CN1819328A - Switching wiring phase shifter - Google Patents
Switching wiring phase shifter Download PDFInfo
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- CN1819328A CN1819328A CN 200510112228 CN200510112228A CN1819328A CN 1819328 A CN1819328 A CN 1819328A CN 200510112228 CN200510112228 CN 200510112228 CN 200510112228 A CN200510112228 A CN 200510112228A CN 1819328 A CN1819328 A CN 1819328A
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- transmission line
- coplanar waveguide
- phase shifter
- switch
- waveguide transmission
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Abstract
The invention consists of an interdigitating co-plane wave guide transmission cable, a normal co-plane wave guide cable, MEMS switch, switch feed line, and medium substrate. The interdigitating co-plane wave guide transmission cable, normal co-plane wave guide cable, MEMS switch and switch feed line all are located on the substrate. The interdigitating co-plane wave guide transmission cable is parallel with the co-plane wave guide cable to build two transmission paths of switch linear phase shifter. The switch feed line is connected to MEMS for use in controlling on/off of MEMS switch. The signal from outside uses MEMS switch to select the one from two transmission paths.
Description
Technical field
The present invention relates to a kind of device of field of micro electromechanical technology, specifically, relate to a kind of switching wiring phase shifter.
Technical background
Microwave phase shifter is the critical elements on communication and the Radar Technology, fundamental type mainly contains the switch line style, loads line style and reflection-type etc., wherein the switch line style is the simplest version, it is to utilize switch to select different transmission paths, utilizes the electrical length difference of different transmission path to produce phase shift.In order further to improve the performance of phase shifter, on the basis of micromachining technology development, people adopt the switch that mems switch substitutes traditional form, a variety of novel switching wiring phase shifters have been designed, wherein great majority designs all is to adopt microstrip line as transmission path, also has to adopt common coplanar waveguide transmission line to do transmission path.
Find through literature search prior art, the article " Low-loss 2-and 4-bit TTD MEMS phase shiftersbased on SP4T switches " (based on 2 and 4 real time delay MEMS phase shifters of low-loss of hilted broadsword four throw switches) that Guan-Leng Tan etc. delivers on IEEE Transactionson Microwave Theory and Techniques (" Institute of Electrical and Electric Engineers microwave theory and technique journal "), in this article, adopt microstrip line as signal transmssion line, designed and produced out four way switch line style phase shifter with hilted broadsword four throw switches as switch element, concrete grammar is with four transmission paths that electrical length is different of two hilted broadsword four throw switches control, constitute two bit phase shifter, constitute four bit phase shifter by two two bit phase shifter cascades then, its deficiency is that wiring is complicated, overall dimensions is bigger, and the insertion loss is higher; Also find in the retrieval, in people's " W-band CPWRF MEMS circuits on quartz substrates " (the W wave band co-planar waveguide RF MEMS circuit on the quartz substrate) literary compositions in IEEE Transactions on Microwave Theory andTechniques (" Institute of Electrical and Electric Engineers microwave theory and technique journal ") such as Jad B.Rizk with common co-planar waveguide as transmission line, four bit phase shifter have been produced with shunt capacitive switch, its deficiency is to underuse the space, and overall dimensions is bigger.
Summary of the invention
The objective of the invention is to provides a kind of switching wiring phase shifter at the deficiencies in the prior art part, makes it have low insertion loss, high-isolation, undersized characteristics.
The present invention is achieved by the following technical solutions, and phase shifter of the present invention comprises: one section interdigital coplanar waveguide transmission line, one section common coplanar waveguide transmission line, mems switch, switch feeder line and dielectric substrate.Interdigital coplanar waveguide transmission line, coplanar waveguide transmission line, mems switch, switch feeder line all are located on the dielectric substrate, interdigital coplanar waveguide transmission line and common coplanar waveguide transmission line are parallel, two transmission paths of switching wiring phase shifter have been constituted, the switch feeder line links to each other with mems switch, in order to the connecting and disconnecting of control mems switch.Outer signals is selected a connection transmission paths wherein by mems switch and the control of switch feeder line.In identical length range, the electrical length of interdigital coplanar waveguide transmission line and common coplanar waveguide transmission line is different, therefore select different transmission paths can produce phase shift, phase-shift phase can be realized by the structural parameters and the periodicity that detours of adjusting the interdigital coplanar waveguide transmission line.
The invention has the beneficial effects as follows: adopt interdigital coplanar waveguide transmission line and common coplanar waveguide transmission line transmission path as switching wiring phase shifter, can effectively reduce the phase shifter overall dimensions, wiring is simple, can obtain low insertion loss by the structural parameters of adjusting coplanar waveguide transmission line.By a bit phase shifter of the present invention, can cascade constitute the switching wiring phase shifter of these types of multidigit such as two, three, four, five.
Description of drawings
Fig. 1 is the structural representation of phase shifter of the present invention.
Fig. 2 is an interdigital coplanar waveguide transmission line enlarged diagram of the present invention.
Fig. 3 is a coplanar waveguide transmission line enlarged diagram of the present invention.
Fig. 4 is the representative configuration figure of four bit phase shifter of phase shifter composition of the present invention.
Embodiment
As shown in Figure 1, phase shifter of the present invention comprises: one section interdigital coplanar waveguide transmission line 1, one section coplanar waveguide transmission line 2, mems switch 3, switch feeder line 4 and dielectric substrate 5.Interdigital coplanar waveguide transmission line 1, coplanar waveguide transmission line 2, mems switch 3, switch feeder line 4 all are provided with on the dielectric substrate 5, interdigital coplanar waveguide transmission line 1 and common coplanar waveguide transmission line 2 are parallel, two transmission paths of switching wiring phase shifter have been constituted, switch feeder line 4 links to each other with mems switch 3, and outer signals is selected a connection transmission paths wherein by mems switch 3 and 4 controls of switch feeder line.In identical length range, interdigital coplanar waveguide transmission line 1 is different with the electrical length of common coplanar waveguide transmission line 2, therefore select different transmission paths can produce phase shift, phase-shift phase can be realized by the structural parameters and the periodicity that detours of adjusting the interdigital coplanar waveguide transmission line.
As shown in Figure 2, be the structural representation of employed interdigital co-planar waveguide among the present invention.Interdigital coplanar waveguide transmission line 1 is made up of earth connection 6,7 and holding wire 8, and holding wire 8 is positioned in the middle of the earth connection 6,7, and the parallel and holding wire 8 of three lines equates all the time with distance between the earth connection 6,7.
As shown in Figure 3, be the structural representation of employed co-planar waveguide among the present invention.Coplanar waveguide transmission line 2 is made up of earth connection 9,10 and holding wire 11, and holding wire 11 is positioned in the middle of the earth connection 9,10, and the parallel and holding wire 11 of three lines equates all the time with distance between the earth connection 9,10.
Interdigital coplanar waveguide transmission line 1, coplanar waveguide transmission line 2 physical dimensions will make that the characteristic impedance of two kinds of transmission lines is 50 Ω, and wherein the holding wire width will take all factors into consideration that phase shifter inserts loss and overall dimensions is determined.The electrical length difference of interdigital coplanar waveguide transmission line 1, coplanar waveguide transmission line 2 within identical length just can produce phase shift when therefore selecting different transmission paths by mems switch 3.
5 pairs of phase shifter performances of dielectric substrate have a direct impact, the dielectric constant of backing material and loss factor have appreciable impact to the insertion loss and the overall dimensions of phase shifter, and microwave circuit dielectric material commonly used such as GaAs, High Resistivity Si, aluminium oxide, glass, complex media material etc. all can adopt.
Interdigital coplanar waveguide transmission line 1, coplanar waveguide transmission line 2 all are the metal bands that adopt the preparation of mask plating method, and material can be selected the good copper of conductivity, silver or golden.The thickness of each metal band has certain influence to the loss of phase shifter, and particularly the thickness effect of holding wire 8 and holding wire 11 is more obvious, generally can get micron order to tens of micron thickness.
As shown in Figure 4, be the integral layout figure of phase shifter of the present invention by typical case's four bit phase shifter of cascade mode composition, be pointed out that this figure is the schematic diagram of layout, be intended to utilize the space to reduce overall dimensions as far as possible, the each several part size might not optimization structure size according to the invention among the figure, only represents the mutual alignment relation of each several part.With reference to shown in Figure 4, A, B, C, D four parts are respectively phase shifters of the present invention, and the concrete structure parameter requires different according to phase shift, and they constitute four bit phase shifter by cascade mode.
Claims (6)
1, a kind of switching wiring phase shifter, comprise: one section interdigital coplanar waveguide transmission line (1), one section common coplanar waveguide transmission line (2), mems switch (3), switch feeder line (4) and dielectric substrate (5), it is characterized in that, interdigital coplanar waveguide transmission line (1), coplanar waveguide transmission line (2), mems switch (3), switch feeder line (4) all is provided with on the dielectric substrate (5), interdigital coplanar waveguide transmission line (1) and coplanar waveguide transmission line (2) are parallel, two transmission paths of switching wiring phase shifter have been constituted, switch feeder line (4) links to each other with mems switch (3), and outer signals is selected a connection transmission paths wherein by mems switch (3) and switch feeder line (4) control.
2, switching wiring phase shifter according to claim 1 is characterized in that, interdigital coplanar waveguide transmission line (1), coplanar waveguide transmission line (2) all are the metal bands that adopt the preparation of mask plating method, and material is copper, silver or golden.
3, switching wiring phase shifter according to claim 1, it is characterized in that, interdigital coplanar waveguide transmission line (1) is made up of earth connection (6,7) and holding wire (8), holding wire (8) is positioned in the middle of the earth connection (6,7), and the parallel and holding wire (8) of three lines equates all the time with distance between the earth connection (6,7).
4, switching wiring phase shifter according to claim 1, it is characterized in that, coplanar waveguide transmission line (2) is made up of earth connection (9,10) and holding wire (11), holding wire (11) is positioned in the middle of the earth connection (9,10), and the parallel and holding wire (11) of three lines equates all the time with distance between the earth connection (9,10).
According to claim 3 or 4 described switching wiring phase shifters, it is characterized in that 5, the thickness of holding wire (8) and holding wire (11) is for micron order arrives tens of microns.
6, switching wiring phase shifter according to claim 1 is characterized in that, forms multi-position switch line style phase shifter by cascade.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101122280A CN100524940C (en) | 2005-12-29 | 2005-12-29 | Switching wiring phase shifter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101122280A CN100524940C (en) | 2005-12-29 | 2005-12-29 | Switching wiring phase shifter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1819328A true CN1819328A (en) | 2006-08-16 |
| CN100524940C CN100524940C (en) | 2009-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101122280A Expired - Fee Related CN100524940C (en) | 2005-12-29 | 2005-12-29 | Switching wiring phase shifter |
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| CN (1) | CN100524940C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102509816A (en) * | 2011-10-28 | 2012-06-20 | 清华大学 | Switch linear phase shifter based on micro electro mechanical system (MEMS) capacitance and inductance phase shifting unit |
| CN105788971A (en) * | 2016-03-16 | 2016-07-20 | 上海交通大学 | Silicon substrate based compact MEMS capacitive radio-frequency switch and production method |
| CN105897297A (en) * | 2016-05-19 | 2016-08-24 | 北京佰才邦技术有限公司 | Device and method for adjusting antenna |
| CN108051455A (en) * | 2017-12-18 | 2018-05-18 | 河南师范大学 | A kind of microwave remote sensor for being used to measure biological sample dielectric property |
| CN110706981A (en) * | 2019-10-21 | 2020-01-17 | 中北大学 | Radio frequency MEMS four-way snake-shaped delayer combined with single-pole four-throw switch |
| CN114744383A (en) * | 2022-05-30 | 2022-07-12 | 南京邮电大学 | Low-loss single-switch broadband microwave 180-degree phase shifter with coplanar waveguide structure |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6242992B1 (en) * | 1999-07-30 | 2001-06-05 | Tfr Technologies, Inc. | Interdigital slow-wave coplanar transmission line resonator and coupler |
| KR20040072404A (en) * | 2003-02-12 | 2004-08-18 | 엘지전자 주식회사 | Multi-bit phase shifter and manufacturing method thereof |
-
2005
- 2005-12-29 CN CNB2005101122280A patent/CN100524940C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102509816A (en) * | 2011-10-28 | 2012-06-20 | 清华大学 | Switch linear phase shifter based on micro electro mechanical system (MEMS) capacitance and inductance phase shifting unit |
| CN102509816B (en) * | 2011-10-28 | 2014-01-15 | 清华大学 | Switch linear phase shifter based on micro electro mechanical system (MEMS) capacitance and inductance phase shifting unit |
| CN105788971A (en) * | 2016-03-16 | 2016-07-20 | 上海交通大学 | Silicon substrate based compact MEMS capacitive radio-frequency switch and production method |
| CN105897297A (en) * | 2016-05-19 | 2016-08-24 | 北京佰才邦技术有限公司 | Device and method for adjusting antenna |
| CN108051455A (en) * | 2017-12-18 | 2018-05-18 | 河南师范大学 | A kind of microwave remote sensor for being used to measure biological sample dielectric property |
| CN110706981A (en) * | 2019-10-21 | 2020-01-17 | 中北大学 | Radio frequency MEMS four-way snake-shaped delayer combined with single-pole four-throw switch |
| CN114744383A (en) * | 2022-05-30 | 2022-07-12 | 南京邮电大学 | Low-loss single-switch broadband microwave 180-degree phase shifter with coplanar waveguide structure |
| CN114744383B (en) * | 2022-05-30 | 2023-12-01 | 南京邮电大学 | Low-loss single-switch broadband microwave 180-degree phase shifter with coplanar waveguide structure |
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| Publication number | Publication date |
|---|---|
| CN100524940C (en) | 2009-08-05 |
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Granted publication date: 20090805 Termination date: 20111229 |