CN100524940C - Switching wiring phase shifter - Google Patents
Switching wiring phase shifter Download PDFInfo
- Publication number
- CN100524940C CN100524940C CNB2005101122280A CN200510112228A CN100524940C CN 100524940 C CN100524940 C CN 100524940C CN B2005101122280 A CNB2005101122280 A CN B2005101122280A CN 200510112228 A CN200510112228 A CN 200510112228A CN 100524940 C CN100524940 C CN 100524940C
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- transmission line
- waveguide transmission
- phase shifter
- switch
- line
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Abstract
The invention consists of an interdigitating co-plane wave guide transmission cable, a normal co-plane wave guide cable, MEMS switch, switch feed line, and medium substrate. The interdigitating co-plane wave guide transmission cable, normal co-plane wave guide cable, MEMS switch and switch feed line all are located on the substrate. The interdigitating co-plane wave guide transmission cable is parallel with the co-plane wave guide cable to build two transmission paths of switch linear phase shifter. The switch feed line is connected to MEMS for use in controlling on/off of MEMS switch. The signal from outside uses MEMS switch to select the one from two transmission paths.
Description
Technical field
The present invention relates to a kind of device of field of micro electromechanical technology, specifically, relate to a kind of switching wiring phase shifter.
Technical background
Microwave phase shifter is the critical elements on communication and the Radar Technology, fundamental type mainly contains the switch line style, loads line style and reflection-type etc., wherein the switch line style is the simplest version, it is to utilize switch to select different transmission paths, utilizes the electrical length difference of different transmission path to produce phase shift.In order further to improve the performance of phase shifter, on the basis of micromachining technology development, people adopt micro-machinery switch to substitute the switch of traditional form, a variety of novel switching wiring phase shifters have been designed, wherein great majority designs all is to adopt microstrip line as transmission path, also has to adopt the conventional co-planar waveguide transmission line to do transmission path.
Find through literature search prior art, the article " Low-loss 2-and 4-bit TTD MEMS phase shifters basedon SP4T switches " (based on 2 and 4 real time delay MEMS phase shifters of low-loss of hilted broadsword four throw switches) that Guan-Leng Tan etc. delivers on IEEE Transactionson Microwave Theory and Techniques (" Institute of Electrical and Electric Engineers microwave theory and technique journal "), in this article, adopt microstrip line as signal transmission path, designed and produced out four way switch line style phase shifter with hilted broadsword four throw switches as switch element, concrete grammar is with four transmission paths that electrical length is different of two hilted broadsword four throw switches control, constitute two bit phase shifter, constitute four bit phase shifter by two two bit phase shifter cascades then, its deficiency is that wiring is complicated, overall dimensions is bigger, and the insertion loss is higher; Also find in the retrieval, use the conventional co-planar waveguide transmission line as transmission path in people such as JadB.Rizk " W-band CPW RF MEMS circuitson quartz substrates " (the W wave band co-planar waveguide RF MEMS circuit on the quartz substrate) literary composition in IEEE Transactions on Microwave Theory and Techniques (" Institute of Electrical and Electric Engineers microwave theory and technique journal "), four bit phase shifter have been produced with shunt capacitive switch, its deficiency is to underuse the space, and overall dimensions is bigger.
Summary of the invention
The objective of the invention is to provides a kind of switching wiring phase shifter at the deficiencies in the prior art part, makes it have low insertion loss, high-isolation, undersized characteristics.
The present invention is achieved by the following technical solutions, and phase shifter of the present invention comprises: one section interdigital coplanar waveguide transmission line, one section conventional co-planar waveguide transmission line, micro-machinery switch, switch feeder line and dielectric substrate.Interdigital coplanar waveguide transmission line, conventional co-planar waveguide transmission line, micro-machinery switch, switch feeder line all are located on the dielectric substrate, interdigital coplanar waveguide transmission line and conventional co-planar waveguide transmission line constitute two transmission paths of switching wiring phase shifter, the switch feeder line links to each other with micro-machinery switch, in order to the connecting and disconnecting of control micro-machinery switch.Outer signals is selected a connection transmission paths wherein by micro-machinery switch and the control of switch feeder line.In identical length range, the interdigital coplanar waveguide transmission line is different with the electrical length of conventional co-planar waveguide transmission line, therefore select different transmission paths can produce phase shift, phase-shift phase can be realized by the structural parameters and the periodicity that detours of adjusting the interdigital coplanar waveguide transmission line.
The invention has the beneficial effects as follows: adopt interdigital coplanar waveguide transmission line and conventional co-planar waveguide transmission line transmission path as switching wiring phase shifter, can effectively reduce the phase shifter overall dimensions, wiring is simple, can obtain low insertion loss by the structural parameters of adjusting interdigital coplanar waveguide transmission line and conventional co-planar waveguide transmission line.By One-position switch line style phase shifter of the present invention, can carry out cascade to constitute the switching wiring phase shifter of these types of multidigit such as two, three, four, five to it.
Description of drawings
Fig. 1 is the structural representation of phase shifter of the present invention.
Fig. 2 is an interdigital coplanar waveguide transmission line enlarged diagram of the present invention.
Fig. 3 is a conventional co-planar waveguide transmission line enlarged diagram of the present invention.
Fig. 4 is the representative configuration figure of four bit phase shifter of phase shifter composition of the present invention.
Embodiment
As shown in Figure 1, phase shifter of the present invention comprises: one section interdigital coplanar waveguide transmission line 1, one section conventional co-planar waveguide transmission line 2, micro-machinery switch 3, switch feeder line 4 and dielectric substrate 5.Interdigital coplanar waveguide transmission line 1, conventional co-planar waveguide transmission line 2, micro-machinery switch 3, switch feeder line 4 all are located on the dielectric substrate 5, interdigital coplanar waveguide transmission line 1 and conventional co-planar waveguide transmission line 2 constitute two transmission paths of switching wiring phase shifter, switch feeder line 4 links to each other with micro-machinery switch 3, and outer signals is selected a connection transmission paths wherein by micro-machinery switch 3 and 4 controls of switch feeder line.In identical length range, interdigital coplanar waveguide transmission line 1 is different with the electrical length of conventional co-planar waveguide transmission line 2, therefore select different transmission paths can produce phase shift, phase-shift phase can be realized by the structural parameters and the periodicity that detours of adjusting the interdigital coplanar waveguide transmission line.
As shown in Figure 2, be the structural representation of employed interdigital coplanar waveguide transmission line among the present invention.Interdigital coplanar waveguide transmission line 1 is made up of two earth connections 6,7 and a signal line 8, holding wire 8 is positioned in the middle of two earth connections 6,7, holding wire 8 equates all the time that with distance between the earth connection 6,7 its structural parameters and the periodicity that detours can require calculate according to difference.
As shown in Figure 3, be the structural representation of employed conventional co-planar waveguide transmission line among the present invention.Conventional co-planar waveguide transmission line 2 is made up of two earth connections 9,10 and a signal line 11, and holding wire 11 is positioned in the middle of two earth connections 9,10, and three metal line are parallel to each other and holding wire 11 equates all the time with distance between the earth connection 9,10.
Interdigital coplanar waveguide transmission line 1, conventional co-planar waveguide transmission line 2 physical dimensions will make that the characteristic impedance of two kinds of transmission lines is 50 Ω, and wherein the holding wire width of interdigital coplanar waveguide transmission line 1 and conventional co-planar waveguide transmission line 2 will take all factors into consideration that phase shifter inserts loss and overall dimensions is determined.The electrical length difference of interdigital coplanar waveguide transmission line 1, conventional co-planar waveguide transmission line 2 within identical length just can produce phase shift when therefore selecting different transmission paths by micro-machinery switch 3.
5 pairs of phase shifter performances of dielectric substrate have a direct impact, the dielectric constant of backing material and loss factor have appreciable impact to the insertion loss and the overall dimensions of phase shifter, and microwave circuit dielectric material commonly used such as GaAs, High Resistivity Si, aluminium oxide, glass, complex media material etc. all can adopt.
Interdigital coplanar waveguide transmission line 1, conventional co-planar waveguide transmission line 2 all are the metal bands that adopt the preparation of mask plating method, and material can be selected the good copper of conductivity, silver or golden.The thickness of each metal band has certain influence to the loss of phase shifter, and particularly the thickness effect of the holding wire 11 of the holding wire 8 of interdigital coplanar waveguide transmission line 1 and conventional co-planar waveguide transmission line 2 is more obvious, generally can get micron order to tens of micron thickness.
As shown in Figure 4, be the integral layout figure of phase shifter of the present invention by typical case's four bit phase shifter of cascade mode composition, be pointed out that this figure is the schematic diagram of layout, be intended to utilize the space to reduce overall dimensions as far as possible, the each several part size might not optimization structure size according to the invention among the figure, only represents the mutual alignment relation of each several part.With reference to shown in Figure 4, A, B, C, D four parts are respectively phase shifters of the present invention, and the concrete structure parameter requires different according to phase shift, and they constitute four bit phase shifter by cascade mode.
Claims (6)
1, a kind of switching wiring phase shifter, comprise: one section interdigital coplanar waveguide transmission line (1), one section conventional co-planar waveguide transmission line (2), micro-machinery switch (3), switch feeder line (4) and dielectric substrate (5), it is characterized in that, interdigital coplanar waveguide transmission line (1), conventional co-planar waveguide transmission line (2), micro-machinery switch (3), switch feeder line (4) all is provided with on the dielectric substrate (5), interdigital coplanar waveguide transmission line (1) and conventional co-planar waveguide transmission line (2) have constituted two transmission paths of switching wiring phase shifter, switch feeder line (4) links to each other with micro-machinery switch (3), and outer signals is selected a connection transmission paths wherein by micro-machinery switch (3) and switch feeder line (4) control.
2, switching wiring phase shifter according to claim 1 is characterized in that, described interdigital coplanar waveguide transmission line (1), conventional co-planar waveguide transmission line (2) all are the metal bands that adopt the preparation of mask plating method, and material is copper, silver or golden.
3, switching wiring phase shifter according to claim 1, it is characterized in that, described interdigital coplanar waveguide transmission line (1) is made up of two earth connections (6,7) and a signal line (8), holding wire (8) is positioned in the middle of two earth connections (6,7), and holding wire (8) equates all the time with distance between two earth connections (6,7).
4, switching wiring phase shifter according to claim 1, it is characterized in that, described conventional co-planar waveguide transmission line (2) is made up of two earth connections (9,10) and a signal line (11), holding wire (11) is positioned in the middle of two earth connections (9,10), and three metal line are parallel to each other and holding wire (11) equates all the time with distance between two earth connections (9,10).
According to claim 3 or 4 described switching wiring phase shifters, it is characterized in that 5, the thickness of the holding wire (8) of described interdigital coplanar waveguide transmission line (1) and the holding wire (11) of conventional co-planar waveguide transmission line (2) is that micron order arrives tens of microns.
6, a kind of switching wiring phase shifter is characterized in that, it is formed by a plurality of switching wiring phase shifter cascades according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101122280A CN100524940C (en) | 2005-12-29 | 2005-12-29 | Switching wiring phase shifter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101122280A CN100524940C (en) | 2005-12-29 | 2005-12-29 | Switching wiring phase shifter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1819328A CN1819328A (en) | 2006-08-16 |
| CN100524940C true CN100524940C (en) | 2009-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101122280A Expired - Fee Related CN100524940C (en) | 2005-12-29 | 2005-12-29 | Switching wiring phase shifter |
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| CN (1) | CN100524940C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102509816B (en) * | 2011-10-28 | 2014-01-15 | 清华大学 | Switch linear phase shifter based on micro electro mechanical system (MEMS) capacitance and inductance phase shifting unit |
| CN105788971A (en) * | 2016-03-16 | 2016-07-20 | 上海交通大学 | Silicon substrate based compact MEMS capacitive radio-frequency switch and production method |
| CN105897297B (en) * | 2016-05-19 | 2019-03-12 | 北京佰才邦技术有限公司 | Adjust the device and method of antenna |
| CN108051455A (en) * | 2017-12-18 | 2018-05-18 | 河南师范大学 | A kind of microwave remote sensor for being used to measure biological sample dielectric property |
| CN110706981A (en) * | 2019-10-21 | 2020-01-17 | 中北大学 | Radio frequency MEMS four-way snake-shaped delayer combined with single-pole four-throw switch |
| CN114744383B (en) * | 2022-05-30 | 2023-12-01 | 南京邮电大学 | Low-loss single-switch broadband microwave 180-degree phase shifter with coplanar waveguide structure |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6242992B1 (en) * | 1999-07-30 | 2001-06-05 | Tfr Technologies, Inc. | Interdigital slow-wave coplanar transmission line resonator and coupler |
| CN1521889A (en) * | 2003-02-12 | 2004-08-18 | Lg电子有限公司 | Multi-bit phase shifter and manufacturing method thereof |
-
2005
- 2005-12-29 CN CNB2005101122280A patent/CN100524940C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6242992B1 (en) * | 1999-07-30 | 2001-06-05 | Tfr Technologies, Inc. | Interdigital slow-wave coplanar transmission line resonator and coupler |
| CN1521889A (en) * | 2003-02-12 | 2004-08-18 | Lg电子有限公司 | Multi-bit phase shifter and manufacturing method thereof |
Non-Patent Citations (2)
| Title |
|---|
| BST薄膜铁电移相器研究进展. 余慧春，徐爱兰，惠春.电子元件与材料，第24卷第3期. 2005 |
| BST薄膜铁电移相器研究进展. 余慧春，徐爱兰，惠春.电子元件与材料，第24卷第3期. 2005 * |
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| CN1819328A (en) | 2006-08-16 |
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