 7 is matched with the screw nut structure to drive the sliding support piece 3 to move, the sliding support piece 3 moves to a specified size, the size can be easily placed into the mask or the positioning table 4, the motor 7 drives the screw rod to rotate, the nut block 6 drives the sliding support piece 3 to move, and then the mask or the positioning table 4 is clamped, and the control precision is high.
As shown in fig. 1 and 2, the sliding support 3 is fixed to the nut block 6 by a connecting plate 8, one end of the connecting plate 8 is fixedly connected to the nut block 6, and the other end is fixedly connected to the sliding support 3.
As shown in fig. 1 and 2, the fixed support 2 and the sliding support 3 are respectively provided with at least one support portion 9 adapted to support the reticle or the positioning stage 4.
As shown in fig. 1 and 2, in order to better position the reticle or the positioning stage 4, the sliding support 3 and the fixed support are respectively provided with an angle positioning portion adapted to position an angle of the reticle or the positioning stage 4.
As shown in fig. 1 and 2, at least one support portion 9 is provided on each of two sides of the sliding support 3 constituting the angular positioning portion.
Specifically, the mask is supported by the supporting portion 9, the contact area between the mask and the whole detection clamp is small, and therefore damage to the mask in the detection process is reduced as much as possible.
As shown in fig. 1 and 2, the sliding support 3 is slidably fitted on the base 1 along one diagonal direction of the reticle.
As shown in fig. 1, the wafer chuck includes a disk 10 fixed on the positioning table 4, and a vacuum suction area 11 adapted to vacuum-suck a wafer is disposed on the disk 10.
Specifically, the wafer clamp disclosed by the utility model positions the wafer in a vacuum adsorption mode, is suitable for wafers of different specifications, and has strong universality.
The above embodiments are described in further detail to solve the technical problems, technical solutions and advantages of the present invention, and it should be understood that the above embodiments are only examples of the present invention and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A mask and wafer inspection jig are provided,
it includes:
a base (1);
a positioning table (4) in a square shape;
a fixed support (2) fixed on the base (1);
a sliding support (3) which is matched on the base (1) in a sliding way;
the moving driving mechanism is arranged between the base (1) and the sliding support piece (3) and is suitable for driving the sliding support piece (3) to move towards the fixed support piece (2) so that the fixed support piece (2) and the sliding support piece (3) clamp the square mask plate or the positioning table (4) together;
and the wafer clamp is fixed on the upper end surface of the positioning table (4) and is suitable for positioning a wafer.
2. The mask and wafer inspection fixture of claim 1,
the base (1) is provided with two parallel guide rails (5), the sliding support piece (3) is provided with guide grooves corresponding to the guide rails (5) one to one, and the guide grooves are matched on the corresponding guide rails (5) in a sliding manner.
3. The mask and wafer inspection fixture of claim 1,
the movement drive mechanism includes:
a screw rod rotatably supported on the base (1);
a nut block (6) which is in threaded connection with the screw rod and is fixed on the sliding support (3);
and the motor (7) is connected with the screw rod to drive the screw rod to rotate.
4. The mask and wafer inspection fixture of claim 3,
the sliding support piece (3) is fixed on the nut block (6) through a connecting plate (8), one end of the connecting plate (8) is fixedly connected with the nut block (6), and the other end of the connecting plate is fixedly connected with the sliding support piece (3).
5. The mask and wafer inspection chuck according to claim 1,
the fixed support piece (2) and the sliding support piece (3) are respectively provided with at least one support part (9) suitable for supporting the mask or the positioning table (4).
6. The mask and wafer inspection fixture of claim 5,
the sliding support piece (3) and the fixed support piece are respectively provided with an angle positioning part suitable for positioning the angle of the mask plate or the positioning table (4).
7. The mask and wafer inspection fixture of claim 6,
at least one supporting part (9) is respectively arranged on two edges of the sliding supporting part (3) which form the angle positioning part.
8. The mask and wafer inspection fixture of claim 1,
the sliding support piece (3) is arranged on the base (1) in a sliding mode along one diagonal direction of the mask plate.
9. The mask and wafer inspection chuck according to claim 1,
the wafer clamp comprises a disc (10) fixed on the positioning table (4), and a vacuum adsorption area (11) suitable for vacuum adsorption of a wafer is arranged on the disc (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123231015.3U CN217007403U (en) | 2021-12-21 | 2021-12-21 | Mask and wafer detection clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123231015.3U CN217007403U (en) | 2021-12-21 | 2021-12-21 | Mask and wafer detection clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217007403U true CN217007403U (en) | 2022-07-19 |
Family
ID=82383254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123231015.3U Active CN217007403U (en) | 2021-12-21 | 2021-12-21 | Mask and wafer detection clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217007403U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115194679A (en) * | 2022-08-26 | 2022-10-18 | 魅杰光电科技(上海)有限公司 | Take vacuum adsorption's mask version automatic positioning fixed establishment |
| CN116880137A (en) * | 2023-07-31 | 2023-10-13 | 苏州天准科技股份有限公司 | Mask supporting device and non-contact exposure equipment |
-
2021
- 2021-12-21 CN CN202123231015.3U patent/CN217007403U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115194679A (en) * | 2022-08-26 | 2022-10-18 | 魅杰光电科技(上海)有限公司 | Take vacuum adsorption's mask version automatic positioning fixed establishment |
| CN115194679B (en) * | 2022-08-26 | 2024-03-12 | 魅杰光电科技(上海)有限公司 | Mask automatic positioning and fixing mechanism with vacuum adsorption function |
| CN116880137A (en) * | 2023-07-31 | 2023-10-13 | 苏州天准科技股份有限公司 | Mask supporting device and non-contact exposure equipment |
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