CN1752714A - Optical projection measurer for external diameter of large wheel diameter - Google Patents
Optical projection measurer for external diameter of large wheel diameter Download PDFInfo
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- CN1752714A CN1752714A CN 200510019663 CN200510019663A CN1752714A CN 1752714 A CN1752714 A CN 1752714A CN 200510019663 CN200510019663 CN 200510019663 CN 200510019663 A CN200510019663 A CN 200510019663A CN 1752714 A CN1752714 A CN 1752714A
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Abstract
The present invention discloses a large wheel diameter outside diameter optical projection measuring equipment. It includes a mechanical positioning component and an optical measuring head mounted on the mechanical positioning component. Said optical measuring head is composed of back projection laser source, beam expander lens, optical slit component, imaging lens component, CCD camera and signal control processing device. It is applicable to diameter measurement of geometric revaling body whose wheel diameter is greater than 500mm, specially it is applicable to diameter measurement of geometric revolving body whose thread width is greater than 80 mm.
Description
Technical field
The invention belongs to field of measuring technique, it relates to the measuring equipment of asking diameter of a circle based on the action method, refers to a kind of optical projection measurer for external diameter of large wheel diameter particularly.
Background technology
The diameter optical measuring device has obtained widespread use as a kind of strong instrument of projection imaging measurement diameter in geometric shape measuring research.In recent years, the big quantity research that the backroom boys carries out this technology is based on the method for direct measurement diameter always.{ see " semiconductor optoelectronic " 1998 in " Double beam laser-scanned size measuring system ", 19 (5): in 320～323}, one literary composition, proposed a kind of typical diameter projection imaging measuring method and device, be characterized in how much tested revolution bodies are installed on the frame of measuring equipment.This method and device are when measuring how much revolution bodies of medium-small diameter, and its range is big, measurement effect good.But when measuring how much revolution bodies in bull wheel footpath, owing to need measurement mechanism itself as positioning reference, so its system architecture is huge and complicated, not only positioning error is bigger than normal, measuring operation is inconvenient, measuring accuracy descends, and it is also poor to measure the stability of optical path length, optical noise height, measurement mechanism.Particularly when measuring bull wheel footpath, non-cylindrical geometry revolution body, the more notable reduction of its measurement effect.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned prior art, a kind of simple in structure, easy to carry, processing ease, optical projection measurer for external diameter of large wheel diameter that measuring accuracy is high are provided.This device utilizes the rear-projection source of parallel light, asks diameter of a circle based on the action method, is very suitable for taking turns bodies are turned round in the footpath greater than the geometry of 80mm greater than how much revolutions body, particularly its tread width of 500mm diameter measurement.
For achieving the above object, the optical projection measurer for external diameter of large wheel diameter that the present invention is designed, has the mechanical positioning assembly that to locate the one section circular arc tread top that is placed on tested how much revolution bodies, in order to the chord length of this section circular arc tread of determining tested how much revolution bodies and this string distance to the mechanical positioning assembly reference plane; Being equipped with one on the described mechanical positioning assembly is used for from the optical measuring head of this section circular arc tread profile of the tested how much revolution bodies of chord length direction projection; Described optical measuring head is penetrated lasing light emitter, beam expanding lens, light slit crack parts, imaging lens component, ccd video camera and a signal controlling treating apparatus and is constituted by being positioned on the same light path rear-projection of arranging successively, described signal controlling treating apparatus is penetrated lasing light emitter with rear-projection and is linked to each other with ccd video camera, be used to control rear-projection and penetrate lasing light emitter and ccd video camera work, and gather and handle the optoelectronic position signal of ccd video camera; This section circular arc tread of described tested how much revolution bodies is between the beam expanding lens and light gap assembly of described optical measuring head, perhaps between the light gap assembly and imaging lens component of described optical measuring head.
The rectangular coordinate that defines on described tested how much revolution bodies is: be X vertically, bending high direction along string is Y, is Z along the chord length direction.The parallel direction of light of then described optical measuring head rear-projection is the Z direction.Like this, when described mechanical positioning assembly determined with respect to tested how much revolution body X to, Y side and Z to the position after, also just determined the position of described optical measuring head with respect to tested how much revolution bodies, specifically determined the chord length of one section circular arc tread of tested how much revolution bodies and this string Y to the position.
The rear-projection that described optical measuring head sends is penetrated lasing light emitter behind beam expanding lens, form a big collimated laser beam, and shine on the tested how much revolution bodies along the chord length direction, the light part that light source sends is blocked by tested how much jatharapanvartanasana body section profiles, another part then shines on the ccd video camera through light slit crack parts, imaging lens component, formed tested how much jatharapanvartanasana body section profiles " as ".Ccd video camera will be somebody's turn to do " as " dimension information be converted into vision signal and binaryzation, form the binaryzation CCD vision signal include the light transmission part dimension information.The size of light transmission part, place, tested peak position is Hi=Ni * m.In the formula: Ni be the light transmission part on ccd video camera, become " as " cover the number of CCD pixel, m is the pixel center distance of ccd image sensor.Hi has determined the concrete Y coordinate figure at the corresponding a certain concrete X coordinate figure of tested how much jatharapanvartanasana body section profiles places, the high value of bow that concrete Y coordinate figure can corresponding concrete string.This coordinate figure is converted into photosignal by ccd video camera and flows to described signal controlling treating apparatus, by the signal controlling treating apparatus from the length L of concrete string and the high value of bow (Ho-Hi) can in the hope of tested how much revolution bodies along X to the diameter of particular location.
The invention has the advantages that: designed measurement mechanism is a positioning reference with tested how much revolution bodies directly, adopting rear-projection to penetrate big collimated laser beam cooperates with light slit crack parts, only one section circular arc tread on tested how much revolution bodies is carried out projection measurement, efficiently solve when measuring bull wheel footpath, non-cylindrical geometry revolution body, huge and the complicated problems of representative diameter projection imaging measurement mechanism system architecture, realized easily the wheel footpath greater than 500mm, particularly tread width greater than tested how much revolution bodies of 80mm diameter measurement of particular location vertically.Compare with the diameter projection imaging measurement mechanism of routine, action method diameter optical measuring device of the present invention has not only that light path is short, optical noise is little, positioning error is few, the characteristics of good stability, and structure is small and exquisite, it is easy to make, be convenient for carrying.The minimum bearing accuracy of its direction of principal axis (X to) can reach 20um, and the minimum Measurement Resolution of the high direction of the bow of string (Y to) can reach 1um, and the minimum resolution of diameter can reach 5um.
Description of drawings
Fig. 1 is a kind of structural representation of optical projection measurer for external diameter of large wheel diameter;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the structural representation of another kind of optical projection measurer for external diameter of large wheel diameter;
Fig. 4 is the left view of Fig. 3;
Fig. 5 is the principle of work synoptic diagram of a kind of optical measuring head of measurement mechanism of the present invention;
Fig. 6 is the principle of work synoptic diagram of the another kind of optical measuring head of measurement mechanism of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments optical projection measurer for external diameter of large wheel diameter of the present invention is described in further detail:
A kind of optical projection measurer for external diameter of large wheel diameter as depicted in figs. 1 and 2, has the mechanical positioning assembly 7 that to locate the one section circular arc tread top that is placed on tested how much revolution bodies 8, this mechanical positioning assembly 7 can adopt any version of the prior art, as long as it can determine the chord length L and the distance H o of this string to mechanical positioning assembly 7 reference planes of this section circular arc tread of tested how much revolution bodies 8.Be mounted with one on this mechanical positioning assembly 7 and be used for from the optical measuring head of this section circular arc tread profile of the tested how much revolution bodies 8 of chord length L direction projection, this optical measuring head constitutes by being positioned at laser instrument 1, beam expanding lens 2, light aperture plate 3, imaging lens component 4, ccd video camera 5 and a signal controlling treating apparatus 6 of arranging successively on the same light path.Wherein: signal controlling treating apparatus 6 links to each other with ccd video camera 5 with laser instrument 1, be used for driving and control laser instrument 1 and ccd video camera 5 work, gather the optoelectronic position signal of ccd video camera 5 simultaneously, and ask the computing formula of circular diameter that the optoelectronic position signal of being gathered is handled by known action method, obtain the diameter of tested how much revolution bodies.This part is a mature technology also, seldom gives unnecessary details in this.
Above-mentioned mechanical positioning assembly 7 the simplest and the most direct firm positioning forms, be exactly that five point location piece P1, P2, P3, P4, P5 are set thereon, one of them point location piece P1 contacts with the center top of this section circular arc tread of tested how much revolution bodies 8, two other symmetrical point location piece P2, P3 contacts with the dual-side of this section circular arc tread of tested how much revolution bodies 8, also has point location piece P4, the P5 of two symmetries to contact with the end face of tested how much revolution bodies 8.Can determine the concrete orientation of entire measuring device thus, also just determine the position of optical measuring head with respect to tested how much revolution bodies 8.Specifically: the point location piece P2 of contact tread dual-side and P3 have determined that measurement mechanism bends the high direction position of diametric(al) (Y to) in other words at the string of tested how much revolution bodies 8, promptly determine the vertical range Ho between the string of the reference field of mechanical positioning assembly 7 and tested how much revolution bodies 8, determined chord length L simultaneously; The point location piece P1 of contact tread center top has determined that measurement mechanism is to the chord length direction of tested how much revolution bodies 8 (Z to) position of rotation; The point location piece P4 of contact end face both sides and P5 determined measurement mechanism along the direction of principal axis of tested how much revolution bodies 8 (X to) position and measurement mechanism to the chord length direction of tested how much revolution bodies 8 (Z to) position of rotation.This kind locator meams is suitable for the situation of the tread broad of tested how much revolution bodies 8.
Another kind of optical projection measurer for external diameter of large wheel diameter as shown in Figure 3 and Figure 4 is to change point location piece P1 into the end face centre with the contact position of tested how much revolution bodies 8 by the tread center top to contact the invariant position of other structure and point location piece.Specifically: the point location piece P2 of contact tread dual-side and P3 have determined that measurement mechanism bends the high direction position of diametric(al) (Y to) in other words at the string of tested how much revolution bodies 8, promptly determine the vertical range Ho between the string of the reference field of mechanical positioning assembly 7 and tested how much revolution bodies 8, determined chord length L simultaneously; The locating piece P1 of contact in the middle of the end face determined the measurement mechanism position of (X to) axially; The locating piece P4 of contact end face both sides and P5 have determined that measurement mechanism bends high direction (Y to) position of rotation to the chord length direction of tested how much revolution bodies 8 (Z to) position of rotation and measurement mechanism to the string of tested how much revolution bodies 8.This kind locator meams is suitable for the narrower situation of tread of tested how much revolution bodies 8.
Be illustrated in figure 5 as the principle of work synoptic diagram of a kind of optical measuring head of above-mentioned measurement mechanism, one section circular arc tread of tested geometry revolution this moment bodies 8 is between the beam expanding lens 2 and light aperture plate 3 of optical measuring head.Laser instrument 1 is behind beam expanding lens 1, form a big collimated laser beam and shine tested how much and turn round on the bodies 8, the light part that light source sends is blocked by the cross section profile of tested how much revolution bodies 8, another part then shines on the ccd video camera 5 through light aperture plate 3, imaging lens component 4, forms tested turn round for how much body 8 cross section profiles " as ".Ccd video camera 5 will be somebody's turn to do " as " dimension information be converted into vision signal and binaryzation, formed the binaryzation CCD vision signal that includes the light transmission part dimension information.Light transmission part, place, tested peak position is of a size of Hi=Ni * m.In the formula: Ni be the light transmission part on ccd video camera 5, become " as " cover the number of CCD pixel, m is the pixel center distance of ccd image sensor.Hi has determined the concrete Y coordinate figure at the corresponding a certain concrete X coordinate figure of tested how much revolution body 8 cross section profiles places, the high value of bow that concrete Y coordinate figure can corresponding concrete string.This coordinate figure is converted into photosignal by ccd video camera 5 and flows to signal controlling treating apparatus 6, by signal controlling treating apparatus 6 from the length L of concrete string and the high value of bow H=Ho-Hi can in the hope of tested how much revolution bodies 8 along X to the diameter of particular location: D=H+L
2/ 4H.
Be illustrated in figure 6 as the principle of work synoptic diagram of the another kind of optical measuring head of above-mentioned measurement mechanism, one section circular arc tread of tested geometry revolution this moment bodies 8 is between the light aperture plate 3 and imaging lens component 4 of optical measuring head.Light that light source sends is earlier through after the light aperture plate 3, and a part is blocked by the cross section profile of tested how much revolution bodies 8, and another part shines on the ccd video camera 5 through imaging lens component 4, forms tested turn round for how much body 8 cross section profiles " as ".Other principle of work is with last identical, and the result is also identical.
More specifically: it is that mW level, wavelength X are the visible light semiconductor laser of 0.670 μ m that above-mentioned laser instrument 1 adopts power.Above-mentioned beam expanding lens 2 adopts and expands the bundle multiples and form greater than 15 times and the fine-tuning lens combination of its spacing, for example be made up of for the convex lens of+200mm for the concavees lens of-10mm and focal length a focal length, and the spacing of lens combination is fine-tuning.The light slit crack of above-mentioned smooth aperture plate 3 is that width is the wide microscler aperture plate of 1/10 seam less than 1mm and straightness error.Above-mentioned imaging lens component 4 can adopt a cylindrical mirror and an imaging lens group to form.Above-mentioned ccd video camera 5 is linear array or Array CCD Camera.Experiments of measuring shows: measurement mechanism of the present invention big in measuring wheel footpath (＞500mm), tread is wide (during＞80mm) how much revolution bodies, its system architecture is small and exquisite and simple, particularly has remarkable advantages when measuring bull wheel footpath, non-cylindric how much revolution bodies.
Measurement mechanism of the present invention is not limited to embodiment recited above, and persons skilled in the art can adopt numerous embodiments to realize the present invention according to content disclosed by the invention.
Claims (6)
1. optical projection measurer for external diameter of large wheel diameter, it is characterized in that: it has the mechanical positioning assembly (7) that can locate the one section circular arc tread top that is placed on tested how much revolution bodies (8), in order to the chord length (L) of this section circular arc tread of determining tested how much revolution bodies (8) and this string distance (Ho) to mechanical positioning assembly (7) reference plane; Being equipped with one on the described mechanical positioning assembly (7) is used for from the optical measuring head of this section circular arc tread profile of the tested how much revolution bodies of chord length (L) direction projection (8), described optical measuring head is penetrated lasing light emitter (1) by being positioned at the rear-projection of arranging successively on the same light path, beam expanding lens (2), light slit crack parts (3), imaging lens component (4), ccd video camera (5), and a signal controlling treating apparatus (6) constitutes, described signal controlling treating apparatus (6) is penetrated lasing light emitter (1) with rear-projection and is linked to each other with ccd video camera (5), is used to control the optoelectronic position signal that rear-projection is penetrated lasing light emitter (1) and ccd video camera (5) work and gathered and locate ccd video camera (5); This section circular arc tread of described tested how much revolution bodies (8) is positioned between the beam expanding lens (2) and light gap assembly (3) of described optical measuring head, perhaps is positioned between the light gap assembly (3) and imaging lens component (4) of described optical measuring head.
2. optical projection measurer for external diameter of large wheel diameter according to claim 1, it is characterized in that: said mechanical positioning assembly (7) is provided with five point location pieces (P1, P2, P3, P4, P5), one of them point location piece (P1) contacts with the center top of this section circular arc tread of tested how much revolution bodies (8), and perhaps the middle end face with this section circular arc tread contacts; Two other symmetrical point location piece (P2, P3) contacts with the dual-side of this section circular arc tread of tested how much revolution bodies (8), also has the point location piece (P4, P5) of two symmetries to contact with the end face of tested how much revolution bodies (8).
3. optical projection measurer for external diameter of large wheel diameter according to claim 1 and 2 is characterized in that: it is that mW level, wavelength X are the visible light semiconductor laser of 0.670 μ m that lasing light emitter (1) employing power is penetrated in said rear-projection.
4. optical projection measurer for external diameter of large wheel diameter according to claim 1 and 2 is characterized in that: said beam expanding lens (2) adopts and expands the bundle multiple greater than 15 times and the fine-tuning lens combination composition of its spacing.
5. optical projection measurer for external diameter of large wheel diameter according to claim 1 and 2 is characterized in that: the light slit crack of said light slit crack parts (3) is that width is the wide microscler slit of 1/10 seam less than 1mm and straightness error.
6. optical projection measurer for external diameter of large wheel diameter according to claim 1 and 2 is characterized in that: said ccd video camera (5) is linear array or Array CCD Camera.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100196639A CN1330927C (en) | 2005-10-26 | 2005-10-26 | Optical projection measurer for external diameter of large wheel diameter |
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| CNB2005100196639A CN1330927C (en) | 2005-10-26 | 2005-10-26 | Optical projection measurer for external diameter of large wheel diameter |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100464154C (en) * | 2006-07-07 | 2009-02-25 | 中国科学院长春光学精密机械与物理研究所 | Photo-electric type major diameter measuring apparatus |
| CN101236077B (en) * | 2008-03-07 | 2010-06-09 | 潘旭华 | Rotating platform object fulcrum and rotating platform central line overlap ratio measuring method |
| CN102735174A (en) * | 2012-07-17 | 2012-10-17 | 中国石油集团渤海石油装备制造有限公司 | Automatic measuring device for circumference of spiral submerged-arc welding pipe |
| CN104019756A (en) * | 2014-06-17 | 2014-09-03 | 西安工业大学 | Sealing element diameter parameter measurement device and measurement method |
| CN104677301A (en) * | 2015-03-05 | 2015-06-03 | 山东大学 | Helical weld pipe line outer diameter measuring device and method based on view detection |
| CN105835901A (en) * | 2016-05-27 | 2016-08-10 | 南京理工大学 | Method and system for detecting train wheel diameters |
| CN107664483A (en) * | 2016-07-29 | 2018-02-06 | 宝山钢铁股份有限公司 | A kind of cylinder bar shape parameter measurement method |
| CN109443279A (en) * | 2018-11-30 | 2019-03-08 | 松林光电科技（湖北）有限公司 | A kind of lens detector for outer diameter error non-rotating detection method |
| CN109668515A (en) * | 2017-10-16 | 2019-04-23 | 苏州华兴致远电子科技有限公司 | Detector for train wheel pair size dynamic detection system and detection method |
| CN110849280A (en) * | 2019-12-02 | 2020-02-28 | 中国科学院长春光学精密机械与物理研究所 | Wheel measuring equipment |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04105006A (en) * | 1990-08-24 | 1992-04-07 | Tokyo Seimitsu Co Ltd | Contactless measuring device |
| CN2120322U (en) * | 1992-05-21 | 1992-10-28 | 清华大学 | Laser high degree of accuracy measurement big diameter apparatus |
| CN1028383C (en) * | 1992-05-21 | 1995-05-10 | 清华大学 | Apparatus and method for high precisely measuring large part inside and outside diameter by laser |
-
2005
- 2005-10-26 CN CNB2005100196639A patent/CN1330927C/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100464154C (en) * | 2006-07-07 | 2009-02-25 | 中国科学院长春光学精密机械与物理研究所 | Photo-electric type major diameter measuring apparatus |
| CN101236077B (en) * | 2008-03-07 | 2010-06-09 | 潘旭华 | Rotating platform object fulcrum and rotating platform central line overlap ratio measuring method |
| CN102735174A (en) * | 2012-07-17 | 2012-10-17 | 中国石油集团渤海石油装备制造有限公司 | Automatic measuring device for circumference of spiral submerged-arc welding pipe |
| CN102735174B (en) * | 2012-07-17 | 2014-10-01 | 中国石油集团渤海石油装备制造有限公司 | Automatic measuring device for circumference of spiral submerged-arc welding pipe |
| CN104019756B (en) * | 2014-06-17 | 2017-09-29 | 西安工业大学 | A kind of seal diameter parameter measuring apparatus and measuring method |
| CN104019756A (en) * | 2014-06-17 | 2014-09-03 | 西安工业大学 | Sealing element diameter parameter measurement device and measurement method |
| CN104677301A (en) * | 2015-03-05 | 2015-06-03 | 山东大学 | Helical weld pipe line outer diameter measuring device and method based on view detection |
| CN104677301B (en) * | 2015-03-05 | 2017-03-01 | 山东大学 | A kind of spiral welded pipe pipeline external diameter measuring device of view-based access control model detection and method |
| CN105835901A (en) * | 2016-05-27 | 2016-08-10 | 南京理工大学 | Method and system for detecting train wheel diameters |
| CN107664483A (en) * | 2016-07-29 | 2018-02-06 | 宝山钢铁股份有限公司 | A kind of cylinder bar shape parameter measurement method |
| CN107664483B (en) * | 2016-07-29 | 2019-06-25 | 宝山钢铁股份有限公司 | A kind of cylinder bar shape parameter measurement method |
| CN109668515A (en) * | 2017-10-16 | 2019-04-23 | 苏州华兴致远电子科技有限公司 | Detector for train wheel pair size dynamic detection system and detection method |
| CN109668515B (en) * | 2017-10-16 | 2024-04-05 | 苏州华兴致远电子科技有限公司 | Train wheel set size dynamic detection system and detection method |
| CN109443279A (en) * | 2018-11-30 | 2019-03-08 | 松林光电科技（湖北）有限公司 | A kind of lens detector for outer diameter error non-rotating detection method |
| CN110849280A (en) * | 2019-12-02 | 2020-02-28 | 中国科学院长春光学精密机械与物理研究所 | Wheel measuring equipment |
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