CN110931413A - Electrostatic chuck separating device - Google Patents
Electrostatic chuck separating device Download PDFInfo
- Publication number
- CN110931413A CN110931413A CN201811117451.8A CN201811117451A CN110931413A CN 110931413 A CN110931413 A CN 110931413A CN 201811117451 A CN201811117451 A CN 201811117451A CN 110931413 A CN110931413 A CN 110931413A
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- electrostatic chuck
- cutting
- heating
- support
- fine adjustment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
Abstract
The invention discloses an electrostatic chuck separating device, and relates to a mechanical device for separating an electrostatic chuck. Its purpose is in order to provide a can be harmless, the electrostatic chuck separator of quick separation electrostatic chuck and chuck base. The electrostatic chuck separating device comprises a guide part, a rotating part and a cutting part, wherein the rotating part is arranged above the guide part and can synchronously move along with the guide part, the cutting part is fixedly arranged, an electrostatic chuck assembly is arranged above the rotating part and can synchronously rotate along with the rotating part, the cutting part can generate heat and generate heat capable of melting an adhesive layer under the condition of electrifying, and when the guide part drives the rotating part to synchronously move to a certain position, the cutting part can cut the adhesive layer along with the movement and rotation of the electrostatic chuck so as to realize the separation of the electrostatic chuck and elements on the electrostatic chuck assembly. The electrostatic chuck separation device has the advantages of simple structure, easiness in manufacturing, high separation efficiency and wide application range, and can realize nondestructive separation.
Description
Technical Field
The invention relates to the field of design and manufacture of semiconductor equipment, in particular to a mechanical device for separating an electrostatic chuck.
Background
Generally, after the electrostatic chuck is used for a certain period of time, the adsorption force of the electrostatic chuck is lost, so that the adsorption force is reduced or even the adsorption force cannot be continued, the problems of unstable or unstable adsorption to the wafer and the like are caused, and further, other equipment may damage the wafer, the price of the wafer is high, and the damage to the wafer causes the increase of the enterprise cost. The electrostatic chuck needs to be periodically serviced or replaced to ensure that it has sufficient chucking power to the wafer. For the convenience of maintenance or the replacement of the electrostatic chuck, the electrostatic chuck needs to be separated from the chuck base and processed independently, and when a new electrostatic chuck is replaced, the chuck base can be reused continuously.
At present, under the national will, the semiconductor industry develops rapidly, the electrostatic chuck used for adsorbing the wafer in the wafer etching equipment and other related equipment has strong market demand, so that the number of the electrostatic chucks needing to be maintained is increased rapidly,
in the prior art, a mechanical saw blade is usually adopted to cut and separate the electrostatic chuck, the electrostatic chuck is often damaged in the cutting and separating process, and the operation is inconvenient and time and labor are wasted.
Disclosure of Invention
The invention aims to provide an electrostatic chuck separating device which can nondestructively and quickly separate an electrostatic chuck and a chuck base.
The electrostatic chuck separating device comprises a guide part, a rotating part and a cutting part, wherein the rotating part is installed above the guide part and can synchronously move along with the guide part, the cutting part is fixedly installed, the electrostatic chuck assembly is installed above the rotating part and can synchronously rotate along with the rotating part, the cutting part can generate heat and generate heat capable of melting an adhesive layer under the condition of electrifying, and when the guide part drives the rotating part to synchronously move to a certain position, the cutting part can cut the adhesive layer along with the movement and rotation of the electrostatic chuck so as to realize the separation of the electrostatic chuck and an element on the electrostatic chuck assembly.
According to the electrostatic chuck separating device, the cutting component comprises the power supply and the heating sheet, the heating sheet is used for cutting the bonding layer, and the heating sheet can generate heat and generate heat capable of melting the bonding layer under the electrified condition.
According to the electrostatic chuck separating device, the cutting piece further comprises a heating piece support which is fixedly installed, and the heating piece is fixedly installed at one end between the heating piece supports.
The electrostatic chuck separating device comprises a cutting component, a fine adjustment system and an extension spring, wherein the cutting component further comprises a knob support fixedly arranged on one side of the other end of the heating sheet support, a second guide shaft fixedly arranged, a fine adjustment knob fixedly arranged on the knob support and capable of moving along the second guide shaft, one end of the extension spring is fixedly arranged on the heating sheet support and is opposite to the knob support, and the other end of the extension spring is fixedly arranged.
The electrostatic chuck separating device comprises a cutting component, a lifting system and a heating piece support, wherein the lifting system is used for adjusting the height of the cutting component to meet the cutting requirements of bonding layers with different heights, the lifting system comprises a third power element, a first guide shaft and a heating piece support, the first guide shaft is fixedly installed on the third power element, the heating piece support is in lifting motion along the first guide shaft, and the heating piece is fixedly installed at one end between the heating piece supports.
The electrostatic chuck separating device comprises a cutting component, a fine adjustment system and a control system, wherein the fine adjustment system comprises a knob support fixedly arranged on one side of the other end of the heating sheet support, an extension spring fixedly arranged on the knob support and arranged opposite to the knob support, one end of the extension spring is fixedly arranged on the knob support, the fine adjustment system comprises a second guide shaft fixedly arranged, and the fine adjustment knob and the knob support can axially move along the second guide shaft.
The electrostatic chuck separating device comprises a guide rail, a sliding platform capable of moving along the guide rail and a first power element for driving the sliding platform to move, wherein the rotating component is mounted on the sliding platform and can move synchronously with the sliding platform.
The electrostatic chuck separating device comprises a guide part, a guide rail seat, a cutting part and a heating piece support, wherein the guide part further comprises the guide rail seat, the guide rail is fixedly arranged on the guide rail seat, and the cutting part further comprises the heating piece support.
The electrostatic chuck separating device comprises a rotating component, a first power element and a second power element, wherein the rotating component comprises a rotating table and the second power element is used for driving the rotating table to rotate, and the electrostatic chuck assembly is fixedly arranged on the rotating table.
The electrostatic chuck separating device comprises a rotating component, a first heating device and a second heating device, wherein the rotating component further comprises a heating device, and the heating device is used for preheating the bonding layer.
The electrostatic chuck separating device is different from the prior art in that the electrostatic chuck separating device is provided with a guide part and a rotating part, the electrostatic chuck assembly can synchronously move and rotate along with the movement of the guide part and the rotating part, and when the electrostatic chuck assembly moves to a certain position, the cutting part can cut the bonding layer. Because the cutting part can generate heat under the electrified condition to melt the bonding layer, the cutting resistance is reduced, the cutting is convenient, and the nondestructive and rapid separation of the electrostatic chuck is realized. The rotation of the rotating component enables the heat generated by the cutting component to be uniformly transferred to the bonding layer, so that the electrostatic chuck is prevented from being damaged due to uneven heating of the bonding layer; the whole device has simple structure, easy manufacture and easy realization of modular production; the electrostatic separation device has good structural rigidity and high operation precision, is convenient for cutting and realizes nondestructive cutting; the cutting separation is carried out by translation matching rotation, and the efficiency is high; the invention can be suitable for general environment, has no special environment requirement, can be used for various working occasions, and has wide application range. Meanwhile, the invention also improves the replacement and maintenance efficiency of the electrostatic chuck.
The cutting component in the electrostatic chuck separating device is a heating sheet, and the mechanical force is small during cutting, so that the electrostatic chuck component cannot be mechanically damaged; the heating sheet bracket is used for supporting and fixing the heating sheet; the fine adjustment system is used for adjusting the height of the heating sheet in a small range so that the heating sheet can be aligned with the bonding layers of the electrostatic chuck assemblies with different thicknesses, and more accurate separation operation is realized; the lifting system is used for adjusting the height of the heating sheet in a larger range so that the heating sheet can be aligned with the bonding layers of the electrostatic chuck assemblies with different heights, and accurate separation operation is realized; rotary part includes heating device, and its purpose is in order to heat the adhesive linkage, when the size of adhesive linkage is great thick, can be in cutting member cuts before right the adhesive linkage preheats, avoids direct cutting to cause the damage to electrostatic chuck.
The electrostatic chuck detaching device of the present invention will be further described with reference to the accompanying drawings.
Drawings
FIG. 1 is a front view of an electrostatic chuck detaching device in an initial state without a lift system and a trimming system;
FIG. 2 is a side view of an electrostatic chuck disengaging apparatus of the present invention;
FIG. 3 is a diagram illustrating an operation state of the electrostatic chuck detaching device according to the present invention;
FIG. 4 is a front elevational view of the electrostatic chuck disengaging device of the present invention after use;
fig. 5 is a front view of the electrostatic chuck detaching device in an initial state in which the lift system and the trimming system are installed.
The device comprises a guide rail seat 1, a guide rail 2, a sliding platform 3, a rotating table 4, a chuck base 5, an electrostatic chuck 6, a heating sheet support 7, a heating sheet 8, a first guide shaft 9, a knob support 10, a knob 11, a tension spring 12 and a second guide shaft 13.
Detailed Description
In the invention, the height refers to the vertical distance between the heating sheet and the guide rail seat.
In a semiconductor manufacturing process, a bonding technique is widely used, for example, a chip package, a wafer stack, and a bonding of functional parts of the electrostatic chuck 6, in which at least two parts are bonded together by an adhesive, and in a semiconductor manufacturing apparatus, an electrostatic chuck assembly including the electrostatic chuck 6 and a chuck base 5 is disposed in a process apparatus such as PVD, CVD, and Etch, and the electrostatic chuck 6 is bonded to the chuck base 5 by an adhesive layer.
In the long-time use process, the adsorption force of the electrostatic chuck 6 is reduced to some extent, the electrostatic chuck 6 needs to be maintained or replaced, the electrostatic chuck 6 needs to be separated from the chuck base 5 firstly, then the treatment is carried out, in order to avoid the damage to the electrostatic chuck 6 in the separation process and realize the lossless and rapid separation of the electrostatic chuck 6, the invention provides an electrostatic chuck separation device, and the specific scheme is as follows:
as shown in fig. 1 to 4, the electrostatic chuck separating device includes a guide member, a rotating member mounted above the guide member and capable of moving synchronously with the guide member, and a cutting member fixedly mounted thereon, wherein the electrostatic chuck assembly is mounted above the rotating member and capable of rotating synchronously with the rotating member, the cutting member is capable of generating heat and generating heat capable of melting the adhesive layer when energized, and when the guide member drives the rotating member to move synchronously to a certain position, the cutting member is capable of cutting the adhesive layer to separate the electrostatic chuck 6 from the element on the electrostatic chuck assembly as the electrostatic chuck 6 moves and rotates. Since the electrostatic chuck assembly moves while rotating, the cutting member cuts from the outer edge of the adhesive layer toward the center or the center position thereof, and as the movement proceeds, the electrostatic chuck 6 is completely separated when the cutting member reaches the center or the center position. Because the cutting part can generate heat under the electrified condition to melt the bonding layer, the cutting resistance is reduced, the cutting is convenient to carry out, and the nondestructive and quick separation of the electrostatic chuck 6 is realized. The heat generated by the cutting component can be uniformly transferred to the bonding layer by the rotating motion of the rotating component, so that the electrostatic chuck 6 is prevented from being damaged due to nonuniform heating of the bonding layer.
Preferably, as shown in fig. 1, the guiding component comprises a guide rail 2, a sliding platform 3 capable of moving along the guide rail 2, and a first power element (not shown in the figure) for driving the sliding platform 3 to move, the first power element is preferably a first motor, and the rotating component is mounted on the sliding platform 3 and capable of moving synchronously with the sliding platform 3. The sliding platform 3 is driven by the first power element to do low-speed horizontal linear motion. The speed range is preferably 0-20 mm/s.
Further preferably, as shown in fig. 1-4, in order to improve the smoothness of the movement of the wire members, the guide rails 2 are two guide rails 2 arranged in parallel,
further preferably, as shown in fig. 1 to 4, the guide member further includes a rail seat 1, and the guide rail 2 is fixedly mounted on the rail seat 1.
Preferably, as shown in fig. 1-4, the rotating member comprises a rotating table 4 and a second power element (not shown) for driving the rotating table 4 to rotate, the second power element is preferably a second motor, and the electrostatic chuck assembly is fixedly mounted on the rotating table 4. The rotating platform 4 is fixedly arranged on the sliding platform 3, and the rotating platform 4 is driven by the second power element to do clockwise or anticlockwise circular motion.
Further preferably, when the size of the adhesive layer is large and thick, the adhesive layer needs to be preheated before cutting, so that damage to the electrostatic chuck 6 caused by direct cutting is avoided, and the rotating component further comprises a heating device which is used for preheating the adhesive layer.
Preferably, as shown in fig. 1 to 4, the cutting component includes a power supply and a heating sheet 8, the heating sheet 8 is used for cutting the adhesive layer, and the heating sheet 8 can generate heat under the power-on condition and generate heat capable of melting the adhesive layer, so as to reduce cutting resistance and avoid cutting damage to the electrostatic chuck 6.
Further preferably, as shown in fig. 1-4, in order to realize the fixed installation of the heating plate 8, the cutting member further comprises a heating plate support 7, the heating plate support 7 is fixedly installed on the rail seat 1, and the heating plate 8 is fixedly installed at one end between the heating plate supports 7.
Further preferably, in order to achieve alignment between the heating sheet 8 and the bonding layers with different heights and achieve accurate cutting of the heating sheet 8, the cutting component further includes a lifting system capable of adjusting the height of the heating sheet 8 within a large range, the lifting system is used for adjusting the height of the cutting component to meet cutting of the bonding layers with different heights, as shown in fig. 5, the lifting system includes a third power element (not shown in the figure), a first guide shaft 9 fixedly installed and a heating sheet support 7 doing lifting movement along the first guide shaft 9, and the heating sheet 8 is fixedly installed at one end between the heating sheet supports 7. The third power element is preferably a third motor, and the lifting action of the heating sheet bracket 7 is realized by controlling the positive and negative rotation of the third motor. The lift system is not limited to the above form.
Further preferably, after the heating sheet 8 is aligned to the bonding layer, the height of the heating sheet 8, i.e. the distance between the heating sheet 8 and the rail seat 1, needs to be adjusted within a small range to achieve more precise separation operation, as shown in fig. 5, the cutting component further includes a fine adjustment system, the fine adjustment system includes a knob support 10 fixedly installed on one side of the other end of the heating sheet support 7, a fine adjustment knob 11 fixedly installed on the knob support 10, and an extension spring 12, one end of which is fixedly installed on the heating sheet support 7 and is arranged opposite to the knob support 10, the other end of the extension spring 12 is fixedly installed, the fine adjustment system further includes a second guide shaft 13 fixedly installed on the rail seat 1, and when the heating sheet support 7 moves up and down, the fine adjustment knob 11 and the knob support 10 move along with the movement of the heating sheet support 7 along the second guide shaft 13.
Further preferably, the fine adjustment knob 11 may be a micrometer knob 11. In the initial state, the extension spring 12 is in the extension state to provide a pretension force for the heating sheet support 7, and the action process is that in the normal state, the tension force of the extension spring 12 enables the heating sheet support 7 to move along the first guide shaft 9 towards the guide rail seat 1 until the output shaft end of the micrometer knob 11 contacts the guide rail seat 1, and then the distance between the heating sheet 8 and the guide rail seat 1 can be adjusted by adjusting the micrometer knobs 11 on the two sides, so that the heating sheet 8 can be aligned with glue layers of electrostatic chuck assemblies with different thicknesses, and more accurate separation operation is realized.
In another embodiment, the cutting component may not be provided with a lifting system, the heating sheet 8 and the bonding layer may be positioned manually, and after the positioning and the alignment, the fine adjustment system is used to perform more precise positioning.
Preferably, in order to realize automatic operation and improve separation efficiency and safety performance, the electrostatic separation device further comprises a detection component, a feeding and discharging manipulator and a corresponding control system, wherein the detection component is used for detecting a limit position, whether separation is completed or not and the like.
The working process of the electrostatic chuck separating device is as follows: referring to fig. 1, regarding the state shown in fig. 1 as an initial state, fixedly mounting the electrostatic chuck assembly to be separated on the rotary table 4, adjusting the height of the heating sheet 8 by manual operation or by a lifting system or a fine adjustment system until the heating sheet 8 is aligned with the adhesive layer, then switching on the power supply to electrify the heating sheet 8 to generate heat, then starting the first motor, driving the sliding platform 3 to move along the guide rail 2 in the direction of the heating sheet 8, and the speed of the feeding movement is relatively slow, starting the second motor, driving the rotary table 4 to rotate, as the feeding movement continues, the heating sheet 8 contacts with the adhesive layer, the heat on the heating sheet 8 is transferred to the adhesive layer, the adhesive layer begins to soften until melting, as the linear feeding is relatively slow, the heat generated by the heating sheet 8 can be transferred to the adhesive layer relatively uniformly by the rotation of the rotary table 4, damage to the electrostatic chuck 6 due to uneven heating is avoided.
As shown in fig. 2, along with the feeding of the sliding platform 3 and the rotational fit of the rotary heating turntable 4, the heating sheet 8 moves from the outer edge of the adhesive layer toward the center of the electrostatic chuck assembly, and when the heating sheet 8 reaches the center of the electrostatic chuck assembly, the electrostatic chuck 6 is separated from the chuck base 5; then stopping the first motor and the second motor, stopping the feeding motion of the sliding platform 3 and the rotating motion of the rotating platform 4, then cutting off the power supply, cutting off the power supply of the heating sheet 8, and taking away the separated electrostatic chuck 6; the first motor is started again, the sliding platform 3 moves towards the direction away from the heating sheet 8 in a feeding way until the sliding platform is completely separated from the position where the heating sheet 8 interferes, the first motor is stopped again, as shown in figure 4, and the chuck base 5 is taken away at the position. If the size of the bonding layer is larger and thicker, preheating is carried out before the separation is started, and a heating device is started to properly soften the bonding layer, and then the separation operation is carried out.
The electrostatic chuck separating device is not limited to the application of only separating the electrostatic chuck, and can also be used for separating other components, cutting an adhesive layer, and cutting a protective layer or other colloids.
The invention has the advantages of convenient manufacture, easy debugging, low cost, no requirements on ambient air humidity and cleanliness, can be used at the temperature of between 10 ℃ below zero and 80 ℃, and can be used in various working occasions.
In the invention, besides arranging the lifting system and/or the fine adjustment system on one side of the cutting component, the lifting system and/or the fine adjustment system can also be arranged on one side of the rotating component, the position of the cutting component is kept unchanged, and the lifting system and/or the fine adjustment system are arranged on the rotating component, so that the rotating component drives the electrostatic chuck assembly to do lifting motion, and the alignment operation of the bonding layer and the cutting component is realized.
The above-mentioned embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solution of the present invention by those skilled in the art should fall within the protection scope defined by the claims of the present invention without departing from the spirit of the present invention.
Claims (10)
1. An electrostatic chuck detachment apparatus, an electrostatic chuck (6) bonded to an element of an electrostatic chuck assembly by an adhesive layer, characterized by: including the guide part, install guide part top and can follow guide part synchronous movement's rotary part and fixed mounting's cutting part, static chuck subassembly install in rotary part's top and can follow rotary part synchronous rotation, the cutting part can generate heat and produce the heat that can make the adhesive linkage melt under the circumstances of circular telegram, works as the guide part drives rotary part synchronous movement goes on with pivoted while moving along with static chuck (6) when a certain position, the cutting part can be right the adhesive linkage cuts in order to realize static chuck (6) with the separation of static chuck subassembly upper element.
2. The electrostatic chuck detachment apparatus of claim 1, wherein: the cutting component comprises a power supply and a heating sheet (8), the heating sheet (8) is used for cutting the bonding layer, and the heating sheet (8) can generate heat under the condition of electrifying and can generate heat for melting the bonding layer.
3. The electrostatic chuck detachment apparatus of claim 2, wherein: the cutting piece further comprises heating piece supports (7) fixedly installed, and the heating pieces (8) are fixedly installed at one ends between the heating piece supports (7).
4. The electrostatic chuck detachment apparatus of claim 3, wherein: the cutting component further comprises a fine adjustment system, the fine adjustment system comprises a knob support (10) fixedly mounted on one side of the other end of the heating piece support (7), a second guide shaft fixedly mounted on the knob support (10), a fine adjustment knob (11) fixedly mounted on the knob support (10) and capable of moving along the second guide shaft, and an extension spring (12) with one end fixedly mounted on the heating piece support (7) and opposite to the knob support (10), and the other end of the extension spring (12) is fixedly mounted on the knob support.
5. The electrostatic chuck detachment apparatus of claim 2, wherein: the cutting component further comprises a lifting system, the lifting system is used for adjusting the height of the cutting component so as to meet the cutting of bonding layers with different heights, the lifting system comprises a third power element, a first guide shaft (9) fixedly installed and a heating sheet support (7) moving up and down along the first guide shaft (9), and the heating sheet (8) is fixedly installed at one end between the heating sheet supports (7).
6. The electrostatic chuck detachment apparatus of claim 5, wherein: the cutting part further comprises a fine adjustment system, the fine adjustment system comprises a knob support (10) fixedly mounted on one side of the other end of the heating piece support (7), and a fine adjustment knob (11) and one end of the fine adjustment knob are fixedly mounted on the knob support (10), the heating piece support (7) is provided with an extension spring (12) which is arranged opposite to the knob support (10), the other end of the extension spring (12) is fixedly mounted, the fine adjustment system further comprises a second guide shaft (13) which is fixedly mounted, and the fine adjustment knob (11) and the knob support (7) can be followed by the second guide shaft (13) to move axially.
7. The electrostatic chuck detachment apparatus of any of claims 1 to 6, wherein: the guide part comprises a guide rail (2), a sliding platform (3) capable of moving along the guide rail (2) and a first power element for driving the sliding platform (3) to move, and the rotating part is mounted on the sliding platform (3) and capable of moving synchronously with the sliding platform (3).
8. The electrostatic chuck detachment apparatus of claim 7, wherein: the guide part further comprises a guide rail seat (1), and the guide rail (2) is fixedly arranged on the guide rail seat (1).
9. The electrostatic chuck detachment apparatus of any of claims 1 to 6, wherein: the rotating part comprises a rotating platform (4) and a second power element used for driving the rotating platform (4) to rotate, and the electrostatic chuck assembly is fixedly installed on the rotating platform (4).
10. The electrostatic chuck detachment apparatus of claim 9, wherein: the rotating component further comprises a heating device, and the heating device is used for preheating the bonding layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811117451.8A CN110931413B (en) | 2018-09-20 | 2018-09-20 | Electrostatic chuck separating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811117451.8A CN110931413B (en) | 2018-09-20 | 2018-09-20 | Electrostatic chuck separating device |
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| Publication Number | Publication Date |
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| CN110931413A true CN110931413A (en) | 2020-03-27 |
| CN110931413B CN110931413B (en) | 2022-03-04 |
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| CN201811117451.8A Active CN110931413B (en) | 2018-09-20 | 2018-09-20 | Electrostatic chuck separating device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114055388A (en) * | 2021-09-29 | 2022-02-18 | 君原电子科技(海宁)有限公司 | Electrostatic chuck separating device |
| CN114789186A (en) * | 2022-03-21 | 2022-07-26 | 君原电子科技(海宁)有限公司 | Splitting device for electrostatic chuck |
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| CN101783310A (en) * | 2009-01-14 | 2010-07-21 | 东京毅力科创株式会社 | Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device |
| US20120248715A1 (en) * | 2011-03-30 | 2012-10-04 | Toto Ltd. | Electrostatic chuck |
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| CN104608266A (en) * | 2015-01-19 | 2015-05-13 | 苏州硅峰太阳能科技有限公司 | Adhering device used for rotary cutting of hard and brittle material |
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| JP2017177257A (en) * | 2016-03-29 | 2017-10-05 | 日本特殊陶業株式会社 | Separation method and manufacturing method for retainer |
| CN107856207A (en) * | 2017-11-06 | 2018-03-30 | 湖北文理学院 | A kind of wear-resistant composite tubes index cutting machine and indexing cutting method with potsherd |
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| CN114055388A (en) * | 2021-09-29 | 2022-02-18 | 君原电子科技(海宁)有限公司 | Electrostatic chuck separating device |
| CN114789186A (en) * | 2022-03-21 | 2022-07-26 | 君原电子科技(海宁)有限公司 | Splitting device for electrostatic chuck |
| CN114789186B (en) * | 2022-03-21 | 2024-01-23 | 君原电子科技(海宁)有限公司 | Splitting device for electrostatic chuck |
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