CN1737493A - Double optical fiber coupling contact type micro measuring force aiming sensor - Google Patents
Double optical fiber coupling contact type micro measuring force aiming sensor Download PDFInfo
- Publication number
- CN1737493A CN1737493A CN 200510072254 CN200510072254A CN1737493A CN 1737493 A CN1737493 A CN 1737493A CN 200510072254 CN200510072254 CN 200510072254 CN 200510072254 A CN200510072254 A CN 200510072254A CN 1737493 A CN1737493 A CN 1737493A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- coupling mechanism
- sensor
- probe
- outgoing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
This invention relates to one micro force measurement aiming sensor with double fiber couple to convert the couple trigger and inner hole edge position into beam angle information stretching into the micro deep hole, which comprises detecting needle, microscope lens, CCD cameral system, software process system, wherein, the detector is composed of one fiber and the other is used as exiting fiber connected together by one coupler. The coupler is used as trigger of detector and the beam passes the incident fiber into couple and is conducted outside. The exporting beam enters the CCD cameral system to get the light spot energy center position through image process technique.
Description
Technical field
The present invention relates to a kind of stretching into and coupling mechanism contact and interior bore edges are touched location in the micro deep-hole and put the double optical fiber coupling contact type micro measuring force aiming sensor that converts the light beam corner information to, the precision when especially in " inferior macroscopic view " field micro deep-hole and other small inside dimension being measured aims at the sender sensor.
Background technology
The development of Aero-Space high-performance, low consumption and precision technology causes accurate microsize part more and more, and minute sized measurement has also proposed more and more higher requirement to precision.In these accurate small inside dimensions, be the technology " bottleneck " that restriction servo control mechanism and engine performance improve to the problems of measurement of micro deep-hole geometric parameter always, be badly in need of inquiring into a kind of method that is applied to the micro deep-hole geometric parameter measurement.
At present, to the measuring method of micro deep-hole geometric parameter seldom, measuring accuracy is not high, especially for the micro hole of big aspect ratio, does not almost have a kind of perfect measuring method.1997～1998 years, University Of Tianjin and German federal physical study institute (PTB) joint research and development go out the method that single fiber cooperates ccd image to handle (1. University Of Tianjin, a kind of contact measuring method and use the miniature three-dimensional gauge head of this method, Chinese patent application number: 98115367.4 1998-06-30; 2. Ji Gui army, H Schwenke, E Trapet, Luo Zhen, the small nozzle opening size and dimension of engine nozzle measuring system, internal combustion engine journal 1998,16 (4): 475～479; 3. Ji Gui army, H Schwenke, E Trapet etc., optics contact miniature three-dimensional measuring system, Chinese journal of scientific instrument 2000,21 (1): 95～97; 4.Ji Guijun, Schwenke Heinrich, TrapetEuqen.An opto-mechanical microprobe system for measuring very small parts on CMMs.Proc SPIE Int Soc Opt Eng.1998,3454:348～353; 5.Guijun Ji, Schwenke Heinrich, TrapetEuqen.Fiber optic sensor for measuring very small holes.Proc SPIE Int Soc Opt Eng.1999.3538:143～146; 6.Schwenke H, Waldele F, Weiskirch C, el at.Opto-tactile sensor for 2D and3D measurement of small structures on coordinate measuring machines.CIRP Ann ManufTechnolog.2001,50 (1): 361～364).This method one low-light pearl is bonded in optical fiber one end and as object image-forming on CCD, and the transversal displacement amount of sensor in the space changed into the low-light pearl at axial displacement, and the variation of the axial displacement of low-light pearl detects by the variation of the picture carrier that CCD captures.But the wide part that enters the low-light pearl by optical fiber in the method does not enter optical system imaging, and the picture signal that CCD caught is faint, is unfavorable for the Flame Image Process of back; When the low-light pearl stretches into micropore inside,, under the situation to big aspect ratio, can't finish surveying work greater than 10: 1 o'clock as aspect ratio because " blocking " effect of hole wall makes the degree of depth that can survey very little; And because the depth of field effect of Liar in the CCD receiving system, when the light pearl touches the gaging hole wall and when the certain displacement amount was laterally arranged, any variation did not take place the picture of light pearl, thereby make the sensitivity of sensor low.
Some scholars of Japan utilize the oscillating scanning measuring method to realize measurement (1.T.Masuzawa to micropore, Y.Hamasaki, M.Fujino.Vibroscanning Method for Nondestructive Measurement of SmallHoles.Annals of the CIRP.1993,42 (1): 589～592; 2.Beomjoon Kim, Takahisa Masuzawa, Tarik Bourouina.The Vibroscanning Method for the Measurement of Micro-hole Profiles.Meas.Sci.Technol.1999, (10): 697～705; 3.Kim B J, Sawamoti Y, Masuzawa T, el at.Advanced vibroscanning method for microhole measurement.International Journal ofElectrical Machining.1995, (1): 41～44), space displacement between probe and the tested hole wall is changed the change in voltage that is converted into the probe in detecting terminal circuit, but inner foreign material in hole or burr etc. are serious to the measurement result influence, thereby make measuring accuracy not high; Simultaneously because the vibration of probe very easily fractures probe, cause probe minimum diameter and the length can not be very big.But in order to improve measuring accuracy and depth measurement degree, two scan-probes and big L/D ratio scan-probe (1.Bergaud C have been proposed again, Kim B J, Masuzawa T.Realisation of silicon-based twin microstylus for 3-dimensionalcharacterization of deep microholes.Proceedings of 3
RdFrance-Japan Congress ﹠amp; 1
StEurope-Asia Congresson on Mechatronics.1996, (2): 640～643; 2.T.Masuzawa, B.J.Kim, C.Bergaud, el at.Twin-probe Vibroscanning Method for Dimensional of Microholes.Annals ofthe CIRP.1997,46 (1): 437～440; 3.B.J.Kim, T.Masuzawa, H.Fjuita, el at.DimensionalMeasurement of Microholes with Silicon-based Micro Twin Probes.Proceeding of the IEEEMicro Methanical Systems (MEMS) .1998:334～339; 4.M.Yamamoto, H.Takeuchi, S.Aoki.Dimensional Measurement of High Aspect Ratio Structures with a Resonating MicroCantilever Probe.Microsystem Technologies.2000, (6): 179～183).Even but for the scan-probe of big L/D ratio since very easily the fractureing property during the probe vibration make it can survey aspect ratio also can not be very big.
Summary of the invention
The objective of the invention is to overcome micro deep-hole measuring method the deficiencies in the prior art part, a kind of double optical fiber coupling contact type micro measuring force aiming sensor that is applicable to that big aspect ratio micro deep-hole is measured is provided, by two fiber couplers and microcobjective sensor is touched the transversal displacement amount that the small displacement of gauge head in micropore changes the ccd image capture system into, the high precision aiming when hole wall being measured by the realization of image space gray scale square location algorithm.
Technical solution of the present invention is: a kind of double optical fiber coupling contact type micro measuring force aiming sensor, form by probe, microcobjective, CCD camera system, software processing system, said probe is made up of two optical fiber, wherein an optical fiber is as incident optical, another root is as outgoing optical fiber, one end of incident optical and outgoing optical fiber is fixedlyed connected with coupling mechanism, coupling mechanism is as the contact of probe, light beam is derived by outgoing optical fiber after incident optical imports coupling mechanism, derives light beam and enters the CCD camera system through microcobjective;
Incident optical and the gluing of outgoing optical fiber are together or separate;
Described coupling mechanism is sphere or elliposoidal glass;
Described coupling mechanism is that the cross section is leg-of-mutton column glass;
Described coupling mechanism is the one-sided sheet glass that has reflectance coating;
Described coupling mechanism is a cylindrical glass.
Probe of the present invention is made up of two optical fiber, and two optical fiber are connected and form the bigger measuring staff of rigidity, forms the hinge of relative flexibility in the terminal knee of incident optical; An optical fiber is as incident optical in two optical fiber, another root is as outgoing optical fiber, one end of two optical fiber is fixedlyed connected with coupling mechanism, coupling mechanism is as the contact of probe, light beam is derived by outgoing optical fiber after incident optical imports coupling mechanism, derive light beam and enter the CCD camera system through microcobjective, obtain the light spot energy center that outgoing beam forms by image space gray scale square location algorithm on CCD, go up hot spot energy central position and sensor by CCD and touch the one-to-one relationship of measuring point and can draw the contact condition that sensor touches gauge head and hole wall inner in the hole in the locus.When sensor touched the gauge head aiming, promptly two optical fiber ball coupling mechanism altogether touched survey measured hole inwall, because " stopping " of hole wall laterally no longer is being subjected to displacement coupling mechanism; If the sensor stiff end continues to move relative to hole wall, the rigidity measuring staff is then around flexible hinge deflection one minute angle under the effect of dynamometry, the synchronous deflection of outgoing beam from the derivation of outgoing optical fiber, this light beam through optical system imaging CCD as the plane on, the side-play amount of the relative initial position of this spot center has reflected the exit beam deflection angle; Determine that the position of correspondence was the sender zero-bit when ergometry was about 30 μ N, show that then touching measuring point reliably contacts with hole wall, accurately aiming on this position.
Advantage of the present invention is:
(1) can survey minimum micro deep-hole diameter and reach φ 0.01mm, limited by fibre core diameter.
(2) can survey maximum aspect ratio reaches more than 50: 1.For diameter is the hole of φ 0.01mm～φ 0.03mm, can survey aspect ratio and reach 50: 1; To diameter is the hole of φ 0.03mm～φ 0.05mm, can survey aspect ratio and reach 40: 1; To diameter is the hole of φ 0.05mm～φ 0.1mm, can survey aspect ratio and reach 30: 1; To diameter is the hole of φ 0.1mm～φ 0.2mm, can survey aspect ratio and reach 20: 1; To diameter is the hole of φ 0.2mm～φ 0.3mm, can survey aspect ratio and reach 15: 1; To diameter is the hole of φ 0.3mm～φ 0.5mm, can survey aspect ratio and reach 10: 1.
(3) stressed optical fiber separates with detection fiber, guarantees that detection fiber is not touched dynamometry and influenced.
Below in conjunction with drawings and Examples the present invention is described in further detail.
Description of drawings
Fig. 1 is that the contact type micro measuring force aiming sensor system constitutes synoptic diagram;
Fig. 2 a is the probe synoptic diagram of embodiment 1;
Fig. 2 b is the probe synoptic diagram of embodiment 2;
Fig. 3 a is the probe synoptic diagram of embodiment 3;
Fig. 3 b is the probe synoptic diagram of embodiment 4;
Fig. 4 a is the probe synoptic diagram of embodiment 5;
Fig. 4 b is the probe synoptic diagram of embodiment 6;
Fig. 5 a is the probe synoptic diagram of embodiment 7;
Fig. 5 b is the probe synoptic diagram of embodiment 8;
Fig. 6 a is the probe synoptic diagram of embodiment 9;
Fig. 6 b is the probe synoptic diagram of embodiment 10;
Fig. 7 a is the probe synoptic diagram of embodiment 11;
Fig. 7 b is the probe synoptic diagram of embodiment 12;
Fig. 8 a is the probe synoptic diagram of embodiment 13;
Fig. 8 b is the probe synoptic diagram of embodiment 14.
Embodiment
Fig. 1 is that the contact type micro measuring force aiming sensor system constitutes synoptic diagram, the laser beam that laser instrument 1 sends enters optical fiber coupled lens 3 through beam-expanding collimation mirror 2 and focuses on, laser beam after the focusing enters emergent light fibre 8 after importing coupling mechanism 7 by incident optical 4, caught by ccd video camera 10 behind imaging microcobjective 9 by the laser beam that outgoing optical fiber penetrates, the picture signal transmission computing machine 11 of being caught by ccd video camera 10 carries out Flame Image Process, mechanical bend part 5 is crooked so that the image capturing space is provided with incident optical 4, coupling mechanism 7 contacts with measured hole 6, the situation that contacts of perception probe contact and measured surface.
Feature of the present invention as shown in Figure 1 is: probe is made up of two optical fiber, wherein an optical fiber is as incident optical 4, another root is as emergent ray 8, one end of two optical fiber is fixedlyed connected with coupling mechanism 7, coupling mechanism 7 is as the contact of probe, light beam is derived by outgoing optical fiber 8 after incident optical 4 imports coupling mechanism 7, derives light beam and enters CCD camera system 10 through microcobjective 9.
Adopted mechanical bend part 5 also can not use mechanical bend part 5 so that the image capturing space is provided with incident optical 4 is crooked among Fig. 1, and directly with the thermal finalization method with incident ray 4 bendings so that the image capturing space is provided.
Aiming process of the present invention comprises the steps:
1. open laser instrument half an hour in advance, the light beam that laser instrument is sent is stable.
2. adjust relative position and attitude between optical fiber coupled lens 3 and the incident optical 4, guarantee that maximum luminous energy enters incident optical.
3. adjust relative position and attitude between outgoing optical fiber 8 and the microlens 9, guarantee that the relative microlens 9 of outgoing end face of outgoing optical fiber 8 is objects in the paraxial region, to improve image quality.
Coupling mechanism is stretched into tested micro deep-hole inside, and make it and tested micro deep-hole produces relative displacement, sensor accurately aims at when touching gauge head and be positioned at the sender zero-bit.
Coupling mechanism of the present invention can be that sphere or elliposoidal glass, one-sided sheet glass, the cross section that has reflectance coating are leg-of-mutton column glass or cylindrical glass.Incident optical and outgoing optical fiber can gluing together or separate, it is following or more than the bottom surface that the outgoing end face of outgoing optical fiber can be positioned at mechanical bend part bottom surface.
Describe the structure of probe in detail below by embodiment, wherein the sensing system of each embodiment constitutes all as shown in Figure 1.
Embodiment 1:
The present embodiment probe structure is shown in accompanying drawing 2a, coupling mechanism 14 is a spherical glass, one end of incident optical 12 and outgoing optical fiber 13 is fixedlyed connected with coupling mechanism 14, incident optical 12 with outgoing optical fiber 13 gluings be in the same place, and the outgoing end face of outgoing optical fiber 13 is positioned at below mechanical bend part 5 bottom surfaces;
Embodiment 2:
The present embodiment probe structure is shown in accompanying drawing 2b, coupling mechanism 17 is a spherical glass, one end of incident optical 15 and outgoing optical fiber 16 is fixedlyed connected with coupling mechanism 17, the end parts parallel of incident optical 15 and outgoing optical fiber 16, and the outgoing end face of outgoing optical fiber 16 is positioned at more than mechanical bend part 5 bottom surfaces;
Embodiment 3:
The present embodiment probe structure is shown in accompanying drawing 3a, coupling mechanism 20 is a spherical glass, one end of incident optical 18 and outgoing optical fiber 19 is fixedlyed connected with coupling mechanism 20, incident optical 18 with outgoing optical fiber 19 gluings be in the same place, and incident optical 18 and outgoing optical fiber 19 have a certain degree, and the outgoing end face of outgoing optical fiber 19 is positioned at below incident optical 18 end faces;
Embodiment 4:
The present embodiment probe structure is shown in accompanying drawing 3b, coupling mechanism 23 is a spherical glass, one end of incident optical 21 and outgoing optical fiber 22 is fixedlyed connected with coupling mechanism 23, incident optical 21 with outgoing optical fiber 22 gluings be in the same place, and the end parts parallel of incident optical 21 and outgoing optical fiber 22, and the outgoing end face of outgoing optical fiber 22 is positioned at more than incident optical 21 end faces;
Embodiment 5:
The present embodiment probe structure is shown in accompanying drawing 4a, and coupling mechanism 26 is a spherical glass, and an end of incident optical 24 and outgoing optical fiber 25 is fixedlyed connected with coupling mechanism 26, and incident optical 24 and outgoing optical fiber 25 have a certain degree;
Embodiment 6:
The present embodiment probe structure is shown in accompanying drawing 4b, and coupling mechanism 29 is a spherical glass, and an end of incident optical 27 and outgoing optical fiber 28 is fixedlyed connected with coupling mechanism 29, the end parts parallel of incident optical 27 and outgoing optical fiber 28;
Embodiment 7:
The present embodiment probe structure is shown in accompanying drawing 5a, and coupling mechanism 32 is an elliposoidal glass, and an end of incident optical 31 and outgoing optical fiber 30 is fixedlyed connected with coupling mechanism 320, and incident optical 31 and outgoing optical fiber 30 have a certain degree;
Embodiment 8:
The present embodiment probe structure is shown in accompanying drawing 5b, and coupling mechanism 35 is the probe synoptic diagram of elliposoidal glass, and an end of incident optical 34 and outgoing optical fiber 33 is fixedlyed connected with coupling mechanism 35, the end parts parallel of incident optical 34 and outgoing optical fiber 33;
Embodiment 9:
The present embodiment probe structure is shown in accompanying drawing 6a, and coupling mechanism 38 is for simultaneously having the sheet glass of reflectance coating 39, and an end of incident optical 37 and outgoing optical fiber 36 is fixedlyed connected with coupling mechanism 38, and incident optical 37 and outgoing optical fiber 36 have a certain degree;
Embodiment 10:
Sensing system constitutes as shown in Figure 1, the present embodiment probe structure is shown in accompanying drawing 6b, coupling mechanism 42 is for simultaneously having the sheet glass of reflectance coating 43, and an end of incident optical 41 and outgoing optical fiber 40 is fixedlyed connected with coupling mechanism 42, the end parts parallel of incident optical 41 and outgoing optical fiber 40;
Embodiment 11:
The present embodiment probe structure is shown in accompanying drawing 7a, and coupling mechanism 46 is leg-of-mutton column glass for the cross section, and an end of incident optical 45 and outgoing optical fiber 44 is fixedlyed connected with coupling mechanism 46, and incident optical 45 and outgoing optical fiber 44 have a certain degree;
Embodiment 12:
The present embodiment probe structure is shown in accompanying drawing 7b, and coupling mechanism 49 is leg-of-mutton column glass for the cross section, and an end of incident optical 48 and outgoing optical fiber 47 is fixedlyed connected with coupling mechanism 49, the end parts parallel of incident optical 48 and outgoing optical fiber 47;
Embodiment 13:
The present embodiment probe structure is shown in accompanying drawing 8a, and coupling mechanism 52 is a cylindrical glass, and an end of incident optical 51 and outgoing optical fiber 50 is fixedlyed connected with coupling mechanism 52, and incident optical 51 and outgoing optical fiber 50 have a certain degree;
Embodiment 14:
The present embodiment probe structure is shown in accompanying drawing 8b, and coupling mechanism 55 is a cylindrical glass, and an end of incident optical 54 and outgoing optical fiber 53 is fixedlyed connected with coupling mechanism 55, the end parts parallel of incident optical 54 and outgoing optical fiber 53.
Used optical fiber can be that multimode optical fiber also can be a single-mode fiber among the present invention, and the single-mode fiber core diameter is less, is applicable to the measurement of small diameter bore, also can mix use with multimode optical fiber by single-mode fiber in same sensor; Can also select special optical fiber as required, should select according to actual needs.
Used optical fiber can be the optical fiber that has covering among the present invention, also can be bare fibre, can also be as using etch to peel off the optical fiber that covering exposes fibre core near the position of coupling mechanism local.
Making and coupling mechanism and a kind of method more simply and easily of the fixedly connected recommendation of optical fiber about coupling mechanism: two bare fibres or the local optical fiber that removes covering are contacted in the end, and adopt hot melt that optical fiber is merged, form sphere or elliposoidal coupling mechanism and finished and the fixedlying connected of optical fiber; For coupling mechanism is that one-sided sheet glass, the cross section that has reflectance coating is that leg-of-mutton column glass and cylindrical glass are realized fixedlying connected of optical fiber and coupling mechanism to glued excessively method.
The present invention integrates Machining Technology, laser technology, CCD imaging technique, optical fiber technology, fiber coupling technique etc., optical fiber coupling principle, optical imaging concept, photoelectricity transformation principle, image processing techniques etc. are applied to same proving installation, for realize littlely mastering, the blind hole dimensional measurement provides high-precision aiming symbol.Optical imagery can adopt Gauss's image-forming principle, carry out high-quality imaging by special big work distance, high magnification, high-quality microcobjective to being returned fiber end face, and by electrooptical device CCD information measured is converted into and is easy to the digital electric signal discerning and handle, via computer acquisition, judgement, processing and analysis etc., finally directly provide current sensor probe to the aiming situation of hole wall and probe situation in the space.Method of sight among the present invention and detection belong to the little power contact-sensing of photoelectricity mode, can guarantee reliability and unicity in the measurement of Mechanical Contact formula, can guarantee the rapidity and the high precision of measuring method again, sensor can be realized the accurate aiming of micro deep-hole dimensional measurement.
Claims (6)
1. double optical fiber coupling contact type micro measuring force aiming sensor, form by probe, microcobjective, CCD camera system, software processing system, it is characterized in that: said probe is made up of two optical fiber, wherein an optical fiber is as incident optical, another root is as outgoing optical fiber, one end of incident optical and outgoing optical fiber is fixedlyed connected with coupling mechanism, coupling mechanism is as the contact of probe, light beam is derived by outgoing optical fiber after incident optical imports coupling mechanism, derives light beam and enters the CCD camera system through microcobjective.
2. sensor as claimed in claim 1 is characterized in that: incident optical and the gluing of outgoing optical fiber are together or separate.
3. sensor as claimed in claim 1 or 2 is characterized in that: described coupling mechanism is sphere or elliposoidal glass.
4. sensor as claimed in claim 1 or 2 is characterized in that: described coupling mechanism is that the cross section is leg-of-mutton column glass.
5. sensor as claimed in claim 1 or 2 is characterized in that: described coupling mechanism is the one-sided sheet glass that has reflectance coating.
6. sensor as claimed in claim 1 or 2 is characterized in that: described coupling mechanism is a cylindrical glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100722545A CN1329709C (en) | 2005-05-27 | 2005-05-27 | Double optical fiber coupling contact type micro measuring force aiming sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100722545A CN1329709C (en) | 2005-05-27 | 2005-05-27 | Double optical fiber coupling contact type micro measuring force aiming sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1737493A true CN1737493A (en) | 2006-02-22 |
| CN1329709C CN1329709C (en) | 2007-08-01 |
Family
ID=36080375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100722545A Expired - Fee Related CN1329709C (en) | 2005-05-27 | 2005-05-27 | Double optical fiber coupling contact type micro measuring force aiming sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1329709C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101871771A (en) * | 2010-06-28 | 2010-10-27 | 天津大学 | High-precision multiple light source modulation optical fiber micro tactile three-dimensional profile measuring method |
| CN103900466A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Temperature self-compensation double-optical-fiber coupling ball microscale sensor based on polarization state detection |
| CN103900470A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Micro-measuring-force aiming sensor based on three-optical-fiber ball-sharing coupling |
| CN103900472A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Double-incidence polarization-maintaining flat optical fiber coupling ball microscale sensor based on polarization state detection |
| CN103900471A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling |
| CN103900468A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Double-fiber ball-shared coupling micro-measuring-force targeting sensor with end face micro-structure |
| CN113310408A (en) * | 2021-04-16 | 2021-08-27 | 防灾科技学院 | Fiber bragg grating displacement sensor based on hyperbolic hinge structure and sensing method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4247764A (en) * | 1979-01-26 | 1981-01-27 | Mechanical Technology Incorporated | Fiber optic proximity instrument having automatic surface reflectivity compensation |
| CN1204046A (en) * | 1998-06-30 | 1999-01-06 | 天津大学 | Optical contact measuring method and miniature three-dimensional measuring head using the same |
| SE514744C2 (en) * | 1999-07-06 | 2001-04-09 | Samba Sensors Ab | Method and apparatus for optical measurement systems |
| CN2427793Y (en) * | 2000-04-26 | 2001-04-25 | 中国工程物理研究院机械制造工艺研究所 | Laser non-contact type device for measuring surface roughness and displacement |
| JP4563600B2 (en) * | 2001-03-01 | 2010-10-13 | 大塚電子株式会社 | Light scattering measurement probe |
| CN100362337C (en) * | 2004-07-28 | 2008-01-16 | 南京航空航天大学 | Optical surface plasma wave nucleic acid sensor system for detecting mononucleotide polymorphism and detecting method |
-
2005
- 2005-05-27 CN CNB2005100722545A patent/CN1329709C/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101871771A (en) * | 2010-06-28 | 2010-10-27 | 天津大学 | High-precision multiple light source modulation optical fiber micro tactile three-dimensional profile measuring method |
| CN101871771B (en) * | 2010-06-28 | 2012-10-03 | 天津大学 | High-precision multiple light source modulation optical fiber micro tactile three-dimensional profile measuring method |
| CN103900466A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Temperature self-compensation double-optical-fiber coupling ball microscale sensor based on polarization state detection |
| CN103900470A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Micro-measuring-force aiming sensor based on three-optical-fiber ball-sharing coupling |
| CN103900472A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Double-incidence polarization-maintaining flat optical fiber coupling ball microscale sensor based on polarization state detection |
| CN103900471A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling |
| CN103900468A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Double-fiber ball-shared coupling micro-measuring-force targeting sensor with end face micro-structure |
| CN103900472B (en) * | 2014-03-20 | 2017-01-25 | 哈尔滨工业大学 | Double-incidence polarization-maintaining flat optical fiber coupling ball microscale sensor based on polarization state detection |
| CN103900466B (en) * | 2014-03-20 | 2017-05-17 | 哈尔滨工业大学 | Temperature self-compensation double-optical-fiber coupling ball microscale sensor based on polarization state detection |
| CN113310408A (en) * | 2021-04-16 | 2021-08-27 | 防灾科技学院 | Fiber bragg grating displacement sensor based on hyperbolic hinge structure and sensing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1329709C (en) | 2007-08-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1329711C (en) | Micro interior cavity dimension measuring apparatus and method based on double optical fiber coupling | |
| CN1737493A (en) | Double optical fiber coupling contact type micro measuring force aiming sensor | |
| CN107208996B (en) | Method and apparatus for measuring characteristics of a workpiece | |
| CN106767545A (en) | A kind of high accuracy high-space resolution angel measuring instrument and angle measurement method | |
| CN104567750A (en) | High-precision ceramic ferrule coaxiality detector | |
| CN105891958A (en) | Large-stroke high-scanning frequency optical fiber delay line | |
| CN108344381A (en) | A kind of non-contact 3-D surface shape measurement method | |
| TWI414751B (en) | Rotation angle measurement system | |
| CN205844575U (en) | A kind of big stroke height rate of scanning fibre delay line | |
| CN1209653C (en) | Three-dimensional profile measuring method and equipment with optical fiber panel and confocal microscope | |
| CN106767521A (en) | A kind of vertical scanning measures white light interference gauge head | |
| CN1204046A (en) | Optical contact measuring method and miniature three-dimensional measuring head using the same | |
| Murakami et al. | Development of a system for measuring micro hole accuracy using an optical fiber probe | |
| Yoshizawa et al. | Development of an inner profile measurement instrument using a ring beam device | |
| JP2004526979A (en) | Sensor device for quick optical distance measurement according to the principle of confocal optical imaging | |
| CN116105638A (en) | U-shaped turntable coaxiality detection system and detection method | |
| TW201723428A (en) | Tilt angle and distance measurement method calculating a distance and a tilt angle of the to-be-tested object according to a barycentric coordinate of a spot | |
| CN214751082U (en) | Laser scanning micro-measuring device | |
| CN2562183Y (en) | Fine tube internal surface detector | |
| CN110312939A (en) | Scanning type probe microscope | |
| CN110702036B (en) | Complex beam angle sensor and small-sized aspheric surface morphology detection method | |
| CN1247956C (en) | Parallel astigmatic three-dimensional focusing detecting method and apparatus thereof | |
| JP5366278B2 (en) | Microcavity measurement method and detector based on microfocal length collimation | |
| KR20120056948A (en) | Confocal measurement equipment using micro-lens array | |
| CN2588324Y (en) | Parallel astigmatic three-D light focusing detector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070801 Termination date: 20200527 |