CN104678339A - Calibration device, system and method for probe type microwave voltage measurement system - Google Patents
Calibration device, system and method for probe type microwave voltage measurement system Download PDFInfo
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- CN104678339A CN104678339A CN201510072783.9A CN201510072783A CN104678339A CN 104678339 A CN104678339 A CN 104678339A CN 201510072783 A CN201510072783 A CN 201510072783A CN 104678339 A CN104678339 A CN 104678339A
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Abstract
The invention discloses a calibration device for a probe type microwave voltage measurement system. The device comprises a microwave signal input end and a microwave signal output end, and further comprises a standard micro-strip, a probe negative electrode touch disk, a probe negative electrode contact, a probe positive electrode contact and a probe positioning bracket, wherein the standard micro-strip is used for transmitting a microwave signal input from the microwave signal input end; the microwave signal output end is used for outputting the microwave signal from the standard micro-strip; the probe negative electrode touch disk adopts a corner cut design; the probe negative electrode contact, the probe positive electrode contact and the probe positioning bracket point are used for positioning a probe. According to the calibration device, a microwave voltage calibration result can be traced back to a power parameter of a 50 ohm system based on a circuit parallel isobaric principle; the calibration device is suitable for calibration of any non-zero impedance probe type microwave voltage measurement systems, and the accuracy of a non 50ohm microwave voltage measurement system can be improved.
Description
Technical field
The present invention relates to a kind of calibrating installation.More specifically, a kind of calibrating installation for probe-type microwave voltage measuring system, system and method is related to.
Background technology
At present, microwave voltage measuring system conventional both at home and abroad, mainly based on the detection principle of microwave detection tube, changes microwave signal into direct current signal, then carries out DC voltage measurement.At present, the calibrating installation of conventional both at home and abroad probe-type microwave voltage measuring system is generally probe station (for accurate location) and standard film (short circuit load, open-circuited load, matched load and straight-through part etc.) thereof.Because probe and standard film are generally 50 Ω systems, and the impedance of a kind of typical non-50 omega load (electro explosive device bridge silk) is 1 Ω ~ 10 Ω, both impedance severe mismatch, the 50 Ω probe-type microwave voltage measuring systems of therefore calibrating on probe station are not also suitable for the measurement that microwave voltage is gone up in non-50 omega load (electro explosive device bridge silk), and this has a strong impact on the accuracy that in non-50 omega load, microwave voltage is measured.
According to circuit voltage divider principle, realize the Measurement accuracy of microwave voltage in non-50 omega load, the probe impedance as receiving trap should much larger than loaded impedance.And will realize calibrating the large impedance probe of non-50 omega, just should use the calibrating installation being suitable for large impedance probe.The shortcoming of 50 Ω probe-type microwave voltage measuring systems is only applicable to for existing microwave voltage measuring system calibrating installation, the microwave voltage measurement calibrating installation of the present invention's design is applicable to the calibration of any non-zero impedance probe-type microwave voltage measuring system, can improve the accuracy of non-50 omega microwave voltage measuring system calibration.
Therefore, need to provide a kind of calibrating installation for probe-type microwave voltage measuring system, system and method, based on circuit in parallel equal pressure principle, microwave voltage calibration result can be traceable to the power parameter of 50 Ω systems, be applicable to the calibration of any non-zero impedance probe-type microwave voltage measuring system, the accuracy of non-50 omega microwave voltage measuring system calibration can be improved.
Summary of the invention
The object of the present invention is to provide a kind of calibrating installation for probe-type microwave voltage measuring system, system and method, solve the shortcoming that microwave current voltage measurement system calibrating installation is only applicable to 50 Ω probe-type microwave voltage measuring systems, be applicable to the calibration of any non-zero impedance probe-type microwave voltage measuring system, the accuracy of non-50 omega microwave voltage measuring system calibration can be improved.
For achieving the above object, the present invention adopts following technical proposals:
For a calibrating installation for probe-type microwave voltage measuring system, this device comprises microwave signal input end, microwave signal output terminal, and this device described comprises further
Standard microstrip, probe negative pole tactile disk, probe cathode contact, probe cathode contact, probe positioning support;
Described standard microstrip, for transmitting the microwave signal inputted by microwave signal input end;
Described microwave signal output terminal, for exporting the microwave signal from standard microstrip;
Described probe negative pole tactile disk adopts corner cut design;
Described probe cathode contact, probe cathode contact and described probe positioning support, for positioning probe.
Preferably, described in comprise standard microstrip, probe negative pole tactile disk, probe cathode contact and probe cathode contact standard microstrip circuit board be the Wide-Band Design, applicable frequency is DC ~ 18GHz.
Preferably, described probe positioning support is glass fibre reinforced plastic support.
Based on a microwave voltage Measurement and calibration system described above, this system described comprises signal source, probe-type microwave voltage Measurement and calibration device, reference measure unit, probe-type microwave voltage measurement module;
Described probe-type microwave voltage Measurement and calibration device, for gathering the microwave signal produced from signal source, and forms the in parallel of reference measure unit and the probe-type microwave voltage measurement module be calibrated at signal output part;
Described reference measure unit, for recording the standard microwave magnitude of voltage V of the microwave signal from described probe-type microwave voltage Measurement and calibration device
0, as reference standard value;
The described probe-type microwave voltage measurement module be calibrated comprises microwave detector, data processing unit further;
Described microwave detector, for will be d. c. voltage signal in the microwave signal voltage transitions of the tested microwave voltage probe measurement gained of probe-type microwave voltage Measurement and calibration device output terminal with described reference measure unit equivalent parallel;
Described data processing unit, for recording the magnitude of voltage V of the voltage signal that described microwave detector exports
1, and according to the standard microwave magnitude of voltage V that described reference measure unit records
0the magnitude of voltage V of the d. c. voltage signal exported with described microwave detector
1, obtain the calibration curve of microwave signal.
Preferably, described microwave voltage probe is positioned by probe positioning support, probe cathode contact and the probe cathode contact in described probe-type microwave voltage Measurement and calibration device.
Preferably, the characteristic impedance of described tested microwave voltage probe can be any nonzero value.
Preferably, this device described comprises wave filter further, for the high-frequency interferencing signal in the d. c. voltage signal that microwave detector described in filtering exports.
Based on a microwave voltage Measurement and calibration method for above-mentioned measuring system, described the method comprises:
Described probe-type microwave voltage Measurement and calibration device is used to transmit the microwave signal produced from signal source;
Use the collection of described reference measure unit from the microwave signal of described probe-type microwave voltage Measurement and calibration device output terminal, and measure power or the voltage of microwave signal, as reference standard value;
The electric shock of probe positioning support, probe positive pole and probe negative pole is used to get an electric shock tested microwave voltage probe and described reference measure unit equivalent parallel, for detecting the microwave signal from described probe-type microwave voltage Measurement and calibration device output terminal;
Microwave detector is used to be d. c. voltage signal by the microwave signal voltage transitions of tested microwave voltage probe measurement;
The normative reference value recorded according to described reference measure unit and described microwave detector gained d. c. voltage signal, calculate the calibration value of described microwave voltage probe.
Preferably, described microwave voltage probe is positioned by probe positioning support, probe cathode contact and the probe cathode contact in described probe-type microwave voltage Measurement and calibration device.
Preferably, the characteristic impedance of described tested microwave voltage probe can be any nonzero value.
Beneficial effect of the present invention is as follows:
Technical scheme of the present invention compared with prior art, has following advantage:
1, based on circuit in parallel equal pressure principle, microwave voltage calibration result can be traceable to the power parameter of 50 Ω systems;
2, the probe negative pole tactile disk in described calibrating installation have employed corner cut design, and this design reduces tactile disk calibrates micro-strip line impedance disturbance to 50 Ω, is conducive to the accuracy improving calibration;
3, described calibrating installation is applicable to the calibration of any non-zero impedance probe-type microwave voltage measuring system, can improve the accuracy of non-50 omega microwave voltage measuring system calibration.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Fig. 1 (a) illustrates the front elevation of a kind of calibrating installation for probe-type microwave voltage measuring system in the embodiment of the present invention;
Fig. 1 (b) illustrates the left view of a kind of calibrating installation for probe-type microwave voltage measuring system in the embodiment of the present invention;
Fig. 1 (c) illustrates the vertical view of a kind of calibrating installation for probe-type microwave voltage measuring system in the embodiment of the present invention;
Fig. 2 illustrates a kind of calibrating installation alignment microstrip circuitry plate structure schematic diagram for probe-type microwave voltage measuring system in the embodiment of the present invention;
Fig. 3 illustrates the system architecture schematic diagram of a kind of calibrating installation for probe-type microwave voltage measuring system in the embodiment of the present invention.
Embodiment
In order to be illustrated more clearly in the present invention, below in conjunction with preferred embodiments and drawings, the present invention is described further.Parts similar in accompanying drawing represent with identical Reference numeral.It will be appreciated by those skilled in the art that specifically described content is illustrative and nonrestrictive, should not limit the scope of the invention with this below.
As shown in Fig. 1 (a)-(c), the invention discloses a kind of calibrating installation measured for probe-type microwave voltage, this device comprises that the coaxial SMA of input end micro-ly ushers to seat 101, base box housing 102, calibration microstrip circuitry plate 103, probe positioning support (glass fibre reinforced plastic support) 104, the coaxial SMA of output terminal is micro-ushers to seat 105; As shown in Figure 2, calibration microstrip circuitry plate 103 comprises metallization via hole 1034, probe cathode contact 1035, the probe cathode contact 1036 on standard microstrip substrate 1031, standard microstrip (50 Ω) 1032, probe negative pole tactile disk 1033, probe negative pole tactile disk further.
The coaxial SMA of described input end is micro-ushers to seat 101, for inputting microwave signal, and carries signal to standard microstrip (50 Ω) 1032;
Described standard microstrip (50 Ω) 1032, for transmitting microwave signal;
The coaxial SMA of described output terminal is micro-ushers to seat 105, for exporting the microwave signal from standard microstrip (50 Ω) 1032;
What described probe negative pole tactile disk 1033 adopted is corner cut design, this design reduces tactile disk calibrates microstrip line 1032 impedance disturbance to 50 Ω, is conducive to the accuracy improving calibration;
Described metallization via hole 1034, with connecting on described standard microstrip substrate 1031 with being positioned at the metal of the relative side of described probe negative pole tactile disk;
Described probe cathode contact 1035, probe cathode contact 1036 and probe positioning support 104, for positioning probe.
The microwave signal that microwave signal source produces 101 is injected on the calibration microstrip circuitry plate 103 of described calibrating installation by micro-the usheing to seat of the coaxial SMA of input end; Be injected into microwave power on calibration microstrip circuitry plate 103 and 105 enter into power meter or frequency spectrograph by micro-the usheing to seat of the coaxial SMA of output terminal.
During calibration, the positive contact probe cathode contact 1036 of probe, the cathode contact probe negative pole contact 1035 of probe.Now, probe be connected to micro-power meter (or frequency spectrograph) equivalent parallel of usheing to seat on 105 of the coaxial SMA of output terminal, both voltage should be equal.Based on circuit in parallel equal pressure principle, the microwave voltage under utilizing the power reading of power meter can calculate 50 Ω conditions, utilizes this voltage to calibrate the microwave voltage that non-50 omega probe reads.
The calibration microstrip circuitry plate 103 of this device described is the Wide-Band Design, is suitable for frequency range DC ~ 18GHz.
As shown in Figure 3, the invention also discloses a kind of probe-type microwave voltage Measurement and calibration system based on said apparatus, this system comprises microwave signal source 301, probe-type microwave voltage Measurement and calibration device 302, power meter (or frequency spectrograph) 303, the probe-type microwave voltage measuring system that is calibrated; The probe-type microwave voltage measuring system be calibrated comprises tested microwave voltage probe 304, microwave detector 305, wave filter 306, oscillograph 307 further.
Microwave signal source 301, for generation of a power or voltage signal;
Probe-type microwave voltage Measurement and calibration device 302, for power or voltage signal being transferred to power meter (or frequency spectrograph) and probe-type microwave voltage measuring system, and form the parallel connection of power meter (or frequency spectrograph) and probe-type microwave voltage measuring system at output terminal;
Power meter (or frequency spectrograph) 303, for power or the voltage signal of this Measurement and calibration device 302 output terminal, form normative reference value, this standard value is used for the calibration of probe-type microwave voltage measuring system;
Tested microwave voltage probe 304, for contacting the both positive and negative polarity of tested voltage, its characteristic impedance can be any, is generally 50 Ω or much larger than 50 Ω;
Microwave detector 305, becomes direct current signal for the microwave voltage signal transmitted by microwave voltage probe 304 by the mode of detection;
Wave filter 306, the high-frequency interferencing signal in outputing signal for filtering microwave detector 305;
Oscillograph 307, for exporting the reading of direct current signal to microwave detector 305.
The invention also discloses a kind of microwave voltage Measurement and calibration method based on said apparatus, the method comprises:
S1, to be positioned by probe positioning support 104 and probe cathode contact 1035, probe cathode contact 1036 pairs of microwave voltage probes 304;
The power that S2, microwave signal source 301 produce 101 is injected on calibration microstrip circuitry plate 103 by micro-the usheing to seat of the coaxial SMA of input end;
S3, be injected into microwave power on calibration microstrip circuitry plate 103 and 105 enter into power meter (or frequency spectrograph) 303 by micro-the usheing to seat of the coaxial SMA of output terminal;
S4, by microwave voltage probe 304 be connected to micro-power meter (or frequency spectrograph) 303 equivalent parallel of usheing to seat on 105 of the coaxial SMA of output terminal, both voltage should be equal;
S5, utilize the power reading of power meter (or frequency spectrograph) 303 can calculate 50 Ω conditions under microwave voltage V
0;
S6, the microwave voltage V utilizing this voltage to read non-50 omega probe-type microwave voltage measuring system
1calibrate;
S7, the standard microwave magnitude of voltage V recorded according to described power meter (or frequency spectrograph) 303
0the magnitude of voltage V of the d. c. voltage signal exported with described microwave detector 304
1, obtain the calibration curve of microwave signal.
The method calibration process comprises further: under fixed frequency point, continuously change the output power P of microwave signal source
i, obtain corresponding standard microwave magnitude of voltage V
0i, and record the reading V being calibrated thing (probe-type microwave voltage measuring system) simultaneously
1i, thus obtain the calibration curve V under a certain fixing frequency
1i-V
0i; Then, by frequency step to next calibration frequency point, repeat above-mentioned steps, obtain the calibration curve under new Frequency point; Repeat above-mentioned steps, until the frequency covered required by calibration and power level.
In sum, scheme of the present invention, based on equal pressure principle in parallel, make non-50 omega microwave voltage measuring system reading can be traceable to the power parameter of 50 Ω, improve calibration accuracy, any non-zero impedance probe-type microwave voltage measuring system can both be calibrated, improve the accuracy of non-50 omega microwave voltage measuring system calibration.
Obviously; the above embodiment of the present invention is only for example of the present invention is clearly described; and be not the restriction to embodiments of the present invention; for those of ordinary skill in the field; can also make other changes in different forms on the basis of the above description; here cannot give exhaustive to all embodiments, every belong to technical scheme of the present invention the apparent change of extending out or variation be still in the row of protection scope of the present invention.
Claims (10)
1. for a calibrating installation for probe-type microwave voltage measuring system, this device comprises microwave signal input end, microwave signal output terminal, it is characterized in that, this device described comprises further
Standard microstrip, probe negative pole tactile disk, probe cathode contact, probe cathode contact, probe positioning support;
Described standard microstrip, for transmitting the microwave signal inputted by microwave signal input end;
Described microwave signal output terminal, for exporting the microwave signal from standard microstrip;
Described probe negative pole tactile disk adopts corner cut design;
Described probe cathode contact, probe cathode contact and described probe positioning support, for positioning probe.
2. calibrating installation according to claim 1, is characterized in that, described in comprise standard microstrip, probe negative pole tactile disk, probe cathode contact and probe cathode contact standard microstrip circuit board be the Wide-Band Design, applicable frequency is DC ~ 18GHz.
3. calibrating installation according to claim 1, is characterized in that, described probe positioning support is glass fibre reinforced plastic support.
4. based on a microwave voltage Measurement and calibration system as claimed in claim 1, it is characterized in that, this system described comprises signal source, probe-type microwave voltage Measurement and calibration device, reference measure unit, probe-type microwave voltage measurement module;
Described probe-type microwave voltage Measurement and calibration device, for gathering the microwave signal produced from signal source, and forms the in parallel of reference measure unit and the probe-type microwave voltage measurement module be calibrated at signal output part;
Described reference measure unit, for recording the standard microwave magnitude of voltage V of the microwave signal from described probe-type microwave voltage Measurement and calibration device
0, as reference standard value;
The described probe-type microwave voltage measurement module be calibrated comprises microwave detector, data processing unit further;
Described microwave detector, for will be d. c. voltage signal in the microwave signal voltage transitions of the tested microwave voltage probe measurement gained of probe-type microwave voltage Measurement and calibration device output terminal with described reference measure unit equivalent parallel;
Described data processing unit, for recording the magnitude of voltage V of the voltage signal that described microwave detector exports
1, and according to the standard microwave magnitude of voltage V that described reference measure unit records
0the magnitude of voltage V of the d. c. voltage signal exported with described microwave detector
1, obtain the calibration curve of microwave signal.
5. microwave voltage Measurement and calibration system according to claim 4, is characterized in that, described microwave voltage probe is positioned by probe positioning support, probe cathode contact and the probe cathode contact in described probe-type microwave voltage Measurement and calibration device.
6. microwave voltage Measurement and calibration system according to claim 4, is characterized in that, the characteristic impedance of described tested microwave voltage probe can be any nonzero value.
7. microwave voltage Measurement and calibration system according to claim 4, is characterized in that, this device described comprises wave filter further, for the high-frequency interferencing signal in the d. c. voltage signal that microwave detector described in filtering exports.
8., based on a microwave voltage Measurement and calibration method for measuring system as claimed in claim 4, it is characterized in that, described the method comprises:
Described probe-type microwave voltage Measurement and calibration device is used to transmit the microwave signal produced from signal source;
Use the collection of described reference measure unit from the microwave signal of described probe-type microwave voltage Measurement and calibration device output terminal, and measure power or the voltage of microwave signal, as reference standard value;
The electric shock of probe positioning support, probe positive pole and probe negative pole is used to get an electric shock tested microwave voltage probe and described reference measure unit equivalent parallel, for detecting the microwave signal from described probe-type microwave voltage Measurement and calibration device output terminal;
Microwave detector is used to be d. c. voltage signal by the microwave signal voltage transitions of tested microwave voltage probe measurement;
The normative reference value recorded according to described reference measure unit and described microwave detector gained d. c. voltage signal, calculate the calibration value of described microwave voltage probe.
9. microwave voltage Measurement and calibration method according to claim 8, is characterized in that, described microwave voltage probe is positioned by probe positioning support, probe cathode contact and the probe cathode contact in described probe-type microwave voltage Measurement and calibration device.
10. microwave voltage Measurement and calibration method according to claim 8, is characterized in that, the characteristic impedance of described tested microwave voltage probe can be any nonzero value.
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| CN201510072783.9A CN104678339B (en) | 2014-12-30 | 2015-02-11 | Calibration device, system and method for probe type microwave voltage measurement system |
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| CN107219486A (en) * | 2017-05-24 | 2017-09-29 | 中国电子科技集团公司第四十研究所 | A kind of calibrating device and its calibration method tested for SAW filter |
| CN109845411A (en) * | 2016-10-18 | 2019-06-04 | 东京毅力科创株式会社 | Microwave output device and plasma processing apparatus |
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|---|---|
| CN104678339B (en) | 2017-05-17 |
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