CN1636079A - 在其中实现一种需要控制一个腔室内气体环境的作业的设施 - Google Patents
在其中实现一种需要控制一个腔室内气体环境的作业的设施 Download PDFInfo
- Publication number
- CN1636079A CN1636079A CNA018189644A CN01818964A CN1636079A CN 1636079 A CN1636079 A CN 1636079A CN A018189644 A CNA018189644 A CN A018189644A CN 01818964 A CN01818964 A CN 01818964A CN 1636079 A CN1636079 A CN 1636079A
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- China
- Prior art keywords
- chamber
- facility
- gas
- described chamber
- matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45519—Inert gas curtains
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0676—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Ventilation (AREA)
- Chemical Vapour Deposition (AREA)
- Prevention Of Fouling (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
Claims (31)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0014793A FR2816726B1 (fr) | 2000-11-16 | 2000-11-16 | Installation dans laquelle est realisee une operation necessitant un controle de l'atmosphere a l'interieur d'une enceinte |
FR00/14793 | 2000-11-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1636079A true CN1636079A (zh) | 2005-07-06 |
CN100447295C CN100447295C (zh) | 2008-12-31 |
Family
ID=8856545
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB018189644A Expired - Lifetime CN100447295C (zh) | 2000-11-16 | 2001-11-06 | 在其中实现一种需要控制一个腔室内气体环境的作业的设施 |
Country Status (9)
Country | Link |
---|---|
US (1) | US6458330B1 (zh) |
EP (1) | EP1348039B1 (zh) |
JP (1) | JP4025196B2 (zh) |
CN (1) | CN100447295C (zh) |
AU (2) | AU2375302A (zh) |
BR (1) | BR0115420B1 (zh) |
DK (1) | DK1348039T3 (zh) |
FR (1) | FR2816726B1 (zh) |
WO (1) | WO2002040738A2 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104191578A (zh) * | 2014-08-28 | 2014-12-10 | 京东方光科技有限公司 | 一种注塑机及应用该注塑机的注塑方法 |
CN104508177A (zh) * | 2012-07-25 | 2015-04-08 | 霍赫劳股份有限公司 | 气体分离器 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2855322B1 (fr) * | 2003-05-21 | 2005-07-01 | Air Liquide | Dispositif de traitement de surface par zone d'un article |
FR2865418B1 (fr) * | 2004-01-28 | 2006-03-03 | Air Liquide | Equipement de reticulation ultraviolette sous atmosphere controlee |
US9255330B2 (en) | 2010-07-09 | 2016-02-09 | Vito Nv | Method and device for atmospheric pressure plasma treatment |
FR2978775B1 (fr) | 2011-08-03 | 2014-02-14 | Air Liquide | Procede de preparation de surfaces d'aluminium par traitement par plasma atmospherique pour le depot de revetements sans promoteurs d'adherence |
EP3054032B1 (en) | 2015-02-09 | 2017-08-23 | Coating Plasma Industrie | Installation for film deposition onto and/or modification of the surface of a moving substrate |
FR3035122B1 (fr) * | 2015-04-20 | 2017-04-28 | Coating Plasma Ind | Procede de traitement de surface d'un film en mouvement et installation pour la mise en oeuvre de ce procede |
EP3532652B1 (fr) | 2016-10-27 | 2022-03-16 | Coating Plasma Innovation | Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement |
JP2018143985A (ja) * | 2017-03-07 | 2018-09-20 | コニカミノルタ株式会社 | 活性エネルギー線照射装置 |
JP2023025313A (ja) * | 2021-08-10 | 2023-02-22 | 日本エア・リキード合同会社 | 紫外線硬化装置及び紫外線硬化方法 |
DE102022126294A1 (de) * | 2022-10-11 | 2024-04-11 | Maschinenfabrik Kaspar Walter Gmbh & Co Kg | Vorrichtung und Verfahren zum Härten einer Polymerschicht auf einem zylindrischen Körper |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4209357A (en) * | 1979-05-18 | 1980-06-24 | Tegal Corporation | Plasma reactor apparatus |
US5356718A (en) * | 1993-02-16 | 1994-10-18 | Ppg Industries, Inc. | Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates |
FR2704558B1 (fr) * | 1993-04-29 | 1995-06-23 | Air Liquide | Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement. |
JPH09232296A (ja) * | 1996-02-23 | 1997-09-05 | Mitsubishi Electric Corp | 半導体装置の製造装置および製造方法 |
US5851293A (en) * | 1996-03-29 | 1998-12-22 | Atmi Ecosys Corporation | Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations |
US6143080A (en) * | 1999-02-02 | 2000-11-07 | Silicon Valley Group Thermal Systems Llc | Wafer processing reactor having a gas flow control system and method |
-
2000
- 2000-11-16 FR FR0014793A patent/FR2816726B1/fr not_active Expired - Fee Related
- 2000-12-18 US US09/738,314 patent/US6458330B1/en not_active Expired - Lifetime
-
2001
- 2001-11-06 AU AU2375302A patent/AU2375302A/xx active Pending
- 2001-11-06 AU AU2002223753A patent/AU2002223753B2/en not_active Ceased
- 2001-11-06 CN CNB018189644A patent/CN100447295C/zh not_active Expired - Lifetime
- 2001-11-06 BR BRPI0115420-6A patent/BR0115420B1/pt not_active IP Right Cessation
- 2001-11-06 JP JP2002543046A patent/JP4025196B2/ja not_active Expired - Fee Related
- 2001-11-06 DK DK01996636.5T patent/DK1348039T3/da active
- 2001-11-06 WO PCT/FR2001/003421 patent/WO2002040738A2/fr active Application Filing
- 2001-11-06 EP EP01996636A patent/EP1348039B1/fr not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104508177A (zh) * | 2012-07-25 | 2015-04-08 | 霍赫劳股份有限公司 | 气体分离器 |
CN104508177B (zh) * | 2012-07-25 | 2016-12-14 | 霍赫劳股份有限公司 | 气体分离器 |
CN104191578A (zh) * | 2014-08-28 | 2014-12-10 | 京东方光科技有限公司 | 一种注塑机及应用该注塑机的注塑方法 |
Also Published As
Publication number | Publication date |
---|---|
FR2816726A1 (fr) | 2002-05-17 |
JP4025196B2 (ja) | 2007-12-19 |
US6458330B1 (en) | 2002-10-01 |
FR2816726B1 (fr) | 2006-06-23 |
EP1348039B1 (fr) | 2013-01-02 |
BR0115420A (pt) | 2003-10-21 |
DK1348039T3 (da) | 2013-03-25 |
WO2002040738A3 (fr) | 2002-07-11 |
US20020057999A1 (en) | 2002-05-16 |
EP1348039A2 (fr) | 2003-10-01 |
AU2002223753B2 (en) | 2006-09-28 |
WO2002040738A2 (fr) | 2002-05-23 |
JP2004514062A (ja) | 2004-05-13 |
BR0115420B1 (pt) | 2011-07-26 |
CN100447295C (zh) | 2008-12-31 |
AU2375302A (en) | 2002-05-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: Paris France Patentee after: Liquid air Co.,Ltd. George Lord utilization and research Patentee after: Softal Electronic Erik Blumenfeld GmbH & Co. Address before: Paris France Patentee before: L'AIR LIQUIDE, SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE Patentee before: Softal Electronic Erik Blumenfeld GmbH & Co. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20160520 Address after: hamburg Patentee after: Sow Tacco Rona and Plummer Co.,Ltd. Address before: Paris France Patentee before: Liquid air Co.,Ltd. George Lord utilization and research Patentee before: Sow Tacco Rona and Plummer Co.,Ltd. Effective date of registration: 20160520 Address after: Paris France Patentee after: Liquid air Co.,Ltd. George Lord utilization and research Patentee after: Sow Tacco Rona and Plummer Co.,Ltd. Address before: Paris France Patentee before: Liquid air Co.,Ltd. George Lord utilization and research Patentee before: Softal Electronic Erik Blumenfeld GmbH & Co. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20081231 |