CN1776893A - Electronic element press connection device - Google Patents
Electronic element press connection device Download PDFInfo
- Publication number
- CN1776893A CN1776893A CN 200510123524 CN200510123524A CN1776893A CN 1776893 A CN1776893 A CN 1776893A CN 200510123524 CN200510123524 CN 200510123524 CN 200510123524 A CN200510123524 A CN 200510123524A CN 1776893 A CN1776893 A CN 1776893A
- Authority
- CN
- China
- Prior art keywords
- load
- crimping
- pressurization
- pressing means
- pressue device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
To improve load precision at the time of crimping a component for a wide range from low load to high load without enlarging a head main body. A crimping head 1 is provided with a first pressing means (air cylinder) 18 crimping a component held by a crimping tool (cylinder rod) 19 in a first load range, a second pressing means (voice coil motor) 13 moving the first pressing means in a coaxial direction and crimping the component held by the crimping tool 19 in a second load range different from the first load range, a first regulation means (stopper) 16 causing the second pressing means to abut on the first pressing means and regulating relative movement of the first pressing means to the second pressing means at the time of crimping by the first pressing means and a second regulation means 18A regulating relative movement of the crimping tool 19 to the first pressing means 18 at the time of crimping by the second pressing means.
Description
Technical field
The present invention relates to a kind of electronic element press connection device, particularly be applicable to the electronic element press connection device that electronic component is installed on automatically printed circuit board, crystal liquid substrate or display panel substrate etc. preferably.
Background technology
As existing electronic element press connection device, the scheme of the crimping of conversion easily load as described below is disclosed in patent documentation 1.In patent documentation 1, as shown in Figure 9 when the crimping load is high load capacity, by fixture with steady pin 130 insert cooperate with guide hole 129A align snap in hole 129B, make under crimping tool 123 and crimping pedestal (block) the 119 relatively-stationary states, applying the pushing force of the first pushing bringing device to crimping pedestal 119 and crimping tool 123.In addition, when the crimping load is underload, under crimping tool 123 and crimping pedestal 119 unfixed states, apply the pushing force of the second pushing bringing device to crimping tool 123.
In patent documentation 2, disclosing can be by the multiple air-driven type crimp head (omitting diagram) of the air pushing electronic component of supplying with by electricity-gas adjuster (regulator).As additive method, also has the spring built-in crimp head that produces pushing force by spring.By can selectively installing to the multiple rigid body type crimping of using this load detection crimping mode is first-class, can corresponding bigger load range.Thereby can carry out efficient crimping operation.
Patent documentation 1: TOHKEMY 2002-43336 communique
Patent documentation 2: TOHKEMY 2004-55705 communique
But the electronic element press connection device of patent documentation 1 is plugged in steady pin 130 by cylinder Enter to snap in hole 129B, carry out the relative fixing of crimping tool 123 and welded part 119, and switch To higher load condition. Yet in the method fixedly during crimping tool 123 positioning accuracy request higher, And owing to when pushing, act on the shearing force of steady pin, can produce steady pin 130 when using for a long time Damage or snap in the wearing and tearing of hole 129B and must change.
In addition, owing to have the mechanism that makes steady pin 130 actions in crimp head, there is crimp head The problem of maximize, control is complicated. In addition, not to pass through load sensor at low-load range The detection of directly loading of 120 grades, but use the quadratic parameter that is called displacement (displacement) Open loop (open loop) control, have the relatively poor problem of load precision that applies.
The electronic element press connection device of patent documentation 2 is by changing crimp head with different the bearing of correspondence The lotus scope. Yet, because must be arranged on crimp head for the mechanism that changes crimp head, deposit Maximizing because of crimp head, and then movable part weight is increased and causing load to increase, perhaps because pressing The problem that joint replacing operation and causing is loaded and increased. In addition, also exist can not to an element with The problem of the load pressurization of different range.
Summary of the invention
The present invention proposes in order to solve above-mentioned existing issue, and purpose provides a kind of electronic element press connection device, and it has avoided the maximization of crimp head main body, can from the underload to the high load capacity on a large scale in load precision when guaranteeing the element crimping.
In order to solve above-mentioned problem, the present invention has: to being crimped the electronic component that instrument keeps, first pressue device that carries out crimping in first load range; Make described first compression bonding apparatus move in coaxial direction, to being crimped element that instrument keeps carries out crimping in second load range that is different from first load range second pressue device; And, also have: when carrying out crimping, be connected to and limit first restraint device that first pressue device and second pressue device relatively move on first pressue device by described first pressue device; And when carrying out crimping by described second pressue device, second restraint device that the restriction crimping tool and first pressue device relatively move.
The present invention also is provided with load detection device, the load when it detects respectively and by described first pressue device and second pressue device element that is crimped instrument and keeps is carried out crimping.
The present invention also is respectively equipped with first load detection device of the load of detection when carrying out crimping by described first pressue device; And detect by described second and add second load detection device that the load when carrying out crimping is put in crimping.
According to the present invention, do not need to be provided with special device, can carry out the conversion of load range, therefore avoided the maximization of crimp head main body, and can from the underload to the high load capacity on a large scale in load precision during the crimping of raising element.
Description of drawings
Fig. 1 be the expression crimp head of using first execution mode electronic element installation device want portion's pattern stereogram;
Fig. 2 is the mode sectional drawing of the crimp head of expression first execution mode;
Fig. 3 is the pressurization test section and the small profile that adds air cylinder of expression first execution mode in detail;
The crimp head mode sectional drawing of first execution mode when Fig. 4 is the pressurization of expression underload;
First execution mode crimp head mode sectional drawing when Fig. 5 is the pressurization of expression high load capacity;
Fig. 6 is the mode sectional drawing of the expression second execution mode crimp head;
The crimp head mode sectional drawing of second execution mode when Fig. 7 is the pressurization of expression underload;
The crimp head mode sectional drawing of second execution mode when Fig. 8 is the pressurization of expression high load capacity;
Fig. 9 is the summary profile of the existing crimp head of expression.
Symbol description
1 crimp head (electronic element press connection device)
2 X-axis guide rails
3 Y-axis guide rails
4 element identifying devices
5 electronic component supply devices
6 crimp head pedestals
7 Z axle turning motors
8 ball screw axles (ball screw shaft)
9 ball screw nuts
10 linear guide portion
11 θ turning motors
12 shaft joints
13,32 voice coil motors (voice coil motor)
14 Z-direction drive divisions
15 ball axle bushes
16 stopper sections
17 pressurization test sections
The 18 small air cylinders that add
19 piston rods (cylinder rod)
23 load sensors
25 splined shafts
Embodiment
Below, the execution mode that present invention will be described in detail with reference to the accompanying.
Fig. 1 be to use first embodiment of the invention electronic element press connection device electronic element installation device want portion's stereogram.
On this electronic element installation device, the element identifying device 4 with cmos camera (camera) or ccd video camera etc. that will be used to discern the electronic component state that is adsorbed is fixed on the precalculated position.In addition, in the front of this erecting device, be provided with the electronic component supply device 5 of the electronic component that is installed on substrate being supplied with usefulness.
Below, according to Fig. 2 the crimp head 1 of present embodiment is described.
That is, this Z-direction drive division 14 has the framework of general cylindrical shape, is fixed with described linear guide portion 10 among the figure of this framework periphery on the two positions up and down on right side.In addition, be fixed with horizontal extension 14A in this framework upper left-hand.
In crimp head 1,, on the horizontal part 6B of crimp head pedestal 6, be fixed with Z axle turning motor 7 in order to drive Z-direction drive division 14 in vertical direction.On this Z axle turning motor 7, be connected with ball screw axle 8 by not shown shaft joint, at the ball screw nut 9 that screws togather on this ball screw axle 8 on the horizontal extension 14A that is fixed in Z-direction drive division 14.So these Z-direction drive division 14 integral body can move in vertical direction by the spinning movement of Z axle turning motor 7.
Below, Z-direction drive division 14 is elaborated.
Framework top at Z-direction drive division 14 is fixed with θ turning motor 11.This θ turning motor 11 is merely able to be connected by shaft joint 12 and splined shaft (not shown) on the axle 13A of drive division of voice coil motor (second pressue device) 13 with transmitting revolving force, and can freely relatively move in Z-direction integratedly with Z-direction drive division 14.
Axle lower end at the drive division of voice coil motor 13 is fixedly connected with pressurization test section 17.It is can freely carry out rectilinear motion and rotate that pressurization test section 17 week relative to framework of Z-direction drive division 14 in supports by ball axle bush (ball bushing) 15, and the drive division of pressurize test section 17 and voice coil motor 13 can move and spinning movement by θ turning motor 11 becomes rotatable structure in Z-direction.
Be fixedly connected with the small air cylinder (first pressue device) 18 that adds of pneumatic type of built-in air bearing (airbearing) coaxially on the top (lower end) of pressurization test section 17.Be connected with three air hoses on the air cylinder in this small adding, air hose 22 and by electricity-gas adjuster (first load detection device, not shown) be connected on the air supply source, air hose 21 is connected air bearing and drives with on the air supply source, and the former can selectively switch between atmospheric pressure and malleation by electromagnetically operated valve.Air hose 20 is connected element absorption with on the vacuum suction source, the composed component adsorption section.In addition, the small air cylinder 18 that adds constitutes by air bearing transmit revolving force between its fixed part and movable part.
In the lower end of Z-direction drive division 14, directly be connected with and be used for small air cylinder 18 rise limitation that add in the stopper section in precalculated position (first restraint device) 16.
Below, with reference to Fig. 3 described pressurization test section 17 and the small internal structure that adds air cylinder 18 are elaborated.
Be fixed with the load sensor (second load detection device) 23 that is used to detect amount of pressurization (load) downwards in pressurization test section 17 inside.The test section downside slight pressurization of load sensor 23 be fixed with and be used for the spring 24 that prevents that load sensor 23 from damaging.Side opposite with load sensor 23 at spring 24 is fixed with splined shaft 25.This splined shaft 25 only can move in vertical direction by spline bearing 26 supportings.In splined shaft 25 and ends spring 24 opposite sides (lower end), be fixed with the small air cylinder 18 that adds.
The small piston rod (piston rod) that adds air cylinder 18 19 is supported by gas bearing 27, can be roughly under the zero state in resistance to sliding and carry out vertically-acting, thereby the impact load when element is installed suppresses lowlyer, so and because resistance to sliding is less also can carry out small pressurization.
The top of piston rod (crimping tool) 19 offers element absorption with adsorption hole 30, is connected on the not shown vacuum suction source by air hose 20.In addition, thrust bearing (thrust bearing) 31 is installed on the small top that adds air cylinder 18, the small air cylinder 18 that adds is being connected under the state on the described stopper section 16, the action that it is rotated by θ turning motor 11.
The present embodiment that has an above-mentioned primary structure with further reference to Fig. 4, Fig. 5 explanation is carried out the process of electronic element press connection installation action by crimp head 1.
In the electronic element installation device of described Fig. 1, thereby make the driving mechanism action of X-axis guide rail 2, Y-axis guide rail 3 make crimp head 1 move to the top of electronic component supply device 5, after element adsorbed, make this crimp head 1 move to the top of element identifying device 4, discern by 4 pairs of elements that are adsorbed of recognition device.
After finishing component recognition, make crimp head 1 be scheduled to installation portion, on the target installation site, carry out crimping and install along the electronic component that X-axis 2, Y-axis guide rail 3 move on the not shown substrate.
Below to this element crimping installation action,, and be elaborated as the situation of the high load capacity pressurization of second load range respectively just as the underload pressurization of first load range.
(1) situation of underload pressurization (for example arrive 0.1[N]～5[N] degree)
As shown in Figure 4, drive voice coil motor 13, pressurization test section 17 is moved to Z axle top,, its butt stopper section, upper end 16 is moved to limit it, keep its position by drawing the small air cylinder 18 that adds.Like this, by limit small mobile that air cylinder 18 makes progress that add with stopper section 16, drive 7 rotations of Z axle turning motor, make Z-direction drive division 14 drop to the precalculated position and when being installed in element on the substrate, can only pressurize by the small air cylinder (first pressue device) 18 that adds.
Smallly add air cylinder 18,, still can be rotated action by thrust bearing 31 even be connected to the state on the stopper section 16.For the small element that adds the piston rod 19 tops absorption of air cylinder 18, utilize the electricity-gas adjuster that connects by air hose 22 that the air pressure value of this cylinder 18 is carried out FEEDBACK CONTROL, thereby can carry out high-precision small pressurization.
(2) situation of high load capacity pressurization (for example, to 5[N]～50[N] degree)
As shown in Figure 5, drive voice coil motor 13, pressurization test section 17 is dropped to not and stopper section 16 position contacting from the state of Fig. 4.Under this state,, can utilize load sensor 23 to detect amount of pressurization by splined shaft 25 and the spring 24 that is connected with this splined shaft 25 by element pressurization to the absorption of piston rod 19 tops.By load sensor 23 detected amount of pressurization, to voice coil motor 13 output drive signals, the activation point of control voice coil motor 13 is to obtain suitable amount of pressurization by not shown control device.At this moment, the piston that is connected with the small piston rod 19 that adds air cylinder 18 is supplied with malleation by air hose 22, such as shown and small end of travel (second restraint device) 18A butt that adds air cylinder 18 upper inside, its position is fixed, and becomes the state that pressurization function is stopped thus.
Can obtain following effect according to as detailed above present embodiment.
Whether the voice coil motor 13 by big load usefulness makes small air cylinder 18 and stopper section 16 butts of adding, and thus, can utilize a crimp head 1 to pressurize from the small big load of loading.Consequently, can avoid causing load to increase because of the maximization or the replacing crimp head of crimp head.
Usually, use and to detect the load sensor of loading greatly to detect the precision of little load relatively poor, can't accurately control small pressurization.On the other hand, if use the high accuracy load sensor,, and can't detect high load capacity then because rated load is less in order accurately to control amount of pressurization.In the present embodiment and since respectively have underload that use with control system use under high load and pressurised driving source, thereby can from the underload to the high load capacity, carry out high-precision control.
In the present embodiment, by compact actuator (the small air cylinder that adds) is arranged on the crimp head top ends, the quality of drive division is less to get final product, and can be suppressed to impact load very little for low pressurised driving source.
Similarly, the small air bearing can be served as bearing etc. by being provided for small-sized first pressue device of underload pressurization in addition.Therefore, do not need be used to the to load bearing portion of drive unit such as large-scale air bearing is reduced resistance to sliding, can use rolling bearing cheaply.Therefore, also has the advantage that can reduce the crimp head cost.
In addition, as mentioned above, carry out the switching of underload and high load capacity with the voice coil motor 13 of drive source, switch special driver, avoided the problem of crimp head maximization and do not need to use by using as the height pressurization.
Below with reference to Fig. 6 second embodiment of the invention is described.
The crimp head of second execution mode except contain voice coil motor (second pressue device) 13 in Z-direction drive division 14, is the same with first execution mode, therefore adopts identical symbol and omits explanation.
In second execution mode, on the lower end position of the Z-direction drive division 14 under the voice coil motor 13, directly be connected with stopper section 16.And the upper end butt of second voice coil motor (first pressue device) 32 on this stopper section 16 and the small pressing mechanism of formation 29 tops thus, limits it and further moves in Z-direction.Contain pressurization test section 17 in this small pressing mechanism 29, this presses test section 17 by the peripheral part inner face of spline 28 with respect to this small pressing mechanism 29, and be in and can move at the free straight line of Z-direction, and the state that the rotation of θ direction is restricted.
In the present embodiment, be fixed in the θ turning motor 11 of Z-direction drive division 14 upper outside, with first execution mode similarly, can transmit revolving force to the axle 13A of voice coil motor 13 by shaft joint 12 and not shown splined shaft and splined nut, and can move freely in Z-direction integratedly with this drive division 14.The top (lower end) of an opposite side of the axle 13A of voice coil motor 13 is connected with described small pressing mechanism 29 and fixes.
This small pressing mechanism 29 is elaborated, and portion is fixed with the voice coil motor 32 of small pressurization usefulness within it, and thereunder, pressurization test section 17 is fastened on the axle as the described voice coil motor 32 of first pressue device.This test section 17 that pressurizes as mentioned above, is bearing in small pressing mechanism 29 inside by spline 28.The drive division of being made up of pressurization test section 17 and voice coil motor 32 etc. can move in vertical direction, and can rotate by 11 spinning movements of θ turning motor.
In small pressing mechanism 29 upper ends, thrust bearing 31 is installed, even should be connected on the stopper section 16 by small pressing mechanism, still can be rotated action.
The pressurization test section 17 of present embodiment, except offer the adsorption hole of element absorption usefulness on splined shaft (crimping tool) 25 tops, and by air hose 20 with beyond not shown vacuum suction source is connected, with first execution mode that the above-mentioned Fig. 3 of utilization describes substantially is identical, therefore adopts same-sign and omits explanation.
Below, the element crimping installation action of present embodiment is described.
(1) situation of underload pressurization (for example, to 1[N]～5[N] degree)
As shown in Figure 7, drive voice coil motor 13, make side shifting on the Z axle such as pressurization test section 17 grades, make small pressing mechanism 29 (voice coil motor 32) and stopper section 16 butts, limiting rises moves, and keeps its position.By limit small pressing mechanism 29 at last side direction, when pressurization, can only pressurize by small pressing mechanism 29.Have thrust bearing 31 in small pressing mechanism 29 upper ends, the spinning movement of θ direction is unrestricted.Drive voice coil motor 32, by load sensor 23, can measure the amount of pressurization that 32 pairs of voice coil motors are adsorbed in the element on splined shaft 25 tops by the splined shaft 25 of pressurization test section 17 and the spring 24 that is connected in this 25 upper end.According to by load sensor 23 detected amount of pressurization, control the driving amount of voice coil motor 32, thus, can carry out small pressurization.
(2) situation of high load capacity pressurization (for example, to 5[N]～50[N] degree)
As shown in Figure 8, drive voice coil motor 13, small pressing mechanism 29 is dropped to not and stopper section 16 position contacting from the state of Fig. 7.At this moment, the voice coil motor 32 of small pressurization usefulness, driving its movable part test section 17 that will pressurize like that as shown is drawn on the abutting part (second restraint device) 34 of lower end, and, by butt its upper end with fixed-site, limit relatively moving of splined shaft (crimping tool) 25 and voice coil motor 32, and the pressurization function of this motor 32 is stopped.
Under this state,, can measure the amount of pressurization of voice coil motor (second adds crimping puts) 13 by load sensor 23 by splined shaft 25 and the spring 24 that is connected in this splined shaft 25 by the element that is adsorbed in splined shaft 25 is pressurizeed.To voice coil motor 13 output drive signals, the position of control voice coil motor 13 is to obtain suitable amount of pressurization by not shown control device for load sensor 23 detected amount of pressurization.
According to above-mentioned present embodiment, with a load sensor 23 can detect underload with and the amount of pressurization of two sides' of use under high load pressue device, therefore compare with first execution mode, accuracy of detection decreases still can reduce the length of crimp head.
In addition, in aforementioned embodiments, air cylinder (air cylinder) 18 is used for small load pressurization, and voice coil motor 13 is used for high load capacity pressurization, but also can conversely voice coil motor be used for small pressurization, air cylinder is used for the pressurization of height (greatly) load.
In addition, for the high load capacity drive source, use θ turning motor also capable of being combined and ball screw replace voice coil motor 13, in this case, the Z-direction driving also can be constituted not only drives with also using and the common drive source as pressurised driving as the Z axle with θ turning motor and ball screw.
In addition, in described second execution mode, pressue device can all use voice coil motor for underload and high load capacity, but also can be for wherein a side or both sides use air cylinder.
In addition, θ turning motor 11 is connected with a series of load control mechanism portion by spline, so the fixing of himself also can be undertaken by crimp head pedestal 6.
In addition,, except air cylinder and voice coil motor, also can use piezoelectricity element such as (piezo) electric field induced strain or linear motor etc., also can use replacement load sensors such as piezoelectric element as direct plus-pressure checkout gear as each pressue device.
Claims (3)
1, a kind of electronic element press connection device is characterized in that, has:
The electronic element press connection that the instrument that will be crimped in first load range keeps is in first pressue device of substrate;
Described first pressue device is moved in coaxial direction, and the element that the instrument that will be crimped in being different from second load range of first load range keeps is crimped on second pressue device of substrate;
When carrying out crimping, be connected to and limit first restraint device that first pressue device relatively moves to second pressue device on first pressue device by described first pressue device;
When carrying out crimping by described second pressue device, second restraint device that the restriction crimping tool and first pressue device relatively move.
2, electronic element press connection device as claimed in claim 1 is characterized in that, is provided with load detection device, is used for detecting respectively the load in the time of will being crimped element that instrument keeps and being crimped on substrate by described first pressue device and second pressue device.
3, electronic element press connection device as claimed in claim 2, it is characterized in that, be respectively arranged with first load detection device of the load of detection when carrying out crimping by described first pressue device, and second load detection device that detects the load when carrying out crimping by described second pressue device.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004-333278 | 2004-11-17 | ||
| JP2004333278A JP4522826B2 (en) | 2004-11-17 | 2004-11-17 | Electronic component crimping equipment |
| JPJP2004333278 | 2004-11-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1776893A true CN1776893A (en) | 2006-05-24 |
| CN100423220C CN100423220C (en) | 2008-10-01 |
Family
ID=36627055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101235240A Active CN100423220C (en) | 2004-11-17 | 2005-11-17 | Electronic element press connection device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4522826B2 (en) |
| CN (1) | CN100423220C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102782594A (en) * | 2010-03-30 | 2012-11-14 | 藤仓橡胶工业株式会社 | Disturbance suppression load control device |
| CN103140129A (en) * | 2011-11-25 | 2013-06-05 | 雅马哈发动机株式会社 | Surface installation device and head part driving control method |
| CN105307473A (en) * | 2015-12-04 | 2016-02-03 | 上海斐讯数据通信技术有限公司 | Assembling tool and assembling method thereof |
| CN112514550A (en) * | 2018-08-01 | 2021-03-16 | Thk株式会社 | Actuator |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006245239A (en) * | 2005-03-02 | 2006-09-14 | Juki Corp | Wide-range pressurizing mounting head |
| JP5095542B2 (en) * | 2008-07-24 | 2012-12-12 | Ｊｕｋｉ株式会社 | Electronic component mounting equipment |
| JP2010131680A (en) * | 2008-12-02 | 2010-06-17 | Ueno Seiki Kk | Holding means driver |
| JP5828943B1 (en) * | 2014-08-11 | 2015-12-09 | 株式会社新川 | Electronic component mounting equipment |
| US10573621B2 (en) * | 2016-02-25 | 2020-02-25 | Semiconductor Energy Laboratory Co., Ltd. | Imaging system and manufacturing apparatus |
| JP2017227318A (en) * | 2016-06-21 | 2017-12-28 | 薫 岡田 | Voice coil motor with auxiliary pneumatic function |
| JP2018046732A (en) * | 2016-09-12 | 2018-03-22 | 薫 岡田 | Linear motor with auxiliary pneumatic function |
| US11134595B2 (en) | 2018-09-05 | 2021-09-28 | Assembleon B.V. | Compliant die attach systems having spring-driven bond tools |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3089392B2 (en) * | 1995-07-13 | 2000-09-18 | 株式会社新川 | Bonding equipment |
| JP3707837B2 (en) * | 1995-09-12 | 2005-10-19 | Ｊｕｋｉ株式会社 | Chip mounter |
| JP3365892B2 (en) * | 1995-10-27 | 2003-01-14 | 松下電器産業株式会社 | Electronic component mounting equipment |
| JP3478020B2 (en) * | 1996-10-04 | 2003-12-10 | セイコーエプソン株式会社 | Liquid crystal device manufacturing apparatus and liquid crystal device manufacturing method |
| JP2877120B2 (en) * | 1996-12-27 | 1999-03-31 | 日本電気株式会社 | Component mounting equipment |
| JP3774012B2 (en) * | 1997-01-20 | 2006-05-10 | ヤマハ発動機株式会社 | Shock absorber for mounting head |
| JPH10340931A (en) * | 1997-06-05 | 1998-12-22 | Toray Eng Co Ltd | Chip bonding tool |
| JP3878322B2 (en) * | 1998-04-03 | 2007-02-07 | シーケーディ株式会社 | Air bearing cylinder and semiconductor manufacturing apparatus |
| JP3961162B2 (en) * | 1999-08-25 | 2007-08-22 | 松下電器産業株式会社 | Electronic component mounting apparatus and electronic component mounting method |
| JP4338860B2 (en) * | 2000-01-21 | 2009-10-07 | ヤマハ発動機株式会社 | Surface mount control method and apparatus |
| JP2002246422A (en) * | 2001-02-16 | 2002-08-30 | Shibaura Mechatronics Corp | Electronic component pressure bonder and electronic component bonding method |
| TW559963B (en) * | 2001-06-08 | 2003-11-01 | Shibaura Mechatronics Corp | Pressuring apparatus of electronic device and its method |
| JP3760898B2 (en) * | 2002-07-18 | 2006-03-29 | 松下電器産業株式会社 | Electronic component crimping apparatus and electronic component crimping method |
| JP3669348B2 (en) * | 2002-07-18 | 2005-07-06 | 松下電器産業株式会社 | Electronic component crimping apparatus and electronic component crimping method |
| JP2004158743A (en) * | 2002-11-08 | 2004-06-03 | Juki Corp | Component holding device |
| JP2004273687A (en) * | 2003-03-07 | 2004-09-30 | Seiko Epson Corp | Compression method, compression device, and process and system for manufacturing electrooptic device |
| JP4359545B2 (en) * | 2004-09-01 | 2009-11-04 | パナソニック株式会社 | Contact load control method for electronic component mounting apparatus |
-
2004
- 2004-11-17 JP JP2004333278A patent/JP4522826B2/en active Active
-
2005
- 2005-11-17 CN CNB2005101235240A patent/CN100423220C/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102782594A (en) * | 2010-03-30 | 2012-11-14 | 藤仓橡胶工业株式会社 | Disturbance suppression load control device |
| CN102782594B (en) * | 2010-03-30 | 2014-08-27 | 藤仓橡胶工业株式会社 | Disturbance suppression load control device |
| CN103140129A (en) * | 2011-11-25 | 2013-06-05 | 雅马哈发动机株式会社 | Surface installation device and head part driving control method |
| CN103140129B (en) * | 2011-11-25 | 2015-10-28 | 雅马哈发动机株式会社 | Surface-mount devices and head drived control method |
| CN105307473A (en) * | 2015-12-04 | 2016-02-03 | 上海斐讯数据通信技术有限公司 | Assembling tool and assembling method thereof |
| CN105307473B (en) * | 2015-12-04 | 2018-03-27 | 上海斐讯数据通信技术有限公司 | Assembly fixture and its assembly method |
| CN112514550A (en) * | 2018-08-01 | 2021-03-16 | Thk株式会社 | Actuator |
| CN112514550B (en) * | 2018-08-01 | 2022-05-31 | Thk株式会社 | Actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4522826B2 (en) | 2010-08-11 |
| CN100423220C (en) | 2008-10-01 |
| JP2006147702A (en) | 2006-06-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1776893A (en) | Electronic element press connection device | |
| CN1278796C (en) | Hortzontal regulation device of auxiliarg apparatus | |
| CN107639638B (en) | Key mechanical arm based on machine vision | |
| CN1151910C (en) | Workpiece handling robot | |
| CN100337905C (en) | Manufacturing system for microstructure | |
| CN101811649B (en) | Automatic reciprocating type lifting gear | |
| CN102085656B (en) | Right-angle coordinate robot | |
| CN1717200A (en) | Parallel-link table and X-ray tomographic imaging apparatus | |
| CN108356458B (en) | Three-axis real-time tracking welding device capable of rotating symmetrically for welding | |
| CN101068706A (en) | Adjusting device, air deflecting system , control member and device enabling aerodynamic resistance of a semi-trailer to be reduced | |
| JP2008185583A (en) | Electronic component transport device and method | |
| CN206632646U (en) | A kind of press-loading device for vehicle electric power-assisted steering device | |
| CN1612676A (en) | Electronic component mounting apparatus | |
| CN1499572A (en) | Part retainer | |
| CN1937202A (en) | Silicon wafer prealigning device | |
| CN101398278A (en) | Stiffness variable multi-shaft docking mechanism for rocket | |
| CN101037023A (en) | Automation hot- press machine | |
| CN103235492A (en) | PCB and film alignment device | |
| CN107855791A (en) | A kind of multi-parallel flexible cable formula optical fabrication device | |
| CN2856980Y (en) | Impact testing machine | |
| CN1956106A (en) | Large stroke pricision working platform device and drive method | |
| CN1939717A (en) | Silk screen printing device | |
| CN107378336A (en) | A kind of various dimensions welding robot | |
| CN101472394B (en) | Contraposition device | |
| CN203191682U (en) | PCB (printed circuit board) and film aligning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |