CN1530176A - Placode processor and liquid feeder - Google Patents
Placode processor and liquid feeder Download PDFInfo
- Publication number
- CN1530176A CN1530176A CNA2004100287332A CN200410028733A CN1530176A CN 1530176 A CN1530176 A CN 1530176A CN A2004100287332 A CNA2004100287332 A CN A2004100287332A CN 200410028733 A CN200410028733 A CN 200410028733A CN 1530176 A CN1530176 A CN 1530176A
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- Prior art keywords
- agent liquid
- liquor charging
- substrate board
- board treatment
- antitarnishing agent
- Prior art date
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Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/52—Devices affording protection against insects, e.g. fly screens; Mesh windows for other purposes
-
- D—TEXTILES; PAPER
- D02—YARNS; MECHANICAL FINISHING OF YARNS OR ROPES; WARPING OR BEAMING
- D02G—CRIMPING OR CURLING FIBRES, FILAMENTS, THREADS, OR YARNS; YARNS OR THREADS
- D02G3/00—Yarns or threads, e.g. fancy yarns; Processes or apparatus for the production thereof, not otherwise provided for
- D02G3/44—Yarns or threads characterised by the purpose for which they are designed
- D02G3/449—Yarns or threads with antibacterial properties
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
- A61L2202/20—Targets to be treated
- A61L2202/25—Rooms in buildings, passenger compartments
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/52—Devices affording protection against insects, e.g. fly screens; Mesh windows for other purposes
- E06B2009/524—Mesh details
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/52—Devices affording protection against insects, e.g. fly screens; Mesh windows for other purposes
- E06B2009/527—Mounting of screens to window or door
Abstract
Provided are an apparatus for transferring the resist solution, which do not generate particles and transfer the resist solution with high precision. A resist pump and a driving equipment are installed to a transferring equipment which transfers a resist solution to a slit nozzle. A first bellows having a smaller diameter, a second bellows having a larger diameter, a coupling member for the first and second bellows and a tube as a flow passage of the resist solution are installed to the resist pump. By allowing the moving member to be moved downward by the driving equipment, the inner volume of the tube is decreased, thereby the resist solution at the inner tube being transferred to the slit nozzle. By allowing the coupling member to be moved downward by the driving equipment, the inner volume of the tube is increased, thereby the resist solution is absorbed in the resist pump.
Description
Technical field
The present invention relates to the technology that a kind of treatment fluid that will coat on the substrate carries out liquor charging.
Background technique
The occasion of treatment fluid such as painting erosion resistant agent liquid on substrate, device of the known force feed type that the device antitarnishing agent liquid sent to by various pumps such as syringe pump (reciprocating pump), bellowspump (bellows pump), gear pump or diaphragm pumps is arranged and antitarnishing agent liquid is sent to certain pressure etc.
Particularly by in the slit coater of gap nozzle painting erosion resistant agent liquid, be coated on the thickness of the antitarnishing agent liquid on the substrate by the amount decision of the antitarnishing agent liquid of the travelling speed of gap nozzle and supply.Therefore, in order to control the thickness of antitarnishing agent liquid accurately, used bellowspump or reciprocating pump in the past.
But, because bellowspump structurally produces pulse inevitably easily in by the antitarnishing agent liquid in the liquor charging, in the bellows part, there is narrow gap, having in fact can not be with problems such as this part are clean fully.Therefore, in slit coater, mainly adopt reciprocating pump, like this, use the slit coater of reciprocating pump to be documented in the patent documentation 1 (TOHKEMY 2000-334355 communique) as the mechanism that antitarnishing agent liquid is sent to.
The schematic representation of the structure of the conveying mechanism that is used for slit coater 100 that Figure 11 is put down in writing for patent documentation 1.Conveying mechanism 100 is made of reciprocating pump 110, pipe arrangement mechanism 120 and driving mechanism 130, and reciprocating pump 110 has cylinder body 111, piston 112, sealed member 113 and exhaust port 114.In addition, pipe arrangement mechanism 120 has pipe arrangement of discharge 121 and expulsion valve 122.And driven unit 130 has motor 131, screw rod 132, nut part 133.In addition, although omitted among the figure, driving mechanism 130 also has speed reducer of the rotational speed that is used to reduce motor 131 etc.
The exhaust port 114 of reciprocating pump 110 is connected on the discharge pipe arrangement 121 of pipe arrangement mechanism 120, discharges pipe arrangement 121 and is connected communicatively on the not shown gap nozzle discharge pipe arrangement 121.Discharging pipe arrangement 121 is connected with exhaust port 114 by making expulsion valve 122 become open state.
In conveying mechanism 100, when motor 131 rotary screws 132, nut part 133 moves along screw rod 132.Owing to be fixed with piston 112 on nut part 133, when screw rod 132 moved, along with this moves, piston 112 moved along the Z axle at nut part 133.The movement direction of nut part 133 is by the sense of rotation regulation of motor 131.
During from gap nozzle discharge antitarnishing agent liquid, liquid feeding device 100 is when expulsion valve 122 is open state, by motor 131 with nut part 133 to (+Z) direction drives, so that piston 112 is pressed in the cylinder body 111, with the antitarnishing agent liquid in the cylinder body 111 to the gap nozzle liquor charging.
In addition, when in cylinder body 111, attracting antitarnishing agent liquid, when expulsion valve 122 is blocking, by motor 131 opposite direction rotation to the time with discharge, ((Z) direction) moves, never illustrated attraction mouthful attraction antitarnishing agent liquid to extract direction from cylinder body 111 with piston 112.Because this action, the slit coater of record can be with antitarnishing agent liquid to the gap nozzle liquor charging in the patent documentation 1.
[patent documentation 1] TOHKEMY 2000-334355 communique
In said apparatus, when piston 112 was pushed, the part of the inwall of cylinder body 111 was exposed in the outside atmosphere, and the rotten problem of antitarnishing agent liquid R of adhering to is arranged.In this state, in order to attract new antitarnishing agent liquid in cylinder body 111 during mobile piston 112, the antitarnishing agent liquid R after rotten sneaks in the antitarnishing agent liquid that is attracted, and this becomes the reason of particle.
In addition, in order to remove this antitarnishing agent liquid after rotten, must take out and clean piston 112 and sealed member 113 etc.Exist the problem of the time that to safeguard pump.
In addition, because machining accuracy, the control accuracy of the driving mechanism (motor 131, screw rod 132 and nut part 133) of mobile piston 112 are low, the feed accuracy of nut part 133 (piston 112) is low, and the result exists the low problem of liquor charging precision.
Moreover because driven plunger valve 110, Sealing 113 wears away with the friction of cylinder body 111, exists consequent particle and sneaks into the problem that maybe must regularly replace sealed member 113 in the treatment fluid.
The 1st purpose of the present invention is to address the above problem, and does not produce particle, accurately treatment fluid is sent to.
In addition, the 2nd purpose is not use wear member as Sealing 113, send treatment fluid to.
Summary of the invention
In order to solve the problems of the technologies described above, technological scheme 1 of the present invention is the substrate board treatment that forms the film of specific treatment fluid on substrate, has the maintenance platform that keeps substrate, the gap nozzle that aforementioned specific treatment fluid is discharged on the interarea of substrate, supply with the feed mechanism of aforementioned particular procedure liquid, and with the liquor charging assembly of aforementioned particular procedure liquid to aforementioned gap nozzle liquor charging, aforementioned liquor charging assembly has the container parts of variable internal capacity, the pipe part of variable internal capacity when inside constitutes the stream of aforementioned specific treatment fluid, and the driven unit of the internal capacity ground of variable aforementioned container parts driving, the aforementioned tubes parts are arranged on the inside of aforementioned container parts, in the space between aforementioned container parts and aforementioned tubes parts in envelope indirect liquid arranged.
In addition, technological scheme 2 of the present invention is in the substrate board treatment of technological scheme 1, aforementioned container parts is different mutually by internal diameter, and inner the 1st and the 2nd bellows that is interconnected constitutes, aforementioned driven unit make the aforementioned the 1st and the boundary vicinity of the 2nd bellows move to specific direction.
In addition, technological scheme 3 of the present invention is in the substrate board treatment of technological scheme 2, the aforementioned slots nozzle relatively moves and discharges aforementioned particular procedure liquid for substrate, the aforementioned the 1st and the speed controlling that moves of the boundary vicinity of the 2nd bellows become the synchronous speed of travelling speed with the aforementioned slots nozzle.
In addition, the invention of technological scheme 4 of the present invention is in the substrate board treatment of technological scheme 1, control unit with the aforementioned driven unit of control, aforementioned control unit have the constant volume feed mechanism and the flow setting type feed mechanism of control by the flow of the aforementioned specific treatment fluid of aforementioned liquid feeding device liquor charging of the flow of the aforementioned specific treatment fluid of controlling aforementioned liquor charging assembly liquor charging.
In addition, technological scheme 5 of the present invention is in the substrate board treatment of technological scheme 1, be provided with the attraction mouth and the exhaust port of the both end sides that lays respectively at the aforementioned tubes parts in aforementioned liquor charging assembly, it is lower than another to be configured to height and position some in aforementioned attraction mouth and the aforementioned exhaust port.
In addition, technological scheme 6 of the present invention is in the substrate board treatment of technological scheme 1, and aforementioned feed mechanism has the baffle-box of storing aforementioned specific treatment fluid, and aforementioned baffle-box under atmospheric pressure makes aforementioned liquor charging assembly attract aforementioned specific treatment fluid.
In addition, technological scheme 7 of the present invention is in the substrate board treatment of technological scheme 6, and the liquid level height of aforementioned baffle-box is set at lower than the exhaust port of aforementioned slots nozzle.
In addition, technological scheme 8 of the present invention is in the substrate board treatment of technological scheme 6, aforementioned feed mechanism also has the supply assembly of the aforementioned specific treatment fluid of in aforementioned baffle-box supply, aforementioned supply assembly will be stored in aforementioned specific treatment fluid in the aforementioned baffle-box with specific pressure to aforementioned gap nozzle liquor charging.
In addition, technological scheme 9 of the present invention is in the substrate board treatment of technological scheme 6, and aforementioned feed mechanism also has the mensuration assembly of measuring the amount that is stored in the aforementioned specific treatment fluid in the aforementioned baffle-box.
In addition, technological scheme 10 of the present invention is in the substrate board treatment of technological scheme 8, also have by aforementioned supply assembly with the occasion of aforementioned specific treatment fluid pressurization and liquor charging not by aforementioned liquor charging assembly ground with the lead preparation stream of aforementioned slots nozzle of aforementioned specific treatment fluid.
In addition, the technological scheme 11 of invention is in the substrate board treatment of technological scheme 10, also have aforementioned specific treatment fluid is being selected still to select assembly by any liquor charging of aforementioned supply assembly liquor charging by driving aforementioned driven unit liquor charging to the occasion of aforementioned gap nozzle liquor charging, and select by aforementioned liquor charging assembly liquor charging the still stream selection assembly by aforementioned preparation stream liquor charging.
In addition, technological scheme 12 of the present invention is in the substrate board treatment of technological scheme 11, and aforementioned stream selects assembly to have the valve that opens and closes aforementioned preparation stream.
In addition, technological scheme 13 of the present invention is in the substrate board treatment of technological scheme 1, and aforementioned liquid feeding device has a plurality of aforementioned container parts and a plurality of aforementioned tubes parts of one all are set in the inside of aforementioned a plurality of container parts.
In addition, technological scheme 14 of the present invention is in the substrate board treatment of technological scheme 13, the liquor charging pipe arrangement that also has between aforementioned a plurality of container parts and aforementioned slots nozzle the stream that forms aforementioned specific treatment fluid, be provided with on the aforementioned slots nozzle in a plurality of treatment fluid supplying mouths, aforementioned liquor charging pipe arrangement couples together aforementioned a plurality of treatment fluid supplying mouths and aforementioned a plurality of container parts one to one.
In addition, technological scheme 15 of the present invention is in the substrate board treatment of technological scheme 4, also has the thickness detection components that detects the thickness that is formed at the aforementioned film on the substrate surface, aforementioned control unit is controlled aforementioned control mechanism according to the testing result of aforementioned thickness detection components, so that the thickness of aforementioned film is even.
In addition, technological scheme 16 of the present invention is in the substrate board treatment of technological scheme 13, and aforementioned driving mechanism changes the internal capacity that drives aforementioned a plurality of container parts independently of one another.
In addition, technological scheme 17 of the present invention is in the substrate board treatment of technological scheme 13, and aforementioned driving mechanism is by connection and drive the internal capacity ground driving that aforementioned a plurality of container parts changes aforementioned a plurality of container parts.
In addition, technological scheme 18 of the present invention is in the substrate board treatment of technological scheme 17, and is roughly the same separately to the length and the thickness of the aforementioned liquor charging pipe arrangement stream the aforementioned slots nozzle separately from aforementioned a plurality of container parts.
In addition, technological scheme 19 of the present invention is the liquid feeding devices that the particular procedure liquid that is coated with carried out liquor charging on substrate, it is characterized by, have and produce the drive motor be used for the driving force of aforementioned specific treatment fluid liquor charging, screw rod by aforementioned drive motor rotation, the nut part that combines with aforementioned screw flight, the guide element of the driving direction of guiding aforementioned nut parts, and the control unit of controlling aforementioned drive motor, the high zero motor of stability when aforementioned drive motor is low speed rotation, aforementioned screw rod and aforementioned nut parts are for to be made of integrally manufactured parts.
In addition, technological scheme 20 of the present invention is in the liquid feeding device of technological scheme 19, and the pitch of aforementioned screw rod is 3mm to 6mm.
In addition, technological scheme 21 of the present invention is in the liquid feeding device of technological scheme 19, has the velocity accuracy below 1% in the low speed rotation of aforementioned drive motor below 500rpm, has 2 for the control from aforementioned control unit
17The resolution precision that P/rev is above.
In technological scheme 1 of the present invention to technological scheme 18, owing to be provided with pipe part in container parts inside, envelope has indirect liquid in the space between container parts and pipe part, and the part of the stream of treatment fluid can exposed to weather, can suppress the generation of particle.In addition, maintenance such as can easily clean.
In technological scheme 4 of the present invention, because control unit has the constant volume feed mechanism and control flow setting type feed mechanism by the flow of the specific treatment fluid of liquid feeding device liquor charging of control by the liquor charging flow of the specific treatment fluid of liquid feeding device liquor charging, can discharge treatment fluid accurately.
In technological scheme 5 of the present invention, be provided with than another lowland by height and position some in the attraction mouth of the both end sides that lays respectively at pipe part and exhaust port, help the removal of the bubble of liquid feeding device.In addition, discharge opeing is easy.
Of the present invention according to technological scheme 6 in because baffle-box under atmospheric pressure makes aforementioned liquid feeding device attract aforementioned specific treatment fluid, the attraction force in the time of can reducing liquid feeding device and attract treatment fluid.
In technological scheme 7 of the present invention,, can suppress undesirable treatment fluid and discharge from gap nozzle because that the liquid level height of baffle-box is set at is lower than the exhaust port of aforementioned slots nozzle.
In technological scheme 8 of the present invention and since the supply assembly will be stored in specific treatment fluid in the baffle-box with specific pressure to the gap nozzle liquor charging, need not to make driven unit to drive can be easily with the treatment fluid liquor charging.
In technological scheme 9 of the present invention,, can suitably keep the amount of the treatment fluid in the baffle-box owing to have the mensuration assembly of measuring the amount that is stored in the specific treatment fluid in the baffle-box.
In technological scheme 10 of the present invention, owing to have not by the preparation stream of liquid feeding device ground with specific treatment fluid guide slit nozzle, in the occasion of for example using the high treatment fluid of viscosity, even apply than the situation of higher pressure and also can not destroy liquid feeding device, can be with the treatment fluid liquor charging.
In technological scheme 11 of the present invention, will specific treatment fluid selecting by driving still any the liquor charging selection assembly by supply assembly liquor charging of driven unit liquor charging owing to have to the occasion of gap nozzle liquor charging, and select still to select assembly by the stream of preparation stream liquor charging by the liquid feeding device liquor charging, can realize liquor charging according to circumstances.
In technological scheme 12 of the present invention,, can easily carry out stream and select because stream selects assembly to have the valve that opens and closes the preparation stream.
In technological scheme 13 of the present invention, because specific treatment fluid is had two liquid delivering pumps at least to the conveying mechanism of gap nozzle liquor charging, can use the high liquid delivering pump of liquor charging precision, therefore can improve the discharge precision of gap nozzle.
In technological scheme 14 of the present invention, the liquor charging pipe arrangement will at least 2 the treatment fluid supplying mouths couple together one to one with at least 2 liquid delivering pumps, and compare from an occasion from treatment fluid to gap nozzle that supply with, can make the discharge balance of gap nozzle even.
In technological scheme 15 of the present invention, owing to control control mechanism,, can realize control corresponding to measured value so that the thickness of film is even according to the testing result of thickness detection components, can form desirable film.
In technological scheme 16 of the present invention,, can flexibly control the liquor charging state by liquid delivering pump according to the discharge state of treatment fluid because driving mechanism drives at least 2 liquid delivering pumps independently of one another.
In technological scheme 17 of the present invention,, can easily a plurality of liquid delivering pumps synchronously be driven because driving mechanism does not need to carry out complicated control by connecting and driving at least 2 liquid delivering pumps.
In technological scheme 18 of the present invention, since roughly the same mutually to the length and the thickness of the liquor charging pipe arrangement stream the gap nozzle separately from least 2 liquid delivering pumps, the discharge precision that liquid delivering pump is connected the occasion that drives can further be improved.
In technological scheme 19 of the present invention, because the high zero motor of stability when drive motor is low speed rotation, screw rod and nut part are for to be made of integrally manufactured parts, can improve feed accuracy, the flow of treatment fluid in the time of can controlling liquor charging accurately by the nut part of drive motor.
In technological scheme 20 of the present invention,,, can further improve feed accuracy by using the highest screw rod of machining accuracy because the pitch of screw rod is 3mm to 6mm.
In technological scheme 21 of the present invention, the velocity accuracy owing to having in the low speed rotation of drive motor below 500rpm below 1% has 2 for the control from control unit
17The resolution precision that P/rev is above can improve feed accuracy.
Description of drawings
Fig. 1 is the stereoscopic figure of the substrate board treatment of the 1st mode of execution of the present invention.
Fig. 2 is the front view of substrate board treatment.
Fig. 3 is the schematic representation of feed mechanism and conveying mechanism.
Fig. 4 is the detail drawing of conveying mechanism.
Fig. 5 is the detail drawing of driving mechanism
Fig. 6 is the schematic representation of the annexation of the conveying mechanism of the 2nd mode of execution and gap nozzle.
Fig. 7 is the antitarnishing agent pump of the 2nd mode of execution and the view of driving mechanism.
Fig. 8 is the schematic representation of the annexation of the conveying mechanism of the 3rd mode of execution and gap nozzle.
Fig. 9 is the front view of main body portion of the substrate board treatment of the 4th mode of execution.
Figure 10 is the schematic representation of the coupled condition of the conveying mechanism of substrate board treatment of the 4th mode of execution and gap nozzle.
The view of Figure 11 liquid feeding device in the past.
Embodiment
Below, with reference to accompanying drawing preferred implementation of the present invention is elaborated.
(the 1, the 1st mode of execution)
(1.1 constitute explanation)
Fig. 1 is the concise and to the point stereogram of the substrate board treatment 1 of embodiments of the present invention.Fig. 2 is the front view of the body 2 of substrate board treatment 1.
The top of platform 3 is horizontal plane, becomes the maintenance face 30 of substrate 90.Distributing on maintenance face 30 is formed with a plurality of vacuum suction mouths, and each vacuum suction mouth is connected with not shown vacuum pump.In substrate board treatment 1 treatment substrate 90 during, by absorption substrate 90 so that substrate 90 is remained on the specific horizontal position.
In this maintenance face 30, on the two end part of the retaining zone of clamping substrate 90 (zone that keeps substrate 90), fixedly installing a pair of walking rails 31a that extends in parallel in general horizontal direction.Walking rails 31a and the anchor plate 31b on the two end part that are fixedly installed on crane span structure structure 4 together guide move (movement direction is defined in specific direction) of crane span structure structure 4.That is, walking rails 31a constitutes the linear steering body that crane span structure structure 4 is bearing in maintenance face 30 tops.
Above platform 3, be provided with the crane span structure structure of crossing over from the two side portions approximate horizontal ground of this platform 34.Crane span structure structure 4 is mainly by being that the nozzle support 40 of osteomere and the elevator mechanism 43,44 that supports its two ends constitute with the carbon fibre resin.
On the gap nozzle 41 that extends to horizontal Y direction, be connected with conveying mechanism 80 to gap nozzle 41 transport process liquid (antitarnishing agent liquid).In addition, below gap nozzle 41, be provided with exhaust port 41a along Y direction.Gap nozzle 41 is carried the antitarnishing agent liquid by conveying mechanism 80, by the surface of scanning substrate 90, discharges antitarnishing agent liquid to the location (hereinafter referred to as " protection dispensing area ") on the surface of substrate 90.At this, the protection dispensing area is the zone of preparing coating in the interarea of substrate 90, is generally from the gross area of substrate 90 to remove along the zone in the zone of the specific width of ora terminalis.
Each gap sensor 42 is installed on the nozzle support 40 with crane span structure structure 4 on the position with maintenance face 30 opposites, detect and the existence (for example substrate 90 or resist film) of specific direction (Z direction) between distance, and with detected result to control system 6 outputs.And each gap sensor 42 preferably is installed near the position of the top the two end part of Y direction of protection dispensing area.Thus, on the different position, the position that is configured in Y direction, 2 gap sensor 42 mounting points separately.
Like this, by gap nozzle 41 and gap sensor 42 are installed respectively on nozzle support 40, to fix their relative position relation.Thereby control system 6 can detect the surface of substrate 90 and the distance of gap nozzle 41 according to the testing result of gap sensor 42.In addition, in the substrate board treatment 1 of present embodiment, have 2 gap sensors 42, but the quantity of gap sensor 42 is not limited to this, can has more gap sensor 42.
In nozzle support 40, on the top position of gap nozzle 41, be provided with conveying mechanism 80.Fig. 3 is used for the schematic representation of antitarnishing agent liquid to the structure of gap nozzle 41 supplies, liquor charging.Moreover although not shown in Fig. 3, each structure connects to pick the signal of control system 6 with possible state as required, can be according to moving respectively from the control signal of control system 6.
Baffle-box 72 is arranged to the air separation of sneaking into antitarnishing agent liquid to be removed by temporary transient storage antitarnishing agent liquid.That is, sneak into air in the antitarnishing agent liquid during antitarnishing agent liquid is stored in the baffle-box 72, concentrate on the top of the storagetank of baffle-box 72, extracting valve 88 out by air described later becomes open state, through air exhaust duct 89 exhaust outside device.In addition, baffle-box 72 also has the function that attracts when antitarnishing agent liquid pump 81 sucks antitarnishing agent liquid under atmospheric pressure.
Although baffle-box 72 is not shown in Fig. 2, can be arranged at the height and position roughly the same in the side of elevator mechanism 43, and sets for and make the liquid level that is positioned at baffle-box 72 be in place, below slightly than the exhaust port 41a of gap nozzle 41 with gap nozzle 41.
Attract pipe arrangement 74 and discharge pipe arrangement 79 for to be used for by the pipe arrangement of antitarnishing agent liquid pump 81 with antitarnishing agent liquid guide slit nozzle 41.Antitarnishing agent liquid according to the open and close valve 75,76 of the switching of carrying out stream from the control signal of control system 6 any under the situation of open state, after attracting pipe arrangement 74 to be attracted in the antitarnishing agent liquid pump 81, through discharging pipe arrangement 79 to gap nozzle 41 liquor chargings.
Open and close valve 83,84 and preparation pipe arrangement 85 are for be used for just can be with the structure of antitarnishing agent liquid liquor charging by antitarnishing agent liquid pump 81.Be blocking, open and close valve 83,84 during for open state at open and close valve 75 promptly, antitarnishing agent liquid is by attracting pipe arrangement 74, antitarnishing agent liquid pump 81 and discharge pipe arrangement 79, but by preparation pipe arrangement 85 to gap nozzle 41 liquor chargings.Promptly, control system 6 mainly is equivalent to stream selection assembly of the present invention with open and close valve 75,83,84.
In addition, substrate board treatment 1 has and is used to produce the conveying mechanism 80 that passes out to the driving force of gap nozzle 41 from feed mechanism 70.
Fig. 4 is at length illustrating the view of conveying mechanism 80.Conveying mechanism 80 mainly is made of antitarnishing agent liquid pump 81 and driving mechanism 82.In addition, figure 4 illustrates the section of antitarnishing agent liquid pump 81.
Antitarnishing agent liquid pump 81 has the 1st bellows the 811, the 2nd bellows 812, bonded block 813, pipe 814.In addition, in antitarnishing agent liquid pump 81, be respectively equipped with the exhaust port 816 that constitutes the outlet of antitarnishing agent liquid when the attraction mouth 815 of the inlet that constitutes antitarnishing agent liquid when attracting antitarnishing agent liquid and antitarnishing agent liquid are discharged.Attract mouth 815 to be connected with feed mechanism 70 by attracting pipe arrangement 74, exhaust port 816 is connected with gap nozzle 41 by discharging pipe arrangement 79.In addition, attract mouth 815 to be positioned at the state setting of below than exhaust port 816.
Moreover, in order to improve discharge precision, wish to shorten distance from the exhaust port 816 of antitarnishing agent liquid pump 81 to gap nozzle 41 from gap nozzle 41.In the substrate board treatment 1 of present embodiment, because in order to shorten this distance, conveying mechanism 80 is arranged on the nozzle support 40, thereby can improves the discharge precision of gap nozzle 41.
The 1st bellows 811 and the 2nd bellows 812 are by constituting along the flexible parts of Z-direction.In addition, the 1st bellows 811 (Z) end of side and the 2nd bellows 812 (+Z) end of side is mutually permanently connected by bonded block 813, simultaneously inside is interconnected.In addition, under the combined length X (Fig. 4) of the 1st bellows 811 and the 2nd bellows 812 was certain state, its two ends were supported on the outer rigid bodies of figure by covering 810.Because the internal diameter area (with the area of Z axle vertical surface) of the 1st bellows 811 is littler than the internal diameter area of the 2nd bellows 812, state of changing between the state of state that the 1st bellows 811 extends and 812 extensions of the 2nd bellows can change the volume of antitarnishing agent liquid pump 81.
Be provided with pipe 814 in the inside of the 1st bellows 811 and the 2nd bellows 812.The pipe 814 plasticity parts by tubulose constitute, and two ends are connected with attracting mouth 815 and exhaust port 816 respectively.That is, pipe 814 constitutes the stream of antitarnishing agent liquid.Moreover, in the substrate board treatment 1 of present embodiment, as shown in Figure 4, the pipe 814 along the Z axle roughly in the Vertical direction setting.
By the 1st bellows the 811, the 2nd bellows 812 and manage in 814 spaces that surround, interior envelope has indirect liquid LQ.Used the low liquid of variation, volume change as indirect liquid LQ with respect to pressure or temperature etc.Therefore, though the 1st bellows 811 and the 2nd bellows 812 owing to flexible situation of be out of shape under, the volume of indirect liquid LQ also can change hardly.
Because this structure, in the substrate board treatment 1 of present embodiment, when the elongation of the 1st bellows 811 (occasion that bonded block 813 moves downwards), because the volume reducing in the space that is surrounded by the 1st bellows 811 and the 2nd bellows 812 of antitarnishing agent liquid pump 81, liquid LQ is pressurized indirectly.Even it is, make pipe 814 shrink (section contraction), pressurized in the pipe 814 by pressurized indirect liquid LQ because liquid LQ is by the also almost nondecreasing liquid of pressurization volume indirectly.At this moment, if control system 6 makes open and close valve 84 and waist valve 86 be blocking, make open and close valve 76 be open state simultaneously, the antitarnishing agent liquid in the pipe 814 are just from exhaust port 816 discharges, with to gap nozzle 41 liquor chargings.In addition, owing to attract mouthful 815 sides to be provided with one-way valve 78, the antitarnishing agent liquid in the pipe 814 can be from not attracting mouthful 815 adverse currents.
On the other hand, when the 2nd bellows extends (occasion that bonded block 813 is moved upward), because the volume in the space that is surrounded by the 1st bellows 811 and the 2nd bellows 812 of antitarnishing agent liquid pump 81 increases, liquid LQ is depressurized indirectly.Even because liquid LQ is the liquid that also increases hardly by the decompression volume indirectly, pipe 814 is expanded, is depressurized in the pipe 814 by indirect liquid LQ.At this moment, if control system 6 makes open and close valve 76,84 and waist valve 86 be blocking, the antitarnishing agent liquid in the baffle-box 72 is just attracted in pipe 814 from attraction mouth 815.
That is, antitarnishing agent liquid pump 81 moves back and forth along Z-direction by making bonded block 813, can carry out the attraction action and the discharging operation of antitarnishing agent liquid repeatedly, has the function with antitarnishing agent liquid liquor charging.
Fig. 5 is at length illustrating the view of driving mechanism 82.Driving mechanism 82 has pedestal 820, drive motor 821, screw rod 822, nut part 823, assembly 824, guiding element 825, bearing part 826 and guide securement parts 827, and antitarnishing agent liquid pump 81 has and produces the function be used for the driving force of antitarnishing agent liquid liquor charging.In the substrate board treatment 1 of present embodiment, the rotary driving force that is produced by drive motor 821 is transformed to straight moving driving force by the structure that mainly is made of screw rod 822 and nut part 823, to become the driving force of protection pump 81.
Pedestal 820 has carried each formation portion of driving mechanism 82, integrated parts.In addition, in Fig. 5, omit diagram, suitably be provided with parts that are used for fixing on the nozzle support 40 etc. on the pedestal 820.Therefore, be fixed on the nozzle support 40 under each formation portion the state by driving mechanism 82, can improve the driving precision with integrative-structure.Moreover pedestal 820 is that state along the Z axle is fixed on the nozzle support 40 with the guiding direction of guiding element 825 described later.
In addition, although omitted diagram among Fig. 5, drive motor 821 is connected on the control system 6 with the state of acceptable signal, can be according to control signal control rotating amount and the rotational speed from control system 6.Moreover, can use AC servomotor, stepper motor, the DD motor etc. can be as drive motor 821 according to the motor of determining rotational position from the control signal of control system 6, but in the substrate control unit 1 of present embodiment, the precision when considering low speed rotation has been used the DD motor.In addition, in order to improve feed precision, (resolution is 2 for high-resolution
17More than the P/rev) the DD motor.
Rotation and when being screwed into screw rod 822 in the openings of nut part 823, nut part 823 moves to specific direction linarity with respect to screw rod 822 along central shaft P.Because nut part 823 is connected by assembly 824 with bonded block 813, when nut part 823 was mobile as previously mentioned, bonded block 813 moved to same direction linkedly.In such substrate board treatment 1, the rotary driving force around central shaft P of drive motor 821 is transformed to the straight moving driving force of the Z-direction of antitarnishing agent liquid pump 81.Moreover nut part 823 is called " postive direction " along the sense of rotation of the drive motor 821 of screw rod 822 when drive motor 821 side shiftings.
In addition, on nut part 828, be provided with and be used for the guide portion (not shown) that cooperates with guiding element 825.Be provided with a plurality of balls in this guide portion, nut part 823 and guide element 825 be because of cooperating by this ball, the friction in the time of can suppressing nut part 823 and move.Be provided with resinous dividing plate between this external each ball and the ball or isolate ball.Thus, owing to suppressing to follow the rotation of ball and vibration and feeding that circulation produces irregular, can improve the velocity accuracy of nut part 823.
Guiding element 825 matches with the guide portion (not shown) of nut part 823, is together had sufficient precision and assembled rigidly, integratedly by a pair of guide securement parts 827 and screw rod 822 simultaneously to be fixed on the pedestal 820.Guiding element 825 has the guide shaft J of straight line shape, has by cooperating with nut part 823, will be by the rotation of screw rod 822 movement direction of mobile nut part 823 be defined as along the function of guide shaft J direction.
In bearing part 826, be provided with not shown supporting bearing in inside, this bearing contacts with screw rod 822.Thus, can not hinder rotatably screw rod 822 is installed on the pedestal 820 around the central shaft P of screw rod 822.In addition, this bearing is considered thrust load in order to improve the rotation rigidity of screw rod 822, uses to have suitable rigid parts.In addition, by using, can improve screw rod 822 stability of rotation than relatively large bearing.
Get back to Fig. 3, the conduct of substrate board treatment 1 mainly in safeguarding etc. the pipe arrangement mechanism of use have waist valve 86, waste liquid pipe arrangement 87, extraction valve 88 and air exhaust duct 89.
Get back to Fig. 1 and Fig. 2, elevator mechanism was opened in the both sides of gap nozzle 41 in 43,44 minutes, was connected with gap nozzle 41 by nozzle support 40. Elevator mechanism 43,44 is used for and the gap nozzle 41 ground lifting of going forward side by side, and simultaneously also is used to adjust the attitude of gap nozzle 41 in the YZ plane.
Be fixed with a pair of AC coreless linear motor (following abbreviates " linear motor " as) 50,51 that is arranged along the edge side branch of the both sides of platform 3 respectively at the two end part of crane span structure structure 4.
Particularly, control system 6 is selected to use with antitarnishing agent liquid guide slit nozzle 41 time to attract pipe arrangement 74 and discharge pipe arrangement 79 or preparation pipe arrangement 85 by according to the open and close controlling of carrying out open and close valve 75,76,83,84 from operator's indication.In addition, according to the sense of rotation of control signal controlling and driving motor 821, the rotating amount and the rotational speed of per 1 stroke.In substrate board treatment 1, owing to determined the amount of movement (the volume-variation amount of antitarnishing agent liquid pump 81) of the bonded block 813 of antitarnishing agent liquid pump 81, this rotating amount control to be equivalent to control the liquor charging amount of the antitarnishing agent liquid of antitarnishing agent liquid pump 81 liquor chargings according to the rotating amount of per 1 stroke of drive motor 821.In addition, in substrate board treatment 1, owing to determined the travelling speed (the volume-variation speed of antitarnishing agent liquid pump 81) of bonded block 813, control the flow that this rotational speed is equivalent to control the antitarnishing agent liquid of antitarnishing agent liquid pump 81 by the rotational speed of drive motor 821.
As the concrete formation of control system 6, memory portion 61 can be the RAM that is equivalent to the temporary memory data, read storage mediums such as the movable photomagneto disk of special-purpose R0M and disk set etc. or Compact Flash with and reading device.In addition, operation unit 62 is for being used for input operation person to the knob of the indication of substrate board treatment 1 and Switch (comprising keyboard or mouse etc.) etc., also can resemble the function that has display unit 63 the touch flat-panel screens concurrently.Display unit 63 is equivalent to liquid crystal display or various lamps etc.
(explanations of 1.2 actions)
Below, the action of substrate board treatment 1 is described.In substrate board treatment 1, mainly there are 3 patterns (coating pattern, give coating pattern, service mode), the selection of any pattern is undertaken by control system 6 each formations of control (part) according to operator's indication input.
(action of 1.2.1 coating pattern)
At first, the action to common coating pattern describes.When selecting the coating pattern from operator's indication input, control system 6 makes open and close valve 84,84, waist valve 86 and extraction valve 88 be blocking, makes open and close valve 75 be open state simultaneously.Selected attraction pipe arrangement 74 and discharged pipe arrangement 79 as the stream of antitarnishing agent liquid like this.
At this moment, in giving baffle-box 72,, antitarnishing agent liquid is stored into upper limit position by supply assembly 71 according to testing result from sensor 73.After, antitarnishing agent liquid pump 81 is removed during the attraction action of carrying out antitarnishing agent liquid, carries out the supply of antitarnishing agent liquid up to upper limit position by the control of control system 6 to baffle-box.
In substrate board treatment 1, when the operator was transported to special position by not shown conveying equipment with substrate 90, platform 3 adsorbed substrate 90 on the special position that remains on the maintenance face 30.Then, according to the control signal from control system 6, the gap sensor 42 that elevator mechanism 43,44 will be installed on the nozzle support 40 moves to the certain height higher than the thickness of substrate 90 (hereinafter referred to as " measuring height ")
Gap sensor 42 is set in when measuring on the height, by linear motor 50,51 with crane span structure structure 4 to (+X) direction moves, and gap sensor 42 is moved to the top of resist film dispensing area.At this moment, control system 6 applies control signal by the testing result according to linear encoder 52,53 to each linear motor 50,51, and control gap sensor 42 is in the position of X-axis direction.
Then, the mensuration in the gap of substrate 90 surfaces of the resist film dispensing area on gap sensor 42 beginning substrates 90 surfaces and gap nozzle 41.When measuring beginning, by linear motor 50,51 make again crane span structure structure 4 to (+X) direction moves, gap sensor 42 scanning resist film dispensing areas transmit the measurement result in the scanning to control system 6.At this moment, control system 6 is associated the measurement result of gap sensor 42 and is kept in the memory portion 61 with the horizontal position of being measured by linear encoder 52,53.
Crane span structure structure 4 is in the (+X) top by substrate 90 on the direction; during the end of scan of gap sensor 42; control system 6 stops crane span structure structure 4 in this position; according to the testing result from gap sensor 42, the attitude on the YZ plane of calculating the gap nozzle 41 of sening as an envoy to becomes appropriate posture (makes the gap nozzle 41 and the interval of protection dispensing area become the attitude that is used to be coated with the appropriate intervals that saves antitarnishing agent liquid.Hereinafter referred to as " appropriate attitude ") the position of nozzle support 40, according to calculating the result, apply control signal to each elevator mechanism 43,44.According to this control signal, each elevator mechanism 43,44 moves nozzle support 40 on Z-direction, gap nozzle 41 is adjusted into appropriate attitude.
Like this, in order to realize the even coating of antitarnishing agent liquid, need adjust the distance on the surface of gap nozzle 41 and substrate 90 closely.In substrate board treatment 1, control system 6 is by controlling elevator mechanism 43,44 to carry out the adjustment of this distance according to the testing result of gap sensor 42.
Subsequent, linear motor 50,51 constructs 4 to (X) direction moves, and gap nozzle 41 is moved to discharge the initial position with crane span structure.At this, discharging the initial position is the roughly position on one side of edge protection dispensing area of gap nozzle 41.
This moment, control system 6 also applied control signal to open and close valve 76 and drive motor 821.Promptly, control system 6 carrying out scan period by gap nozzle 41, makes open and close valve 76 be open state.Simultaneously the rotation of drive motor 821 downward directions is driven, the bonded block 813 that makes antitarnishing agent liquid pump 81 is to (Z) direction moves.
Since by this action, the 1st bellows elongation of antitarnishing agent liquid pump 81, while the 2nd bellows contract, liquid LQ is pressurized indirectly.When liquid LQ was pressurized indirectly, pipe 814 shrank, and the antitarnishing agent liquid that is attracted in the pipe 814 is sent into to gap nozzle 41 from exhaust port 816.
Like this, gap nozzle 41 relatively moves with respect to substrate, discharges antitarnishing agent liquid to the resist film dispensing area simultaneously.Thus, on the surface of substrate 90, form the coating of antitarnishing agent liquid.In addition, control system 6 controlling and driving motors 821 are so that the travelling speed of the boundary vicinity (bonded block 813) of the 1st bellows 811 of antitarnishing agent liquid pump 81 and the 2nd bellows 812 is the synchronous speed of travelling speed (sweep rate) with gap nozzle 41.Thus, can control rightly from the amount of the antitarnishing agent liquid of antitarnishing agent liquid pump 81 discharges.In addition, in the substrate board treatment 1 of present embodiment,, can in by the antitarnishing agent liquid of liquor charging, not produce pulsation such as pumping action, can control the liquor charging inequality because the bonded block 813 of antitarnishing agent liquid pump 81 together moves glibly with nut part 823.
In addition, in this constitutes, baffle-box 72 is set, sets liquid level height with the high state of liquid level height of the antitarnishing agent liquid in the aspect ratio baffle-box 72 of the exhaust port 41a of gap nozzle 41.Thus, when coating, can not produce and from gap nozzle 41, flow out undesirable liquid stream.
In addition, the rotational speed of the drive motor 821 of this moment is by control system 6 controls, so that the bed thickness of the antitarnishing agent liquid that forms is a setting value on whole of protection dispensing area.Be used to make the rotational speed of the drive motor 821 that control system 6 so controls to distribute to wait by experiment in advance and obtain appropriate value.In addition, in order to improve the liquor charging precision of antitarnishing agent liquid, preferably make the state liquor charging of antitarnishing agent liquid, but general motor is stable in high speed rotating with comparison low speed.The driving mechanism 82 of the substrate board treatment 1 of present embodiment is owing to adopted the good DD motor of low speed rotation precision in the drive motor 821, even, can improve the discharge precision of gap nozzle 41 in that antitarnishing agent liquid also can be carried out high-precision control with the occasion of low speed liquor charging.
Moreover owing to use this drive motor that running accuracy is good in low speed rotation 821, the wire pitch D that can not make screw rod 822 is the numerical value of the discontented 3mm of machining accuracy reduction, can be the 3mm to 6mm of good processing accuracy, can realize the raising of precision.
The antitarnishing agent liquid discharge capacity of slit coater is roughly determined by the amount of the antitarnishing agent liquid of supplying with respect to gap nozzle.In the substrate board treatment 1 of present embodiment, begin to be controlled to be the rotating amount that drive motor 821 rotates by control system 61 stroke to the amount of discharging the antitarnishing agent liquid that (1 stroke) tailend send from antitarnishing agent liquid pump 81 from the discharge of antitarnishing agent liquid.At this, be 2 because drive motor 821 has resolution for the control of control system 6
17The high-resolution that P/rev is above can improve the control accuracy of this rotating amount.Therefore, can improve the precision of the discharge capacity of gap nozzle 41.
After this, linear motor 50,51 makes gap sensor 42 scan protection dispensing areas by crane span structure structure 4 is moved to directions X, measures and is formed at the gap of the resist film on the substrate 90 and transmit to control system 6.Control system 6 by calculating the gap of measuring before the resist-coating value (and the distance between substrate 90 surfaces) and resist-coating after value (and the distance between the surface of resist film) poor in the gap measured, calculate the thickness size that is formed at the resist film on the substrate 90.
Further, according to the thickness size of calculating, compare with the predefined particular value as the scope of the thickness size that allows, judge that whether good the coating of carrying out for substrate 90 handle, judgment result displays is on display unit 63.
Thus, owing to after the coating (resist film) that forms treatment fluid on the surface of substrate 90, can promptly carry out whether good judgement, can be according to the judged result that shows on the display unit 63, for example operator waits and can promptly tackle treatment state.Moreover, in the inspection of using gap sensor 42, owing to mainly can carry out the unusual detection of X-axis direction, can detect for example uncoated antitarnishing agent liquid (antitarnishing agent liquid deficiency), discharge the initial position and discharge that to produce thick film phenomenon etc. in end position dislocation, the coating end position unusual.Moreover the speed of the drive motor 821 in the time of can improving next coating according to this mould measurement result in the occasion of the thin thickness that for example Film Thickness Ratio is wished etc. are according to circumstances flexibly controlled antitarnishing agent liquid pump 81, obtain desirable coating result.
In addition, during this period, control system 6 makes drive motor 821 counter-rotating of driving mechanism 82 according to control signal, make nut part 823 to (+Z) direction moves.Thus since bonded block 813 to (+Z) direction moves, the 1st bellows 811 shrinks, the 2nd bellows 812 elongations simultaneously.Therefore, indirect liquid LQ is depressurized, and pipe 814 expands, and attracts antitarnishing agent liquid through attracting mouth 815 from feed mechanism 70 in pipe 814.
Like this, antitarnishing agent liquid pump 81 is at discharging operation and attract in the action not the stream of antitarnishing agent liquid etc. partly to be exposed to the open air externally in the air.That is the device of the use reciprocating pump in the past shown in, can image pattern 11 makes like that to expose externally airborne antitarnishing agent liquid to the open air rotten and sneak in the antitarnishing agent liquid of coating.Therefore, substrate board treatment 1 can suppress the particle generation.
When the inspection of resist film finished, platform 3 stopped the absorption of substrate 90, and operator or conveying equipment take out substrate 90 from maintenance face 30, be transported to down the treating process in step.
It more than is the action of coating pattern of the substrate board treatment 1 of present embodiment.
(action of 1.2.2 pre-coating pattern)
Below, the pre-coating pattern of substrate board treatment 1 is described.The pre-coating pattern is that substrate board treatment 1 does not pass through the driving of antitarnishing agent liquid pump 81 with the pattern of antitarnishing agent liquid to gap nozzle 41 liquor chargings.
In substrate board treatment 1, for example before the coating pattern, the state that causes antitarnishing agent liquid normally not discharge for the front end drying etc. that prevents because of gap nozzle 41, or the antitarnishing agent liquid that has gone bad that in advance will be on the front end of gap nozzle 41 will carry out pre-coating (examination coating) as reasons such as waste liquid, removals.In addition, also carry out pre-coating in the processing such as air extraction after cleaning.
When selecting the pre-coating pattern from operator's indication, at first control system 6 makes open and close valve 75,76 be open state according to control signal, makes open and close valve 83,84, waist valve 86 and air extraction valve 88 be blocking simultaneously.Thus, select to attract pipe arrangement 74 and discharge pipe arrangement 79 as the stream of 41 antitarnishing agent liquid from feed mechanism 70 to gap nozzle.
After this, by control control linear motor 50,51, crane span structure structure 4 is moved to carrying out pre-coating position (position that not shown precoated plate is coated with) from position of readiness.
Then, control system 6 is carried out the liquor charging of antitarnishing agent liquid to gap nozzle 41 by barometric pressure by control baffle-box 72.
In the pre-coating of substrate board treatment 1 is handled, do not need to discharge accurately, do not need to be undertaken the High Accuracy Control of discharge capacity, discharge flow rate by control antitarnishing agent liquid pump 81.Therefore, owing to the gimmick of antitarnishing agent liquid liquor charging has been selected not driving by antitarnishing agent liquid pump 81, and, can not produce the liquor charging that driving force ground carries out antitarnishing agent liquid by the gimmick of the barometric pressure liquor charging of baffle-box 72 as control system 6.
In slit coater, the occasion of using the high antitarnishing agent liquid of viscosity and clean and during removal waste fluid with rotten antitarnishing agent liquid and particle one gas ground extrusion occasion etc. in, need carry out liquor charging by high pressure.In the substrate board treatment 1 of present embodiment, in this processing, also can deal with by pre-coating.
When carrying out pre-coating by importing selection from operator's indication by high pressure, at first control system 6 makes open and close valve 83,84 be open state according to control signal, makes open and close valve 75, waist valve 86 and air extraction valve 88 be blocking simultaneously.Thus, select preparation pipe arrangement 85 as the stream of 41 antitarnishing agent liquid from feed mechanism 70 to gap nozzle.
After this, control system 6 control linear motors 50,51 move crane span structure structure 4.At this moment, in the occasion to substrate 90 coating, after similarly being measured etc. by gap sensor 42 with the coating pattern, crane span structure structure 4 is set on the aforesaid discharge initial position.Under situation about being coated with on the precoated plate, crane span structure structure 4 is configured on the aforesaid pre-coating position.
When crane span structure structure 4 was set on the certain location, control system 6 moved crane span structure structure 4 by control linear motor 50,51 to specific direction, scanned by gap nozzle 41 simultaneously.This moment, control system 6 made open and close valve 76 be open state, and the supply assembly 71 of controlling feed mechanism 70 simultaneously pressurizes antitarnishing agent liquid.Thus, the antitarnishing agent liquid after the pressurization to gap nozzle 41 liquor chargings, is discharged antitarnishing agent liquid from gap nozzle 41 from feed mechanism 70.
Like this, because substrate board treatment 1 has preparation pipe 85, control system 6 has the function of suitable selection preparation pipe 85, even in the high pressure that for example is applied with pipe 814 damaged degrees that may make antitarnishing agent liquid pump 81 to antitarnishing agent liquid, substrate board treatment 1 also can carry out the liquor charging of antitarnishing agent liquid.Therefore, even being full-bodied antitarnishing agent liquid, also can use substrate board treatment 1 as treatment fluid.
After implementing the discharge of specified quantitative, linear motor 50,51 makes crane span structure structure 4 keep out of the way position of readiness, finishes pre-coating.It more than is the action specification of the pre-coating pattern of substrate board treatment 1.
(action of 1.2.3 service mode)
Below, the action of the service mode of substrate board treatment 1 is described.In substrate board treatment 1, suitably clean pipe arrangement (attract management 74, discharge pipe arrangement 79, prepare pipe arrangement 85, waste liquid pipe arrangement 87 etc.) and maintenances such as antitarnishing agent liquid pump 81 or replacing antitarnishing agent liquid.
When board device 1 basis is selected service mode from operator's indication input, make waist valve 86 be open state by control system 6.
In substrate board treatment 1, as shown in Figures 3 and 4, the pipe 814 of antitarnishing agent liquid pump 81 is along the Z-direction setting.That is, the liquor charging direction of the antitarnishing agent liquid in the antitarnishing agent liquid pump 81 attracts the height and position of mouth 815 to be arranged at than on the low position of the height and position of exhaust port 816 with the state setting along Z-direction.
Like this, in the substrate board treatment 1 of embodiments of the present invention, low attraction mouth 815 sides that are provided with of height and position will be connected on the waste liquid pipe arrangement 87 in mouth 815 and the exhaust port 816 by attracting, make waist valve 86 under the situation of open state in control system 6, can easily extract the antitarnishing agent liquid in the antitarnishing agent liquid pump 81.
In addition, on the inwall of the pipe 814 of the stream that constitutes antitarnishing agent liquid, do not form complicated convex-concave etc., only by making waist valve 86 just make antitarnishing agent liquid in the antitarnishing agent liquid pump 81 direct into sewer pipe 87 and being extracted swimmingly for open state.Thereby, maintenance such as can easily clean.
In addition, owing to the gas in the antitarnishing agent liquid pump 81 is also taken out expeditiously from top, can also easily carry out the bubble removal operation by this set.
In addition, in substrate board treatment 1,, can also reclaim the antitarnishing agent liquid in the gap nozzle 41 expeditiously because when waist valve 86 was open state, open and close valve 76 also was an open state.Moreover, also can be when waist valve 86 is open state, control system 6 is by the structure of the not shown recovering mechanism suction feed waste liquid pipe arrangement 87 of control.In this occasion, can more easily extract antitarnishing agent liquid.
Through specific time, finish removal waste fluid, clean and remove when handling, substrate board treatment 1 shows that on display unit 63 upkeep operation finishes when finishing to safeguard.Thus, the operator can learn that substrate board treatment 1 has become and can begin to be coated with treatment state.
As mentioned above, in the substrate board treatment 1 of the 1st mode of execution, when conveying mechanism 80 carries out discharging operation and attracts action, can not resemble the stream (inwall of cylinder body 111) that makes treatment fluid the reciprocating pump in the past 110 shown in Figure 11 and expose to the open air externally in the atmosphere, can prevent the generation of particle.
In addition, because conveying mechanism 80 passes through collapsible tube 814 with the treatment fluid liquor charging, can suppress the pulsation of flowing of treatment fluid, accurately liquor charging.In such slit coater of substrate board treatment 1, be subjected to the influence of antitarnishing agent liquid liquor charging precision of relative gap nozzle 41 very big owing to discharge precision, be effective especially therefore.
In addition, owing in antitarnishing agent liquid pump 81, there not be to use the such wear member of the Sealing 113 of reciprocating pump 110 in the past (for example O shape encircle etc.), can suppress the replacing frequency of parts.In addition, can suppress because the generation of the particle that abrasion cause.
In addition because the interior shape of antitarnishing agent liquid pump 81 is simple shape cylindraceous (pipe 814), can be easily with the treatment fluid removal waste fluid of antitarnishing agent liquid pump 81 inside.Thereby, because of can easily carrying out cleaning and removing of treatment fluid, can easily carry out upkeep operation.Particularly, therefore, be applicable to the coating of colored resist film because of the displacement of comparing treatment fluid with general bellowspump is good.
In addition, by attract mouthfuls 815 and exhaust port 816 in than the lowland one side's height and position is set, the bubbles in the antitarnishing agent liquid pump 81 are easily taken out from top, treatment fluid can be from the bottom removal waste fluid easily.Also can make upkeep operation easy thus.
In addition, control system 6 is by selecting can to carry out liquor charging according to the behaviour in service of substrate board treatment 1 by drive motor 821 liquor chargings that drive driving mechanism 82 with by supply assembly 71 liquor chargings.
In addition, in substrate board treatment 1,, can carry out liquor charging according to the situation of the treatment fluid that uses by selecting through antitarnishing agent liquid pump 81 and attracting pipe arrangement 74 with antitarnishing agent liquid liquor charging or through preparing pipe arrangement 85 with antitarnishing agent liquid liquor charging.
(2. the 2nd mode of execution)
In the substrate board treatment 1 of the 1st mode of execution, for by 1 antitarnishing agent liquid pump 81 with the structure of antitarnishing agent liquid to gap nozzle 41 liquor chargings.At this, bigger at substrate 90 volumes to be processed, needing increases under the situation of the discharge capacity that is coated with per 1 stroke of handling, is to deal with by antitarnishing agent liquid pump 81 being replaced by the big magna pump of discharge capacity in the past.But because this large-scale pump is difficult to make accurately, its result has the problem that the coating precision reduces.In the present invention, the substrate board treatment 1 as shown in the 1st mode of execution, the pump of antitarnishing agent liquid liquor charging is not limited to 1, can be for a plurality of.
Fig. 6 illustrates the conveying mechanism 80a of substrate board treatment 1 of the 2nd mode of execution that constitutes according to this principle and the annexation figure of gap nozzle 51.In addition, roughly the same to the structure of preparation pipe arrangement 85 grades and the 1st mode of execution among Fig. 6, omit diagram at this.
The conveying mechanism 80a of the substrate board treatment 1 of present embodiment have on 2 antitarnishing agent liquid pump 81a, 81b and 2 driving mechanism 82a, the 82b this point different with the substrate board treatment 1 of the 1st mode of execution.
Fig. 7 is the view that antitarnishing agent liquid pump 81a, 81b and driving mechanism 82a, 82b are shown.Antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b have the structure roughly the same with the 1st mode of execution.In addition, driving mechanism 82a and driving mechanism 82b are marked by same-sign and omission to its explanation owing to have the structure roughly same with the driving mechanism 82 of the 1st mode of execution.
Each drive motor 821 is the DD motor, be connected on the control system 6 respectively independently, in the substrate board treatment 1 of the 2nd mode of execution, the assembly 824 of driving mechanism 82a is fixed on the bonded block 813 of antitarnishing agent liquid pump 81a, and the assembly 824 of driving mechanism 82b is fixed on the bonded block 813 of antitarnishing agent liquid pump 81b.Promptly, have the driving force that driving mechanism 82a produces antitarnishing agent liquid pump 81a, the function of the driving force of driving mechanism 82b generation antitarnishing agent liquid pump 81b.
Like this, because 2 antitarnishing agent liquid pump 81a, 81b are by independent driving mechanisms 82a, 82b drive respectively, control system 6 can be distinguished and controls antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b independently, can flexibly control the liquor charging of antitarnishing agent liquid with situation fit ground.See aftermentioned for details.
In addition, as shown in Figure 6, the conduct of conveying mechanism 80a is used for the liquor charging pipe arrangement to gap nozzle 41 guiding antitarnishing agent liquid, discharges pipe arrangement 79 and branches into the 1st pipe arrangement 79a and the 2nd pipe arrangement 79b.
The 1st pipe arrangement 79a is connected on the exhaust port 816 of antitarnishing agent liquid pump 81a, has the function of guiding from the antitarnishing agent liquid of antitarnishing agent liquid pump 81a discharge.In addition, the 2nd pipe arrangement 79b is connected on the exhaust port 816 of antitarnishing agent liquid pump 81b, is the pipe arrangement of guiding from the antitarnishing agent liquid of antitarnishing agent liquid pump 81b discharge.The length and the thickness of the stream of the 1st pipe arrangement 79a and the 2nd pipe arrangement 79b antitarnishing agent liquid separately are roughly the same.The 1st pipe arrangement 79a is connected in joint CP with the 2nd pipe arrangement 79b, after collaborate in joint CP by the antitarnishing agent liquid of each pipe arrangement guiding, guides by discharging pipe arrangement 79.The 1st pipe arrangement 79 is connected on the supplying mouth 410 of Y direction (length direction) central part that is arranged at gap nozzle 41.
Below, the action of the substrate board treatment 1 of the 2nd mode of execution is described.Because the substrate board treatment 1 of present embodiment forms the action of resist film on the surface of substrate 90 and the substrate board treatment 1 of the 1st mode of execution carries out, and suitably elliptically describes roughly the samely.
At first, by being transported to, substrate 90 begins on the substrate board treatment 1 to handle, linear motor 50,51 make portal structure 4 to (+X) direction moves, carrying out the gap by gap sensor 42 simultaneously measures, according to the output of gap sensor 42, elevator mechanism 43,44 is adjusted the attitude of gap nozzle 41.
After this, make crane span structure structure 4 to (X) direction moves and gap nozzle 41 is moved to the discharge initial position, begins scanning by gap nozzle 41 by linear motor 50,51.
Follow the beginning of the scanning of this gap nozzle 41, in the substrate board treatment 1 of the 2nd mode of execution, also discharge antitarnishing agent liquid from gap nozzle 41.Be in particular, control system 6 is applying control signal to open and close valve 76 and 2 drive motors 821, carry out scan period by gap nozzle 41, open and close valve 76 is an open state, simultaneously each drive motor 821 is driven to the postive direction rotation, the bonded block 813 that makes antitarnishing agent liquid pump 81a, 81b is to (Z) direction moves.
Since by this action, the 1st bellows 811 elongations of antitarnishing agent liquid pump 81a, 81b, the 2nd bellows 812 shrinks simultaneously, and the antitarnishing agent liquid that is attracted in the pipe 814 is discharged from each exhaust port 816.That is, from the exhaust port 816 of antitarnishing agent liquid pump 81a when the 1st pipe arrangement 79a discharges antitarnishing agent liquid, discharge antitarnishing agent liquid from the exhaust port 816 of antitarnishing agent liquid pump 81b to the 2nd pipe arrangement 79b.
The antitarnishing agent liquid of Pai Chuing collaborates mutually at joint CP like this, guides to supplying mouth 410 by discharging pipe arrangement 79, and supplies with to gap nozzle 41.That is, the discharge capacity of the gap nozzle 41 of substrate board treatment 1 is the total amount of the discharge capacity of the discharge capacity of antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b.Thus, in the occasion for large-scale substrate 90 painting erosion resistant agent liquid, even in the occasion of must the delivery ratios more antitarnishing agent liquid of gap nozzle 41, the pump of conveying mechanism 80a can not add large volume yet, can guarantee necessary discharge capacity.Therefore, substrate board treatment 1 can not reduce the volume of discharging precision ground reply substrate 90 and increase by using high-precision miniature pump (antitarnishing agent liquid pump 81a, 81b).
At this moment, the discharge flow rate and the discharge flow rate of antitarnishing agent liquid pump 81b of control system 6 control antitarnishing agent liquid pump 81a are so that be the needed flow of film that is used to form desirable thickness from the flow of the antitarnishing agent liquid of gap nozzle 41 discharges.In the substrate board treatment 1 of present embodiment, the travelling speed of the bonded block separately 813 of control antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b, so that the discharge flow rate of the discharge flow rate of antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b about equally, and these total flows are the discharge flow rate of desirable gap nozzle 41.
The travelling speed of each bonded block 813 is implemented by the rotational speed of 82a of controlling and driving mechanism and driving mechanism 82b drive motor 821 separately.On the other hand, as shown in Figure 7, antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b are roughly same formation.Moreover in the 1st pipe arrangement 79a and the 2nd pipe arrangement 79b, the length and the thickness of the stream of antitarnishing agent liquid are roughly the same.Because the conveying mechanism 80a of the substrate board treatment 1 of the 2nd mode of execution has such structure (so-called similar structure), control system 6 is with the synchronously control mutually of 2 drive motors 821, and the discharge capacity that can easily be controlled to be antitarnishing agent liquid pump 81a equates with the discharge flow rate of antitarnishing agent liquid pump 81b.
In addition, the velocity distribution that is used to make the total flow of the discharge capacity of the discharge capacity of antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b to become the drive motor 821 of the needed flow of film that is used to form desirable thickness is tried to achieve by experiment and pre-coating processing etc. in advance, according to this result, carry out synchronization control as previously mentioned.
In addition, the control of being undertaken by 6 pairs of each drive motors 821 of control system is not limited to foregoing synchronization control, also can non-synchronously control.For example because of the Environmental Conditions and the ageing state difference of each parts of using among antitarnishing agent liquid pump 81a, 81b and driving mechanism 82a, the 82b, or the difference of the machining accuracy of these standards laid down by the ministries or commissions of the Central Government, if control system 6 is the synchronously control as described above of each drive motor 821, the discharge capacity that can produce antitarnishing agent liquid pump 81a and the variation of the discharge capacity of antitarnishing agent liquid pump 81b and the situation of generation error.But, because the substrate board treatment 1 of the 2nd mode of execution has 2 driving mechanism 82a, 82b, antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b can be constituted independently with controlling, control system 6 also can not carried out synchronization control in this case, and carries out the control with these error concealments.
In addition, also can not drive antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b simultaneously.For example also can when beginning, at first only drive antitarnishing agent liquid pump 81a, discharge the finish time, then discharge ground and control from antitarnishing agent liquid pump 81 by antitarnishing agent liquid pump 81a from gap nozzle 41 discharges.
That is,, can carry out any control as long as during gap nozzle 41 scanning resist film dispensing areas, suitably control antitarnishing agent liquid discharge flow rate from gap nozzle 41.
Like this, because the substrate board treatment 1 of the 2nd mode of execution is to constitute each drive motor 821 independent control ground, so can according to circumstances flexibly control the liquor charging state.Thereby, can realize the discharge accurately of gap nozzle 41.
After, carry out action and the control same with the substrate board treatment 1 of the 1st mode of execution, after the processing for substrate 90 finishes, substrate 90 is taken out of outside device from substrate board treatment 1.
As mentioned above, owing to the antitarnishing agent liquid pump 81a, the 81b that in the substrate board treatment 1 of the 2nd mode of execution, have at least more than 2, guaranteed the state of the discharge capacity of the antitarnishing agent liquid that gap nozzle 4 is discharged.Thereby, owing to can use high-precision miniature pump, compare the discharge precision that can improve gap nozzle 41 with the situation of using magna pump.Usually, if for the discharge capacity of per 1 stroke is below the 200cc, discharge flow rate is 0.2 to 10cc/sec miniature pump, and can produce the discharge flow rate precision is about ± 5%.Can access the discharge precision of necessity when on substrate 90, forming resist film.
In addition, owing to the driving mechanism 82a, the 82b that have at least more than 2, respectively antitarnishing agent liquid pump 81a, 81b more than at least 2 are driven independently, according to circumstances state is flexibly controlled the liquor charging flow.
In addition, in the substrate board treatment 1 of the 2nd mode of execution, have 2 antitarnishing agent liquid pump 81a, 81b, but, also can use more pump in that antitarnishing agent liquid is not limited to this to the quantity of the pump of gap nozzle 41 liquor chargings.Also be same in the following embodiments.
(3. the 3rd mode of execution)
The substrate board treatment 1 of the 2nd mode of execution has 2 driving mechanism 82a, 82b in order to drive 2 protection pump 81a, 81b, drives each antitarnishing agent liquid pump 81a, 81b independently by each driving mechanism 82a, 82b.Thereby, equate that with the discharge flow rate of antitarnishing agent liquid pump 81b control system 6 is synchronously controlled drive portion 82a, 82b in order to make antitarnishing agent liquid pump 81a.But, 2 antitarnishing agent liquid pump 81a, the synchronously driven gimmick of 81b being not limited to situation by control system 6 control, for example also can mechanically carry out.
Fig. 8 is the schematic representation according to the annexation of the conveying mechanism 80b of the substrate board treatment 1 of the 3rd mode of execution of this principle formation and gap nozzle 41.Moreover the substrate board treatment 1 for present embodiment is marked with corresponding symbol for the formation with the 1st and the 2nd mode of execution said function, omits its explanation at this.
On the nut part 823a of the driving mechanism 82c of the 3rd mode of execution, be fixed with 2 assembly 824a, 824b.Assembly 824a is the parts that have with assembly 824 identical functions of the driving mechanism 82a of the 2nd mode of execution, is fixed on antitarnishing agent liquid pump 81a one side of nut part 823a.On the other hand, assembly 824b is fixed on antitarnishing agent liquid pump 81b one side of nut part 823a, and is installed on the bonded block 813 of antitarnishing agent liquid pump 81b.
Below, the action of the substrate board treatment 1 of the 3rd mode of execution is described.Because the substrate board treatment 1 of present embodiment forms resist film on the surface of substrate 90 action is carrying out with the roughly the same action of the substrate board treatment 1 of the 1st mode of execution, suitably omission is to its explanation.
At first, by being transported to, substrate 90 begins on the substrate board treatment 1 to handle, linear motor 50,51 make portal structure 4 to (+X) direction moves, carrying out the gap by gap sensor 42 simultaneously measures, according to the output of gap sensor 42, elevator mechanism 43,44 is adjusted the attitude of gap nozzle 41.
After this, make crane span structure structure 4 to (X) direction moves and gap nozzle 41 is moved to the discharge initial position, begins scanning by gap nozzle 41 by linear motor 50,51.
Follow the beginning of the scanning of this gap nozzle 41, in the substrate board treatment 1 of the 3rd mode of execution, also discharge antitarnishing agent liquid from gap nozzle 41.
At first, control system 6 makes open and close valve 76 be open state, and the drive motor 821 of driving mechanism 82c is just being changeed, and makes nut part 823a to (Z) direction moves.Thus, the bonded block 813 of the bonded block 813 of antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b integratedly with identical speed to (Z) direction moves.Because antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b are made of the parts of roughly the same structure, when each bonded block 813 moves with the speed that equates, with the substrate board treatment 1 of the 2nd mode of execution similarly, the amount of the antitarnishing agent liquid of discharging from each antitarnishing agent liquid pump 81a, 81b is for equating.
Crane span structure structure 4 is to (X) direction moves, and when gap nozzle 41 moved to end position, control system 6 made open and close valve 76 for blocking, stops the rotation of drive motor 821 simultaneously, stops from the discharge of the antitarnishing agent liquid of gap nozzle 41.
After, carry out action and the control same with the substrate board treatment 1 of the 1st mode of execution, after the processing to substrate 90 finishes, substrate 90 is taken out of outside device from substrate board treatment 1.
As mentioned above, in the substrate board treatment 1 of the 3rd mode of execution, also can obtain the effect roughly the same with the substrate board treatment 1 of the 2nd mode of execution.
In addition, because in the substrate board treatment 1 of the 2nd mode of execution, driving mechanism 82c connects by the nut part 823a with a plurality of assembly 824a, 824b and drives 2 antitarnishing agent liquid pump 81a, 81b, do not need to carry out complicated control, can easily make discharge flow rate separately equally drive antitarnishing agent liquid pump 81a, 81b by control system 6.
(4. the 4th mode of execution)
In the above-described embodiment, to being illustrated from a situation of supplying with antitarnishing agent liquid in gap nozzle 41, but the position of supplying with antitarnishing agent liquid is not limited only to a place.
Fig. 9 is the front view according to the body 2 of the substrate board treatment 1 of the 4th mode of execution of this principle formation.In addition, in the substrate board treatment 1 of present embodiment, also be marked with same-sign, omit its explanation for formation with the 1st and the 2nd mode of execution said function.
On the body 2 of present embodiment, similarly be provided with crane span structure structure 4 with above-mentioned mode of execution.In addition, crane span structure structure 4 is made of elevator mechanism 43,44 and nozzle support 40.
Figure 10 is the schematic representation of gap nozzle 41 and the coupled condition of conveying mechanism 80c, 80d of the substrate board treatment 1 of the 4th mode of execution.
On gap nozzle 4, be provided with 2 supplying mouths (supplying mouth 401a and supplying mouth 401b) that are used to supply with antitarnishing agent liquid with the state of arranging in Y direction.That is, the allocation position of supplying mouth 401a and supplying mouth 401b has nothing in common with each other on the position of the length direction of gap nozzle 41.
Conveying mechanism 80c and conveying mechanism 80d have roughly same formation, conveying mechanism 80c has antitarnishing agent liquid pump 81a, driving mechanism 82a, discharge tube 79c and open and close valve 76a, and conveying mechanism 80d has antitarnishing agent liquid pump 81b, driving mechanism 82b, discharge tube 79d and open and close valve 76b.
In the present embodiment, the exhaust port 816 of antitarnishing agent liquid pump 81a is connected with discharge tube 79c, and discharge tube 79c is installed on the supplying mouth 410a of gap nozzle 41 by open and close valve 76a.In addition, the exhaust port 816 of antitarnishing agent liquid pump 81b is connected with discharge tube 79d, and discharge tube 79d is installed on the supplying mouth 410b of gap nozzle 41 by open and close valve 76b.That is, antitarnishing agent liquid pump 81a and antitarnishing agent liquid pump 81b are connected on supplying mouth 401a and the 401b one to one.
Below, the action of the substrate board treatment 1 of the 4th mode of execution is described.Because the substrate board treatment 1 of present embodiment forms resist film on the surface of substrate 90 action is to carry out suitably explanation elliptically with the roughly the same action of the substrate board treatment 1 of the 1st mode of execution.
At first, by being transported to, substrate 90 begins on the substrate board treatment 1 to handle, linear motor 50,51 make portal structure 4 to (+X) direction moves, carrying out the gap by gap sensor 42 simultaneously measures, according to the output of gap sensor 42, elevator mechanism 43,44 is adjusted the attitude of gap nozzle 41.
After this, make crane span structure structure 4 to (X) direction moves and gap nozzle 41 is moved to the discharge initial position, begins scanning by gap nozzle 41 by linear motor 50,51.
Follow the beginning of the scanning of this gap nozzle 41, in the substrate board treatment 1 of the 4th mode of execution, also discharge antitarnishing agent liquid from gap nozzle 41.
At first, control system 6 makes open and close valve 76a, the 76b open state of respectively doing for oneself, and each drive motor 821 of each driving mechanism 82c is just being changeed, and makes each nut part 823a to (Z) direction moves.Thus, similarly discharge antitarnishing agent liquid with the 2nd mode of execution from antitarnishing agent liquid pump 81a, 81b.
At this, in the substrate board treatment 1 of the 2nd and the 3rd mode of execution, the antitarnishing agent liquid of discharging from 2 antitarnishing agent liquid pump 81a, 81b is collaborating to the way of gap nozzle 41 liquor chargings, supplies with to gap nozzle 41 from 1 supplying mouth 410.
Resemble the substrate board treatment 1 of the 1st to the 3rd mode of execution, with antitarnishing agent liquid from one in the slit coater that gap nozzle 41 is supplied with, along with the maximization of substrate 90, when gap nozzle 41 maximizes, from supplying with the nearest position of opening 410 with between supplying mouth 410 highest distance positions, from the range difference increase of supplying mouth 410.Thereby, in the delivery volume of the antitarnishing agent liquid of these positions, producing error, the discharge flow rate of gap nozzle 41 is inhomogeneous on Y direction.In addition, when gap nozzle 41 maximized, because the machining accuracy of gap nozzle 41 reduces, discharge flow rate was inhomogeneous on Y direction.
But in the substrate board treatment 1 of the 4th mode of execution, the antitarnishing agent liquid of discharging from each antitarnishing agent liquid pump 81a, 81b is supplied with to the diverse location of antitarnishing agent liquid nozzle 41 by stream (discharge tube 79c and discharge tube 79d) independently respectively.Thereby, owing to compare with the substrate board treatment 1 of the 1st to the 3rd mode of execution, the substrate board treatment 1 of present embodiment can with from the nearest position of supplying mouth with the range difference apart from supplying mouth suppresses lessly from supplying mouth position farthest, so can control the error of discharge flow rate of the length direction of gap nozzle 41.Thus, can improve the discharge precision of gap nozzle 41.
Crane span structure structure 4 is to (X) direction moves, and when gap nozzle 41 moved to end position, it was blocking that control system 6 makes open and close valve 76a, 76b, stops the rotation of drive motor 821 simultaneously, stops to discharge antitarnishing agent liquid from gap nozzle 41.
After this, by the action same, measure and the gap that is formed on the lip-deep resist film of substrate 90 by gap sensor 42 with the substrate board treatment 1 of the 1st mode of execution.Calculating part 60 is according to the thickness size of obtaining the resist film of each position from the output of 2 gap sensors 42, by with these values mutually relatively, the thickness of the resist film that forms detected error (film thickness difference) on the Y direction.
Like this, substrate board treatment 1 can be corresponding to as the thickness of the resist film of controlling object each drive motor 821 of feedback control independently according to the output of gap sensor 42.Thus, even the machining accuracy of for example gap nozzle 41 owing to the situation about reducing that maximizes under, owing to can control the error of the liquor charging amount of antitarnishing agent liquid pump 81a, 81b, so can improve the discharge precision of gap nozzle 41 with the discharge flow rate of elimination Y direction.
Same with the substrate board treatment 1 of the 1st mode of execution, when the inspection of resist film finished, platform 3 stopped the absorption of substrate 90, and operator or conveying equipment take out substrate 90 from maintenance face, carry to next treating process.
As above-mentioned, even the substrate board treatment 1 of the 4th mode of execution is in the occasion of the length of using maximization along with substrate 90, length direction (Y direction) as the large-scale gap nozzle 41 more than the 1m, be arranged on the two end part of gap nozzle 41 respectively dividually by conveying mechanism 80c, 80d, supply with antitarnishing agent liquid from 2 to gap nozzle 41 independently of one another, can make the antitarnishing agent liquid delivery volume homogenization of the length direction of gap nozzle 41.Thereby, can improve the discharge precision of gap nozzle 41.
In addition, by the output according to gap sensor 42, each drive motor 821 that feedback control drives each antitarnishing agent liquid pump 81a, 81b can carry out the control corresponding to measured value, has further improved the discharge precision.
Moreover, in the substrate board treatment 1 of present embodiment, to being illustrated, but also can be the structure of supplying with antitarnishing agent liquid from more position from 2 situations from antitarnishing agent liquid to gap nozzle that supply with.
(5. variation)
More than embodiments of the present invention are illustrated, but the present invention and not only in above-mentioned mode of execution can have various distortion.
For example, the substrate board treatment 1 of above-mentioned mode of execution is discharged antitarnishing agent liquid from gap nozzle, promptly so-called slit coater, but the present invention is not limited to slit coater.
In addition, the pump that driving mechanism 82 drives is not limited in the pump of antitarnishing agent liquid pump 81 the sort of forms, for example also can use the piston of driven plunger pump.That is, so long as, can be any pump by movable part drives the pump of liquor charging along the axle of straight line shape.
In addition, antitarnishing agent liquid pump 81,81a, 81b also can be arranged at the below of gap nozzle 41.In this occasion, the antitarnishing agent liquid in antitarnishing agent liquid pump 81 and the gap nozzle 41 further can be reclaimed expeditiously, removal waste fluid.
In addition, as aforementioned, in order to improve the discharge precision of gap nozzle 41, wish to shorten distance from each exhaust port 816 of antitarnishing agent liquid pump 81,81a, 81b to gap nozzle 41 (supplying mouth 401).In the substrate board treatment 1 of the 1st to the 3rd mode of execution,, conveying mechanism 80,80a, 80b shorten this distance on the nozzle support 40 by being arranged on.But also can be for example by further shortening this distance near the central part that conveying mechanism 80,80a, 80b is installed in nozzle support 40.
In addition, such to substrate board treatment 1 at the 4th mode of execution, gap nozzle 41 has under the situation of a plurality of supplying mouth 410a, 410b, in order to proofread and correct the discharge inequality of gap nozzle 41 in Y direction, the use feedback control is illustrated, but feedback control effectively is not limited in this situation.Promptly, even only have the occasion of single supplying mouth 410 at the such gap nozzle 41 of the 1st to the 3rd mode of execution, for the flow control of the antitarnishing agent liquid that will discharge from gap nozzle 41 is an appropriate amount, also can carry out the feedback control of each drive motor 821 according to the thickness of the resist film of obtaining by the output of gap sensor 42.That is, also can revise the velocity distribution that waits the drive motor 821 of trying to achieve by experiment in advance by feedback control.
Claims (21)
1. a substrate board treatment that forms the film of specific treatment fluid on substrate is characterized by,
Have the feed mechanism of the maintenance platform that keeps substrate, the gap nozzle of will described specific treatment fluid on the interarea of substrate, discharging, the described particular procedure liquid of supply, with the liquor charging assembly of described particular procedure liquid to described gap nozzle liquor charging,
The driven unit that described liquor charging assembly has the container parts of variable internal capacity, the internal capacity ground of pipe part, the variable described container parts of variable internal capacity drives when inside constitutes the stream of described specific treatment fluid,
Described pipe part is arranged on the inside of described container parts, in the space between described container parts and described pipe part in envelope indirect liquid arranged.
2. according to the described substrate board treatment of claim 1, it is characterized by,
Described container parts is different mutually by internal diameter, and inner the 1st and the 2nd bellows formation that is interconnected,
Described driven unit make the described the 1st and the boundary vicinity of the 2nd bellows move to specific direction.
3. according to the described substrate board treatment of claim 2, it is characterized by,
Described gap nozzle relatively moves and discharges described particular procedure liquid for substrate,
The described the 1st and the speed controlling that moves of the boundary vicinity of the 2nd bellows become the synchronous speed of travelling speed with described gap nozzle.
4. according to the described substrate board treatment of claim 1, it is characterized by,
Control unit with the described driven unit of control,
Described control unit has the constant volume feed mechanism and the flow setting type feed mechanism of control by the flow of the described specific treatment fluid of described liquor charging assembly liquor charging of the liquor charging amount of the described specific treatment fluid of controlling described liquor charging assembly liquor charging.
5. according to the described substrate board treatment of claim 1, it is characterized by,
In described liquor charging assembly, be provided with the attraction mouth and the exhaust port of the both end sides that lays respectively at described pipe part,
It is lower than another to be configured to height and position some in described attraction mouth and the described exhaust port.
6. according to the described substrate board treatment of claim 1, it is characterized by,
Described feed mechanism has the baffle-box of storing described specific treatment fluid,
Described baffle-box under atmospheric pressure makes described liquor charging assembly attract described specific treatment fluid.
7. according to the described substrate board treatment of claim 6, it is characterized by, the liquid level height that described feed mechanism also has to described baffle-box is set at lower than the exhaust port of described gap nozzle.
8. according to the described substrate board treatment of claim 6, it is characterized by,
Described feed mechanism also has the supply assembly of the described specific treatment fluid of in described baffle-box supply,
Described supply assembly will be stored in described specific treatment fluid in the described baffle-box with specific pressure to described gap nozzle liquor charging.
9. according to the described substrate board treatment of claim 6, it is characterized by, described feed mechanism also has the mensuration assembly of measuring the amount that is stored in the described specific treatment fluid in the described baffle-box.
10. according to the described substrate board treatment of claim 8, it is characterized by, also have by described supply assembly with the occasion of described specific treatment fluid pressurization and liquor charging not by described liquor charging assembly ground with the lead preparation stream of described gap nozzle of described specific treatment fluid.
11. according to the described substrate board treatment of claim 10, it is characterized by, also have described specific treatment fluid is being selected still to select assembly by any liquor charging of described supply assembly liquor charging by driving described driven unit liquor charging to the occasion of described gap nozzle liquor charging, and select by described liquor charging assembly liquor charging the still stream selection assembly by described preparation stream liquor charging.
12. according to the described substrate board treatment of claim 11, it is characterized by, described stream selects assembly to have the valve that opens and closes described preparation stream.
13. according to the described substrate board treatment of claim 1, it is characterized by, described liquid feeding device has a plurality of described container parts and one a plurality of described pipe part all is set in the inside of described a plurality of container parts.
14. according to the described substrate board treatment of claim 13, it is characterized by,
The liquor charging pipe arrangement that also has between described a plurality of container parts and described gap nozzle the stream that forms described specific treatment fluid,
On described gap nozzle, be provided with a plurality of treatment fluid supplying mouths,
Described liquor charging pipe arrangement couples together described a plurality of treatment fluid supplying mouths and described a plurality of container parts one to one.
15. according to the described substrate board treatment of claim 4, it is characterized by,
Also have the thickness detection components that detects the thickness that is formed at the described film on the substrate surface,
Described control unit is controlled described control mechanism according to the testing result of described thickness detection components, so that the thickness of described film is even.
16. according to the described substrate board treatment of claim 13, it is characterized by, described driving mechanism changes the internal capacity that drives described a plurality of container parts independently of one another.
17. according to the described substrate board treatment of claim 13, it is characterized by, described driving mechanism is by connection and drive the internal capacity ground driving that described a plurality of container parts changes described a plurality of container parts.
18. according to the described substrate board treatment of claim 17, it is characterized by, roughly the same separately to the length and the thickness of the described liquor charging pipe arrangement stream the described gap nozzle separately from described a plurality of container parts.
19. the particular procedure liquid that will be coated with on substrate carries out the liquid feeding device of liquor charging, it is characterized by,
Have to produce and be used for the drive motor of the driving force of described specific treatment fluid liquor charging, screw rod, the nut part that combines with described screw flight, the guide element of driving direction that guides described nut part and the control unit of controlling described drive motor by described drive motor rotation
The high zero motor of stability when described drive motor is low speed rotation,
Described screw rod and described nut part are for to be made of integrally manufactured parts.
20. according to the described liquid feeding device of claim 19, it is characterized by, the pitch of described screw rod is 3mm to 6mm.
21., it is characterized by according to the described liquid feeding device of claim 19, have the velocity accuracy below 1% in the low speed rotation of described drive motor below 500rpm, have 2 for control from described control unit
17The resolution precision that P/rev is above.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP69952/2003 | 2003-03-14 | ||
| JP2003069952A JP2004281645A (en) | 2003-03-14 | 2003-03-14 | Substrate treating device |
| JP69834/03 | 2003-03-14 | ||
| JP69834/2003 | 2003-03-14 | ||
| JP69952/03 | 2003-03-14 | ||
| JP2003069834A JP4184124B2 (en) | 2003-03-14 | 2003-03-14 | Substrate processing equipment |
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| Publication Number | Publication Date |
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| CN1530176A true CN1530176A (en) | 2004-09-22 |
| CN1295026C CN1295026C (en) | 2007-01-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2004100287332A Expired - Lifetime CN1295026C (en) | 2003-03-14 | 2004-03-12 | Placode processor and liquid feeder |
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| Country | Link |
|---|---|
| KR (1) | KR20040081336A (en) |
| CN (1) | CN1295026C (en) |
| TW (1) | TWI253359B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5183508A (en) * | 1987-11-23 | 1993-02-02 | Epicor Technology, Inc. | Apparatus for patch coating printed circuit boards |
| JPH07130627A (en) * | 1993-11-05 | 1995-05-19 | Koganei Corp | Resist coater |
| JP3278714B2 (en) * | 1996-08-30 | 2002-04-30 | 東京エレクトロン株式会社 | Coating film forming equipment |
| JP3865938B2 (en) * | 1998-06-30 | 2007-01-10 | 株式会社コガネイ | Bellows pump |
| JP4366757B2 (en) * | 1999-05-27 | 2009-11-18 | 東レ株式会社 | Coating apparatus, coating method, and method for manufacturing plasma display or display member |
| JP4080148B2 (en) * | 2000-07-11 | 2008-04-23 | 松下電器産業株式会社 | Screen printing device and paste storage container for screen printing device |
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2004
- 2004-01-29 TW TW093101977A patent/TWI253359B/en not_active IP Right Cessation
- 2004-03-10 KR KR1020040016133A patent/KR20040081336A/en not_active Application Discontinuation
- 2004-03-12 CN CNB2004100287332A patent/CN1295026C/en not_active Expired - Lifetime
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| CN104722448A (en) * | 2013-12-18 | 2015-06-24 | 日东电工株式会社 | Coating apparatus and method for producing coating film |
| CN104722448B (en) * | 2013-12-18 | 2019-07-09 | 日东电工株式会社 | The manufacturing method of apparatus for coating and coated film |
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| CN106824680A (en) * | 2017-03-20 | 2017-06-13 | 合肥京东方光电科技有限公司 | A kind of waste discharge liquid bath and gap nozzle cleaning device for gap nozzle |
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| CN111527586B (en) * | 2017-12-28 | 2024-04-09 | 东京毅力科创株式会社 | Substrate processing apparatus, substrate processing method, and computer-readable recording medium |
| CN111720301A (en) * | 2019-03-20 | 2020-09-29 | 铠侠股份有限公司 | Pump and coating device |
| US11413647B2 (en) | 2019-03-20 | 2022-08-16 | Kioxia Corporation | Pump and coating device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200417418A (en) | 2004-09-16 |
| TWI253359B (en) | 2006-04-21 |
| CN1295026C (en) | 2007-01-17 |
| KR20040081336A (en) | 2004-09-21 |
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