CN1808126A - Microwave ceramic element detection clamp and device, and detection method thereof - Google Patents
Microwave ceramic element detection clamp and device, and detection method thereof Download PDFInfo
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Abstract
Disclosed are a detecting clamp and device of microwave ceramic component and a method for detecting. The clamp comprises a microwave coplane waveguide, a sample position chip, detecting probe mount and a SMA adaptor. The microwave ceramic component detecting device comprises a microwave network analyzer, a microwave coplane waveguide testing clamp, input coaxial cables and output coaxial cables. The detecting method comprises steps of: taking open circuit and short circuit calibrating detection and match load calibration, then measuring data, and taking parallel and serial detection on the components for detecting, finally entering testing software for data analysis, calculation, process and storage.
Description
Technical field
The present invention relates to a kind of components and parts pick-up unit, especially relate to anchor clamps and device and detection method thereof that a kind of radio frequency and microwave ceramic components (comprising resonator, wave filter, diplexer, electric capacity and inductance etc.) the multiparameter not damaged under different conditions such as in parallel, series connection, some frequency, frequency sweep detects.
Background technology
In recent years, along with the development of millimeter wave and submillimeter wave technology, co-planar waveguide (CPW) had been subjected to concern (Zhou Xilang, the conformal transformation analysis [J] of modification co-planar waveguide, communication journal, 1997,18 (11): 65-70; Carlsson E.Confomalmapping of the field and charge distributions in multi-layered substrateCPW ' s[J] .IEEE T rans, MTT, 1999,47 (8): 1544-1552), its reason is because with respect to conventional microstrip line, co-planar waveguide has outstanding advantage when being used for GaAs single-chip microwave integration circuit (GaA sMMIC), for various active or passive two terminal device, be easy to all realize that serial or parallel connection connects and needn't hole on substrate.Co-planar waveguide not only can be applied in the microwave integrated circuit, and can be applied in (Fang Shaojun, Wang Baisuo in millimeter wave and the optical integrated circuit, golden red, the analysis and test [J] of the asymmetric co-planar waveguide of back of the body metallization layer, Maritime Affairs University Of Dalian's journal, 2001,27, (3): 67-70).Network analyzer can also carry out the test of time domain aspect to network except that mainly from the frequency domain aspect characterizes the characteristic of network, on time relationship network characteristic is characterized.
Along with the widespread use of radio frequency and microwave in fields such as communications, the development and the production of radio frequency and microwave ceramic components (comprising resonator, wave filter, diplexer, electric capacity and inductance etc.) increase rapidly, be badly in need of accurate, the convenient and low pick-up unit of cost of development, in particular for the test fixture of said apparatus.Generally adopt at present both at home and abroad tested components and parts are positioned in the coaxial cavity and detect, its shortcoming is that complicated operation and use face are narrow, require the components and parts size about 10mm, do not see that less than the microwave ceramics sheet capacitor of 2mm suitable test fixture is arranged, this affects from development, exploitation and the production of major product to radio frequency and microwave ceramic components.
Summary of the invention
The objective of the invention is at lacking relevant microwave ceramic components pick-up unit in the prior art, especially the problem that lacks the microwave co-planar waveguide test fixture be used for the microwave ceramic components pick-up unit provides that a kind of applicability is wide, not damaged, easy to operate, good reproducibility, the microwave co-planar waveguide test fixture that is used for the microwave ceramic components pick-up unit that price is low.
Another object of the present invention is to provide a kind of microwave ceramic components pick-up unit and detection method thereof that above-mentioned microwave co-planar waveguide test fixture is formed of using.
Microwave co-planar waveguide test fixture of the present invention is provided with:
The microwave co-planar waveguide, the microwave co-planar waveguide is provided with waveguide base, high frequency printed circuit board and securing member, high frequency printed circuit board is fixed on the waveguide base by securing member, on high frequency printed circuit board, be provided with short circuit open circuit calibrated channel, coupling calibrated channel, sense channel in parallel and series connection sense channel, one end of short circuit open circuit calibrated channel is short circuit calibration load, the other end is open circuit calibration load, is provided with short-circuit line on short circuit open circuit calibrated channel; The coupling calibrated channel is coupling calibration load, mating on the calibrated channel and connecing build-out resistor, obtains 50 Ω matched loads; Sense channel in parallel is used to test the absorption peak of tested components and parts, and tested components and parts are positioned on the inner wire of sense channel in parallel, forms and take back the road by probe with sense channel outer conductor in parallel; The series connection sense channel is used to test the harmonic peak of tested components and parts, and tested components and parts cross-over connection is pressed tested components and parts by probe and closely contacted with the section of series connection sense channel inner wire in the inner wire section two ends of series connection sense channel;
Sample spacer, sample spacer are located on the sense channel in parallel or series connection sense channel on the high frequency printed circuit board of microwave co-planar waveguide, and the sample spacer is provided with the sample cell that is used for fixing tested components and parts sample;
The detector probe frame, detector probe has been set up adjustable support, probe, probe base, spring and closure plate, the bottom of adjustable support is connected across on the sense channel in parallel or series connection sense channel of microwave co-planar waveguide, adjustable support is provided with vertical fluting, the probe base both sides are connected with adjustable support and can adjust upper-lower position on vertical fluting of adjustable support, be used to adjust the spacing of probe and microwave co-planar waveguide, probe passes the probe base central through hole, spring housing is located in the probe base central through hole, closure plate is located at the probe base top, is used for fixing the position of probe in probe base;
Sub-miniature A connector, sub-miniature A connector is established 8 pairs, correspond respectively to short circuit open circuit calibrated channel, coupling calibrated channel, sense channel in parallel and series connection sense channel, sub-miniature A connector is fixed in the both sides, front and back of waveguide base, the inner wire of sub-miniature A connector is connected with microwave co-planar waveguide inner wire, the outer conductor of sub-miniature A connector is connected with microwave co-planar waveguide outer conductor, and sub-miniature A connector is used for being connected with the output concentric cable with the input concentric cable.
Microwave ceramic components pick-up unit of the present invention is provided with microwave network analyzer, microwave co-planar waveguide test fixture, input concentric cable and output concentric cable, the microwave signal output port of the input termination microwave network analyzer of input concentric cable, the sub-miniature A connector of the output termination microwave co-planar waveguide test fixture of input concentric cable, the sub-miniature A connector of the input termination microwave co-planar waveguide test fixture of output concentric cable, the microwave signal input port of the output termination microwave network analyzer of output concentric cable.
Microwave ceramic components detection method of the present invention the steps include:
1) will import concentric cable and be connected short circuit open circuit calibrated channel and microwave network analyzer respectively, open a way and short circuit calibration detection with the output concentric cable;
2) will import concentric cable and be connected coupling calibrated channel and microwave network analyzer respectively, carry out the matched load calibration, after microwave network analyzer shows the Congratulations printed words, carry out DATA REASONING with the output concentric cable;
3) will import concentric cable and be connected sense channel in parallel and microwave network analyzer respectively, tested components and parts are carried out and connect detection with the output concentric cable;
4) will import concentric cable and be connected series connection sense channel and microwave network analyzer respectively, tested components and parts will be connected in series detection with the output concentric cable;
5) open computer, enter corresponding testing software, test data analysis, calculating, processing and preservation.
Testing software can adopt the VC6.0 SDK (Software Development Kit), the corresponding testing software of different tested components and parts under the establishment Windows system, software is pointed out testing procedure, test data is carried out operational analysis and Error processing, man-machine dialog interface is provided, can provide clearly form and curve, with comprehensively reflection and preserve, print of test result.
The present invention is directed to and lack relevant microwave ceramic components pick-up unit in the prior art, especially the problem that lacks the microwave co-planar waveguide test fixture that is used for the microwave ceramic components pick-up unit, provide a kind of applicability wide, not damaged, easy to operate, good reproducibility, the microwave co-planar waveguide test fixture that price is low and microwave ceramic components pick-up unit and detection method thereof, by microwave co-planar waveguide test fixture and microwave network analyzer (HP8714 type for example, E8362B type etc.) connect, realize that radio frequency and microwave ceramic components (comprise resonator, wave filter, diplexer, electric capacity and inductance etc.) in parallel connection, series connection, point frequently, multiparameter under the different conditions such as frequency sweep detects.These anchor clamps can adopt relevant software to carry out computational analysis and Error processing, and test result data is accurate, are applicable to that development and the product to radio frequency and microwave ceramic components detects in research institutions and the factory and enterprise.For example, the described microwave co-planar waveguide of the application of the invention test fixture can obtain small sheet capacitor test result in parallel.
Description of drawings
Fig. 1 is a microwave co-planar waveguide test fixture structural upright synoptic diagram.
Fig. 2 looks synoptic diagram for microwave co-planar waveguide test fixture structure master.
Fig. 3 is the microwave co-planar waveguide of microwave co-planar waveguide test fixture and the structure and the annexation figure of sub-miniature A connector.
Fig. 4 is the right view of Fig. 3.
Fig. 5 is microwave co-planar waveguide test fixture detector probe frame and sample spacer STRUCTURE DECOMPOSITION synoptic diagram.
Fig. 6 forms block scheme for the microwave ceramic components pick-up unit.
Fig. 7 is typical sheet capacitor and connects transmission parameter (S21) curve map when measuring.In Fig. 7, horizontal ordinate is frequency (MHZ), and ordinate is through-put power (db).Frequency is from 0.300MHZ (Start), and 3000.000MHZ stops (Stop).
Fig. 8 is that typical sheet capacitor is connected in series reflection parameters (S11) curve map when measuring.In Fig. 8, horizontal ordinate is frequency (MHZ), and ordinate is through-put power (db).Frequency is from 0.300MHZ (Start), and 3000.000MHZ stops (Stop).
Embodiment
Following examples will the present invention is further illustrated in conjunction with the accompanying drawings.
Referring to Fig. 1-5, microwave co-planar waveguide test fixture is provided with microwave co-planar waveguide 1, sample spacer 2, detector probe frame 3 and sub-miniature A connector 4.Microwave co-planar waveguide 1 is provided with waveguide base 11, high frequency printed circuit board 12 and securing member, high frequency printed circuit board 12 is fixed on the waveguide base 11 by securing member, on high frequency printed circuit board 12, be provided with short circuit open circuit calibrated channel 121, coupling calibrated channel 122, sense channel in parallel 123 and series connection sense channel 124, one end of short circuit open circuit calibrated channel 121 is short circuit calibration load, the other end is open circuit calibration load, is provided with short-circuit line 1211 on short circuit open circuit calibrated channel; Coupling calibrated channel 122 is coupling calibration load, mating on the calibrated channel and connecing build-out resistor 1221, obtains 50 Ω matched loads; Sense channel 123 in parallel is used to test the absorption peak of tested components and parts, and tested components and parts are positioned on the inner wire of sense channel 123 in parallel, forms and connect widely different road by probe with the outer conductor of sense channel 123 in parallel; Series connection sense channel 124 is used to test the harmonic peak of tested components and parts, and tested components and parts cross-over connection is pressed tested components and parts by probe and closely contacted with the section of the inner wire of series connection sense channel 124 in the inner wire section two ends of series connection sense channel 124.
Sub-miniature A connector 4 is established 8 pairs, correspond respectively to short circuit open circuit calibrated channel 121, coupling calibrated channel 122, sense channel in parallel 123 and series connection sense channel 124, sub-miniature A connector 4 is fixed in the both sides, front and back of waveguide base 11, the inner wire of sub-miniature A connector 4 is connected with microwave co-planar waveguide 1 inner wire, the outer conductor of sub-miniature A connector 4 is connected with microwave co-planar waveguide 1 outer conductor, and sub-miniature A connector 4 is used for being connected with the output concentric cable with the input concentric cable.
The inner wire of microwave co-planar waveguide is shapes such as the plane or the conical surface at the section of series connection test point, and the series connection that can satisfy the microwave ceramic components of various sizes detects requirement.Usually, the inner wire width of microwave co-planar waveguide can be made as 2mm, and the internal and external conductor spacing is 0.4mm; High frequency printed circuit board length is chosen as 27mm, and thickness is 1mm, and the high frequency printed circuit board relative dielectric constant is 2.6, and the characteristic impedance of microwave co-planar waveguide is 50 Ω.Above data can recomputate adjustment according to the requirement of tested components and parts.
Referring to Fig. 6, the microwave ceramic components pick-up unit is provided with microwave network analyzer 101, microwave co-planar waveguide test fixture 102, input concentric cable 103 and output concentric cable 104, the microwave signal output port of the input termination microwave network analyzer 101 of input concentric cable 103, the sub-miniature A connector of the output termination microwave co-planar waveguide test fixture 102 of input concentric cable 103, the sub-miniature A connector of the input termination microwave co-planar waveguide test fixture 102 of output concentric cable 104, the microwave signal input port of the output termination microwave network analyzer 101 of output concentric cable 104.
When detecting microwave ceramic components, can adopt following detection method.To import concentric cable and be connected short circuit open circuit calibrated channel and microwave network analyzer respectively, open a way and short circuit calibration detection with the output concentric cable; To import concentric cable and be connected coupling calibrated channel and microwave network analyzer respectively, carry out the matched load calibration, after microwave network analyzer shows the Congratulations printed words, carry out DATA REASONING with the output concentric cable; To import concentric cable and be connected sense channel in parallel and microwave network analyzer respectively, tested components and parts are carried out and connect detection with the output concentric cable; To import concentric cable and be connected series connection sense channel and microwave network analyzer respectively, tested components and parts will be connected in series detection with the output concentric cable; Open computer, enter corresponding testing software, to test data analysis, calculating, processing and preservation.
For making the suffered contact force unanimity of the tested components and parts A of each measurement, the central through hole 331 of probe base 33 is designed to stepped circular hole.When pressing probe 32 and shutting closure plate 35, the contact force of probe 32 and tested components and parts A is by the elastic force decision of the spring in the detector probe frame 34.Can be equipped with multiple probe according to tested components and parts size and detection mode, for example, when tested components and parts were resonator, wave filter and diplexer, probe tip was processed into coniform; When tested components and parts were electric capacity and inductance sheet small size, probe tip was processed into needle-like; When parallel connection detected, probe adopted brass to make; When series connection detected, probe adopted polystyrene or tygon to make.During measurement tested components and parts are put into and be fixed on the high frequency printed circuit board central channel on the microwave co-planar waveguide, tested components and parts electrode is docked with the exciting electrode and the coupling electrode of 4 passages.
8 sub-miniature A connectors 5 are individually fixed in the both sides, front and back of waveguide base 1, the inner wire of sub-miniature A connector 5 is connected with microwave co-planar waveguide 2 inner wires, the outer conductor of sub-miniature A connector 5 is connected with microwave co-planar waveguide 2 outer conductors, and the insulating material between internal and external conductor is inwardly shortened 1mm, reaches the optimum matching state.Can be according to the different situations of test site, for microwave co-planar waveguide test fixture is equipped with suitable clamp base, clamp base is used for fixing microwave co-planar waveguide test fixture and input and output concentric cable, plays the effect of steady testing operation.Can adopt microwave network analyzers such as 8714 types or E8362B type.
Fig. 7 provides a kind of 1mm * 1mm * 0.5mm typical case's sheet capacitor and connects transmission parameter (S21) curve map when measuring.Show by Fig. 7, can obtain small sheet capacitor test result in parallel by using microwave co-planar waveguide test fixture.
Fig. 8 provides a kind of 1mm * 1mm * transmission parameter (S11) curve map when 0.5mm typical case sheet capacitor serial connection is measured.Show by Fig. 8, can obtain small sheet capacitor series connection test result by using microwave co-planar waveguide test fixture.
By to a kind of dielectric filter (TQM23 type) and connect and measure its transmission parameter (S21) curve and show, use microwave co-planar waveguide test fixture of the present invention can obtain test results in parallel such as dielectric filter, diplexer.
Claims (3)
1, microwave co-planar waveguide test fixture is characterized in that being provided with:
The microwave co-planar waveguide, the microwave co-planar waveguide is provided with waveguide base, high frequency printed circuit board and securing member, high frequency printed circuit board is fixed on the waveguide base by securing member, on high frequency printed circuit board, be provided with short circuit open circuit calibrated channel, coupling calibrated channel, sense channel in parallel and series connection sense channel, one end of short circuit open circuit calibrated channel is short circuit calibration load, the other end is open circuit calibration load, is provided with short-circuit line on short circuit open circuit calibrated channel; The coupling calibrated channel is coupling calibration load, mating on the calibrated channel and connecing build-out resistor, obtains 50 Ω matched loads; Sense channel in parallel is used to test the absorption peak of tested components and parts, and tested components and parts are positioned on the inner wire of sense channel in parallel, forms and take back the road by probe with sense channel outer conductor in parallel; The series connection sense channel is used to test the harmonic peak of tested components and parts, and tested components and parts cross-over connection is pressed tested components and parts by probe and closely contacted with the section of series connection sense channel inner wire in the inner wire section two ends of series connection sense channel;
Sample spacer, sample spacer are located on the sense channel in parallel or series connection sense channel on the high frequency printed circuit board of microwave co-planar waveguide, and the sample spacer is provided with the sample cell that is used for fixing tested components and parts sample;
The detector probe frame, detector probe has been set up adjustable support, probe, probe base, spring and closure plate, the bottom of adjustable support is connected across on the sense channel in parallel or series connection sense channel of microwave co-planar waveguide, adjustable support is provided with vertical fluting, the probe base both sides are connected with adjustable support and can adjust upper-lower position on vertical fluting of adjustable support, be used to adjust the spacing of probe and microwave co-planar waveguide, probe passes the probe base central through hole, spring housing is located in the probe base central through hole, closure plate is located at the probe base top, is used for fixing the position of probe in probe base;
Sub-miniature A connector, sub-miniature A connector is established 8 pairs, correspond respectively to short circuit open circuit calibrated channel, coupling calibrated channel, sense channel in parallel and series connection sense channel, sub-miniature A connector is fixed in the both sides, front and back of waveguide base, the inner wire of sub-miniature A connector is connected with microwave co-planar waveguide inner wire, the outer conductor of sub-miniature A connector is connected with microwave co-planar waveguide outer conductor, and sub-miniature A connector is used for being connected with the output concentric cable with the input concentric cable.
2, microwave ceramic components pick-up unit, it is characterized in that being provided with microwave network analyzer, microwave co-planar waveguide test fixture, input concentric cable and output concentric cable, the microwave signal output port of the input termination microwave network analyzer of input concentric cable, the sub-miniature A connector of the output termination microwave co-planar waveguide test fixture of input concentric cable, the sub-miniature A connector of the input termination microwave co-planar waveguide test fixture of output concentric cable, the microwave signal input port of the output termination microwave network analyzer of output concentric cable; Described microwave co-planar waveguide test fixture is provided with:
The microwave co-planar waveguide, the microwave co-planar waveguide is provided with waveguide base, high frequency printed circuit board and securing member, high frequency printed circuit board is fixed on the waveguide base by securing member, on high frequency printed circuit board, be provided with short circuit open circuit calibrated channel, coupling calibrated channel, sense channel in parallel and series connection sense channel, one end of short circuit open circuit calibrated channel is short circuit calibration load, the other end is open circuit calibration load, is provided with short-circuit line on short circuit open circuit calibrated channel; The coupling calibrated channel is coupling calibration load, mating on the calibrated channel and connecing build-out resistor, obtains 50 Ω matched loads; Sense channel in parallel is used to test the absorption peak of tested components and parts, and tested components and parts are positioned on the inner wire of sense channel in parallel, forms and take back the road by probe with sense channel outer conductor in parallel; The series connection sense channel is used to test the harmonic peak of tested components and parts, and tested components and parts cross-over connection is pressed tested components and parts by probe and closely contacted with the section of series connection sense channel inner wire in the inner wire section two ends of series connection sense channel;
Sample spacer, sample spacer are located on the sense channel in parallel or series connection sense channel on the high frequency printed circuit board of microwave co-planar waveguide, and the sample spacer is provided with the sample cell that is used for fixing tested components and parts sample;
The detector probe frame, detector probe has been set up adjustable support, probe, probe base, spring and closure plate, the bottom of adjustable support is connected across on the sense channel in parallel or series connection sense channel of microwave co-planar waveguide, adjustable support is provided with vertical fluting, the probe base both sides are connected with adjustable support and can adjust upper-lower position on vertical fluting of adjustable support, be used to adjust the spacing of probe and microwave co-planar waveguide, probe passes the probe base central through hole, spring housing is located in the probe base central through hole, closure plate is located at the probe base top, is used for fixing the position of probe in probe base;
Sub-miniature A connector, sub-miniature A connector is established 8 pairs, correspond respectively to short circuit open circuit calibrated channel, coupling calibrated channel, sense channel in parallel and series connection sense channel, sub-miniature A connector is fixed in the both sides, front and back of waveguide base, the inner wire of sub-miniature A connector is connected with microwave co-planar waveguide inner wire, the outer conductor of sub-miniature A connector is connected with microwave co-planar waveguide outer conductor, and sub-miniature A connector is used for being connected with the output concentric cable with the input concentric cable.
3, microwave ceramic components detection method is characterized in that the steps include:
1) will import concentric cable and be connected short circuit open circuit calibrated channel and microwave network analyzer respectively, open a way and short circuit calibration detection with the output concentric cable;
2) will import concentric cable and be connected coupling calibrated channel and microwave network analyzer respectively, carry out the matched load calibration, carry out DATA REASONING with the output concentric cable;
3) will import concentric cable and be connected sense channel in parallel and microwave network analyzer respectively, tested components and parts are carried out and connect detection with the output concentric cable;
4) will import concentric cable and be connected series connection sense channel and microwave network analyzer respectively, tested components and parts will be connected in series detection with the output concentric cable;
5) open computer, enter corresponding testing software, test data analysis, calculating, processing and preservation;
Described microwave co-planar waveguide test fixture is provided with:
The microwave co-planar waveguide, the microwave co-planar waveguide is provided with waveguide base, high frequency printed circuit board and securing member, high frequency printed circuit board is fixed on the waveguide base by securing member, on high frequency printed circuit board, be provided with short circuit open circuit calibrated channel, coupling calibrated channel, sense channel in parallel and series connection sense channel, one end of short circuit open circuit calibrated channel is short circuit calibration load, the other end is open circuit calibration load, is provided with short-circuit line on short circuit open circuit calibrated channel; The coupling calibrated channel is coupling calibration load, mating on the calibrated channel and connecing build-out resistor, obtains 50 Ω matched loads; Sense channel in parallel is used to test the absorption peak of tested components and parts, and tested components and parts are positioned on the inner wire of sense channel in parallel, forms and take back the road by probe with sense channel outer conductor in parallel; The series connection sense channel is used to test the harmonic peak of tested components and parts, and tested components and parts cross-over connection is pressed tested components and parts by probe and closely contacted with the section of series connection sense channel inner wire in the inner wire section two ends of series connection sense channel;
Sample spacer, sample spacer are located on the sense channel in parallel or series connection sense channel on the high frequency printed circuit board of microwave co-planar waveguide, and the sample spacer is provided with the sample cell that is used for fixing tested components and parts sample;
The detector probe frame, detector probe has been set up adjustable support, probe, probe base, spring and closure plate, the bottom of adjustable support is connected across on the sense channel in parallel or series connection sense channel of microwave co-planar waveguide, adjustable support is provided with vertical fluting, the probe base both sides are connected with adjustable support and can adjust upper-lower position on vertical fluting of adjustable support, be used to adjust the spacing of probe and microwave co-planar waveguide, probe passes the probe base central through hole, spring housing is located in the probe base central through hole, closure plate is located at the probe base top, is used for fixing the position of probe in probe base;
Sub-miniature A connector, sub-miniature A connector is established 8 pairs, correspond respectively to short circuit open circuit calibrated channel, coupling calibrated channel, sense channel in parallel and series connection sense channel, sub-miniature A connector is fixed in the both sides, front and back of waveguide base, the inner wire of sub-miniature A connector is connected with microwave co-planar waveguide inner wire, the outer conductor of sub-miniature A connector is connected with microwave co-planar waveguide outer conductor, and sub-miniature A connector is used for being connected with the output concentric cable with the input concentric cable.
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