CN219381123U - Clamping device - Google Patents

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a clamping device. The clamping device comprises a bottom plate and at least three clamping units arranged on the bottom plate, wherein each clamping unit comprises an axial limiting assembly, a radial limiting assembly and a top plate, each axial limiting assembly comprises a first mounting seat and a supporting piece arranged on the first mounting seat, and the first mounting seat is arranged on the bottom plate in a sliding manner; the radial limiting assembly comprises a second mounting seat and a radial clamping piece arranged on the second mounting seat; in the clamping position, the bearing piece is abutted against the bottom surface of the workpiece, and the radial clamping piece is abutted against the side surface of the workpiece under the action of the elasticity of the tension spring; in the release position, the support is separated from the workpiece, and the workpiece slides downwards against the radial clamping piece; the top plate is connected with the bottom plate through at least three leveling pieces and is used for being connected with the mechanical arm. The clamping device can reduce the risk of workpiece breakage and improve the accuracy of workpiece placement.

Description

Clamping device

Technical Field

The utility model relates to the technical field of semiconductor processing, in particular to a clamping device.

Background

The wafer refers to a silicon wafer used for manufacturing a semiconductor circuit, the wafer is in the shape of a regular cylinder, and the original material of the wafer is silicon. The wafer is one of the most critical raw materials in the manufacture of semiconductor integrated circuits, and in the semiconductor processing technology, the wafer needs to be trimmed for facilitating subsequent processing in order to ensure the integrity and smoothness of the edge of the wafer, thereby ensuring the excellent performance of the chip manufacturing finished product. When trimming a wafer, a clamping manipulator is generally used to place the wafer on a processing station, and the process requires that the mechanical clamping manipulator has high stability and adjustable capability for placing a wafer on the processing station so as to meet the concentricity requirement of the wafer placed on the processing station and the processing station.

The existing wafer clamping device is as the semiconductor wafer clamping equipment provided in the utility model patent with the application number of CN 202011208953.9, the clamping finger assembly is arranged on the bracket body, and the inclined guide section and the linear clamping section are arranged on the clamping finger assembly, wherein the length of the linear clamping section is matched with the thickness of the wafer, and the linear clamping section is used for applying radial pressure to the edge of the wafer, so that the wafer is firmly clamped in the clamping finger assembly, and the clamping stability is improved; however, the semiconductor wafer clamping apparatus has the following problems:

1. the radial clamping pressure is high, and the wafer is broken;

2. when a wafer is placed vertically on a slide holder, the wafer is easy to shift in position, so that the circle center cannot be aligned effectively.

Disclosure of Invention

The utility model aims to provide a clamping device which can reduce the risk of workpiece damage and improve the accuracy of workpiece placement.

To achieve the purpose, the utility model adopts the following technical scheme:

the utility model provides a clamping device, which comprises a bottom plate, a top plate and at least three clamping units arranged on the bottom plate, wherein the top plate is connected with the bottom plate through at least three leveling pieces and is used for being connected with a mechanical arm, and the clamping units comprise:

the axial limiting assembly comprises a first mounting seat and a supporting piece arranged on the first mounting seat, the first mounting seat is arranged on the bottom plate in a sliding manner, the first mounting seat can be close to or far away from the axis of the workpiece, and the supporting piece is used for supporting the workpiece;

the radial limiting assembly comprises a second installation seat and a radial clamping piece arranged on the second installation seat, the second installation seat is arranged on the first installation seat in a sliding manner, and the second installation seat is connected with the first installation seat through a tension spring; the axial limiting assembly is provided with a clamping position and a release position, in the clamping position, the first mounting seat is far away from the second mounting seat, the bearing piece is abutted against the bottom surface of the workpiece, and the radial clamping piece is abutted against the side surface of the workpiece in the radial direction under the action of the elasticity of the tension spring; in the release position, the first mounting seat is close to the second mounting seat, the supporting piece is separated from the workpiece, the elasticity of the extension spring to the second mounting seat is reduced, and the workpiece slides downwards against the radial clamping piece.

Preferably, the clamping unit further comprises a driving piece, the driving piece is fixedly arranged on the bottom plate, the driving piece is connected with the first mounting seat, and the driving piece can drive the axial limiting assembly to move between the clamping position and the releasing position.

Preferably, the clamping unit further comprises a push rod, the push rod is arranged on the first mounting seat, and the first mounting seat can push the second mounting seat to be far away from the driving piece along the radial direction of the workpiece through the push rod.

Preferably, a compression spring is disposed between the radial clamping member and the second mounting seat, and the compression spring can apply elastic force in the vertical direction to the radial clamping member.

Preferably, the clamping device further comprises an air supply nozzle arranged on the bottom plate, and the air supply nozzle is used for blowing air flow to the upper side of the workpiece.

Preferably, the clamping device further comprises a housing, the housing is arranged above the clamping unit, and the housing is detachably arranged on the bottom plate.

Preferably, an air extraction joint is arranged on the outer cover.

Preferably, the top plate is provided with a threaded hole.

Preferably, a first guide rail is mounted on the bottom plate along the radial direction of the workpiece, and the first mounting seat is arranged on the first guide rail.

Preferably, a second guide rail is mounted on the first mounting seat along the radial direction of the workpiece, and the second mounting seat is arranged on the second guide rail.

The utility model has the beneficial effects that:

according to the clamping device provided by the utility model, the radial clamping piece is arranged on the second mounting seat, and can apply radial acting force to the workpiece, so that the radial limiting of the workpiece can be realized; the first mounting seat is provided with the supporting piece, and the supporting piece is used for supporting the workpiece, so that the axial limiting of the workpiece can be realized without radial excessive clamping of the workpiece, the radial pressure on the workpiece is reduced, and the risk of workpiece damage is reduced; the first mounting seat is arranged on the bottom plate in a sliding manner and can be close to or far away from the axis of the workpiece, so that the clamping device can adjust the position of the workpiece to realize the centering of the workpiece; the bottom plate is connected with the mechanical arm through the top plate, and the leveling piece is arranged between the top plate and the bottom plate, so that the levelness of the bottom plate can be adjusted, and the flexibility and the accuracy of the adjustment of the clamping unit are ensured; through setting up axial spacing subassembly and radial spacing subassembly and connecting first mount pad and second mount pad through extension spring, when axial spacing subassembly is in the release position, drive first mount pad and be close to the second mount pad, the bearing piece breaks away from the work piece, and the extension spring's that radial clamping piece received elasticity reduces to can make the work piece paste and lean on radial clamping piece accurate gliding to processing station, play the guide effect to the release of work piece, guaranteed the precision of work piece placement position.

Drawings

FIG. 1 is a schematic view of a clamping device according to an embodiment of the present utility model;

fig. 2 is a schematic structural view of a clamping unit according to an embodiment of the present utility model.

In the figure:

100-workpiece;

1-a bottom plate;

2-a clamping unit; 21-an axial stop assembly; 211-a first mount; 212-a support; 22-radial stop assemblies; 221-a second mount; 222-radial clamps; 223-compressing a spring; 23-stretching a spring; 24-driving member; 25-pushing rod;

3-an air supply spray pipe;

4-an outer cover;

5-an air extraction joint;

6-top plate;

7-leveling pieces;

8-a first guide rail;

9-a second guide rail.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", "left", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

As shown in fig. 1, the present utility model provides a clamping device, which comprises a bottom plate 1 and at least three clamping units 2 mounted on the bottom plate 1, wherein a top plate 6 is connected with the bottom plate 1 through at least three leveling pieces 7, the top plate 6 is used for being connected with a mechanical arm, and the clamping units 2 comprise an axial limiting assembly 21 and a radial limiting assembly 22; the axial limiting assembly 21 comprises a first mounting seat 211 and a supporting piece 212 arranged on the first mounting seat 211, the first mounting seat 211 is arranged on the bottom plate 1 in a sliding manner, the first mounting seat 211 can be close to or far away from the axis of the workpiece 100, and the supporting piece 212 is used for supporting the workpiece 100; the radial limiting assembly 22 comprises a second mounting seat 221 and a radial clamping piece 222 arranged on the second mounting seat 221, the second mounting seat 221 is arranged on the first mounting seat 211 in a sliding mode, and the second mounting seat 221 is connected with the first mounting seat 211 through a tension spring 23. In this embodiment, the workpiece 100 may be a wafer, or may be another cylindrical or annular hard object, and the first mounting seat 211 may be capable of moving along the radial direction of the workpiece 100, so as to be close to or far from the axial position of the workpiece 100; the clamping units 2 can be three, the three clamping units 2 are uniformly arranged on the bottom plate 1 at intervals of 120 degrees, and as the radial clamping pieces 222 are arranged on the second mounting seat 221, the radial clamping pieces 222 can apply radial acting force to the workpiece 100, so that the radial limiting of the workpiece 100 can be realized, and the workpiece 100 is clamped between at least three clamping units 2; because the first mounting seat 211 is provided with the supporting piece 212, the supporting piece 212 is used for supporting the workpiece 100, and the axial limiting of the workpiece 100 can be realized without excessively clamping the workpiece 100 in the radial direction, so that the radial pressure on the workpiece 100 is reduced, and the risk of damage to the workpiece 100 is reduced; since the first mounting seat 211 is slidably disposed on the base plate 1 and can be close to or far from the axis of the workpiece 100, an operator can adjust the position of the workpiece 100 by moving the clamping device, so as to achieve centering of the workpiece 100. Alternatively, there may be four or five clamping units 2, where all the clamping units 2 are uniformly arranged on the bottom plate 1, and an included angle between two adjacent clamping units 2 is guaranteed to be equal, and meanwhile, stable clamping of the cylindrical workpiece 100 can be guaranteed, and the number of the clamping units 2 is not limited.

The axial limiting assembly 21 has a clamping position and a release position, in the clamping position, the first mounting seat 211 is far away from the second mounting seat 221, the bearing piece 212 is abutted against the bottom surface of the workpiece 100, and the radial clamping piece 222 is abutted against the side surface of the workpiece 100 in the radial direction under the action of the elastic force of the tension spring 23; in the release position, the first mounting seat 211 is close to the second mounting seat 221, the supporting member 212 is separated from the workpiece 100, the elasticity of the tension spring 23 on the second mounting seat 221 is reduced, and the workpiece 100 slides down against the radial clamping member 222. In the present embodiment, the axial limiting assembly 21 slides on the base plate 1 through the first mounting seat 211 to realize movement between a clamping position and a release position, wherein the axial limiting assembly 21 in the clamping position is closer to the axis of the workpiece 100 than in the release position; when the axial limiting assembly 21 is positioned at the clamping position, the first mounting seat 211 pulls the second mounting seat 221 through the tension spring 23, so that the radial clamping piece 222 abuts against the side surface of the workpiece 100 to apply radial pressure to the workpiece 100, radial limiting of the workpiece 100 is realized, the bottom of the supporting piece 212 is provided with a supporting bulge, when the axial limiting assembly 21 is positioned at the clamping position, the supporting bulge is positioned at the bottom of the workpiece 100 and is abutted against the bottom surface of the workpiece 100, radial limiting of the workpiece 100 is realized, and at the moment, the distance between the first mounting seat 211 and the second mounting seat 221 is larger; when the axial limiting assembly 21 is located at the releasing position, the first mounting seat 211 is far away from the axis of the workpiece 100 in the radial direction, that is, the first mounting seat 211 is close to the second mounting seat 221, the supporting member 212 is separated from the bottom of the workpiece 100, meanwhile, the distance between the first mounting seat 211 and the second mounting seat 221 is shortened, so that the tension of the tension spring 23 on the second mounting seat 221 is reduced, and at the moment, the radial pressure of the radial clamping member 222 on the workpiece 100 is also reduced and is smaller than the gravity of the workpiece 100; in this process, the radial clamping member 222 still keeps abutting against the workpiece 100, so that the workpiece 100 can accurately slide down to the processing station by abutting against the radial clamping member 222, that is, the radial clamping member 222 plays a guiding role in releasing the workpiece 100, and the controllability and accuracy of placing the workpiece 100 are further improved.

The top plate 6 is connected to the bottom plate 1 by at least three leveling members 7, the top plate 6 being adapted to be connected to a robot arm. In this embodiment, the clamping device further comprises a top plate 6, the top plate 6 is connected to the bottom plate 1 through at least three leveling members 7, and the top plate 6 is used for being connected to a mechanical arm. In the present embodiment, all the clamping units 2 are connected to the upper robot arm through the top plate 6; the top plate 6 is connected to the bottom plate 1 through at least three leveling members 7, the leveling members 7 are regular hexagonal struts, the distance between the bottom plate 1 and the top plate 6 is adjusted by changing the length of the leveling members 7, and in other embodiments, the leveling members 7 are not limited to hexagonal struts, so long as they can perform the functions of connection and height adjustment, and are not limited herein. Specifically, before performing the clamping operation, the operator first mounts the top plate 6 onto the robot arm and adjusts the respective leveling members 7 so that the bottom plate 1 and the top plate 6 remain parallel, thereby reducing the positioning error of the workpiece 100 and improving the accuracy of the placement position of the workpiece 100.

Further, as shown in fig. 1, the clamping unit 2 further includes a driving member 24, where the driving member 24 is fixedly disposed on the base plate 1, the driving member 24 is connected to the first mounting seat 211, and the driving member 24 can drive the axial limiting assembly 21 to move between the clamping position and the releasing position. In this embodiment, the driving member 24 can drive the first mounting seat 211 to move along the radial direction of the workpiece 100 on the base plate 1, and an operator controls the movement of the first mounting seat 211 by controlling the opening and closing of the driving member 24 and the stroke of the output end, so that the first mounting seat 211 is not required to be manually pushed, and the device is efficient and convenient, and meanwhile, is convenient for precise control. Specifically, the driving member 24 may be a conventional linear stepping motor, or may be a cylinder capable of stopping at a stroke, so long as it is a linear displacement device capable of achieving precise control, and is not limited herein.

Further, as shown in fig. 1, the clamping unit 2 further includes a push rod 25, the push rod 25 is disposed on the first mount 211, and the first mount 211 can push the second mount 221 away from the driving member 24 in the radial direction of the workpiece 100 by the push rod 25. In this embodiment, the axial limiting assembly 21 further has an initial position, when the workpiece 100 is lowered onto the processing station by the clamping device, the operator controls the driving member 24 to drive the first mounting seat 211 to move continuously in a direction away from the axis of the workpiece 100, the second mounting seat 221 is still kept at the initial position and the first mounting seat 211 is gradually close to the second mounting seat 221 under the tensile force of the extension spring 23, the first mounting seat 211 is provided with the push rod 25, and after the push rod 25 abuts against the second mounting seat 221, the first mounting seat 211 can push the second mounting seat 221 to move synchronously by the push rod 25 until the radial clamping member 222 on the second mounting seat 221 is completely separated from the contact with the workpiece 100, and at this time, the clamping device can be removed; the push rod 25 may have a cylindrical structure or a cubic structure, as long as it has a certain length and can be rigidly contacted with the second mount 221, which is not limited herein. Through setting up push rod 25, can make axial spacing subassembly 21 and radial spacing subassembly 22 synchronous movement to initial position, push rod 25 and extension spring 23 mutually support simultaneously, both guaranteed the independent operation of first mount pad 211 and second mount pad 221, can realize the synchronous cooperation of both again, simple structure, convenient high efficiency.

Further, as shown in fig. 1, a compression spring 223 is provided between the radial clamp 222 and the second mount 221, and the compression spring 223 can apply a vertical elastic force to the radial clamp 222. In this embodiment, the radial clamping member 222 is vertically mounted on the second mounting seat 221 by the compression spring 223, and when the bottom of the radial clamping member 222 is pressed upward, the compression spring 223 is elastically deformed to move the radial clamping member 222 upward. Specifically, when the axial limiting assembly 21 is located at the release position, the operator controls the clamping device to move vertically downwards in alignment with the processing station, the bottom of the radial clamping piece 222 will contact the processing station first, and the compression spring 223 is compressed upwards, so that the radial clamping piece 222 on each clamping unit 2 moves upwards, the radial clamping piece 222 on each clamping unit 2 is guaranteed to contact the processing station, and therefore the workpiece 100 is always placed on the processing station by leaning against each radial clamping piece 222, and the accuracy of the placing position of the workpiece 100 is improved.

Further, as shown in fig. 1, the holding device further includes an air supply nozzle 3, the air supply nozzle 3 is provided on the base plate 1, and the air supply nozzle 3 is used for blowing an air flow to the upper side of the workpiece 100. In this embodiment, the air supply nozzle 3 is externally connected with a nitrogen supply device, a through hole is formed in the center of the bottom plate 1, and the air supply nozzle 3 blows nitrogen to the workpiece 100 below through the through hole; when the axial limiting assembly 21 is located at the release position, an operator starts the nitrogen supply device, and blows nitrogen flow to the upper side of the workpiece 100 through the air supply spray pipe 3, the nitrogen flow can assist in pushing the workpiece 100 to slide downwards along the radial clamping piece 222, and the situation that the workpiece 100 cannot be lowered due to large friction resistance is prevented, so that the practicability of the clamping device is improved.

Further, as shown in fig. 1, the clamping device further includes a housing 4, the housing 4 is provided above the clamping unit 2, and the housing 4 is detachably provided on the base plate 1. In the present embodiment, the housing 4 is connected to the base plate 1 by bolts, the clamping unit 2 is covered on the base plate 1 from above, and the supporting member 212 and the radial clamping member 222 extend from the bottom of the housing 4, so as to be capable of supporting and clamping the workpiece 100; the outer cover 4 can prevent external foreign matters from falling into the inside of the clamping unit 2, so that abrasion or pollution is caused to each part, and the service life of each part is prolonged.

Specifically, as shown in fig. 1, the housing 4 is provided with an air extraction joint 5. In this embodiment, the air extraction joint 5 is externally connected with a small air extraction pump, and when the clamping device works, the air extraction pump sucks air in the outer cover 4 through the air extraction joint 5, so that an air flow structure from bottom to top is formed in the outer cover 4, oil or impurities on each part in the outer cover 4 can be effectively prevented from falling onto the lower workpiece 100 along the supporting piece 212 and the radial clamping piece 222, and the risk of pollution to the workpiece 100 is reduced.

Specifically, as shown in fig. 1, the top plate 6 is provided with a screw hole. In this embodiment, offer threaded hole and with arm threaded connection on the roof 6, convenient dismantlement is convenient for later stage to this clamping device maintain and change, has improved the practicality.

Further, a first rail 8 is mounted on the base plate 1 in the radial direction of the workpiece 100, and a first mount 211 is provided on the first rail 8. In this embodiment, the first mounting seat 211 is slidably disposed on the base plate 1 through the first guide rail 8, so that the axial limiting assembly 21 can move along the radial direction of the workpiece 100.

Further, the first mount 211 is provided with a second rail 9 along the radial direction of the workpiece 100, and the second mount 221 is provided on the second rail 9. In the present embodiment, the second mounting seat 221 is slidably disposed on the first mounting seat 211 through the second guide rail 9, and the second guide rail 9 and the first guide rail 8 are both disposed along the radial direction of the workpiece 100, and cooperate with each other, so that the radial clamping member 222 can move along the radial direction of the workpiece 100, thereby stably and effectively clamping the workpiece 100.

The application method of the clamping device provided in this embodiment is approximately as follows:

the axial limiting assembly 21 is driven to move to the clamping position by the driving piece 24, so that the radial clamping piece 222 is abutted against the side face of the workpiece 100, and the supporting piece 212 is abutted against the bottom face of the workpiece 100. Specifically, before the clamping operation, the axial limiting assembly 21 is located at an initial position, an operator moves the mechanical arm to enable the supporting member 212 and the radial clamping member 222 to be located at the outer side of the workpiece 100 to be clamped, then the operator controls the driving member 24 to drive the first mounting seat 211 to be close to the axis of the workpiece 100 in the radial direction, and the first mounting seat 211 drives the second mounting seat 221 to be close to the side face of the workpiece 100 synchronously through the extension spring 23; when the radial clamping piece 222 abuts against the side surface of the workpiece 100, the second mounting seat 221 stops moving, and the first mounting seat 211 can still move towards the axis of the workpiece 100 until the supporting piece 212 abuts against the side surface of the workpiece 100; at this time, the axial limiting assembly 21 is located at the clamping position, the supporting member 212 supports the workpiece 100 from the bottom surface of the workpiece 100, a space exists between the push rod 25 and the second mounting seat 221, and the radial clamping member 222 radially clamps the workpiece 100 by the elastic force of the extension spring 23.

Each driving piece 24 is controlled to move each clamping unit 2 while clamping the workpiece 100 until the workpiece 100 moves to a designated processing station. Specifically, the operator controls the driving pieces 24 of each clamping unit 2 according to the position of the workpiece 100, so that each driving piece 24 drives the corresponding first mounting seat 211 at the same time, thereby driving the workpiece 100 to perform fine adjustment of the position, and enabling the workpiece 100 to be aligned to the processing station, so as to ensure the accuracy of the processing position; it should be noted that, in this process, the driving members 24 should cooperate with each other to synchronously drive the corresponding first mounting seats 211, so as to ensure that the radial force applied to the workpiece 100 during the moving process is not greatly changed, thereby avoiding damage to the workpiece 100 caused by uneven stress.

The axial stop assembly 21 is driven by the drive member 24 to move to the release position, disengaging the support 212 from the workpiece 100 and sliding the workpiece 100 down against the radial clamp 222 to the machining station. Specifically, after the workpiece 100 moves above the designated machining station, the operator moves the mechanical arm vertically downward to make the radial clamping member 222 abut against the machining station, and since the compression spring 223 is provided between the radial clamping member 222 and the second mounting seat 221, it is ensured that the workpiece 100 is kept parallel to the plane of the machining station; then, the operator controls the driving piece 24 to drive the first mounting seat 211 to be far away from the axis of the workpiece 100 in the radial direction, the supporting piece 212 is separated from abutting against the workpiece 100 under the driving of the first mounting seat 211, at the moment, a space still exists between the push rod 25 and the second mounting seat 221, and the extension spring 23 between the first mounting seat 211 and the second mounting seat 221 is still in a stretching state; because the second mounting seat 221 is still kept at the original position under the tensile force of the extension spring 23, the first mounting seat 211 is close to the second mounting seat 221, so that the elastic force of the extension spring 23 is reduced, the radial pressure of the radial clamping piece 222 on the workpiece 100 is also reduced, the gravity of the workpiece 100 is greater than the friction resistance of the workpiece 100 and the radial clamping piece 222, and the workpiece 100 can slide down against the radial clamping piece 222; at the same time, the operator starts the nitrogen supply device and blows nitrogen flow to the upper side of the workpiece 100 through the air supply spray pipe 3, and the air flow can assist in pushing the workpiece 100 to slide downwards, so that the phenomenon that the workpiece 100 is clamped between the radial clamping pieces 222 and cannot slide downwards due to accidents is avoided. After the workpiece 100 is lowered, the operator controls the driving member 24 to drive the first mounting seat 211 to keep away from the axis of the workpiece 100 in the radial direction, so that the push rod 25 gradually approaches and abuts against the second mounting seat 221, and the first mounting seat 211 can push the second mounting seat 221 to synchronously move through the push rod 25 until the radial clamping member 222 is completely separated from contact with the workpiece 100, and at this time, the placing operation of the workpiece 100 is completed.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. Clamping device, including bottom plate (1), roof (6) and install at least three clamping unit (2) on bottom plate (1), its characterized in that, roof (6) through at least three leveling piece (7) with bottom plate (1) are connected, roof (6) are used for being connected with the arm, clamping unit (2) include:

the axial limiting assembly (21) comprises a first mounting seat (211) and a supporting piece (212) arranged on the first mounting seat (211), the first mounting seat (211) is arranged on the bottom plate (1) in a sliding mode, the first mounting seat (211) can be close to or far away from the axis of the workpiece (100), and the supporting piece (212) is used for supporting the workpiece (100);

the radial limiting assembly (22) comprises a second mounting seat (221) and a radial clamping piece (222) arranged on the second mounting seat (221), the second mounting seat (221) is arranged on the first mounting seat (211) in a sliding mode, and the second mounting seat (221) is connected with the first mounting seat (211) through an extension spring (23); the axial limiting assembly (21) is provided with a clamping position and a release position, in the clamping position, the first mounting seat (211) is far away from the second mounting seat (221), the bearing piece (212) is abutted against the bottom surface of the workpiece (100), and the radial clamping piece (222) is abutted against the side surface of the workpiece (100) in the radial direction under the action of the elastic force of the extension spring (23); in the release position, the first mounting seat (211) is close to the second mounting seat (221), the supporting piece (212) is separated from the workpiece (100), the elasticity of the tension spring (23) on the second mounting seat (221) is reduced, and the workpiece (100) slides downwards against the radial clamping piece (222).

2. Clamping device according to claim 1, wherein the clamping unit (2) further comprises a driving member (24), the driving member (24) being fixedly arranged on the base plate (1), the driving member (24) being connected with the first mounting seat (211), the driving member (24) being capable of driving the axial limiting assembly (21) to move between the clamping position and the release position.

3. Clamping device according to claim 2, characterized in that the clamping unit (2) further comprises a push rod (25), the push rod (25) being arranged on the first mounting seat (211), the first mounting seat (211) being able to push the second mounting seat (221) away from the driving member (24) in the radial direction of the workpiece (100) by means of the push rod (25).

4. Clamping device according to claim 1, characterized in that a compression spring (223) is arranged between the radial clamping member (222) and the second mounting seat (221), the compression spring (223) being capable of exerting a vertical elastic force on the radial clamping member (222).

5. Clamping device according to claim 1, characterized in that it further comprises an air-feed nozzle (3), said air-feed nozzle (3) being arranged on said base plate (1), said air-feed nozzle (3) being adapted to blow an air flow over said workpiece (100).

6. Clamping device according to claim 1, characterized in that it further comprises a housing (4), said housing (4) being arranged over the clamping unit (2), said housing (4) being detachably arranged on the base plate (1).

7. Clamping device according to claim 6, characterized in that the housing (4) is provided with a suction connection (5).

8. Clamping device according to claim 1, characterized in that the top plate (6) is provided with threaded holes.

9. Clamping device according to any of claims 1-8, characterized in that a first guide rail (8) is mounted on the base plate (1) in the radial direction of the workpiece (100), the first mounting seat (211) being arranged on the first guide rail (8).

10. Clamping device according to any of claims 1-8, characterized in that a second guide rail (9) is mounted on the first mounting (211) in the radial direction of the workpiece (100), the second mounting (221) being arranged on the second guide rail (9).