CN1499572A - Part retainer - Google Patents
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- CN1499572A CN1499572A CNA200310114846XA CN200310114846A CN1499572A CN 1499572 A CN1499572 A CN 1499572A CN A200310114846X A CNA200310114846X A CN A200310114846XA CN 200310114846 A CN200310114846 A CN 200310114846A CN 1499572 A CN1499572 A CN 1499572A
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Abstract
The component holding device is provided with a suction nozzle 12 which holds a component by means of its front end section by suction, a moving body 14 which is supported in a vertically movable state, and a first vertically moving means 20 which drives the moving body 14 in the vertical direction. The device is also provided with a second vertically moving means 30 which is installed to the moving body 14 and, at the same time, drives the nozzle 12 in the vertical direction from the moving body 14; a pressurizing force detecting means 15 which detects the pressurizing force of the front end section of the nozzle 12; and an action control means 60 which controls the actions of the first and second vertically moving means 20 and 30. The control unit 60 has a pressurization correcting and controlling section which drives the second vertically moving means 30 upward based on the pressurizing force detected by means of the pressurizing force detecting means 15 when the first vertically moving means 20 drives the moving body 14 downward.
Description
Technical field
The present invention relates to spare parts maintaining equipment, be installed in the spare parts maintaining equipment on the parts presenter of carrying when particularly relating to the part assembling.
Background technology
In patent documentation 1, a kind of spare parts maintaining equipment 110 is disclosed, as shown in Figure 5, this spare parts maintaining equipment 110 has: the single shaft platform 112 that the movable objective table 111 that drives is along the vertical direction arranged; By there not being the single shaft platform 113 of drive source, can be supported up or down with respect to movable objective table 111 attraction mouth 114; Detect the force cell (load cell) 115 of the pressure on the part C that this attraction mouth 114 keeps; Move the structure that attracts mouth 114 and support it to force cell 115 1 sides, offset the extension spring 119 of the influence of the deadweight that attracts mouth 114 grades; Be arranged on the compression spring 116 that attracts between mouth 114 and the force cell 115; According to the output of force cell 115, detect the test section 117 that attracts the pressure on the mouth 114; And according to the pressure that detects, the controller 118 of the upper-lower position of control single shaft platform 112.
[patent documentation 1]
Te Kaiping 8-330790 communique
Disclosed existing technology constitutes like this in the patent documentation 1: on movable objective table 111, utilize single shaft platform 113, can make and attract mouth 114 to move up and down, carry out pressure detecting by force cell 115, so can follow the tracks of the pressure control that pressure changes in real time, the driving weight of movable objective table 111 increases, for example, the work switching that stops, rising rapidly and descend of movable objective table etc. has become difficulty, the unfavorable condition that exists response to descend.Therefore, might surpass the pressure that becomes target, have the unfavorable condition that is difficult to set high-precision pressure.
The objective of the invention is to improve the setting accuracy of pressure.
Summary of the invention
The first aspect of invention has: the adsorption mouth (12) that keeps part with leading section absorption; Can be supported up or down moving body (14); Drive first of moving body along the vertical direction and move up and down unit (20); Be installed in the moving body, drive second of adsorption mouth along the vertical direction from this moving body simultaneously and move up and down unit (30); The pressure sensing cell (15) of the pressure of the leading section of detection adsorption mouth; And the control of working unit (60) of carrying out first and second work that moves up and down unit control, control of working unit adopts the structure that pressurization Correction and Control parts are arranged, these pressurization Correction and Control parts move up and down the decline of carrying out moving body in the unit when driving first, the pressure that detects according to pressure sensing cell moves up and down the unit driving of rising to second.
In said structure, move up and down the decline of carrying out moving body in the unit by first and drive, that accompanies with it second moves up and down the unit and adsorption mouth descends.Then, the leading section of adsorption mouth is in case contact with the below, just by the rising of pressure sensing cell detected pressures.Therefore, second moves up and down the unit to the adsorption mouth driving of rising, and suppresses or avoid the increase of pressure.
The second aspect same structure of first aspect that has and invent of invention, adopt such structure simultaneously: having with along the vertical direction axle is the center, carries out the anglec of rotation regulon (50) that the anglec of rotation of adsorption mouth is regulated.
In said structure, have and the same effect of first aspect of inventing, keeping on the adsorption mouth leading section under the situation of part simultaneously, utilize the rotation of anglec of rotation regulon to drive adsorption mouth, regulate its direction.
The same structure of first aspect that the third aspect of invention has and invents, adopt such structure simultaneously: retractable elastomer (17) is inserted between pressure sensing cell (15) and the adsorption mouth, and the overload that is provided with pressure sensing cell prevents with backstop (13a), be used for adsorption mouth is moved in the scope of pressure sensing cell one side, limit moving of this adsorption mouth.
In said structure, has the same effect of first or second aspect with invention, simultaneously when pressurizeing operation with the adsorption mouth leading section, adsorption mouth is compresses elastomeric on one side, on one side to pressure sensing cell one side shifting, will be added on the pressure sensing cell with the elastic force that the pressure that produces on the adsorption mouth leading section equates.
On the other hand, usually, pressure sensing cell determines durable measurement range according to its accuracy of detection of loading.
Therefore, adsorption mouth towards pressure sensing cell near the scope that moves in, along with this near and the elastic force that increases is no more than the position of above-mentioned durable load, the overload of moving that the restriction adsorption mouth is set prevents to use backstop, seeks to protect pressure sensing cell.
First, second that the fourth aspect of invention has and invents or the same structure of the third aspect, adopt such structure simultaneously: the benchmark memory unit that control of working unit (60) has adsorption mouth when non-pressurised and the output of the pressure sensing cell during non-absorption stores as fiducial value, pressurization Correction and Control parts are according to the variation of fiducial value, move up and down the unit driving of rising to second.
The fourth aspect of invention has first, second or the same effect of the third aspect with invention, utilizes the benchmark memory unit simultaneously, and the output of the pressure sensing cell when the storage adsorption mouth is non-pressurised, during non-absorption is as fiducial value.During so-called when non-pressurised, non-absorption, for example, when the main power source of device is connected, can be after operation begins input, also can judge, can also judge according to pressurization and the having or not of work order that attracts by detecting pressurization and attraction.
And, after the storage, deducted pressure based on the pressure of fiducial value from detected pressures based on the output of pressure sensing cell, as the pressure of the reality that on the leading section of adsorption mouth, produces, carry out the second work control that moves up and down the unit.
The invention the 5th aspect have and invent first, second, the 3rd or the same structure of fourth aspect, adopt such structure simultaneously: second moves up and down the unit has by its driving of a certain direction up and down, add press contacts, the mobile limiting unit that moves of the object that restriction is moved, when the pressurization Correction and Control parts of mobile limiting unit surpass the decline of regulation in detected pressures under the situation of threshold value, carry out second and move up and down the work control that the unit begins to rise and drives, control of working unit has when decline noise retentive control parts, noise retentive control parts are the work control beginning of carrying out to pressurization Correction and Control parts since first driving that moves up and down the unit during this decline, carry out work control, this work control is that the press contacts that adds that limiting unit is moved in restricted passage is carried out second the moving of the object that moves up and down that moves up and down the unit.
Above-mentioned what is called " object that this moves up and down ", be meant second move up and down object that the unit drives up and down, be adsorption mouth.In addition, second moves up and down the unit under situation about driving by the unit that keeps adsorption mouth to use, and comprises this holding unit.
In addition, threshold value during so-called decline is meant the desired value of for example pressurizeing.
In said structure, has the same effect of first, second, third or fourth aspect with invention, simultaneously move up and down the unit when beginning to drive first, the work control of noise retentive control parts during by decline, second moves up and down the add press contacts of unit by mobile limiting unit, and this mobile object that comprises adsorption mouth is fixed.
Then, adsorption mouth is descended, when the pressure that produces on the leading section surpasses when descending threshold value,,, seek to reduce pressure this mobile object that comprises adsorption mouth driving of rising by the work control of pressurization Correction and Control parts.
The same structure in the 5th aspect that the 6th aspect of invention has and invents, adopt such structure simultaneously: control of working unit has when rising noise retentive control parts, noise retentive control parts are when being driven by first rising that moves up and down the moving body that carries out the unit during this rising, under the situation when the detected pressures of pressure sensing cell reaches the rising of regulation below the threshold value, by the press contacts that adds of mobile limiting unit, limit second work of the moving control that moves up and down the object that the unit moves up and down.
Threshold value during above-mentioned so-called the rising for example is the pressurization desired value or hang down the value of some than it.
In said structure, has the same effect in the 5th aspect with invention, moving up and down the unit by first simultaneously rises moving body, the leading section of adsorption mouth discharges from pressurized state, if this detected pressures drops to when rising below the threshold value, the work control of mouth retentive control parts during then by rising, second moves up and down the unit will comprise that this mobile object pressurization of adsorption mouth is fixed on mobile limiting unit one side.
Description of drawings
Fig. 1 is the profile of the electronic component holding device of expression working of an invention form.
Fig. 2 is the block diagram of the control system of disclosed electronic component holding device in the presentation graphs 1.
Fig. 3 is the flow chart of down maneuver of the adsorption mouth of expression electronic component holding device.
Fig. 4 is the flow chart of down maneuver of the adsorption mouth of expression electronic component holding device.
Fig. 5 is the structure chart of conventional example.
Embodiment
(general structure of example)
According to Fig. 1 to Fig. 4 example of the present invention is described.The electronic component holding device (spare parts maintaining equipment) 10 of example of the present invention for example can be used for keeping the so small-sized electronic component C of semiconductor chip, concerning the mounting object thing of regulation, from the top to the electronic component C that kept exert pressure with regulation.
As shown in Figure 1, electronic component holding device 10 has: be supported on the X-Y travel mechanism (not shown), can the mobile body frame 11 of along continuous straight runs (XY direction); Have the mouth retainer 13 that electronic component C absorption is remained on the adsorption mouth 12 on the leading section; Can be supported on the movable carriage (moving body) 14 on the body frame 11 up or down; Drive first of movable carriage 14 along the vertical direction and move up and down unit 20; Be arranged on the movable carriage 14, drive second of mouth retainer 13 along the vertical direction from this movable carriage 14 simultaneously and move up and down unit 30; Make the air-breathing suction unit 40 of leading section of adsorption mouth 12; The force cell (pressure sensing cell) 15 of the pressure on the leading section of detection adsorption mouth 12; With along the vertical direction axle is that the anglec of rotation regulon 50 that the anglec of rotation of adsorption mouth 12 is regulated is carried out at the center; Prevent that described from behind air bearing 36 air discharged from flowing to the shutter 16 of leading section one side of adsorption mouth 12; And the control of working unit 60 of carrying out the work control of each structure.Below describe each one in detail.
(body frame)
(movable carriage)
(first moves up and down the unit)
First moves up and down unit 20 has: move up and down motor 21 towards the state configuration of below at the revolvingly driven type on the top of body frame 11 with output shaft; Detect the encoder 22 of its anglec of rotation; Be connected on the output shaft that moves up and down motor 21 by coupling, rotating the screw rod rotating shaft 23 that is supported on freely on the body frame 11 under the state along the vertical direction; Be fixed on movable carriage 14 that this screw rod rotating shaft 23 matches on nut 24; And the decline that connects movable carriage 14 and body frame 11 prevents with spring 25.The above-mentioned motor 21 that moves up and down adopts pulse motor or servomotor.
Utilize said structure, drive,, carry out movable carriage 14 location along the vertical direction according to the anglec of rotation by the rotation that moves up and down motor 21.In addition, above-mentioned encoder 22 is exported to control of working unit 60 with its detection signal, and control of working unit 60 is discerned the present position of movable carriage 14 according to this detection signal, moves up and down the work control of motor 21.
In addition, descending prevents from often movable carriage 14 to be applied tension force towards the top with spring 25, and this output shaft is under the situation of free state when the unexpected non-energising of not using when moving up and down motor 21 or causing by having a power failure etc., prevents movable carriage 14 declines.
(adsorption mouth and mouth retainer)
(suction unit)
Above-mentioned air intake duct 41 is supported on back described second abreast along its length direction and above-below direction and is moved up and down on the shell of revolution 31 of unit 30.In addition, air intake duct 41 forms spline along its length in its outside, cooperates with splined nut on being arranged on shell of revolution 31.On the other hand, shell of revolution 31 along with upper and lower to center line serve as that axle is supported on the movable carriage 14 revolvably, air intake duct 41 can move up and down with respect to shell of revolution 31, simultaneously is rotated action with shell of revolution 31.
One end of aspirating air pipe 43 is connected on the movable body 42, and the other end is connected as on the (not shown)s such as the asepwirator pump of source of suction or displacer.
(second moves up and down the unit)
Second moves up and down unit 30 has: can be with upper and lower to being shell of revolution 31 on center rotation and the lower inside that can be supported on movable carriage 14 up or down; Be fixedly connected on the fulcrum 33 on the upper end of shell of revolution 31 along the center line of this shell of revolution 31; Drive the voice coil motor 34 of shell of revolution 31 along the vertical direction with respect to movable carriage 14 by this fulcrum 33; And the scope that the moves up and down setup unit (mobile limiting unit) 35 of setting the scope that moves up and down of shell of revolution 31.
Shell of revolution 31 forms inside and is hollow, rotary body shape that its underpart external diameter is littler than top external diameter.The bottom of such shell of revolution 31 utilizes the air bearing 36 that is arranged on the movable carriage 14, with upper and lower to be the center can rotate reach supported up or down.To be internal diameters lack bigger sleeve than the external diameter of shell of revolution 31 bottoms to air bearing 36, air is supplied with and shell of revolution 31 between the gap in, shell of revolution 31 can be remained on its center.Such air bearing 36 is owing to support shell of revolution 31 non-contactly, so do not rub, shell of revolution 31 is rotated sleekly and moves up and down.
In addition, shell of revolution 31 upper lateral part within it forms the locker room, and forms the through hole that penetrates into the bottom from the locker room.Above-mentioned splined nut 32 is arranged in such through hole, the air intake duct 41 of through hole that can support break-through up or down.In addition, utilize this splined nut 32, can make air intake duct 41 rotations in the time of with shell of revolution 31 rotations.
Be configured in the inside upper surface central authorities of the locker room of shell of revolution 31 as the force cell (load cell) 15 of pressure sensing cell.The pressure sensitive portion of force cell 15 is towards the below, and the upper ledge contact that is configured in the contact member 18 that is provided with on the more upper end of the elastomeric compression spring 17 of conduct on the top of above-mentioned movable body 42 is on this pressure sensitive portion.Can use such compression spring 17, promptly as shown in the figure, even movable body 42 is positioned under the situation of position, lower side, contact member 18 also can often contact on the pressure sensitive portion of force cell 15 and the compression spring of the such natural length of preestablished pressure.Owing to constitute like this,, can detect so if pressurize on the leading section of adsorption mouth 12, then this pressure is passed to force cell 15.
In addition, adsorption mouth 12, mouth retainer 13, air intake duct 41, shell of revolution 31, fulcrum 33 and force cell 15 all are configured on the same axle, so the pressing force from the leading section of adsorption mouth 12 can be directly passed to force cell 15 with not losing, so can be with the forefront pressure of higher accuracy detection adsorption mouth 12.
The bottom of fulcrum 33 is connected on the shell of revolution 31, penetrates into the top of movable carriage 14 simultaneously, and its length direction is parallel on the voice coil motor 34 of inside upper part configuration that above-below direction is supported on movable carriage 14.Such voice coil motor 34 has: be fixedly connected on the bobbin 34a on the fulcrum 33; Fixedly be assemblied in the coil 34b on the top circumference of bobbin 34a; Be fixed on the cover 34c on the movable carriage 14; Be fixed on the cover 34c, be inserted in simultaneously the inboard of coil 34b loosely, and the fulcrum 33 intercalations tubular yoke 34d in the heart hole therein; And be fixed on the cover 34c, coil 34b is inserted in its inboard tubular magnet 34e loosely simultaneously.Such voice coil motor 34 can drive fulcrum 33 by coil 34b and bobbin 34a along the vertical direction according to the work control of control of working unit 60, is used for the pressure control of adsorption mouth 12.In addition,, do not hinder the spinning movement of fulcrum 33, can carry out anglec of rotation adjusting sleekly by the adsorption mouth 12 of fulcrum 33 though voice coil motor 34 drives fulcrum 33 along the vertical direction.
Moving up and down scope setup unit 35 has: have the function as the mobile limiting unit of shell of revolution 31 and adsorption mouth 12, be integrally formed upper flange 35a and lower flange 35b at the above and below and the fulcrum 33 of voice coil motor 34; Be arranged on thrust bearing 35c on the movable carriage 14 with state with respect to the upper surface of upper flange 35a; And be arranged on thrust bearing 35d on the movable carriage 14 with state with respect to the lower surface of lower flange 35b.
Utilize voice coil motor 34 to drive fulcrum 33 upward, position when above-mentioned upper flange 35a contacts with thrust bearing 35c is the upper limit position of shell of revolution 31, drive fulcrum 33 downwards, the position when lower flange 35b contacts with thrust bearing 35d is the lower position of shell of revolution 31.In addition, utilize each thrust bearing 35c, 35d,, also can carry out the spinning movement of fulcrum 33 sleekly even at each flange portion 35a, when 35b is contact condition.
(anglec of rotation regulon)
Anglec of rotation regulon 50 has: be connected second splined shaft 51 that moves up and down on fulcrum 33 upper ends of unit 30 with one heart by coupling and fulcrum 33; By the splined nut 52 that is arranged on its inboard, bottom, can support the tubular axis body 53 of splined shaft 51 up or down; Output shaft is connected on the upper end of this tubular axis body 53 and is configured in the angular adjustment motor 54 on the top of body frame 11 by coupling; And the encoder 55 that detects the anglec of rotation of this angular adjustment motor 54.Angular adjustment motor 54 adopts pulse motor or servomotor.
The output shaft of splined shaft 51, tubular axis body 53 and angular adjustment motor 54 is concentric fully, its result, and they and fulcrum 33, shell of revolution 31, air intake duct 41 and adsorption mouth 12 are fully with one heart.
On the other hand, encoder 55 is exported to control of working unit 60 with the rotation angle value of the output shaft of angular adjustment motor 54, control of working unit 60 is rotated drive controlling according to this value, so that make the rotation of the angle value that angular adjustment motor 54 stipulates.Its result, output shaft from angular adjustment motor 4, by tubular axis body 53, splined shaft 51, fulcrum 33, shell of revolution 31, air intake duct 41 and mouth retainer 13, the rotation of carrying out adsorption mouth 12 drives the direction that can regulate the electronic component C that is adsorbed on the leading section that remains on adsorption mouth 12.
(shutter)
(control of working unit)
As shown in Figure 2, control of working unit 60 has: the ROM60a that writes the control program of the described various functions in back of carrying out electronic component holding device 10 or various work; According to control program, centralized control moves up and down the CPU60b of the work of each one such as motor 21, voice coil motor 34, angular adjustment motor 54 and suction unit 40; And the deal with data of CPU60b is stored in RAM60c in the service area.
In addition, in control of working unit 60, be provided with simultaneously: the setting input unit 64 that carries out the input setting of necessary data in this work control or the indication input of work beginning etc.; According to control signal from control of working unit 60, each drive circuit 61,62,63 that each motor 21,34,54 is driven; And the output of encoder 22,25, force cell 15 is input to each input circuit 65,66,67 in the control of working unit 60 as detection signal.
The output of the force cell 15 of above-mentioned control of working unit 60 with adsorption mouth 12 when non-pressurised, during non-absorption is as fiducial value, carries out being stored in control in the memory block of RAM (benchmark memory unit) 60c as initial load.When so-called adsorption mouth 12 is non-pressurised, during non-absorption, be meant when setting input unit 64 and imported the maintenance work of electronic component C and begin.In addition, in the time of also can being the main power source input of device.
In addition, above-mentioned initial load mainly is the precompressed load that the deflection of natural length by compression spring 17 causes.
In addition, control of working unit 60 is carried out the control as pressurization Correction and Control parts, promptly, moved up and down by first that unit 20 drives and when dropping to predefined target location at movable carriage 14, when the detected pressures of force cell 15 has surpassed above-mentioned initial load and has descended during the total of threshold value or it feels like surpass but when also surpassing, utilize the driving of rising of second 34 pairs of shell of revolutions 31 of voice coil motor that move up and down unit 30.
Threshold value is here as the pressurization desired value during decline, by in advance after set input unit 64 inputs, is stored in the memory block of regulation of RAM60c.Same in addition, also import the decline target location of movable carriage 14 from setting input unit 64 in advance, be stored in the memory block of regulation of RAM60c.Under the situation of the absorption of carrying out electronic component C, such target location is the front position of adsorption mouth 12 position lower than the upper surface of electronic component C, under the situation that the installed surface that makes electronic component C become target is pressurizeed, be the lower surface position lower that is adsorbed the electronic component C of maintenance than installed surface.
In addition, the control of mouth retentive control parts when control of working unit 60 is carried out as decline, promptly, the work control beginning that drives since first decline that moves up and down the movable carriage 14 that carries out unit 20 as pressurization Correction and Control parts, by the press contacts that adds of lower flange 35b and thrust bearing 35d, limit the work of the moving control of shell of revolution 31.
In addition, the control of mouth retentive control parts when control of working unit 60 is carried out as rising, promptly, movable carriage 14 is moved up and down unit 20 by first and rises and drive and when arriving the climbing target position, when the detected pressures of force cell 15 is less than or equal to the rising of initial load and regulation under the situation of the aggregate value of threshold value, by the press contacts that adds of upper flange 35a and thrust bearing 35c, limit the work of the moving control of shell of revolution 31.
Threshold value is to hang down the value of some with the pressurization desired value or than it when rising here in addition.Threshold value is in advance after set input unit 64 inputs during such rising, is stored in the memory block of regulation of RAM60c.Same in addition, the climbing target position of movable carriage 14 is stored in the memory block of regulation of RAM60c also in advance after set input unit 64 inputs.In addition, for example by X-Y travel mechanism mobile electron spare parts maintaining equipment 10 time, the climbing target position is the height around adsorption mouth 12 is not projected into.
(job description of electronic component holding device)
The work of the electronic component holding device 10 that explanation is made of said structure.According to the flow process among Fig. 3, the down maneuver of adsorption mouth 12 when electronic component holding device 10 work is described, according to the flow process among Fig. 4, illustrate adsorption mouth 12 on action is fallen.
Electronic component holding device 10 utilizes X-Y travel mechanism and is positioned in the top of the electronic component C that should adsorb maintenance.
Then, if imported the work sign on from setting input unit 64, then at first, control of working unit 60 detects the front end of mouth 12 under non-absorption and non-pressurised state, be added in the set pressure on the force cell 15, it as initial load, is stored in (step S11: as the control of benchmark memory unit) in the memory block.
Secondly, according to the control of control of working unit 60, undertaken driving (step S12) towards the decline of decline target location by first 21 pairs of movable carriages 14 of motor that move up and down that move up and down unit 20.
In addition, at this moment, control according to control of working unit 60, by the driving that descends of second voice coil motor 34 that moves up and down unit 30, make lower flange 35b add press contacts till on the thrust bearing 35d, prevent the up-down vibration (step S13 :) of shell of revolution 31 as the control of decline mouth retentive control parts.
In the down maneuver of movable carriage 14, control of working unit 60 is according to the output of force cell 15, whether the detected value of judging pressure surpasses initial load and the aggregate value (step S14) of threshold value when descending, under situation about not surpassing, according to the output of encoder 22, judge whether to arrive decline target location (step S15).Under the situation of no show, control of working unit 60 is returned the processing of step S14 again.
On the other hand, owing to the decline of movable carriage 14, in a single day contact is on electronic component C for the leading section of adsorption mouth 12, and the detected pressures of force cell 15 just increases, the aggregate value of threshold value when reaching, surpassing initial load and decline.Therefore, the control of working unit 60 work control (step S17 :) that second voice coil motor 34 that moves up and down unit 30 risen drive as the control of pressurization Correction and Control parts.Return step S14 again, the aggregate value of control of working unit 60 threshold value with the detected pressures of force cell 15 and initial load with when descending compares, under the situation that detected pressures rises, carry out the second rising drive controlling (step S17) that moves up and down the 30 pairs of shell of revolutions 31 in unit again.
And, under the situation that detected pressures descends, transfer to step S15, control of working unit 60 is carried out the present position of movable carriage 14 and is confirmed.
Arrived the decline target location if conclude movable carriage 14, just control of working unit 60 stops first driving (step S16) that moves up and down unit 20.Therefore, the control of the down maneuver of adsorption mouth 12 finishes.In addition, after such down maneuver control finishes, the leading section that is adsorption mouth 12 is used as the state of the pressure contact of target at electronic component C, the work control that control of working unit 60 makes suction unit 40 begin to drive, make in the adsorption mouth 12 to be negative pressure, C is adsorbed on the leading section with electronic component.
Secondly, carry out the vertical motion of adsorption mouth 12.Control of working unit 60 utilize first move up and down unit 20 move up and down motor 21, movable carriage 14 is carried out driving (step S21) towards the rising of climbing target position.In addition, in the vertical motion of movable carriage 14, control of working unit 60 is according to the output of force cell 15, whether the detected value of judging pressure is the initial load and the aggregate value following (step S22) of threshold value when rising, under situation about not reaching below the aggregate value, constantly continue to judge, reach below the aggregate value until rising driving by movable carriage 14.
Rising by so movable carriage 14 drives, and the lower surface that is maintained at the electronic component C on the adsorption mouth 12 leaves the place of loading.Therefore, the detected value of force cell 15 becomes initial load and when rising below the aggregate value of threshold value, control of working unit 60 is utilized the driving of rising of second voice coil motor 34 that moves up and down unit 30, add press contacts till on the thrust bearing 35c until upper flange 35a, prevent the up-down vibration (step S23 :) of shell of revolution 31 as the control of rising mouth retentive control parts.
In addition, control of working unit 60 judges whether to arrive climbing target position (step S24) according to the output of encoder 22.Under the situation of no show, Yi Bian proceeding first, control of working unit 60 moves up and down the driving of unit 20, Yi Bian continue to confirm the output of encoder 22, till arriving.
Then, arrived the climbing target position if conclude movable carriage 14, then control of working unit 60 stops first driving (step S25) that moves up and down unit 20.Therefore, the rising work of adsorption mouth 12 control finishes.
After this, under the situation that the anglec of rotation of adsorption mouth 12 need be regulated, control of working unit 60 drives the angular adjustment motor 54 of anglec of rotation regulon 50 according to setting the predefined anglec of rotation in the input unit 64.At this moment, control of working unit 60 compares detection angles and set angle according to the output of encoder 55, proceeds the driving of angular adjustment motor 54, till unanimity.
In addition, after this electronic component C is transported to the target group holding position, similarly carries out pressurized operation with above-mentioned situation.
(effect of example)
In above-mentioned electronic component holding device 10, constantly detect the pressure on the leading section of adsorption mouth 12 in real time, and be reflected in its work control, owing to constitute like this, so can seek pressure controlled high precision int.
In addition, in electronic component holding device 10, first moves up and down unit 20 driving that descends, at this moment second move up and down the rising of carrying out the adsorption mouth 12 that pressure correction uses in unit 30 and drive, so the switching of the both forward and reverse directions that need be undertaken by single drive source does not drive, so reduced The Effect of Inertia Force, can realize high responsiveness.Therefore, can set the pressure of adsorption mouth leading section accurately.In addition, owing to move up and down unit 30 with second and carry out Correction and Control, thus move up and down the formation of unit 20 and do not require high accuracy first, for example, first drive source that moves up and down unit 20 can also be sought the high speed more of operation by using the drive source of energy high-speed driving.
Particularly in said structure, the adjusting of pressure and elastomeric spring etc. are irrelevant, but regulate by the driving of voice coil motor 34, so can seek further high precision int.
In addition, owing to, be connected to adsorption mouth 12 always, so can high accuracy, height responsively carries out angular adjustment from the output shaft of the anglec of rotation motor 54 of anglec of rotation regulon 50, with one heart by fulcrum 33, shell of revolution 31, air intake duct 41.
(other business)
In addition, in the work control that above-mentioned control of working unit 60 is carried out,, be not defined in this especially, for example, can make pressure increase at leisure and change yet though the pressure of the leading section of adsorption mouth 12 is controlled definitely.
In addition, be assembled in size that the force cell 15 in the above-mentioned electronic component holding device 10 exports actually with respect under the inadequate situation of the linear relationship of applied pressure, also can utilize linear high force cell to measure the output characteristic of assembled force cell 15 in advance, be stored in the control of working unit 60, carry out reference when asking pressure according to the output of force cell 15 simultaneously.
In addition, control of working unit 60 is under the situation of carrying out as the control of benchmark memory unit, in above-mentioned work, though provided the situation that only detects initial load and storage when down maneuver begins for example, but under the situation that force cell 15 might change along with environment temperature or usage frequency, also can carry out the renewal of initial load with higher frequency.
In addition, in above-mentioned electronic component holding device 10,, also can use to support to be rotated and straight-line ball bearing though support shell of revolution 31 with air bearing 36.
In addition, though above-mentioned voice coil motor 34 uses DYN dynamic motor, also can use the motor of moving-magnetic type.In addition, also can replace above-mentioned voice coil motor 34 with other coaxial motors.
In addition, the moving up and down of movable carriage 14 also can be used other motion converter unit of mechanism of being made up of synchronous belt and belt pulley etc. and so on, replaces above-mentioned screw mechanism.
In addition, the output of the angular adjustment motor 54 of anglec of rotation regulon 50 also can pass to shell of revolution 31 by the reducing gear of train of reduction gears or harmonic drive etc.
In addition, also can use and carry out roll adjustment pad that highly fine adjustment forms etc., replace pressure is added in compression spring 17 on the above-mentioned force cell 15.In the case, it is high to utilize voice coil motor 34 to carry out the system rigidity of drive controlling, can carry out the pressure control of high-speed response.But, not by the defencive function that compresses 17 pairs of force cells 15 of spring.
In addition, in above-mentioned electronic component holding device 10,, also can omit the structure of anglec of rotation regulon 50, seek to simplify if do not need.
In addition, shutter 16 also can use the plate body that replaces of air-curtain type.In addition, also can make the electromagnetically operated valve that to open when having a power failure, supply with compressed air, push the cylinder of movable carriage 14 etc., replace first decline that moves up and down unit 20 to prevent with spring 25.
In the first aspect of invention, during the decline work of adsorption mouth, first moves up and down the unit driving that descends, at this moment second move up and down the pressurize rising of the adsorption mouth of revising usefulness of unit and drive, so the switching of the both forward and reverse directions that need be undertaken by single drive source does not drive, so reduced The Effect of Inertia Force, can realize high responsiveness.Therefore, can set the pressure of adsorption mouth leading section accurately.
The second aspect of invention owing to have an anglec of rotation regulon, so regulate by the anglec of rotation that remains on the part on the adsorption mouth, can be switched direction arbitrarily, can adapt to the various operations such as conveying, assembling of part.
The third aspect of invention prevents to use backstop owing to be provided with overload, so can prevent adsorption mouth exceedingly near pressure sensing cell one side, avoids pressure sensing cell by additional excessive pressure, can seek to protect pressure sensing cell.Therefore, can improve the overall maintainability of device.
The fourth aspect of invention, because the detected pressures with adsorption mouth when non-pressurised, during non-absorption is as fiducial value in advance, carrying out second work that moves up and down the unit controls, so can carry out so-called zero point revises, can get rid of the influence of mounting structure of the intrinsic discrete influence of the product of each pressure sensing cell, pressure sensing cell or the influence of operational environments such as the temperature when using, humidity etc., can the higher precision set pressure of usefulness.
The 5th aspect of invention, move up and down the decline of the moving body that carries out the unit when mobile by first, limit it on the moving body and move owing to comprising being fixed on as second structure of adsorption mouth that moves up and down the mobile object of unit, so can prevent because the generation of the vibration in addition that the inertia force of the mobile generation of moving body causes, the front position of adsorption mouth is fixed, and can seek the stabilisation of pressure.In addition, can protect the structure that comprises adsorption mouth to avoid vibration or impact effectively.
The 6th aspect of invention; move up and down the rising of the moving body that carries out the unit when mobile by first; limit it on the moving body and move owing to comprising being fixed on as second structure of adsorption mouth that moves up and down the mobile object of unit; so can prevent because the generation of the vibration in addition that the inertia force of the mobile generation of moving body causes; the front position of adsorption mouth is fixed, and can protect the structure that comprises adsorption mouth to avoid vibration or impact effectively.
Claims (6)
1. a spare parts maintaining equipment is characterized in that: have
The adsorption mouth that keeps part with leading section absorption;
Can be supported up or down moving body;
Drive first of above-mentioned moving body along the vertical direction and move up and down the unit;
Be configured in the above-mentioned moving body, drive second of above-mentioned adsorption mouth along the vertical direction simultaneously and move up and down the unit;
Detect the pressure sensing cell of pressure of the leading section of above-mentioned adsorption mouth; And
Carry out above-mentioned first and second and move up and down the control of working unit of the work control of unit,
Above-mentioned control of working unit has pressurization Correction and Control parts, these pressurization Correction and Control parts move up and down the decline of carrying out above-mentioned moving body in the unit when driving above-mentioned first, the pressure that detects according to above-mentioned pressure sensing cell moves up and down the unit driving of rising to above-mentioned second.
2. spare parts maintaining equipment according to claim 1 is characterized in that: having with along the vertical direction axle is the center, the anglec of rotation regulon that the anglec of rotation of the adsorption mouth that rises is regulated.
3. spare parts maintaining equipment according to claim 1 and 2 is characterized in that: retractable elastomer is inserted between above-mentioned pressure sensing cell and the above-mentioned adsorption mouth,
The overload that is provided with above-mentioned pressure sensing cell prevents to use backstop, is used for above-mentioned adsorption mouth is moved in the scope of above-mentioned pressure sensing cell one side, limits moving of this adsorption mouth.
4. according to claim 1,2 or 3 described spare parts maintaining equipments, it is characterized in that: the benchmark memory unit that above-mentioned control of working unit has above-mentioned adsorption mouth when non-pressurised and the output of the pressure sensing cell during non-absorption stores as fiducial value,
Above-mentioned pressurization Correction and Control parts are according to the variation of fiducial value, move up and down the unit driving of rising to above-mentioned second.
5. according to claim 1,2,3 or 4 described spare parts maintaining equipments, it is characterized in that: above-mentioned second moves up and down the unit has by its driving of a certain direction up and down, adds press contacts, the mobile limiting unit that moves of the object that restriction is moved,
When the pressurization Correction and Control parts of above-mentioned mobile limiting unit surpass the decline of regulation in above-mentioned detected pressures under the situation of threshold value, carry out above-mentioned second and move up and down the work control that the unit begins to rise and drives, above-mentioned control of working unit has when decline noise retentive control parts, noise retentive control parts are between the work control beginning that begins from above-mentioned first driving that moves up and down the unit to carry out to above-mentioned pressurization Correction and Control parts during this decline, carry out work control, this work control is that the press contacts that adds of the above-mentioned mobile limiting unit of restricted passage is carried out above-mentioned second the moving of the object that moves up and down that moves up and down the unit.
6. spare parts maintaining equipment according to claim 5, it is characterized in that: above-mentioned control of working unit has when rising noise retentive control parts, noise retentive control parts are when being driven by above-mentioned first rising that moves up and down the above-mentioned moving body that carries out the unit during this rising, under the situation when the detected pressures of above-mentioned pressure sensing cell reaches the rising of regulation below the threshold value, by the press contacts that adds of above-mentioned mobile limiting unit, limit above-mentioned second work of the moving control that moves up and down the object that the unit moves up and down.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002324749A JP2004158743A (en) | 2002-11-08 | 2002-11-08 | Component holding device |
| JP2002324749 | 2002-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1499572A true CN1499572A (en) | 2004-05-26 |
| CN1321435C CN1321435C (en) | 2007-06-13 |
Family
ID=32804202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200310114846XA Expired - Fee Related CN1321435C (en) | 2002-11-08 | 2003-11-07 | Part retainer |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2004158743A (en) |
| CN (1) | CN1321435C (en) |
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Also Published As
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| CN1321435C (en) | 2007-06-13 |
| JP2004158743A (en) | 2004-06-03 |
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