TW201723428A - Tilt angle and distance measurement method calculating a distance and a tilt angle of the to-be-tested object according to a barycentric coordinate of a spot - Google Patents

Abstract

This invention is a tilt angle and distance measurement method, comprising the following steps: making a light source be incident on a to-be-tested object by means of a combination of a spectroscope and a convex lens; receiving the light source reflected by the to-be-tested object by a photoelectric induction module; and calculating a distance and a tilt angle of the to-be-tested object according to a barycentric coordinate of a spot produced by the light source reflected by the to-be-tested object on the photoelectric induction module by means of a processing unit.

Description

Tilt angle and distance measurement method

The invention relates to a measuring system, in particular to analyzing the tilt angle of the object to be tested and the inclination of the distance between the object to be tested and the measuring system by analyzing a single light source reflected by the object to be tested to the position of the center of gravity of the two sets of photodetectors. Angle and distance measurement method.

With the development of technology and the advancement of the industry, today's industrial processes have been developed to the nanometer level, and various electronic components, panels and wafers have also been miniaturized. In this process, microprocessors and micro-nano systems are also Because of the continuous improvement of the process, electronic products are moving toward small and dense circuit layout. In the process of manufacturing these sophisticated electronic products, it is necessary to have corresponding measurement methods to measure such products. Precision electronic products to ensure the quality and reliability of these electronic products.

The methods used to measure electronic products are generally divided into contact and non-contact. The contact measurement method is measured by using a dial gauge or a contact probe. The dial gauge converts the general linear displacement into a rotary motion of the pointer through a gear or a lever, and then indicates the amount of movement by a pointer on the dial. The measuring instrument, when the probe touches the object to be tested, the mechanism generates a switch change, and the electronic signal is turned from off to off, that is, the coordinates are locked and sent to the processor for processing. Contact measurement has the characteristics of high precision and high reliability, but it needs to be measured point by point, so the measurement speed is slow. Due to the need to directly contact the surface of the object to be tested, the surface of the object to be tested needs to have certain rigidity and is easy to be damaged. The measurement object is easily limited by the fact that the probe size cannot measure a small object to be tested, and is not suitable for use in electronic products that require rapid, precise and non-destructive measurement.

The non-contact measurement method mostly uses a laser light source to measure, and the measurement speed is fast, does not need to contact the object to be tested itself, and the measurement dead angle is small, which is quite suitable for measuring the high-precision object to be tested. Although the non-contact measurement has a measurement signal due to the roughness of the surface of the object to be tested and the curvature of the surface, the current electronic products are highly sophisticated, such as the wafer factory's micro-nano platform automatic collimator. Applications such as wafer flatness detection, displacement sensor measurement of the position of fine components, and surface contour and roughness detection applications, all manufacturers hope to optically and automatically apply measurement technology to the factory. In the meantime, the traditional human strength measurement method is replaced by the non-destructive and high efficiency of the non-contact measurement technology.

Because many manufacturers today want to apply non-contact measurement technology to the factory and automate the measurement method. Among them, autofocus technology is an important technology for non-contact measurement, but it can only measure the object to be tested. The distance between the instruments is measured, and the tilted object to be tested cannot be measured. However, the automatic collimator only measures the inclination of the object to be tested, but cannot measure the distance between the object to be tested and the measuring instrument.

The object of the present invention is to provide a method for measuring the tilt angle and the distance. The two photoelectric sensing modules receive the light reflected from the object to be tested to calculate the tilt angle and distance of the object to be tested, and are used for measuring the wafer. Gears, surface contours of objects, etc., can quickly determine whether the object to be tested is flawed.

In order to achieve the above objects and effects, one embodiment of the present invention discloses a tilt angle and distance measurement method, including a light source module, a first beam splitter, a second beam splitter, and a first light source. a sensing module, a second photo-sensing module, a first convex lens, a second convex lens, a processing unit, and the processing unit is incident on the object to be tested through the mirror group by the light emitted by the light source module Then, the tilt angle and distance of the object to be tested are obtained by reflecting the object to be measured to the position coordinates of the center of gravity of the light point on the first photo-sensing module and the second photo-sensing module.

In an embodiment of the present invention, the display unit further includes a display unit electrically connected to the processing unit, and the display unit is configured to display an inclination angle and a distance of the object to be tested.

In an embodiment of the invention, the light source module may be a laser, a mercury lamp, a fluorescent lamp, a halogen lamp or a light emitting diode.

In an embodiment of the invention, the first beam splitter, the second beam splitter, the first convex lens, and the second convex lens may be made of glass, resin, plastic or polycarbonate.

In addition, the present invention provides another method for measuring the tilt angle and the distance, which differs from the previous one in that two light source modules are used in the present aspect, and the light emitted by the processing unit by the first and second light source modules is The mirror group is reflected to the spot coordinates of the first photo-sensing module and the second photo-sensing module, and the tilt angle and distance of the object to be tested are obtained.

In order to provide a better understanding and understanding of the features and the efficacies of the present invention, the preferred embodiment and the detailed description are as follows:

In the prior art, the non-contact measurement method cannot simultaneously measure the distance between the object to be tested and the inclination angle of the object to be tested. Therefore, the present invention proposes that the method for measuring the inclination angle and the distance can be simultaneously obtained while measuring. The distance between the object and the angle of inclination of the object to be tested.

When the light is off the optical axis of the focusing objective for a distance S and then incident on the object to be tested through the focusing objective, the reflected light is reflected back to the focusing objective at different angles due to the difference in the inclination of the object to be tested, so that the reflected object is reflected back. Light is incident on different locations on the optical sensor, and the position of the center of gravity of these reflected spots has a fixed ratio to the distance of the object to be tested.

Therefore, in the case where the material of the lens, the reflectance of the lens, the distance between the lens and the lens, the distance between the lens and the photodetector, and the incident point of the light are known, the photo-inductance measurement can be performed. The position of the center of gravity of the spot on the device and the above factors can be calculated to obtain the distance and tilt angle of the object to be tested.

Here, the tilt angle and distance measurement method of the first embodiment of the present invention will be described. Referring to the first figure, it is a system block diagram of the tilt angle and distance measurement method according to the first embodiment of the present invention. As shown in the figure, the system required for performing the tilt angle and distance measurement method of the embodiment includes: a light source module 10, a first photoelectric sensing module 31, a second photoelectric sensing module 33, and a first The spectroscope 51, a second dichroic mirror 53, a first convex lens 71, a second convex lens 73, a processing unit 90 and a power supply unit 11, the present embodiment is used to measure the distance and inclination of an object to be tested 13. An angle to determine whether the object to be tested 13 has flaws. The first beam splitter 51 is sequentially named as a first side 511, a second side 512, a third side 513, and a fourth side 514 in a clockwise manner. The second beam splitter 53 is sequentially named as a first side 531, a second side 532, a third side 533, and a fourth side 534 in a clockwise manner. The first beam splitter 51, the second beam splitter 53, the first convex lens 71 and the second convex lens 73 can be regarded as a lens module.

The light source module 10 is disposed on the first side 511 of the first beam splitter 51, the second beam splitter 53 is disposed on the third side 513 of the first beam splitter 51, and the first photo-sensing module 31 is disposed on The fourth side 514 of the first beam splitter 31 is disposed on the fourth side 534 of the second beam splitter 53. The second convex lens 73 is disposed on the first beam splitter 51 and the second beam splitter 53 The first lens 17 is disposed on the second side 532 of the second beam splitter 53. The processing unit 90 is electrically connected to the first photo-sensing module 31 and the second photo-electric Sensing module 33.

The light source module 10 can be a light-emitting component such as a laser, a mercury lamp, a fluorescent lamp, a halogen lamp or a light-emitting diode. The first beam splitter 51 and the second beam splitter 53 can allow half of the light to be reflected by half, although the brightness of the light source is reduced after passing through the beam splitter, so that the use efficiency of the light source is reduced, but the light source module 10 can be transmitted through the light source. The luminous efficiency is compensated. The first photoelectric sensing module 31 and the second photoelectric sensing module 33 can be a charge coupled device (CCD), a contact image sensing device (CIS), or a complementary metal oxide semiconductor active pixel. A sensor (CMOS, Complementary Metal-Oxide-Semiconductor) or other electronic component that converts an optical image into an electronic signal. The material of the first beam splitter 51, the second beam splitter 53, the first convex lens 71, and the second convex lens 73 may be glass, resin, plastic, crystal, polymethyl methacrylate, propylene carbonate or polycarbonate. Ester or other material that can be used as a lens. The processing unit 90 is an electronic component that can perform arithmetic and logic operations. The power supply unit 11 supplies the power required by the light source module 10. The object to be tested 13 can reflect light.

Next, the light path of the tilt angle and distance measuring method of the first embodiment of the present invention for measuring the distance and the tilt angle of the object to be tested is described. Referring to FIG. 2A to FIG. 2C, it is the present invention. The light path diagram of the tilt angle and the distance measuring method of the first embodiment, when the object to be tested 13 is measured by using the tilt angle and distance measuring method of the present invention, as shown in FIG. 2A, the light source module 10 emits a light L to the first beam splitter 51, and the light beam L has an offset S from the optical axis of the first beam splitter 51 when it is incident. After passing through the first beam splitter 51, the light L is divided into the light L passing through the first beam splitter 51 and the light reflected from the second side 512 of the first beam splitter 51. Only the light L passing through the first beam splitter 51 is discussed in the example. The light L passes through the first beam splitter 51 and is incident on the second beam splitter 53. The light L passes through the second beam splitter 53 and is split into a second surface that is reflected from the second beam splitter 53. The light L emitted by 532 and the light passing through the second beam splitter 53 only discuss the light L which is reflected from the second surface 532 of the second beam splitter 53 in this embodiment. The light L is emitted from the second surface 532 of the second beam splitter 53 to the first convex lens 71. The first convex lens 71 refracts the light L so that the light L is incident on the object 13 to be tested.

Continuing the above, as shown in FIG. 2B, the object to be tested 13 reflects the light L to the first convex lens 71. The light L is refracted by the first convex lens 71 and is incident on the second beam splitter 53. After passing through the second beam splitter 53, the L is reflected and reflected from the first surface 531 of the second beam splitter 53 to emit a first splitting light L1 and a second splitting light L2 passing through the second splitting mirror 53. .

In the above, as shown in the second C, the first splitting light L1 is incident on the first beam splitter 51, and the first splitting light L1 is divided into the reflected light from the first splitting mirror 51. The first surface splitting L1 of the mirror 51 and the light passing through the first beam splitter, in the present embodiment, only the first splitting light emitted from the fourth surface 514 of the first beam splitter 51 is discussed. L1. The first beam splitting L1 is incident from the fourth surface 514 of the first beam splitter 51 to the second convex lens 73. The second convex lens 73 refracts the first beam splitting L1 such that the first beam splitting L1 is incident on the first photosensor module. Group 31. The second beam splitting L2 is incident on the second photosensor module 33 through the fourth surface 534 of the second beam splitter.

Next, a method for calculating the distance and the inclination angle of the object to be tested by the tilt angle and distance measurement method according to the first embodiment of the present invention will be described. Please refer to the second D diagram, the second E diagram, and the second F diagram. A schematic diagram and a parameter diagram of a spot on the first photoelectric sensing module and the second photoelectric sensing module of the tilt angle and distance measuring method according to the first embodiment of the present invention, as shown in the second D diagram and the second E diagram, When the first splitting light L1 is incident on the first photoelectric sensing module 31, a first light spot 311 is generated. When the second light splitting light L2 is incident on the second photoelectric sensing module 33, a second light spot 331 is generated. a light spot 311 and the second light spot 331 may be due to the distance of the object to be tested 13 , the intensity of the light L emitted by the light source module 10 , the first beam splitter 51 , the second beam splitter 53 , and the first The shape of the convex lens 71 and the second convex lens 73 and other factors that affect the light condition have different shapes and brightness.

The processing unit 90 calculates the distance between the object to be tested 13 and the tilt angle of the object to be tested 13 according to the signal generated by the light received by the first photoelectric sensor module 31 and the second photoelectric sensor module 33. In detail, the processing unit 90 calculates a first spot center of gravity coordinate 3111 of the first spot 311 on the first photoelectric sensing module 31. The first spot center of gravity coordinate 3111 includes an X-axis coordinate and a Y-axis coordinate. . The processing unit calculates the second spot 331 on the second spot center-of-gravity coordinate 3311 of the second photo-sensing module 33. The second spot center-of-gravity coordinate 3311 includes an X-axis coordinate and a Y-axis coordinate, and the first spot 3111 The center of gravity coordinates and the center of gravity of the second spot 3311 can utilize general image processing technology, and the content includes binarization, morphology, image filling and small area removal, convex hull calculation center of gravity coordinates, and the center of gravity of the spot is calculated in the image. Pixel intensity values of the i-th column and the j-th row ( The weighting is multiplied by its position and divided by the sum of the image pixel intensity values. The mathematical equation is as follows: Before the processing unit 90 calculates the center of gravity coordinates of the spot, the processing unit 90 may first remove the noise on the first photoelectric sensing module 31 and the second photoelectric sensing module 33 by filtering, and the processing unit 90 also A threshold may be set first so that the darker portions of the first photoelectric sensing module 31 and the second photoelectric sensing module 33 are removed before the calculation of the center of gravity coordinates to reduce noise interference.

In the above, according to the path of the light, the optical path of the light emitted by the light source module 10 at the position F1 of the first photodetector 31 can be modeled by a mathematical formula, and the formula is as follows: (1) where P1 is the coordinate of the exit point of the light from the second convex lens 73, which may change due to the distance and the tilt angle of the object to be tested, and V1 is that the first splitting light L1 is emitted from the second convex lens 73 to the first photoelectric The vector of the sensing module 31 changes due to the distance and tilt angle of the object to be tested. D1 is the distance between the second side 532 of the second beam splitter 53 and the second beam splitter mirror, and D2 is the first beam splitter 51. The distance between the fourth side 514 and the first beam splitter mirror, D3 is the distance between the fourth side 514 of the first beam splitter 51 and the second convex lens 73, D4 is the thickness of the second convex lens 73, and D5 is the first The distance between the second convex lens 73 and the first photoelectric sensing module 31 is obtained, and when D1+D2+D3+D4+D5, the vertical distance between the second beam splitter 53 and the first photoelectric sensing module 31 can be obtained.

In the above, according to the path of the light, the optical path of the light emitted by the light source module 10 at the position F2 of the second photo-detector 33 can be modeled by a mathematical formula, and the formula is as follows: (2) wherein P2 is the light exiting the point coordinates from the fourth side 534 of the second beam splitter 53, which is changed by the distance and the tilt angle of the object to be tested, and V2 is the second beam splitter L2 from the second beam splitter 53. The vector that is incident on the second photoelectric sensing module 33 changes due to the distance and tilt angle of the object to be tested, D6 is the thickness of the second beam splitter 53, and D7 is the fourth side of the second beam splitter 53. The distance from the second photoelectric sensing module, and the vertical distance between the second beam splitter 53 and the second photodetector 33 can be obtained when D6+D7.

Following the above, according to the world coordinate conversion matrix and the above formula (1), the coordinates of the first spot center-of-gravity coordinate 3111 on the first photoelectric sensing module 31 can be calculated, and the world of the first spot center-of-gravity coordinates 3111 is calculated. The formula for the coordinate transformation matrix is as follows: (3) Det _X is the quotient of the X-axis direction pixel and the sensing chip length of the photoelectric sensing module, and Det _Y is the quotient of the Y-axis direction pixel and the sensing chip width of the photoelectric sensing module, and Sf1 _x and Sf1 _Y are The compensation value of the first photoelectric sensing module in the X-axis and Y-axis directions compared to the actual origin.

In the above, according to the world coordinate conversion matrix and the above formula (2), the coordinates of the second spot center-of-gravity coordinate 3311 on the second photoelectric sensing module 33 can be calculated, and the world of the second spot center-of-gravity coordinates 3311 is calculated. The formula for the coordinate transformation matrix is as follows: (4) Where Sf2 _x and Sf2 _Y are the compensation values of the first photoelectric sensing module in the X-axis and Y-axis directions compared with the actual origin.

According to the above formula (1) and formula (3), the coordinates of the first spot center-of-gravity coordinate 3111 on the first photoelectric sensing module 31 can be calculated. (Fives)

According to the above formula (2) and formula (4), the coordinates of the second spot center-of-gravity coordinate 3311 on the second photoelectric sensing module 33 can be calculated. (six)

By using the above formula (5), the mathematical expression of the X-axis coordinate and the Y-axis coordinate of the incident point F1 on the first photoelectric sensing module 31 when the light is transmitted to the first photo-inductance sensing module 31 can be obtained:

By using the above formula (6), the mathematical expression of the X-axis coordinate and the Y-axis coordinate of the incident point F2 on the second photoelectric sensing module 33 when the light is transmitted to the second photo-inductive sensing module 33 can be obtained:

Since V1, V2, D1~D7, P1, P2, the first spot center of gravity coordinate 3111 (that is, the incident point F1) and the second spot center of gravity coordinate 3311 (that is, the incident point F2) are all after the optical model is established. Knowing the number, and V1, V2, P1, P2 will be affected by the distance of the object to be tested, the X-axis tilt angle of the object to be tested and the Y-axis tilt angle of the object to be tested, so the distance between the object to be tested and The angle of inclination of the object to be tested.

The processing unit 90 obtains the distance between the object to be tested 13 and the second convex lens 73, the X-axis tilt angle of the object to be tested 13, and the Y-axis tilt angle of the object to be tested 13, thereby completing the first implementation of the present invention. For example, the user can measure the distance and the tilt angle of the object to be tested by using the technique disclosed in the embodiment to determine whether the object to be tested has flaws.

Here, the tilt angle and distance measurement method of the second embodiment of the present invention will be described. Referring to the third figure, it is a system block diagram of the tilt angle and distance measurement method according to the second embodiment of the present invention. As shown in the figure, the system required for performing the tilt angle and distance measurement method of the embodiment includes: a first light source module 211, a second light source module 213, a first photoelectric sensing module 231, and a first Two photoelectric sensing modules 233, a polarizing beam splitter 251, a first beam splitter 253, a second beam splitter 255, a first convex lens 271, a second convex lens 273, a processing unit 290, and a first polarizer The second polarizing mirror 2113 and a power supply unit 2131 are used to measure the distance and the tilt angle of the object to be tested 300 to determine whether the object to be tested 300 has flaws.

The polarizing beam splitter 251 is sequentially named as a first side 2511, a second side 2512, a third side 2513, and a fourth side 2514 in a clockwise manner. The polarizing beam splitter 251 allows P-type light to pass and reflect the S-type. The light, the electric field component of the polarized incident light is perpendicular to the plane formed by the incident light and the reflected light. The incident light at this time is called S-type light, and the electric field component of the polarized incident light is parallel to the plane formed by the incident wave and the reflected wave. The incident light at this time is called a P-type ray. The first beam splitter 253 is sequentially named as a first side 2531, a second side 2532, a third side 2533, and a fourth side 2534 in a clockwise manner. The second beam splitter 255 is sequentially named in a clockwise manner as a first side 2551, a second side 2552, a third side 2553, and a fourth side 2554. The first polarizer 2111 will only pass the P-type light. The second polarizer 2113 will only pass the S-type light.

The first light splitting mirror 253 is disposed on the third side 2513 of the polarizing beam splitter 251. The first light source module 211 is disposed on the first side 2511 of the polarizing beam splitter 251, and the first light source module 211 is emitted. The second light source module 213 is disposed on the second side 2532 of the first beam splitter 253, and the second light source module 213 is disposed on the second side 2532 of the first beam splitter 253, wherein the light is polarized light and includes a P-type light (a first type of light) and an S-type light (a second type of light). The light emitted by the two light source modules 213 is polarized light, and includes P-type light (first type light) and S-type light (second type light). The first photo-electric sensing module 231 is disposed on the second beam splitter. The second side of the second beam splitter 253 is disposed on the third side 2533 of the first beam splitter 253, and the second photo-sensing module 233 is disposed on the fourth side 2514 of the polarizing beam splitter 251. The first polarizer 2111 is disposed between the second beam splitter 255 and the first photo sensor module 231. The second polarizer 2113 is disposed between the first beam splitter 253 and the second light source module 213. The first convex lens 271 is disposed on the second side 2552 of the second beam splitter 255, and the second convex lens 273 is disposed on the polarizing beam splitter 251. The first photo-sensing module 233 is electrically connected to the first photo-sensing module 231 and the second photo-sensing module 233. The power supply module 2131 is electrically connected to the first A light source module 211 and the second light source module 213 provide power required by the first light source module 211 and the second light source module 213.

The light emitted by the first light source module 211 and the second light source module 213 is polarized light and includes a P-type light and an S-type light. The first photoelectric sensing module 231 and the second photoelectric sensing module 233 can be a charge coupled component, a contact image sensing component or a complementary metal oxide semiconductor active pixel sensor or other electronic device capable of converting an optical image into an electronic signal. element. The material of the polarizing beam splitter 251, the first beam splitter 253, the second beam splitter 255, the first convex lens 271, the second convex lens 273, the first polarizing mirror 2111 and the second polarizing mirror 2113 may be Glass, resin, plastic, crystal, polymethyl methacrylate, propylene carbonate or polycarbonate or other materials can be used as lenses. The processing unit 290 is an electronic component that can perform arithmetic and logic operations. The power supply unit 2131 provides power required by the first light source module 211 and the second light source module 213. The object to be tested 300 can reflect light.

Next, the light path of the tilt angle and the distance measuring method according to the second embodiment of the present invention for measuring the distance and the tilt angle of the object to be tested is described. Referring to FIGS. 4A to 4F, it is the present invention. A schematic diagram of a light path of the tilt angle and distance measuring method of the second embodiment, when the object to be tested 300 is measured using the tilt angle and distance measuring method of the present invention, as shown in FIG. 4A, the first light source The module 211 emits a first light L10 to the polarizing beam splitter 251. The first light L10 includes a P-type light and an S-type light. When the first light L10 is incident on the polarizing beam splitter 251, the polarizing beam is split. The optical axis of the mirror 251 has an offset S.

In the above, the P-type light of the first light L10 passes through the polarization beam splitter 251 and is incident on the first beam splitter 253. The P-type light of the first light L10 passes through the first beam splitter 253 and is divided. The P-type ray that passes through the first ray L10 of the first dichroic mirror 253 and the ray that is reflected from the second surface 2532 of the first dichroic mirror 253 are only discussed in this embodiment. A P-type ray of the first light L10 of a beam splitter 253. The P-type light of the first light L10 passes through the first beam splitter 253 and is incident on the second beam splitter 255. The P-type light of the first light L10 is divided into reflected by the second beam splitter 255. The P-type ray of the first ray L10 and the ray passing through the second dichroic mirror 255 from the second surface 2552 of the second beam splitter 255 are only discussed in the present embodiment and are reflected from the second The second surface 2552 of the beam splitter 255 emits the P-type light of the first light L10. The P-type light of the first light L10 is reflected to the first convex lens 271, and the first convex lens 271 refracts the P-type light of the first light L10 to be incident on the object to be tested 300.

In the above, as shown in FIG. 4B, the object to be tested 300 reflects the P-type light of the first light L10 to the first convex lens 271, and the P-type light of the first light L10 is refracted by the first convex lens 271. The P-type light of the first light L10 passes through the beam splitter 255 and is split into a first split light L11 that is reflected from the first surface 2551 of the second beam splitter 255. And the second splitting light L12 passing through one of the second beam splitters 255, the first splitting light L11 and the second splitting light L12 are both P-type light rays.

Following the above, as shown in FIG. 4C, the first beam splitting L11 is incident on the first beam splitter 253, and the first beam splitting L11 penetrates the first beam splitter 253 and the polarizing beam splitter 251. The second splitting light L12 passes through the fourth surface 2534 of the second beam splitter and the first polarizer 2111 to enter the first photoelectric sensing module 231.

The second light source module 213 emits a second light L20 to the second polarizer 2113. The second light L20 includes a P-type light and an S-type light. The second light is included. The S-type light of the L20 passes through the second polarizer 2113 and is incident on the first beam splitter 253. When the S-type light of the second light L20 is incident on the first beam splitter 253 and the optical axis of the first beam splitter 253 There is an offset S.

Following the above, the S-type light of the second light ray L20 is divided into the light passing through the first beam splitter 253 and reflected from the third surface 2533 of the first beam splitter 253 after passing through the first beam splitter 253. In the present embodiment, only the S-type ray of the second ray L20 that is reflected from the third surface 2533 of the first beam splitter 253 is reflected. The S-type light of the second light ray L20 is reflected by the first beam splitter 253 to the second beam splitter 255, and the S-type light of the second light ray L20 is divided into reflected by the second beam splitter 255. The S-type ray of the second ray L20 emitted by the second surface 2552 of the second dichroic mirror 255 and the ray passing through the second dichroic mirror 255 are only reflected in the embodiment and are reflected from the second dichroic mirror 255. The second surface 2552 emits the S-ray of the second light L20. The S-type light of the second light L20 is reflected to the first convex lens 271, and the first convex lens 271 refracts the S-type light of the second light L20 to be incident on the object to be tested 300.

In the above, as shown in FIG. E, the object to be tested 300 reflects the S-type light of the second light L20 to the first convex lens 271, and the S-type light of the second light L20 is refracted by the first convex lens 271. To the second beam splitter 255, the S-type light of the second light L20 passes through the beam splitter 255 and is split into a third split L21 from the first surface 2551 of the second beam splitter 255. The fourth splitting light L22 is passed through one of the second beam splitters 255, and the third splitting light L21 and the fourth splitting light L22 are both S-type light rays.

Continuing the above, as shown in the fourth F, the third splitting L21 is incident on the first beam splitter 253, and the third splitting beam L21 is transmitted through the first beam splitter 253 to the polarizing beam splitter 251. The beam splitter 251 reflects the third beam split L21 to the second convex lens 273. The second convex lens 273 refracts the third splitter L21 to the second photosensor module 233. The fourth beam splitting L22 passes through the fourth surface 534 of the second beam splitter and is blocked by the first polarizer 2111.

The processing unit 290 is further configured to: according to a position of a center of gravity of the spot on the first photo sensor module 231 and the second photo sensor module 233, a vertical distance between the second beam splitter 255 and the first photodetector 231, The second splitting light L12 is emitted from the first polarizing mirror 2111 and the second splitting light L12 from the first polarizing mirror 2111 to the vector of the first photodetector 231, the second dichroic mirror 255 and the second spectroscope 255 The vertical distance of the second photodetector 233, the exit point coordinate of the third split L21 from the second convex lens 273, and the third split L21 from the second convex lens 273 to the vector of the second photodetector 233, The distance of the object to be tested 300, the X-axis tilt angle, and the Y-axis tilt angle are calculated, and the calculation manner is the same as that of the first embodiment, and details are not described herein again.

The polarizing beam splitter 251 may also be of a type that allows S-type light to pass through and reflect P-type light. In this case, the first polarizer 2111 allows the S-type light to pass through and block the P-type light. The second polarizer 2113 passes the P-type light and blocks the S-type light. In this case, the S-type light is the first type of light, and the P-type light is the second type of light.

In this way, the tilt angle and the distance measurement method of the second embodiment of the present invention are completed. The user of the present invention can measure the distance and the tilt angle of the object to be tested by using the technique disclosed in the embodiment to determine the Whether the object to be tested is defective. Compared with the first embodiment, the present embodiment uses two sets of light source modules for measurement, so that the brightness of the light source modules can be independently adjusted, so that the light received by the photoelectric sensing module is better and clearer. Interference from noise.

Here, the tilt angle and distance measurement method of the third embodiment of the present invention will be described. Referring to FIG. 5, it is a block diagram of the tilt angle and distance measurement method according to the third embodiment of the present invention. The difference between this embodiment and the first embodiment is that the processing unit 90 is electrically connected to a display unit 15, and the display unit 15 can be an LED matrix, an LCD display, a liquid crystal display or other display device that can be used for displaying information. The user of the present invention can know the distance and the tilt angle of the currently measured object through the values displayed on the display unit.

The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and the variations, modifications, and modifications of the shapes, structures, features, and spirits described in the claims of the present invention. All should be included in the scope of the patent application of the present invention.

The invention is a novelty, progressive and available for industrial use, and should meet the requirements of the patent application stipulated in the Patent Law of China, and the invention patent application is filed according to law, and the prayer bureau will grant the patent as soon as possible. prayer.

10‧‧‧Light source module
31‧‧‧First Photoelectric Sensor Module
311‧‧‧First spot
3111‧‧‧First spot center of gravity coordinates
33‧‧‧Second photoelectric sensor module
331‧‧‧second spot
3311‧‧‧Second spot center of gravity coordinates
51‧‧‧First Beamsplitter
511‧‧‧ first surface
512‧‧‧ second surface
513‧‧‧ third surface
514‧‧‧ fourth surface
53‧‧‧Second beam splitter
531‧‧‧ first surface
532‧‧‧ second surface
533‧‧‧ third surface
534‧‧‧Fourth surface
71‧‧‧First convex lens
73‧‧‧second convex lens
90‧‧‧Processing unit
11‧‧‧Power supply unit
13‧‧‧Test object
15‧‧‧Display unit
L‧‧‧Light
L1‧‧‧ first split light
L2‧‧‧Second split light
211‧‧‧ first light source module
213‧‧‧Second light source module
231‧‧‧First Photoelectric Sensor Module
233‧‧‧Second photoelectric sensor module
251‧‧‧polar polarizer
2511‧‧‧ first surface
2512‧‧‧ second surface
2513‧‧‧ third surface
2514‧‧‧ fourth surface
253‧‧‧First Beamsplitter
2531‧‧‧ first surface
2532‧‧‧ second surface
2533‧‧‧ third surface
2534‧‧‧Fourth surface
255‧‧‧Second beam splitter
2551‧‧‧ first surface
2552‧‧‧ second surface
2553‧‧‧ third surface
2554‧‧‧Fourth surface
271‧‧‧First convex lens
273‧‧‧second convex lens
290‧‧‧Processing unit
2111‧‧‧First polarizer
2113‧‧‧Second polarizer
2131‧‧‧Power supply unit
300‧‧‧Test objects
L10‧‧‧First light
L20‧‧‧second light
L11‧‧‧ first split light
L12‧‧‧Second split light
L21‧‧‧ third split light
L22‧‧‧Fourth light
D1~D7‧‧‧Distance
V1‧‧‧ vector
V2‧‧‧ vector
P1‧‧‧ Shooting point coordinates
P2‧‧‧ shooting point coordinates

The first figure is a schematic diagram of the tilt angle and distance measuring method according to the first embodiment of the present invention; the second A to the second C: it is the tilt angle and distance of the first embodiment of the present invention Schematic diagram of the light path of the measuring method; FIG. 2D is a schematic diagram of the light spot on the first photoelectric sensing module of the tilting angle and distance measuring method according to the first embodiment of the present invention; A schematic diagram of a spot on a second photoelectric sensing module of a tilt angle and distance measuring method according to a first embodiment of the present invention; a second F diagram: a tilt angle and distance measuring method according to a first embodiment of the present invention FIG. 3 is a schematic view showing a tilt angle and distance measuring method according to a second embodiment of the present invention; FIGS. 4A to 4F are views showing a tilt of the second embodiment of the present invention; A schematic diagram of the ray path of the angle and distance measuring method; and a fifth figure: it is a schematic diagram of the tilt angle and distance measuring method of the third embodiment of the present invention.

10‧‧‧Light source module

31‧‧‧First Photoelectric Sensor Module

33‧‧‧Second photoelectric sensor module

51‧‧‧First Beamsplitter

511‧‧‧ first surface

512‧‧‧ second surface

513‧‧‧ third surface

514‧‧‧ fourth surface

53‧‧‧Second beam splitter

531‧‧‧ first surface

532‧‧‧ second surface

533‧‧‧ third surface

534‧‧‧Fourth surface

71‧‧‧First convex lens

73‧‧‧second convex lens

90‧‧‧Processing unit

11‧‧‧Power supply unit

13‧‧‧Test object

Claims (10)

A method for measuring a tilt angle and a distance, comprising: at least one light source module injecting at least one light into a lens module, wherein the at least one light is incident on the optical axis of the lens module when the lens module is injected into the lens module; At least one light is incident on the object to be tested through the lens module; the object to be tested reflects the at least one light to the lens module; the at least one light is incident on the first photoelectric sensor module through the lens module And a processing unit calculates a distance between the object to be tested and the object to be tested according to the signal generated by the first photoelectric sensing module and the second photoelectric sensing module receiving the at least one light The X-axis tilt angle and the Y-axis tilt angle of the object to be tested. The method for measuring the tilt angle and the distance according to the first aspect of the patent application, wherein the processing unit generates a first spot center of gravity coordinate and the at least one light according to the at least one light generated by the first photoelectric sensing module. The second spot center-of-gravity coordinate generated by the second photoelectric sensing module obtains the distance of the object to be tested and the X-axis tilt angle of the object to be tested and the Y-axis tilt angle of the object to be tested. A tilt angle and distance measuring method, comprising: a light source module emitting a light to a first beam splitter, wherein the light is incident on the optical axis of the first beam splitter when entering the first beam splitter; Transmitting the first beam splitter to a second beam splitter; the second beam splitter reflects the light to a first convex lens; the first convex lens refracts the light to a sample to be tested; the object to be tested reflects the light to the a first convex lens; the first convex lens refracts the light to the second beam splitter, the second beam splitter splits the light into a first splitting light and a second splitting light, and the second splitting mirror reflects the first splitting light to the first splitting mirror a first beam splitter that reflects the first splitting light to a second convex lens, the second convex lens refracting the first splitting light to a first photoelectric sensing module, and the second splitting light is projected through the second splitting mirror a second photo-sensing module; a processing unit is refracted on the first photo-sensing module according to the centroid of the first spot and the second beam is projected on the second photo-sensing module One of the second spots The centroid coordinate calculates a distance between the object to be tested and the first convex lens, and an X-axis tilt angle of the object to be tested and a Y-axis tilt angle of the object to be tested. The method for measuring the tilt angle and the distance according to the third aspect of the patent application, the processing unit is configured to emit the first splitter from the second convex lens according to a vertical distance between the second splitter and the first photodetector. a point coordinate, a vector of the first beam splitting from the second convex lens to the first photodetector, a vertical distance between the second beam splitter and the second photodetector, and the second splitting from the second splitting The exit point coordinates of the mirror and the vector of the second splitting beam from the second spectroscope to the first photo-electrical sensor are used to model the optical path, and the distance and the X-axis tilt angle of the object to be tested are obtained by calculation and The Y-axis tilt angle of the object to be tested. The tilt angle and distance measuring method according to the third aspect of the patent application, wherein the first spot center of gravity coordinates includes an X-axis coordinate and a Y-axis coordinate, and the second spot center-of-gravity coordinates include an X-axis coordinate and a Y-axis coordinate. The method for measuring the tilt angle and the distance according to the third aspect of the patent application, the measuring method further comprises: a display unit electrically connected to the processing unit, the display unit is configured to display the distance or the X axis Tilt angle or \ and the tilt angle of the Y axis. A method for measuring a tilt angle and a distance, comprising: a first light source module emitting a first light comprising a first type of light and a second type of light to the polarized beam splitter, wherein the first light is incident The polarizing beam splitter is offset from the optical axis of the polarizing beam splitter, and the polarizing beam splitter allows the first type to pass and the second type of light to be reflected; the first type of light of the first light penetrates the polarizing pole The first beam of light of the first light passes through the first beam splitter to a second beam splitter; the second beam splitter reflects the first type of light of the first light a first convex lens; the first convex lens refracts the first type of light of the first light to an object to be tested; the object to be tested reflects the first type of light of the first light to the first convex lens; a convex lens refracts the first type of light of the first light to the second beam splitter, the second beam splitter splits the first type of light of the first light into a first splitting light and a second splitting light, the first The splitting light and the second splitting light are first type rays, and the first beam splitting reflects The second beam splitter passes through the second beam splitter to a first polarizer that blocks the second type of light, and the second beam splits the second polarizer to a first photo-sensing a second light source module emits a second light that includes a first type of light and a second type of light to a second polarizer, and the second polarizer allows the second type of light to pass through; The second type of light of the second light passes through the second polarizer to the first beam splitter, wherein the second type of light of the second light is incident on the first beam splitter and deviates from the first beam splitter An optical axis; the first beam splitter reflects the second type of light of the second light to the second beam splitter; the second beam splitter reflects the second type of light of the second light to the first convex lens; a convex lens refracts the second type of light of the second light to the object to be tested; the object to be tested reflects the second type of light of the second light to the second beam splitter; the second beam splitter applies the second The second type of light of the light is divided into a third splitting light and a fourth splitting light, the third splitting light and The fourth splitting light is a second type of light, the second splitting mirror reflects the third splitting light to the first beam splitter, and the third splitting light penetrates the first beam splitter to the polarizing beam splitter, the first polarizing pole The beam splitter reflects the third splitting light to a second convex lens, the second convex lens refracts the third splitting light to a second photoelectric sensing module, and the fourth splitting light is projected through the second splitting mirror to the first polarizing mirror. The first polarizer absorbs the fourth splitting light; a processing unit according to the second splitting light, the X-axis coordinate of the center of gravity of the first spot on the first photo-sensing module and the Y-axis coordinate of the center of gravity of a first spot and The third beam splitting is projected on the second photo-sensing module, the center of gravity of the second spot, the X-axis coordinate, and the center of gravity of the second spot, the Y-axis coordinate, and the distance between the object to be tested and the second convex lens is obtained. One of the X-axis tilt angles and one of the Y-axis tilt angles of the object to be tested. The method of measuring the tilt angle and the distance according to the seventh aspect of the patent application, the processing unit is configured according to a vertical distance between the second beam splitter and the first photodetector, and the second splitting light is from the first polarizer An exit point coordinate, a vector of the second splitter that is incident from the first polarizer to the first photodetector, a vertical distance between the second splitter and the second photodetector, and the third splitter from the first splitter An exit point coordinate of the lenticular lens and a vector from the second lenticular lens to the second photo-electric detector are used to model the optical path, and the distance and the X-axis tilt angle of the object to be tested are obtained by calculation and The Y-axis tilt angle of the object to be tested. The method for measuring the tilt angle and the distance according to the seventh aspect of the patent application, the measuring method further comprises: a display unit electrically connected to the processing unit, the display unit is configured to display the distance or the X axis Tilt angle or \ and the tilt angle of the Y axis. The method for measuring the tilt angle and the distance according to the seventh aspect of the patent application, wherein when the first type of light is a P-type light, the second type of light is an S-type light, and when the first type of light is an S-type In the case of light, the second type of light is a P-type light.