CN1816415B - 使用表面活性剂薄膜进行激光加工 - Google Patents
使用表面活性剂薄膜进行激光加工 Download PDFInfo
- Publication number
- CN1816415B CN1816415B CN200480018698.4A CN200480018698A CN1816415B CN 1816415 B CN1816415 B CN 1816415B CN 200480018698 A CN200480018698 A CN 200480018698A CN 1816415 B CN1816415 B CN 1816415B
- Authority
- CN
- China
- Prior art keywords
- wafer
- surfactant
- laser processing
- film
- surfactant film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004094 surface-active agent Substances 0.000 title claims abstract description 183
- 238000003754 machining Methods 0.000 title claims abstract description 14
- 235000012431 wafers Nutrition 0.000 claims description 163
- 238000000034 method Methods 0.000 claims description 57
- 239000011248 coating agent Substances 0.000 claims description 29
- 238000000576 coating method Methods 0.000 claims description 29
- 230000008569 process Effects 0.000 claims description 14
- 239000003795 chemical substances by application Substances 0.000 claims description 11
- 230000003213 activating effect Effects 0.000 claims description 10
- 239000002904 solvent Substances 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000005520 cutting process Methods 0.000 claims description 6
- 238000013519 translation Methods 0.000 claims description 6
- 238000005457 optimization Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000002280 amphoteric surfactant Substances 0.000 claims description 4
- 239000003945 anionic surfactant Substances 0.000 claims description 4
- 150000001450 anions Chemical class 0.000 claims description 4
- 230000007812 deficiency Effects 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 4
- 239000002736 nonionic surfactant Substances 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 4
- 238000009736 wetting Methods 0.000 claims description 4
- 239000002826 coolant Substances 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000007761 roller coating Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000007654 immersion Methods 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 58
- 239000012636 effector Substances 0.000 description 21
- 238000010586 diagram Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 230000014616 translation Effects 0.000 description 3
- 239000012190 activator Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 238000006424 Flood reaction Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000005068 cooling lubricant Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 230000015843 photosynthesis, light reaction Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Images
Landscapes
- Dicing (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
Claims (30)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0313115A GB0313115D0 (en) | 2003-06-06 | 2003-06-06 | Laser machining using a protective coating |
GB0313115.8 | 2003-06-06 | ||
GB0400677.1 | 2004-01-13 | ||
GB0400677A GB2409998B (en) | 2004-01-13 | 2004-01-13 | Laser machining using a surfactant film |
PCT/EP2004/006001 WO2004110694A2 (en) | 2003-06-06 | 2004-06-03 | Laser machining using a surfactant film |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1816415A CN1816415A (zh) | 2006-08-09 |
CN1816415B true CN1816415B (zh) | 2012-07-04 |
Family
ID=9959511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200480018698.4A Expired - Fee Related CN1816415B (zh) | 2003-06-06 | 2004-06-03 | 使用表面活性剂薄膜进行激光加工 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN1816415B (zh) |
GB (1) | GB0313115D0 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180126644A (ko) * | 2017-05-17 | 2018-11-28 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
CN111192817B (zh) * | 2019-12-30 | 2022-10-11 | 厦门市三安集成电路有限公司 | 一种芯片镭射切割后的处理方法 |
-
2003
- 2003-06-06 GB GB0313115A patent/GB0313115D0/en not_active Ceased
-
2004
- 2004-06-03 CN CN200480018698.4A patent/CN1816415B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1816415A (zh) | 2006-08-09 |
GB0313115D0 (en) | 2003-07-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: IRITALK SCIENCE AND TECHNOLOGY INDUSTRIAL STOCK CO Free format text: FORMER OWNER: XSIL TECHNOLOGY CO., LTD. Effective date: 20091204 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20091204 Address after: oregon Applicant after: Electro Scient Ind Inc. Address before: Dublin, Ireland Applicant before: XSIL Technology Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20210603 |
|
CF01 | Termination of patent right due to non-payment of annual fee |