CN103900471A - Micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling - Google Patents
Micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling Download PDFInfo
- Publication number
- CN103900471A CN103900471A CN201410118968.4A CN201410118968A CN103900471A CN 103900471 A CN103900471 A CN 103900471A CN 201410118968 A CN201410118968 A CN 201410118968A CN 103900471 A CN103900471 A CN 103900471A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- incident optical
- coupling
- probe
- ccd camera
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling and belongs to the precision instrument manufacture and measurement technology. The sensor comprises a laser device a, a laser device b, a beam expanding collimating lens a, a beam expanding collimating lens b, an optical fiber coupling lens a, an optical fiber coupling lens b, a conduit, a microscope objective, a CCD camera, a computer and a probe composed of an incidence optical fiber a, an incident optical fiber b, a coupler and an emergent optical fiber. The incident optical fiber a adheres to the incident optical fiber b in the lateral direction through glue. The coupler serves as a contact point of the probe. Two lasers emitted by the laser device a and the laser device b are incoherent lasers, enter the incidence optical fiber a and the incidence optical fiber b and are guided into the coupler and then guided out through the emergent optical fiber. The guided lasers enter the CCD camera through the microscope objective. The position of a light spot energy center formed on the CCD camera by the emitted lasers can be obtained through the image processing technology so that the collimation condition of the sensor in a space can be judged. The sensor is good in directivity, high in anti-jamming capacity and high in definition.
Description
Technical field
The invention belongs to exact instrument manufacture and measuring technique, particularly a kind of based on two incident opticals micro measuring force aiming sensor of ball coupling altogether.
Background technology
Along with the development of aerospace industry, auto industry, electronics industry and sophisticated industry etc., for the demand sharp increase of accurate micro-member.Owing to being subject to the restriction of space scale and micro-member capture-effect to be measured and the impact of measuring contact force, the precision measurement of micro-member size becomes difficult to achieve, especially fathoming of small inner chamber member is difficult to improve, and these become " bottleneck " of restriction industry development already.In order to realize less dimensional measurement, increase and fathom, the most widely used way is exactly that the inner chamber that uses elongated probe to go deep into micro-member is surveyed, and measures the small inside dimension on different depth by the mode that aims at sender.Therefore, the aiming signal sending type detection system that the precision measurement of micro-member size at present mainly has very thin probe taking coordinate measuring machine combination is as main, due to the comparative maturity of development of measurement of coordinates machine technology, accurate three-dimensional space motion can be provided, and therefore the detection mode of aiming triggering type probe becomes the key of micro-member size detection system design.
At present, the Main Means of micro-member dimensional measurement comprises following several method:
1. the people such as graduate professor H.Schwenke of German federal physical technique has proposed a kind of low-light pearl scattering imaging method, has realized the two-dimensional detection to probe probe location information.The method utilizes single fiber as probe measuring staff, bonding low-light pearl or be welded to measuring staff end, make light be coupled into inside of optical fibre and propagate on low-light pearl and form scattering, form sensitive signal with an area array CCD receiving scattered light, realized micro-power contact type measurement.The people such as professor H.Schwenke had expanded this method afterwards, a bonding low-light pearl on measuring staff, increase the imaging optical path of Liao Yi road to this low-light pearl, this makes this detection system have three-dimensional detection ability simultaneously, and the standard deviation obtaining when measurement standard ball is 0.2 μ m.According to relevant report, the method can realize the aperture of measuring Φ 151 μ m, fathoms as 1mm.This method is in measurement deep hole process, because low-light pearl scattering angle is larger, along with the increase fathoming, the quality of low-light pearl scattering imaging facula reduces gradually because scattered beam is subject to that hole wall blocks, cause image blur, reduce measuring accuracy, therefore cannot realize the high-acruracy survey of large aspect ratio.
2. the people such as the Chinese Tan Jiubin of Harbin Institute of Technology professor and doctor Cui Jiwen proposes a kind of probe structure based on two coupling fibers, two optical fiber are connected by end welding ball, welding ball is as gauge head, introduce light compared with long optical fibers for one, other one goes out light compared with short-range missile, overcome the limitation that low-light pearl scattering method fathoms, can realize accurate aiming when diameter is not less than micro deep-hole that 0.01mm, aspect ratio be not more than 50: 1 and is measured.In this method coupling ball, there is coherent light interference, cause the Signal-to-Noise that obtains lower, affect measuring accuracy and further promote.
3. USA National Institute of Standard and Technology has been used the probe of single fiber measuring staff in conjunction with low-light pearl gauge head, on two-dimensional directional, the imaging of optical fiber measuring staff is amplified to 35 times of left and right by optical design, differentiate and receive optical fiber measuring staff imaging on two-dimensional directional with 2 area array CCDs, then the image receiving is carried out to profile detection, thereby the minute movement in measuring process of monitoring optical fiber measuring staff, and then realize trigger-type and measure, the theoretical resolution of this detection system can reach 4nm, the probe measuring head diameter of detection system is Φ 75 μ n, in experiment, measure the aperture of Φ 129 μ m, its expanded uncertainty estimated value has reached 70nm (k=2), ergometry is μ N magnitude.This method detection resolving power is high, and measuring accuracy is high, and the gauge head of use is easy to miniaturization, can measure the micropore of larger aspect ratio.The limitation of the method is that image-generating unit is to the micrometric displacement enlargement factor of optical fiber measuring staff lower (only having 35 times), must further improve resolving power by image algorithm, the two-dimensional micro-displacement of detection optical fiber measuring staff must use two cover imaging systems, cause system architecture more complicated, measurement data calculated amount is larger, these factors cause the resolving power of detection system to be difficult to further raising, and the real-time of detection system is poor, and system forms more complicated.
Union Bank of Switzerland metering office researched and developed a novel coordinate measuring machine be devoted to brief summary member nano-precision can trace measurement.This measuring machine has adopted the novel contact type probe of the flexure hinge structure based on stamp identification principle, and this design can reduce moving mass and guarantee omnidirectional soft, is a probe with three-D space structure detectivity.The ergometry of this sensing arrangement, lower than 0.5mN, is supported removable probe simultaneously, and the diameter of probe gauge head is minimum to Φ 100 μ m.Detection system combines the platform of a high position precision of being developed by Philips CFT, and the positional precision of platform is 20nm.The standard deviation of this measuring system measuring repeatability reaches 5nm, and the uncertainty of measurement result is 50nm.This kind of method complex structural designs, require measuring staff to have higher rigidity and hardness simultaneously, otherwise be difficult to realize effective displacement sensing, this makes measuring staff structure be difficult to further miniaturization, measure aspect ratio and be restricted simultaneously, the resolving power of detection system is difficult to further raising.
5. the people such as the Chinese Tan Jiubin of Harbin Institute of Technology professor and Wang Fei has proposed a kind of measuring method of the micro-focus collimation of one dimension based on single fiber probe measuring staff, the method utilizes the super large curvature of single fiber probe measuring staff and the design feature of micro-cylindrical lens to set up the micro-focus collimation imaging optical path of pointolite one dimension, by measuring position and the width of fringe of center of energy of imaging bright fringes, thereby obtain the two dimensional displacement quantity information of optical fiber probe measuring staff, if this device is configured as follows: optical fiber probe measuring staff radius is 10 μ m, its refractive index n=1.7, image distance l'=300mm, photelectric receiver pixel dimension is 7 μ m, utilize image algorithm can differentiate the variation of 0.1 pixel, its theoretical resolution can reach 0.03nm.The width of fringe of the method imaging bright fringes is difficult for measuring, in the time that two-dimension displacement is measured, there is the coupled problem in image-forming information, i.e. the position of the center of energy of imaging bright fringes and the coupled problem of width of fringe simultaneously, therefore, the method does not possess the ability of two-dimentional precision measurement.
In sum, at present in microsize and coordinates detection method, because the probe of optical fiber fabrication has, probe size is little, measurement contact force is little, measure aspect ratio feature large, that measuring accuracy is high has obtained extensive concern, utilizes its distinctive optical characteristics and mechanical property to be accomplished in several ways the minute sized precision measurement on certain depth.The problem that existing measurement means mainly exists has:
Detection system fathom limited.The be masked impact of effect of the low-light pearl scattering imaging method of Germany PTB, is difficult to realize the lifting fathoming, and has reduced system detection accuracy simultaneously.
2. the displacement resolving power of detection system is difficult to further raising.The elementary magnification of existing detection system is lower, has caused its overall magnification lower, is difficult to realize the further raising of its displacement resolving power.The optical beam path enlargement ratio of the optics measuring staff of the detection method that USA National Institute of Standard and Technology adopts only has 35 times, and lower elementary enlargement ratio has caused its displacement resolving power to be difficult to further raising.
3. detection system real-time is poor, is difficult to realize accurate on-line measurement.The detection method that USA National Institute of Standard and Technology adopts must use two-way area array CCD to receive signal pattern, must use more complicated image algorithm could realize the high resolution monitoring to the displacement of optical fiber measuring staff, this causes measuring system to need data volume to be processed greatly to increase, reduce the real-time performance of detection system, be difficult to realize in small inner cavity size and two-dimensional coordinate measuring process the synchronism that aims at sender and open, only measures.
4. there is the coupling of two-dimension displacement sensing, cause two-dimension displacement orientation detection scarce capacity.In the time of two-dimension displacement sensing, there is coupling in the micro-focus collimation measuring method based on single fiber probe measuring staff that Harbin Institute of Technology proposes, when tested displacement is Two-dimensional Position, between the two-dimensional signal that the method obtains, there is correlativity, and cannot separate, cause two-dimensional measurement to have very large error, cannot realize the Measurement accuracy of two-dimension displacement.
5. the energy of outgoing beam is low, Signal-to-Noise is low.In the probe structure based on two coupling fibers that Harbin Institute of Technology proposes, because coupling ball efficiency is low, low from the beam energy of outgoing optical fiber outgoing, easily be subject to the interference of extraneous veiling glare, and there is coherent light interference in coupling ball, cause the Signal-to-Noise that obtains lower, measuring accuracy is difficult to further lifting.
Summary of the invention
The object of the invention is to overcome micro-member dimension measurement method the deficiencies in the prior art, a kind of micro measuring force aiming sensor based on the common ball coupling of two incident opticals that is applicable to the dimensional measurement of large aspect ratio micro-member is provided, by coupling mechanism and microcobjective, by sensor probe, the small tactile displacement amount in micropore changes the transversal displacement amount of ccd image capture system into, and the high precision being realized when hole wall is measured by image centroid location algorithm aims at.
Technical solution of the present invention is: a kind of based on two incident opticals micro measuring force aiming sensor of ball coupling altogether, described sensor comprises laser instrument a, beam-expanding collimation mirror a, coupling fiber lens a, conduit, probe, microcobjective, CCD camera and computing machine, data line is communicated with CCD camera with computing machine, probe is placed in micropore to be measured, described probe comprises incident optical a, coupling mechanism and outgoing optical fiber, coupling mechanism is connected with incident optical a and outgoing optical fiber respectively as the contact of probe, the light beam that laser instrument a sends enters incident optical a after beam-expanding collimation mirror a and coupling fiber lens a, light beam is derived by outgoing optical fiber after incident optical a imports coupling mechanism, derive light beam and enter CCD camera through microcobjective, described sensor also comprises laser instrument b, beam-expanding collimation mirror b, coupling fiber lens b, described probe also comprises incident optical b, described incident optical b and the adhesion of incident optical a side direction, and described incident optical b is connected with coupling mechanism, the two bundle laser that described laser instrument b and laser instrument a send are incoherent light, the light beam that laser instrument b sends enters incident optical b after beam-expanding collimation mirror b and coupling fiber lens b, light beam is derived by outgoing optical fiber after incident optical b imports coupling mechanism, derives light beam and enters CCD camera through microcobjective.
Advantage of the present invention is:
1. two incident opticals in sensor carry out side direction adhesion with glue and have increased the rigidity of probe, and the radial rigidity of two optical fiber after adhesion is different in all directions, has directional selectivity while touching gaging hole wall.
2. by two bundle incoherent lights, the energy of outgoing beam is strengthened greatly, can improve the resolving power of detector and to there being the adaptive faculty of environment of light disturbance.
3. optical detection signal, only in inside of optical fibre transmission, is not subject to the impact of micropore inwall, measures maximum aspect ratio and can reach 40: 1, meets the requirement of large aspect ratio micro measurement.
Brief description of the drawings
Fig. 1 is based on two incident opticals micro measuring force aiming sensor structural representation of ball coupling altogether.
In figure: 1, laser instrument a, 2, laser instrument b, 3, beam-expanding collimation mirror a, 4, beam-expanding collimation mirror b, 5, coupling fiber lens a, 6, coupling fiber lens b, 7, conduit, 8, micropore to be measured, 9, incident optical a, 10, coupling mechanism, 11, incident optical b, 12, outgoing optical fiber, 13, probe, 14, microcobjective, 15, CCD camera, 16, computing machine.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of the present invention is described in further detail.
One based on two incident opticals micro measuring force aiming sensor of ball coupling altogether, described sensor comprises laser instrument a1, beam-expanding collimation mirror a3, coupling fiber lens a5, conduit 7, probe 13, microcobjective 14, CCD camera 15 and computing machine 16, data line is communicated with CCD camera 15 with computing machine 16, probe 13 is placed in micropore 8 to be measured, described probe 13 comprises incident optical a9, coupling mechanism 10 and outgoing optical fiber 12, coupling mechanism 10 is connected with incident optical a9 and outgoing optical fiber 12 respectively as the contact of probe 13, the light beam that laser instrument a1 sends enters incident optical a9 after beam-expanding collimation mirror a3 and coupling fiber lens a5, light beam is derived by outgoing optical fiber 12 after incident optical a9 imports coupling mechanism 10, derive light beam and enter CCD camera 15 through microcobjective 14, it is characterized in that described sensor also comprises laser instrument b2, beam-expanding collimation mirror b4, coupling fiber lens b6, described probe 13 also comprises incident optical b11, described incident optical b11 and the adhesion of incident optical a9 side direction, and described incident optical b11 is connected with coupling mechanism 10, the two bundle laser that described laser instrument b2 and laser instrument a1 send are incoherent light, the light beam that laser instrument b2 sends enters incident optical b11 after beam-expanding collimation mirror b4 and coupling fiber lens b6, light beam is derived by outgoing optical fiber 12 after incident optical b11 imports coupling mechanism 10, derive light beam and enter CCD camera 15 through microcobjective 14.
Utilize conduit 7 also can not use conduit 7 by bending to incident optical a9 and incident optical b10 to image capture space is provided, and directly by thermal finalization method by incident optical a9 and incident optical b10 bending to image capture space is provided.
The course of work of the present invention is as follows:
Open laser instrument a1 and laser instrument b2, the beamstability that laser instrument a1 and laser instrument b2 are sent half an hour in advance.Adjust respectively relative position and attitude between coupling fiber lens a5, coupling fiber lens b6 and incident optical a9, incident optical b11, ensure that maximum luminous energy enters incident optical a9 and incident optical b11.Adjust relative position and attitude between outgoing optical fiber 12 and microcobjective 14, ensure that the relative microcobjective 14 of outgoing end face of outgoing optical fiber 12 is objects in paraxial region, to improve image quality.Probe 13 is stretched into micropore to be measured 8 inside, and make it to produce relative displacement with micropore 8 to be measured, in the time that coupling mechanism 10 contacts with the hole wall of micropore 8 to be measured, by microcobjective 14, by probe 13, the small tactile displacement amount in micropore 8 to be measured changes the transversal displacement amount of CCD15 image capture system into, and the high precision being realized when hole wall is measured by image centroid location algorithm aims at.
Claims (1)
1. one kind is total to the micro measuring force aiming sensor of ball coupling based on two incident opticals, described sensor comprises laser instrument a (1), beam-expanding collimation mirror a (3), coupling fiber lens a (5), conduit (7), probe (13), microcobjective (14), CCD camera (15) and computing machine (16), data line is communicated with CCD camera (15) with computing machine (16), probe (13) is placed in micropore to be measured (8), described probe (13) comprises incident optical a (9), coupling mechanism (10) and outgoing optical fiber (12), coupling mechanism (10) is connected with incident optical a (9) and outgoing optical fiber (12) respectively as the contact of probe (13), the light beam that laser instrument a (1) sends enters incident optical a (9) after beam-expanding collimation mirror a (3) and coupling fiber lens a (5), light beam is derived by outgoing optical fiber (12) after incident optical a (9) imports coupling mechanism (10), derive light beam and enter CCD camera (15) through microcobjective (14), it is characterized in that: described sensor also comprises laser instrument b (2), beam-expanding collimation mirror b (4), coupling fiber lens b (6), described probe (13) also comprises incident optical b (11), described incident optical b (11) and incident optical a (9) side direction adhesion, and described incident optical b (11) is connected with coupling mechanism (10), the two bundle laser that described laser instrument b (2) and laser instrument a (1) send are incoherent light, the light beam that laser instrument b (2) sends enters incident optical b (11) after beam-expanding collimation mirror b (4) and coupling fiber lens b (6), light beam is derived by outgoing optical fiber (12) after incident optical b (11) imports coupling mechanism (10), derive light beam and enter CCD camera (15) through microcobjective (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410118968.4A CN103900471A (en) | 2014-03-20 | 2014-03-20 | Micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410118968.4A CN103900471A (en) | 2014-03-20 | 2014-03-20 | Micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103900471A true CN103900471A (en) | 2014-07-02 |
Family
ID=50991941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410118968.4A Pending CN103900471A (en) | 2014-03-20 | 2014-03-20 | Micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103900471A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112964197A (en) * | 2021-03-23 | 2021-06-15 | 哈尔滨工业大学 | Micro-sphere surface morphology detection device based on negative feedback phase-locked vibration suppression |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1204046A (en) * | 1998-06-30 | 1999-01-06 | 天津大学 | Optical contact measuring method and miniature three-dimensional measuring head using the same |
| CN1731084A (en) * | 2005-09-14 | 2006-02-08 | 哈尔滨工业大学 | Micro interior cavity dimension measuring apparatus and method based on double optical fiber coupling |
| CN1737493A (en) * | 2005-05-27 | 2006-02-22 | 哈尔滨工业大学 | Double optical fiber coupling contact type micro measuring force aiming sensor |
| US20070038120A1 (en) * | 2005-07-05 | 2007-02-15 | The Board Of Regents Of The University Of Texas | Depth-Resolved Spectroscopy Method and Apparatus |
| CN101871771B (en) * | 2010-06-28 | 2012-10-03 | 天津大学 | High-precision multiple light source modulation optical fiber micro tactile three-dimensional profile measuring method |
-
2014
- 2014-03-20 CN CN201410118968.4A patent/CN103900471A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1204046A (en) * | 1998-06-30 | 1999-01-06 | 天津大学 | Optical contact measuring method and miniature three-dimensional measuring head using the same |
| CN1737493A (en) * | 2005-05-27 | 2006-02-22 | 哈尔滨工业大学 | Double optical fiber coupling contact type micro measuring force aiming sensor |
| US20070038120A1 (en) * | 2005-07-05 | 2007-02-15 | The Board Of Regents Of The University Of Texas | Depth-Resolved Spectroscopy Method and Apparatus |
| CN1731084A (en) * | 2005-09-14 | 2006-02-08 | 哈尔滨工业大学 | Micro interior cavity dimension measuring apparatus and method based on double optical fiber coupling |
| CN101871771B (en) * | 2010-06-28 | 2012-10-03 | 天津大学 | High-precision multiple light source modulation optical fiber micro tactile three-dimensional profile measuring method |
Non-Patent Citations (1)
| Title |
|---|
| JIWEN CUI，ETC.: "Fiber probe for micro-hole measurement based on detection of returning", 《SENSORS AND ACTUATORS A: PHYSICAL》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112964197A (en) * | 2021-03-23 | 2021-06-15 | 哈尔滨工业大学 | Micro-sphere surface morphology detection device based on negative feedback phase-locked vibration suppression |
| CN112964197B (en) * | 2021-03-23 | 2022-04-29 | 哈尔滨工业大学 | Micro-sphere surface morphology detection device based on negative feedback phase-locked vibration suppression |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103759641B (en) | Three-dimensional micro-scale measurement device and method based on four-core fiber grating | |
| CN101520313B (en) | Sensing method and device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation | |
| CN103900481B (en) | Guarantor's inclined zero diopter fibre coupling ball minute yardstick sensor based on polarization state detection | |
| CN102564309B (en) | Device and method for measuring micro-pore size based on fiber Bragg grating | |
| CN102589439B (en) | Contact type temperature non-inductive three-dimensional detection sensor based on fiber Bragg grating (FBG) | |
| CN103759652B (en) | Two-dimentional micro-scale measurement device and method based on double optical fiber grating | |
| CN101545761A (en) | Optical measuring system with multiple degrees of freedom | |
| CN102589422B (en) | Orthogonal light path two-dimensional micro-focus collimation and three-dimensional coordinate sensor | |
| CN106425691B (en) | Measuring of Axis Rotating Accuracy detection device and method based on laser interference principle | |
| CN101520314B (en) | Sensing method and device for micro inner cavity and two-dimensional coordinate based on one-dimensional micro-focus collimation | |
| CN103900468A (en) | Double-fiber ball-shared coupling micro-measuring-force targeting sensor with end face micro-structure | |
| CN103759642B (en) | Two-dimensional microscale measuring device and method based on three-core fiber bragg grating | |
| CN106767395A (en) | One kind is used for six efficient measuring systems of geometric error high resolution of line slideway and method | |
| CN103759643B (en) | Two-dimentional micro-scale measurement device and method based on twin-core fiber grating | |
| CN103673926A (en) | Reflection cavity type confocal measuring method of super-large radius of curvature | |
| CN102062586B (en) | Inner-bore laser measuring device | |
| CN103900467B (en) | Single fiber coupling ball minute yardstick sensor based on polarization state detection | |
| CN103759653B (en) | Three-dimensional micro-scale measurement device and method based on five core fibre gratings | |
| CN104697448A (en) | Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device | |
| CN109520443B (en) | Roll angle measuring method based on combined surface type reference part | |
| CN103900471A (en) | Micro-measuring-force collimation sensor based on double-incidence optical fiber ball-sharing coupling | |
| CN103900466A (en) | Temperature self-compensation double-optical-fiber coupling ball microscale sensor based on polarization state detection | |
| CN103900470B (en) | Micro-measuring-force aiming sensor based on three-optical-fiber ball-sharing coupling | |
| CN102519370B (en) | Micropore measurer based on orthogonal two-dimensional micro-focus collimation and method | |
| CN103900469B (en) | Double-optical-fiber coupling ball microscale sensor based on polarization state detection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140702 |