CN1501697A - Cloche for solid camera element - Google Patents
Cloche for solid camera element Download PDFInfo
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- CN1501697A CN1501697A CNA031052800A CN03105280A CN1501697A CN 1501697 A CN1501697 A CN 1501697A CN A031052800 A CNA031052800 A CN A031052800A CN 03105280 A CN03105280 A CN 03105280A CN 1501697 A CN1501697 A CN 1501697A
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- cloche
- camera element
- solid camera
- plate glass
- glass
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
- C03C3/093—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium containing zinc or zirconium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Glass Compositions (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Provided is a cover glass for solid imaging devices having a high grade with respect to the defects of a surface and inside, a low cost, excellent weather resistance, lighter weight, and high strength.The side 12 of a plate glass is composed of a first side portion 12a forming roughly perpendicularity to a first light transmitting plane 11a, and a second side portion 12b tilted to the first side portion 12a. The surface roughness of the first side portion 12a is greater than that of the second side portion 12b. The Ra value of the surface roughness of the first side portion 12a is 0.1 to 10 nm, and the Rmax value is 0.1 to 30 nm. The Ra value of the surface roughness of the second side portion is 0.1 to 5 nm, and the Rmax value is 0.1 to 20 nm. The angle formed by the first side portion 12a to the first light transmitting plane 11a is within the range of 90[deg.]+-5[deg.], and the angle formed by the second side portion 12b to the first side portion 12a is 8[deg.] or smaller.
Description
Technical field
The Cloche for solid camera element that the present invention is made up of plate glass is installed on and comprises the front of solid-state imager at internal member, plays the effect of protection solid-state imager and loophole.
Background technology
The former configuration of solid-state imager has the cloche that adopts the planar shaped transparent surface, is used to protect this element.This solid-state imager utilizes various adhesive seals on the external member that ceramic material such as aluminium oxide or plastic material are made, the solid-state imager of protection external member inside, and the loophole that can be used as visible rays etc. simultaneously uses.
As the solid-state image pickup element of external member inside, the photosemiconductor that often uses has charge coupled device CCD (Charge Coupled Device), CMOS (ComplementaryMetal Oxide Semicon) etc. now.Wherein, CMOS also is known as Cmos, compare Miniaturizable with CCD, consuming electric power also can taper to about 1/5th, can utilize the microprocessor manufacture craft, so exist equipment investment few, characteristics such as low cost of manufacture often are used in the image input device of mobile phone and minicom etc.
CCD and CMOS need with image correct be transformed to electronic information, so, require to have high-grade cleannes to adhering to of stain, scar and the foreign matter on used cloche surface etc. strict standard being arranged all.And, except that the cleannes on surface, also need to prevent sneaking into of foreign matters such as the crystal defect of glass inside and platinum, prevent that trace from containing the U and the Th generation alpha ray of radiant composition and causing soft errors, so relate to many-sided challenge at these, many solution countermeasures such as employing high-purity raw occurred resembling.For example, patent documentation 1,2 is used for improving cost, the weather proof and micro-countermeasure that contains composition aspect problem exactly.In addition,, add surperficial scar and inclination etc., all can influence the correct reception and registration of image information, so also need to take certain countermeasure because Cloche for solid camera element and optical glass have a same even property.Even to influencing the edge tilt problem of Cloche for solid camera element intensity, its research that solves countermeasure is also being carried out,, just can improved inspection precision always to edge tilt for example according to the method in the patent 3.In addition, according to the method in the patent 4, but the higher chamfered edge processing that prevents edge tilt of efficient.
[patent documentation 1]
Te Kaiping 7-206467 (the 2nd page the-the 7th page)
[patent documentation 2]
Te Kaiping 6-211539 (the 2nd page the-the 7th page)
[patent documentation 3]
Te Kaiping 2001-241921 (the 2nd page the-the 4th page, the 1st figure)
[patent documentation 4]
Te Kaiping 6-106469 (the 2nd page the-the 3rd page)
In recent years, in the solid-state imager field, CMOS is considered to have purposes especially widely.The low price of this element, and can be used for mobile phone and PDA etc.Because these machines generally all are used to be subject to the environment of impulsive force and external stress; so to being used for protecting the CMOS of their equipments; the Cloche for solid camera element that while uses as light inlet window; requirement has than original higher intensity, particularly impact strength and weather proof performance etc.Therefore be used for the Cloche for solid camera element of these purposes, except low price and lightweight characteristics will be arranged, also must have high strength and stable weather proof performance.Aspect cost and weather resistance, as previously mentioned, solution countermeasure has to a certain degree been arranged at present, but, also failed to reach fully the level that such use requires in weight and intensity direction.
Summary of the invention
The purpose of this invention is to provide in that to have high-grade, low price, weather resistance aspect surface and the internal flaw excellent, and the Cloche for solid camera element that weight is lighter, intensity is higher.
Cloche for solid camera element of the present invention, form by inorganic oxide plate glass, comprise with the lower part: be in plate glass thickness direction, relative first transparent surface and second transparent surface in position, and the side that constitutes the plate glass periphery, wherein the side is divided first side adjacent with first transparent surface, second side adjacent with second transparent surface with first side again.Have following characteristics on constituting: the surface roughness of first side is greater than the surface roughness of second side, the Ra value of the first side surface rugosity is 0.1～10nm, the Rmax value is 0.1～30nm, the Ra value of the second side surface rugosity is 0.01～5nm, the Rmax value is 0.01～20nm, first side and the first transparent surface angulation are in 90 ° ± 5 ° scope, and second side and the first side angulation are below 8 °.
In the above-described configuration, first side of plate glass side and second side are according to surface texture, mainly are that the different boundary lines that form of surface roughness are distinguished, if the microscope with 50 times of amplifications is observed, just can be clearly seen that this boundary line.In common one week of the first side surrounding plate glass, with the first transparent surface adjacency, second side also is around one week of plate glass, and is adjacent with second transparent surface with first side.
Why first side and the first transparent surface angulation will be based on following reason in 90 ° ± 5 ° scope.If above-mentioned angle is less than 85 °, or greater than 95 °, then when assembling operation, just very difficult decision cloche is to the position of solid-state imager.In addition, shape according to plate glass, the side is divided into a plurality of parts along the plate glass periphery, form crest line between each adjacent side, at this moment, the crest line portion of first side, promptly near the bight of first transparent surface, be easy to generate problems such as minute crack and small skew, when particularly carrying with assembling operation, the probability that produces these problems is bigger.So, may be after the solid-state imager assembling, product strength generation problem causes the obstacle in the use.
Why second side and the first side angulation will be based on following reason below 8 °.If greater than 8 °, also we can say if second side and the first transparent surface angulation less than 77 °, greater than 103 °, then when the conveyance cloche, and the adjustment of loading distance between its article such as the plastic pallet very difficulty that just becomes in case be provided with improperly, is vibrated when conveyance and external stress such as impact, the crest line of the cloche lateral edge and second side, promptly near the second transparent surface bight, just be easy to generate problems such as minute crack and small skew.In addition, after being equipped on solid-state imager, aspect mechanical strength property, also be easy to generate above-mentioned same problem.
Which kind of processing method no matter first side of side and second side as long as possess above-mentioned condition, adopt can.First side and second side by the side surface configurations at plate glass has the different surfaces proterties can effectively reduce the probability of problems such as plate glass side generation minute crack and small skew when making Cloche for solid camera element.To since caused chipss of glass such as minute crack and small skew adhere at the secondary of transparent surface, and the crest line of side, i.e. the minute crack that takes place of plate glass bight etc., these cause the low problem of plate glass intensity effectively to solve.
Situation with above these formations is all confirmed by engineering sample inspection and pressure accelerated test etc. when manufacturing operation; more satisfactory is to have the following composition that will talk about and the plate glass of characteristic; it is in a series of links such as the processing of manufacturing operation, cleaning, conveyance, inspection; the side is the crest line of side particularly; the bight that is plate glass seldom goes wrong, and the cloche of protection solid-state imager has also embodied very strong ability to bear in the tests such as shock test after assembling.
The transparent surface that has maximum area in the Cloche for solid camera element has penetrating visible rays, correctly passes on the function of image information, so its surface must be very smooth.The side also is so, even there is fine crack etc. on its surface, the intensity of plate glass is significantly descended.In addition, be also noted that the surface of plate glass also must be very clean, the obstacle when adhering to dirt and stain and all can become visible rays and see through, or cause the decline of mechanical strength.
This Cloche for solid camera element is in order to realize more stable grade, adopted following more satisfactory structure: the Ra value of the first side surface rugosity is 0.1～5.0nm, the Rmax value is 1.0～15nm, the Ra value of the second side surface rugosity is 0.1～3.0nm, the Rmax value is 0.5～12nm, first side and the first transparent surface angulation are in 90 ° ± 3 ° scope, and second side and the first side angulation are below 5 °.
Determine precision by the job management frequency that increases the processing operation, the position of improving when riving operation, and improve improvement in a series of operations such as homogeneity of processed raw material glass plate, can realize the stable manufacture process state, thereby make the surface roughness of first side and second side reach higher grade.Can also effectively suppress the generation of chips of glass.At this moment surface roughness can reach better state: the Ra value of the first side surface rugosity is 0.3～1.2nm, and the Rmax value is 2.0～12.0nm, and the Ra value of the second side surface rugosity is 0.3～1.0nm, and the Rmax value is 1.5～10.0nm.
This Cloche for solid camera element with above formation, its longitudinal size can be 2～50mm, lateral dimension can be 2～50mm, thickness of slab 0.1～1mm, and transparent surface is mirror-like.In addition, foreign matter and bubble etc. be can't see in glass inside, along plate thickness direction to see through the tone that light forms be colourless.
In above formation, first lateralarea shared ratio { first lateralarea/(first lateralarea+second lateralarea) } in whole lateralarea is preferably 0.1～0.3.
This Cloche for solid camera element, its side comprise first side and second side that surface texture is different, and this angle from manufacturing operation considers it also is necessary.Common first side is processed to form by the crack, and second side is processed to form by riving.If first lateralarea shared ratio in whole lateralarea then adds and is easy to generate inclination man-hour carrying out riving of second side less than 0.1.In addition, because the surface roughness (Ra value, Rmax value) of first side is greater than second side, so its area is preferably relatively littler, ratio shared in whole lateralarea is 0.3 to the maximum.If surpass 0.3, when conveyance, be easy to generate problems such as inclination.In order to reach higher grade, 0.27 more better with being defined as on this ratio, be decided to be 0.25 the most satisfactory.
Shape according to plate glass, the side is divided into a plurality of parts (each side) along the border direction, and this moment, above-mentioned area ratio was represented the first side gross area (summation of first lateralarea of each side) shared ratio in whole side gross area (summation that is divided into each lateralarea of a plurality of parts along the border).For example, when plate glass slightly was square, its side was divided into 4 parts (having 4 sides) along the border direction, and above-mentioned area ratio is represented the first lateralarea summation shared ratio in 4 lateralarea summations of 4 sides.When calculating each side respectively in whole lateralarea during shared ratio, the area ratio of each side can be different, also can have the area ratio of part side to exceed above-mentioned scope.But preferably the area ratio of each side all in above-mentioned scope.In addition, as required, 2 relative sides in 4 sides can have area identical ratio.
In the above-described configuration, plate glass slightly is square, all there is own corresponding side on its 4 limits, in all sides, ask boundary line from first side and second side to first transparent surface, the mean value of distance on the slab-thickness direction, and to establish this mean value be Za, then from the boundary line of first side and second side to first transparent surface, on the slab-thickness direction, satisfy-0.2≤(Z-Za)/Za≤0.2 this relation apart from Z.This moment each side above-mentioned ratio (Z-Za)/Za} can be identical, also can be different.In addition, 2 relative sides in 4 sides can have identical above-mentioned ratio.
From the boundary line of first side and second side to first transparent surface, on the slab-thickness direction apart from Z, all be certain in each side usually.When two adjacent sides above-mentioned apart from Z not simultaneously, then the crest line place of above-mentioned boundary line between two sides in these two sides is just discontinuous.So, this crest line is just by border between the border between two first sides, two second sides and the border between first side and second side, and the border of totally three kinds of proterties is formed.The inventors of this device are by test of many times and investigation, find that boundary line is discontinuous at the crest line place, can cause minute crack and small skew, when above-mentioned ratio (Z-Za)/Za} is not in the scope-0.2～0.2 time, the probability that produces this problem obviously increases.
Why this minute crack and small skew become problem especially, are that take some countermeasures just cumbersome this moment again because it occurs in the forming of flat glass sessions afterwards mostly, and harm is big.That is to say that if having problems, can only keep high-quality product, and if go wrong in the operations such as the inspection after shaping, conveyance and assembling, can increase percent defective by screening, waste more time and expense result in greater loss when being shaped.
The inventors of this device also find, this boundary line is in the discontinuous situation in the crest line place of plate glass side, just the complicated shape of crest line itself does not form problems such as minute crack and small skew easily, because also have the border of the first different side of surface roughness and second side on the crest line, this also can cause problems such as minute crack and small skew.That is to say, in the crest line position, have between first side of similar face rugosity, what variation is the surface roughness on border can not produce between second side, but by the surface roughness that different first side of surface roughness and second side form the border, can be all bigger than the surface roughness of first side and second side.Therefore first side and second side boundary length at the crest line place should be as much as possible little.From this viewpoint, above-mentioned ratio (Z-Za)/Za} is more satisfactory in-0.2～0.2 scope.This ratio is less than-0.2, or greater than 0.2, all can carry out plate glass processing, or during operation such as conveyance and assembling, more is easy to generate the glass plate bight, i.e. the minute crack at side crest line place etc.By will (Z-Za)/value of Za} is controlled in-0.2～0.2 the scope, can satisfy Cloche for solid camera element desired high-strength characteristic when reality is used.
When adopting more stable condition, when requiring cloche to have higher grade, above-mentioned ratio (Z-Za)/Za} is preferably in-0.05～0.05 the scope.Reduce the incidence of minute crack in thus can the operation after shaping, also can improve the incidence that adds the minute crack in man-hour simultaneously.
More satisfactory situation is the crest line place between two adjacent sides, and first side in one of them side and the boundary line end of second side with first side in the another side and the boundary line end of second side, are substantial same point.If can make the crest line place not have the existence of minute crack again, meeting is more better.
Here said " being substantial same point ", except referring to first side in the side and the boundary line end of second side, with first side in the another side and the boundary line end of second side, outside the crest line place is this formation of same point fully, also comprise the situation when distance between two line ends is less than plate glass thickness 3%, this distance is preferably in below 1%.
Distance between above-mentioned two line ends was greater than 3% o'clock of plate glass thickness, and first side and second side that surface roughness is different are long at the boundary line at crest line place, can cause the generation of the problems such as the obvious increase of surface roughness at crest line place.Not only add and to produce minute crack man-hour, when conveyance and assembling operation, also same problem can take place.So in the grade requirement strictness, and need guarantee stabilized quality the time, the distance between above-mentioned two line ends is preferably less than 1% of plate glass thickness.
For example utilize the situation of the side of laser cutting device processing plate glass, in order to obtain above-mentioned crest line structure, should be when first side surface part of each the plate glass longitudinal direction of processing the profile that slightly is square and transverse direction, the relative moving speed of accurate management laser beam, control this velocity variations set point ± 5% in, the output of laser beam is changed also preferably being controlled at simultaneously ± 5% in.
The minute crack of indication in " the crest line place does not have minute crack " is meant the surface roughness that surpasses place, crack face from the length of the origin-to-destination in crack, i.e. the situation more than 10 times of crest line surface roughness Ra value.The size in crack yes greatly great defective, even but undersized crack according to the direction at place, crack, also forms small skew easily and causes some problems, influence optical characteristics, for example the fine chips of glass of Sheng Chenging can transparent surface attached to plate glass on.So, can not despise undersized crack, still, with reference to the desired quality of Cloche for solid camera element, if being influenced negligible atomic gap, those all to manage, can improve manufacturing cost and management cost, just improving product cost, is unpractical.Comprehensive these factors according to the minute crack at above-mentioned standard control crest line place, just can be guaranteed the quality of Cloche for solid camera element, can also effectively control cost.
Plate glass according to above-mentioned standard control crest line place minute crack can satisfy the high-grade requirement of Cloche for solid camera element fully, in operations such as the later inspection of processing operation, conveyance, assembling, also can keep high-strength characteristic.
In addition, this Cloche for solid camera element is distinguished all more than 95% the straight line internal transmission coefficient of wavelength 500nm and wavelength 600nm visible rays, and is more satisfactory.
Here " straight line internal transmission coefficient ", refer to line transmission light from a side transparent surface incident plate glass, see through plate glass inside, when the opposite side transparent surface penetrates, remove the spectral-transmission favtor after the reflection loss, the ratio of expression quantity of light emission and incident light quantity.The mensuration of transmission coefficient to the performance whether Cloche for solid camera element of judging document image can meet the demands, is very important.This straight line internal transmission coefficient is in case less than 95%, just be difficult to use as Cloche for solid camera element.
The material of this Cloche for solid camera element is formed and is represented with quality %, preferably contains 50～70% SiO
2, 2～20% Al
2O
3, 4～30% RO (RO=MgO+CaO+ZnO+SrO+BaO).
SiO
2It is the main key composition that constitutes this Cloche for solid camera element, if the amount of this composition is less than 50%, then solid-state imager is when using, during especially for the such former purposes that does not draw attention of portable information terminals such as mobile phone, the problem that the weather resistance aspect can occur can't be satisfactory.In order to realize stable weather resistance, SiO
2Content be preferably in more than 53%.But, if SiO
2Content surpass 70%, then dissolve the frit difficulty that becomes, in order to overcome this problem, need the higher dissolution equipment of setting up expenses again, cause manufacturing cost, the rising of product cost just is unpractical.
Al
2O
3Be the composition that helps to improve the glass weather resistance, the addition of this composition is less than 2%, and effect is just not obvious.If but Al
2O
3Addition greater than 20%, then the initial stage dissolubility of this composition worsens when glass dissolves, and can influence the manufacturing of homogenous product.The result can cause Cloche for solid camera element when reality is used, and optics and mechanical properties are easy to generate problem.In order to realize stable dissolubility, Al
2O
3The upper limit of addition is advisable with 16%.
RO (RO=MgO+CaO+ZnO+SrO+BaO) is by add the oxide of alkali earth metal Mg, Ca, Zn, Sr, Ba in glass, improve the composition of glass weather resistance, and, improve the dissolubility of glass by reducing the viscosity of glass, effectively improve homogenizing of product.The addition of RO is less than 4%, and above-mentioned effect is difficult to embody fully, otherwise, the addition of RO easily forms crystalline deposit greater than 30% during dissolving, devitrification inclination increases, transmission coefficient to glass brings baneful influence, causes the glass homogenieity low, also can reduce glass intensity sometimes.
In the alkaline-earth oxide that adds, the quality % of the addition of CaO is preferably 0.1～25%.This is that its addition is less than 0.1% because the effect of CaO is the weather resistance that improves glass, and then additive effect is not obvious.In order to realize stable additive effect, addition is preferably in more than 0.4%.If but the addition of CaO is too much, can cause the decline of weather resistance on the contrary, so its addition on be defined as 25% better.Addition surpasses 25%, can go wrong aspect resistance to water.In order to realize stable additive effect, the upper limit of addition is preferably 23%.
ZnO is in order to suppress B
2O
3With the composition that alkali metal component volatilizees in melten glass, its addition does not have effect 0.03% when following, and in order to realize obvious effects, addition need be more than 0.07%.But the addition of ZnO is too much, can cause weather resistance poor, and its upper limit is 4%, if surpass this standard, can bring baneful influence to weather resistance.In order to realize stable weather resistance, the upper limit of addition is preferably 3.7%.
This Cloche for solid camera element has above-mentioned composition, by adopting high-purity raw and perfect fusion environment, can accurately adjust U (uranium), Th (thorium), Fe (iron), Pb (lead), Ti (titanium), Ba (barium), Cl (chlorine), Sn (tin), As (arsenic), Sb (antimony), S (sulphur), Zn (zinc), P (phosphorus), Mn (manganese), the amount of Zr (zirconium), particularly near the influential Fe of the transmission coefficient the ultraviolet range (iron), Pb (lead), Ti (titanium), Cl (chlorine), Mn (manganese), can realize that with 100ppm～10ppb be the management that unit carries out, cause the U (uranium) of soft errors to producing the α line, Th (thorium) can realize that with 10ppb～0.1ppb be the management that unit carries out.
This Cloche for solid camera element, its alkali cleaning amount of carrying is preferably in below the 0.1mg according to JIS-R3502, and density is preferably in 2.8g/cm
3Below, the yang type modulus ratio is preferably in 27Gpa/gcm
-3More than, DPH (Diamond Pyramid Hardness) is preferably in 500kg/mm
2More than.
Here " the alkali cleaning amount of carrying according to JIS-R3502 below 0.1mg ", what represent is the quality of this Cloche for solid camera element aspect weather resistance, the meaning is by using the test method based on JIS (JIS R3502:1995), when measuring the alkali cleaning amount of putting forward of this Cloche for solid camera element product, its measured value is below 0.1mg.In order to obtain more stable weather resistance, the above-mentioned alkali cleaning amount of carrying is more better below 0.08mg.
Density is at 2.8g/cm
3Below, be to come into one's own because of these situations that need hold use at the volley such as resembling mobile phone, require Cloche for solid camera element the smaller the better, in portable electronic machine.
When being used for portable electronic machine, the intensity of cloche is extremely important, and yang type modulus is just represented the degree that cloche is out of shape when loading certain external force, and yang type modulus is big more, just difficult more distortion of cloche.By yang type modulus is controlled at 27Gpa/gcm than (=Young's modulus/density)
-3More than, can satisfy characteristic in light weight and on-deformable, be used for the Cloche for solid camera element of portable electronic machine.
DPH (Diamond Pyramid Hardness) is at 500kg/mm
2More than, can make the surface of cloche can not produce scar easily.Why important this characteristic is, even be because to be loaded into behind the portable electronic machine be to use under guard mode, but in assembling of the e-machine before loading and the conveyance operation, still needs to use the glass material that is difficult for the generation scar.This be because, if because the assembling and the conveyance operation of e-machine cause the minute crack on cloche surface, then in checking process to e-machine, will go wrong and be regarded as defective item because of being equipped on behind the solid-state imager image, can not come into the market to sell.But, if minute crack is to appear at some and image inspection such as side not have what direct correlation and dredged the place of revealing, then when carrying out quality testing such as image, just miss easily, and directly shipment.In this case, the in-problem solid-state imager of cloche is used for portable electronic machine, when the brute force that is subjected to landing etc. is impacted, or when being subjected to bigger bending force in the work pants pocket of packing into, will produce stronger stress to cloche, can produce problem such as isolate at the minute crack place.Therefore the DPH (Diamond Pyramid Hardness) on cloche surface is preferably in 500kg/mm
2More than.
This Cloche for solid camera element when possessing above-mentioned characteristic, preferably can also satisfy following characteristic.Aspect acid resistance, when carrying out the acid resistance evaluation test, use the powder quality slip of 0.01N nitric acid dousing processing after 60 minutes preferably less than 0.20% according to JOGIS06-1999.In addition, preferably do not have the inhomogeneity materials of influence such as texture and defect joint in the plate glass, keep the uniform properties of height.
The plate glass that adopts the present invention to make, add quantitative transition metallic element by utilizing, or make noble metal, can be used as the sheet glass of colour filter with methods such as colloidal precipitates, the windowpane that also can be used as laser diode, and be used for e-machine as the light functional part.In addition, can plate evaporating film etc. on the surface of plate glass, carry out the adjustment on the optical characteristics by the whole bag of tricks such as CVD.
As mentioned above, because the surface roughness of this Cloche for solid camera element first side is greater than the surface roughness of second side, the Ra value of the first side surface rugosity is 0.1～10nm, the Rmax value is 0.1～30nm, the Ra value of the second side surface rugosity is 0.01～5nm, the Rmax value is 0.01～20nm, first side and the first transparent surface angulation are in 90 ° ± 5 ° scope, second side and the first side angulation are below 8 °, so in the processes such as assembling operation of the manufacturing operation of plate glass and e-machine, minute crack and consequent chips of glass that plate glass side takes place be can significantly reduce, thereby the impact strength that is loaded into behind the solid-state imager and the cleannes of glass plate improved.
Because this Cloche for solid camera element first side becomes 90 ° ± 5 ° angles with transparent surface, slightly be vertical plane, so, during the assembling solid imaging apparatus, adjust the position of cloche and solid-state imager easily at the seal glass cover.
Because this Cloche for solid camera element first lateralarea shared ratio in whole lateralarea is 0.1～0.3, so can reduce Ra value, the Rmax value of side surface rugosity, also can reduce the incidence of the side minute crack that derives from according to the surface roughness situation.
Because this Cloche for solid camera element slightly is square, satisfy the relation of-0.2≤(Z-Za)/Za≤0.2, so can reduce the incidence of the plate glass intensity decreases problem that causes by crest line between each side, can produce Cloche for solid camera element with stabilised quality.
Because the crest line place between adjacent two sides of this Cloche for solid camera element, first side in one of them side and the boundary line end of second side, with first side in the another side and the boundary line end of second side, be substantial same point, the crest line place does not have minute crack simultaneously, so after the solid-state imager assembling, can not cause because of the crest line place plate glass over time intensity significantly descend, obtain stabilized quality.
Because this Cloche for solid camera element, to the straight line internal transmission coefficient of wavelength 500nm and wavelength 600nm visible rays respectively all more than 95%, so when being equipped on solid-state imager, can bring into play the effect of high-performance semiconductor element fully.
Because the composition of the used plate glass of this Cloche for solid camera element is represented with quality %, contain 50～70% SiO
2, 2～20% Al
2O
3, 0.01～30% RO (RO=MgO+CaO+ZnO+SrO+BaO) is so can satisfy kind specific character as the desired optics of cloche material, chemistry and the mechanical aspects of solid-state imager.
Because below 0.1mg, density is at 2.8g/cm for the alkali cleaning amount of carrying of this Cloche for solid camera element (according to the JIS-R3502 specification)
3Below, the yang type modulus ratio is at 27Gpa/gcm
-3More than, DPH (Diamond Pyramid Hardness) is at 500kg/mm
2More than, so surface of plate glass has as necessary high weather resistance of the cloche of solid-state imager and the long-term high-strength characteristic of using.
Description of drawings
Fig. 1 is that the oblique view of this Cloche for solid camera element (is schemed a) and part sectional drawing (figure b).
Fig. 2 is the side expanded view of this Cloche for solid camera element.
Fig. 3 is the bight expanded view of this Cloche for solid camera element.
Fig. 4 is a key diagram of making the method for thin glass plate from thick raw material glass plate.
Fig. 5 is that the thin glass plate after first processing carries out second key diagram that adds the processing method in man-hour.
Fig. 6 is the microphotograph to the amplification of this Cloche for solid camera element part side.
Symbol description
10: Cloche for solid camera element
11a: first transparent surface
11b: second transparent surface
12: the side
12a (12a1,12a2): first side
12b (12b1,12b2): second side
13: crest line
13a (13a1,13a2): the line end of boundary line (line endpoints) on the crest line
14 (14a, 14b): boundary line
α: the transparent surface and the first side angulation
β: first side and the second side angulation
Embodiment
Followingly example of the present invention is illustrated with reference to illustration.
Fig. 1 represents the Cloche for solid camera element 10 of relevant this example.Cloche for solid camera element 10 is made up of inorganic oxide plate glass, has first relative on the plate glass thickness direction transparent surface 11a and the second transparent surface 11b, and constitutes the side 12 of plate glass periphery.Plate glass slightly is square, and side 12 is divided into 4 parts (below separated side each several part (each side) being referred to as " part side 12 ") along plate glass border direction.Each several part side 12 is by slightly forming perpendicular to the first side 12a of the first sidelight face 11a with the second side 12b that 12a is the inclination angle.The surface roughness of the first side 12a is greater than the surface roughness of the second side 12b.The first side 12a is around the whole border of plate glass, and the first side 12a of each several part side 12 directly links to each other with the first transparent surface 11a.Equally, also around the whole border of plate glass, the second side 12b's second side 12b of each several part side 12 directly links to each other with the second transparent surface 11b.
Why constituting side 12 by the first side 12a and two faces of the second side 12b, is because make only relatively difficult by the plate glass that simultaneously constitutes.That is to say,, make forming of flat glass, will damage the linearity of side, form crooked side view if only constitute whole side by first side.If only constitute whole side by second side, make forming of flat glass, will damage the surface accuracy of side greatly.Certainly, also can after shaping, correct the surface accuracy of side, but can greatly improve the manufacturing cost of plate glass, can not provide market needed low-cost cloche by mirror ultrafinish.Therefore, plate glass side is carried out the method for mirror ultrafinish, from physically being feasible, but and it is unrealistic.
Side 12 is divided into the first side 12a and the second side 12b along boundary line 14, and there is crest line 13 in 12 adjacent of 2 part sides.The line end (end points of line) of the boundary line 14 of the line end of the boundary line 14 of a part side 12 (end points of line) and another part side 12 is positioned at substantial same point 13a place on crest line 13.
Shown in Fig. 1 (b), the first side 12a becomes the α angle with the first transparent surface 11a, and this α angle is 90 ° ± 5 °.The second side 12b becomes the β angle with the first side 12a, and this β angle is below 8 °.If the β angle is below 8 °, then as shown in the figure, plate glass no matter be to the inside angle or angle laterally, all more satisfactory.
Fig. 2 represents the expansion of 1 part side 12.Lateral parts 12 is made of the first side 12a and the second side 12b, and both boundary lines 14 are almost parallel with the first transparent surface 11a.Therefore boundary line 14 to the first transparent surface 11a from part side 12 almost are certain in the thickness of slab direction apart from Z.In addition, this boundary line 14 is also almost parallel with 12b.In the plate glass of this example, the part side 12 identical with part side 12 structures shown in Figure 2 also has 3.The area ratio that the front is said, promptly { area of the first side 12a/(area of the area of the first side 12a+second side 12b) } all is 0.1～0.3 in each several part side 12.The ratio that the front is said (Z-Za)/and Za}, all be-0.2～0.2 in each several part side 12.This ratio (Z-Za)/Za} is a little bit smaller more satisfactory, if can obtain stabilized quality more in-0.05～0.05 scope especially.These ratios can be identical in 4 part sides 12, also can be different.
Crest line 13 is the summit 15a in plate glass bight and the tie line of top 15b, and above-mentioned some 13a (substantial same point) is positioned on the crest line 13.
Fig. 3 is that the expansion in plate glass bight is represented.In this example, two adjacent part sides 12 apart from Z (as shown in Figure 2) and inequality, make boundary line 14a and boundary line 14b in these 2 part sides 12, also discontinuous on crest line 13.This distance, promptly on crest line 13, line end (end points of the line) 13a1 of boundary line 14a in part side 12, and the distance between the line end of the boundary line 14b in another part side 12 (end points of the line) 13a2, be preferably in below 3% of plate glass thickness T, more better below 1%.So crest line 13 comprises the border of border, the first side 12a2 and the second side 12b1 of border, the second side 12b1 and the second side 12b2 of the first adjacent side 12a1 and the first side 12a2, is made up of 3 kinds of borders altogether.
The first side 12a1 and first border of side 12a2 on crest line 13, promptly from the summit 15a in plate glass bight to the distance the boundary line end points 13a1, in Fig. 2, be expressed as apart from Z.So, above-mentioned ratio (Z-Za)/and Za} is more little, the border of the first side 12a2 and the second side 12b1 on crest line 13, and promptly the distance between boundary line end points 13a1 and the boundary line end points 13a2 is just more little.From this viewpoint, above-mentioned ratio (Z-Za)/Za} is more satisfactory in-0.2～0.2 scope, and is more better in-0.05～0.05 scope.
Distance between boundary line end points 13a1 and the boundary line end points 13a2, more satisfactory below 3% in the plate glass thickness T more better below 1%, at this moment detects by an unaided eye, and can be considered substantial same point 13a.
The border of the first side 12a2 and the second side 12b1 on crest line 13, it is the zone between boundary line end points 13a1 and the boundary line end points 13a2, the border that comprises the face that two surface roughnesses are different, two kinds of results that surface state mixes present the wherein thicker side's of a kind of ratio the thicker surface state in surface (the first side 12a2) exactly.So this zone with crest line 13 is that starting point produces minute crack easily.By with length that should the zone in the crest line 13, promptly the distance between boundary line end points 13a1 and the boundary line end points 13a2 is controlled at below 3% of plate glass thickness T, can prevent the generation of above-mentioned minute crack, if can be more better below 1%.
By the appropriate regulation processing conditions, make the surface roughness of the first side 12a and the second side 12b approaching as far as possible, in addition, the sampling check frequency by improving machined surface etc., make the mean value of distance between the summit 15a in plate glass bight and the boundary line end points 13a1, with the difference of the mean value (Za) of distance between summit 15a and the boundary line end points 13a2, more satisfactory below ± 10%, more better below ± 8%, the most satisfactory below ± 5%.
Below to the manufacture method of above-mentioned Cloche for solid camera element, and the result of benchmark test describes.
At first, the initial operation of plate glass manufacturing is a laminal big glass plate of making a slice 300mm size, and this operation has two types, and a kind of is to extend forming process, and a kind of is only to utilize the accurate method of cutting attrition process of grinding.When utilizing the extension forming process, prepare one earlier and put into the raw material glass plate that calciner fuses, size can be wide 850mm, thick 5mm, long 3m.Then, this piece raw material glass plate 20 is put into the grindstone that has artificial leather, add on one side automatically the slurry that forms in the materials such as free whetstone grains such as cerium oxide being scattered in water, carry out attrition process on one side, till the Ra value that forms surface roughness is the minute surface of 1.1nm, clean again, dry, promptly obtain the plate glass 20 of thickness of slab 4.5 ± 0.5mm.Then, this plate glass 20 is inserted in as shown in Figure 4 the extension building mortion 30, utilize heating furnace 30a to heat, make glass viscosity remain on 105dPas, utilize again and be installed in the heat-resisting axis of rolling 30b of following extraction-type, take out of to the speed of moving into speed with 10 times, promptly form thin glass plate 40, the both sides of this thin glass plate 40 are shaped by line.So just formed the lamellar big glass plate of a slice 300mm.
Utilize precision to grind to cut and grind abrasive method and add man-hour, the uniform glass that will fuse in calciner is used the casting method moulding earlier, for example according to the size of 800 * 300 * 300mm, use fret saw (adopting free whetstone grain) that it is cut off then, obtain the thin glass plate of thickness of slab 1.5.Then, this thin glass plate inserted in the spin finishing processing machine of talking about previously carry out attrition process, obtain lamellar big glass plate.Big glass sheet size scope by above two kinds of method manufacturings can be: vertical 50～600mm, and horizontal 50～600mm, thickness of slab 0.1～50mm can change as required.
Then need carry out fine cut to lamellar big glass plate, two kinds of processing methods are arranged, a kind of is to adopt the laser scribing that has laser cutting device, and a kind of is to utilize the heating projection roller bearing that has the heating ceramic powder.Utilize laser scribing to add man-hour, at first use the hot working laser cutting device, on the one side of thin glass plate, carry out first cutting processing according to the chessboard trellis, depth of cut is 20% of a sheet thickness, the laser beam translational speed is 180 ± 5mm/sec or 220 ± 5mm/sec, and laser output power is 120 ± 5W or 160 ± 5W.Then as shown in Figure 5, opposite side at first machined surface 15 of thin glass plate 17, wire head with metal material moves along the M direction, simultaneously first machined surface, the 15 usefulness anchor clamps of thin glass plate 17 is pushed down, and makes first machined surface 15 of thin glass plate 17 be subjected to the stress pressure break.So, can be by the second processing cutting operation, obtain along first be processed to form give the rectangular glass sheet that alignment is cut apart.Utilize vacuum tweezer respectively the rectangular glass sheet that obtains to be phoresied to subsequent processing again.Then, rectangular glass sheet is carried out pressure break processing once more, obtain final solid-state imager glass plate.
Utilization has the processing method of the heating projection roller bearing of heating ceramic powder, be in the development phase now, its roughly process be such, tip end surface is paid the sharp keen roller bearing blade edge heating of ceramic powder, the limit tightly is pressed in glass pane surface and moves, make the glass pane surface heating, utilize the blade (employing Peltier's element) of cooling in advance afterwards at once, the glass surface that exposes along the crack head of glass pane surface, this both direction of direction that moves with laser imposes the tension force of the continuous action of vertical direction to glass pane surface, it can be cut off, need not to resemble and use cooling water the laser cutting, processing effect with use laser scribing similar.
No matter adopt above-mentioned which kind of processing method, all can obtain having side shown in Figure 6 outward appearance, the plate glass of thickness of slab 0.1mm～1mm.Fig. 6 is actually near the photo in bight, side of Cloche for solid camera element, and the side is to be made of the first first side V that is processed to form and second these 2 faces of the second side W that is processed to form afterwards.By the first first side V that is processed to form, have a kind of surface texture through the hot working treatment effect, be mirror (Mirro) face, the Ra value of its surface roughness is 0.3～2.0nm, the Rmax value is 2.0～20.0nm.The feature of this side V is, section breaks, and to carry out speed fast, present and a kind ofly utilize mechanical scribing such as scribing machine to carry out the surface state that machine cuts is handled, be that its section has little, the concavo-convex big rib-loop in space (Rib) sign, this only breaks Shi Caihui at a high speed at section and takes place, but its surface roughness is obviously different greater than the concavo-convex excessive section of 100nm greater than 50nm, Rmax value with the sort of Ra value again simultaneously.By the second second side W that is processed to form, can find the rib-loop sign that open at several curvilinear intervals on every side in the bight sometimes, and have large-scale minute surface, the Ra value of this surface roughness is 0.3～10nm, the Rmax value is 2.0～20.0nm.
Preferably can make the surface roughness of these two sides as much as possible little, and not have attachments such as foreign matter and stain by management.Can in operation, take a series of measure, for example more frequently carry out the management of machining accuracy, improve the frequency of periodic maintenance etc., the surface roughness Ra value that makes the first side V is 0.3～1.2nm, the Rmax value is 3.0～9.0nm, the surface roughness Ra value of the second side W is 0.3～1.0nm, and the Rmax value is 2.5～8.0nm.
(performance evaluation 1) then, this Cloche for solid camera element to being shaped according to the method described above carries out benchmark test.It below is concrete outcome.
At first, the frit that to concoct in advance according to the composition shown in the table 1, utilize the platinum crucible of 1000cc volume, insert in the electric calciner with agitating function, kept 20 hours with 1550 ℃ temperature, make the raw material fusing, afterwards the glass of fusion is poured in the carbon mould, make it slowly to cool off, become the suitable shape that to measure various performances.Each glass sample with gained utilizes following method to measure then.The alkali cleaning amount of carrying is measured according to JIS R3502.Be labeled as the item of ND in the table, the meaning of expression detection difficult.Density is measured according to general Archimedes's method.The Young's modulus ratio is to utilize clock to spin the non-destruction spring rate determinator (KI-11) that (strain) makes, and measures Young's modulus by the flexural resonance method, compares with density then to draw.DPH (Diamond Pyramid Hardness) is measured according to JIS Z2244-1992.Carry out the used glass sample of straight line internal transmission coefficient determination, its surface process and the identical attrition process of foregoing glass plate manufacturing operation, thickness of slab is also identical with glass plate with solid-state imager, the spectrophotometer that utilizes (strain) Hitachi to make during mensuration.
[table 1]
| Sample number | ??1 | ??2 | ??3 | ??4 | ??5 | ??6 | ??7 | ??8 |
| (quality %) SiO 2 | ??68.5 | ??54.0 | ??60.0 | ??53.5 | ??69.5 | ??68.5 | ??69.1 | ??55.4 |
| ????Al 2O 3 | ??4.1 | ??13.9 | ??14.6 | ??15.0 | ??6.4 | ??5.1 | ??5.5 | ??11.1 |
| ????B 2O 3 | ??3.1 | ??8.1 | ??10.1 | ??8.5 | ??12.3 | ??10.8 | ??10.8 | ??6.8 |
| ????CaO | ??6.5 | ??22.3 | ??5.3 | ??9.2 | ??1.5 | ??3.2 | ??0.6 | ??7.0 |
| ????SrO | ??0.3 | ??5.8 | ??1.0 | |||||
| ????BaO | ??0.5 | ??2.4 | ??5.7 | ??2.3 | ??2.6 | ??14.4 | ||
| ????ZnO | ??0.1 | ??0.1 | ??0.6 | ??0.1 | ??0.1 | ??0.9 | ??1.0 | ??3.5 |
| ????MgO | ??2.4 | ??0.1 | ??0.2 | ??6.8 | ??0.1 | |||
| ????Li 2O | ??0.1 | |||||||
| ????Na 2O | ??14.0 | ??0.2 | ??6.4 | ??11.5 | ??8.4 | |||
| ????K 2O | ??1.0 | ??0.2 | ??0.9 | ??1.3 | ??2.0 | |||
| ????As 2O 3 | ??0.1 | ??0.6 | ||||||
| ????ZrO 2 | ??0.1 | ??0.1 | ??0.3 | ??0.1 | ||||
| ????SnO 2 | ??0.1 | ??0.1 | ||||||
| ????TiO 2 | ??0.1 | |||||||
| ????Sb 2O 3 | ??0.2 | ??0.5 | ??0.1 | ??0.1 | ??0.01 |
| The alkali cleaning amount of carrying (mg) | 0.02 | 0.01 | ND | ND | 0.08 | 0.07 | 0.05 | ND |
| Density (g/cm 3) | 2.51 | 2.62 | 2.73 | 2.61 | 2.36 | 2.43 | 2.45 | 2.75 |
| Young's modulus is than (Gpa/gcm -3) | 30.2 | 32.5 | 27.1 | 31.8 | 30.0 | 28.1 | 29.4 | 27.3 |
| DPH (Diamond Pyramid Hardness) (Kg/mm 2) | 580 | 680 | 660 | 600 | 680 | 640 | 650 | 640 |
| Straight line internal transmission coefficient (%) | ||||||||
| Wavelength: 500nm wavelength: 600nm | ?99.0 ?99.2 | 98.9 99.1 | 98.7 99.1 | 99.1 99.0 | 99.2 98.8 | 99.0 99.0 | 98.9 98.8 | 99.1 98.8 |
By the result shown in the table 1 as can be known, no matter be which part sample, its alkali cleaning amount of carrying, density, Young's modulus ratio, DPH (Diamond Pyramid Hardness), straight line internal transmission coefficient all satisfy condition of the present invention.But to realize the performance of this Cloche for solid camera element, not only will satisfy these compositions and various characteristics, also will make the side have foregoing surface texture.
Then, make Cloche for solid camera element (sample A～E), the surface texture of its side is confirmed.Sample A～D (embodiment) adopts following process to form, make the raw material glass plate that satisfies above-mentioned each characteristic earlier, be processed into thin glass plate then, form first side by laser scribing (first processing) again, form second side, just fracturing work by cutting off processing (second processing).First side of sample E (Comparative Examples) side is formed by mechanical scribing, and second side forms by fracturing work.Utilize (Digital Instruments corporate system) atomic force microscope (NanoScopeIII Tapping Mode AFM) and contact pin type surface roughness to measure machine (Tayler-Hobson corporate system) then, first side of each sample side and the surface roughness of second side are measured.The result is as shown in table 2.
[table 2]
(unit: nm)
| The sample name | Embodiment | Comparative Examples | ||||||
| ????????A | ????????B | ?C | ?D | ?E | ||||
| First side | Surface roughness: Ra | 1.2 | 1.1 | 1.1 | 1.2 | 0.9 | 1.3 | 72.5 |
| Maximum surface roughness: Rmax | 7.5 | 7.8 | 10.3 | 10.5 | 8.9 | 12.6 | 132.0 | |
| Second side | Surface roughness: Ra | 0.6 | 0.6 | 0.8 | 0.6 | 0.7 | 0.9 | 7.5 |
| Maximum surface roughness: Rmax | 4.8 | 5.9 | 5.6 | 6.2 | 4.5 | 5.8 | 15.2 | |
| Determination method (1.: microscope between atomic force, 2.: contact pin type is measured) | ① | ② | ① | ② | ① | ① | ② | |
When utilizing atomic force microscope to carry out surface roughness mensuration, measure for 10 times, ask its mean value (this value is represented with the 1. hurdle in the table 2) with the mensuration progress row of 40 μ m.When utilizing contact pin type surface roughness mensuration machine to measure, measure the long 0.25mm that is, instrumentation speed is 0.0025mm/sec, filter 0.33Hz, 200,000 times of magnification ratios (this value is represented with the 2. hurdle in the table 2).Dual mode all is with probe the sample side to be scanned along parallel direction, measures.From the measurement result of table 2, Ra value, the Rmax value of first side of sample A～D (embodiment) and the second side surface rugosity all satisfy condition of the present invention, present the surface of good proterties.And the Ra value of the first side surface rugosity of sample E (Comparative Examples) has surpassed 72.5nm and 50nm, and is very coarse, even if use microscopic examination, also can obviously find out the difference with sample A～D surface texture.
After measured, sample A～D (embodiment) first side and transparent surface angulation are 88～93 °, and second side and the first side angulation are 2～7 °.So wherein any one is all satisfied this imaging apparatus necessary side of cloche form.
Make Cloche for solid camera element (sample F, G), and utilize the contact pin type surface roughness to measure machine (Tayler-Hobson corporate system) surface state of transparent surface is estimated.Add man-hour carrying out big glass plate, they have adopted above-mentioned two kinds of different processing methods respectively, and sample F adopts precision to grind and cuts attrition process, and sample G adopts and extends forming process.Adopt following condition determination, measure the long 1mm that is, instrumentation speed is 0.025mm/sec, filter 0.33Hz, 100,000 times of magnification ratios.The result is as shown in table 3.
[table 3]
| The sample name | Embodiment | ||
| ????F | ????G | ||
| Transparent surface | Surface roughness: Ra | ????0.3 | ????0.2 |
| Maximum surface roughness: Rmax | ????2.5 | ????1.8 | |
By the measurement result shown in the table 3 as can be known, the transparent surface of sample F and sample G all possesses as the due sufficient flatness of Cloche for solid camera element.
As mentioned above, this Cloche for solid camera element is when having good side surface grade, and its transparent surface also has level and smooth surface texture, can give full play to the function of Cloche for solid camera element.
(performance evaluation 2) is by implementing the evaluation test of following impact strength characteristic, to estimate the strength characteristics of this Cloche for solid camera element.In order under the state that really is equipped on mobile phone, to carry out shock test, take out solid-state imager in the lift-launch solid-state imager camera of Xiao Shouing from the market, the Cloche for solid camera element that will test, be sealed in sticker and have on screw fixed hole, the alumina substrate identical with solid-state imager weight, be screwed on the mobile phone with this alternative solid-state imager, as the testing mobile phone that is used for shock test.In order to make testing mobile phone, the nearest bight, position that distance is installed solid-state imager can become shock point, vinyl chloride tubular guide rail is installed on testing mobile phone, and this tubular guide rail tied up at length 1.2m, keeps on the vertical round metal cylindricality pillar, make the height of testing mobile phone then, drop on the oak floor of thick 3cm from 1m.
In the test, (size: 7 * 7 * 0.3mm) as embodiment to have used 30 these Cloche for solid camera element, the optical glass BK7 that has used 30 same sizes that utilize mechanical slice processing and is sealed in them on the alumina substrate respectively as a comparison case.Test method is, each test body is fallen respectively 200 times from 1 meter eminence, finish the back and take out alumina substrate, carry out visualization and utilize 20 times entity microscope observing, break to thinking to have, utilize 50 times microscopic examination again, and utilize scanning electron-microscopic observation whether minute crack is arranged.
As a result, 30 test bodies that are equipped with this Cloche for solid camera element are no abnormal, for the purpose of prudent, utilize sweep electron microscope to observe again, can not confirm to have the generation of new minute crack.And the test body that the side of those used plate glass is formed by the machinery section, just find in the investigation before test, there is thin thin banded plastically deforming area between first side of side and transparent surface, find minute crack in this part, the Ra value of its surface roughness is 105～320nm, has 2 test bodies to break because of minute crack after the test.Utilizing sweep electron microscope that these 2 test bodies are carried out the corrugated resolves, find that these 2 test bodies all are because there is minute crack in first side of plate glass side, therefore when being subjected to impact type stress, the broken face that has the rupture cross-section feature will show.In addition, the residue test body to not breaking utilizes 50 times microscopic examination, confirms wherein to have first side of 3 test body plate glass sides, has the small skew that produces because of minute crack.
By above experiment as can be known, produce the shock test of strength problem in the face of easily making original plate glass, this Cloche for solid camera element has embodied enough ability to bears, has good Practical Performance.
(performance evaluation 3) implements following this long strength characteristics comparative experiments in order to estimate the strength characteristics of this Cloche for solid camera element.This test is the combination by weather resistance test and strength test, utilizes the conveyance stroke of actual operational phase, and the strength characteristic when very Ke Ke reproduction is used for a long time is to estimate.
At first, prepare altogether 4000 blocks of plate glass that are shaped with the size of glass plate according to solid-state imager, (sample H～O) prepares 3000 (sample P～T) as a comparison case in addition again as embodiment.Result when the profile of used plate glass, surface texture and off-test, as shown in table 4.
In the table the 2nd, ratio (Z-Za)/Za} said in front, Z be the boundary line of first side in each side and second side between first transparent surface, the distance on plate thickness direction, Za is that the above-mentioned of 4 sides removes 4 arithmetic means that obtain apart from summation.Numerical value is the plate glass bight to 20 sample test bodies of various conditions in the table, and just gained result's mean value is measured in 80 positions.Distance between the line end in the 3rd, be meant on the crest line between each adjacent 2 sides the distance (distance between line endpoints 13a1 for example shown in Figure 3 and the line endpoints 13a2) between the end points (line endpoints) of the boundary line in side and the end points (line endpoints) of the boundary line in the another side.
| The sample name | Unit | Embodiment | Comparative Examples | ||||||||||||
| ????H | ??I | ??J | ????K | ??L | ??M | ??N | ??O | ??P | ??Q | ??R | ??S | ??T | |||
| Thickness of glass | ??mm | ????0.51 | ??0.52 | ??0.51 | ??0.49 | ??0.7 | ??0.71 | ??0.69 | ??0.71 | ??0.72 | ??0.52 | ??0.51 | ??0.49 | ??0.52 | |
| ????{(Z-Za)/Za}×100 | ??％ | ????3.3 | ??4.6 | ??2.4 | ??1.0 | ??1.3 | ??1.9 | ??14.9 | ??18.8 | ??27.5 | ??22.1 | ??21.2 | ??20.3 | ??3.6 | |
| The thickness of slab of distance/plate glass between line end * 100 | ??％ | ????1.4 | ??1.9 | ??1.0 | ??0.4 | ??0.6 | ??0.8 | ??7.1 | ??14.5 | ??15.6 | ??11.3 | ??10.4 | ??10.6 | ??0.8 | |
| First side and transparent surface angulation: α | ??° | ????87.8 | ??90.2 | ??90.7 | ??89.6 | ??91.1 | ??94.2 | ??92.3 | ??90.1 | ??92.3 | ??91.3 | ??88.3 | ??95.8 | ??92.1 | |
| Second side and first side angulation: the β | ??° | ????7.5 | ??3.5 | ??2.6 | ??1.1 | ??0.4 | ??3.3 | ??4.1 | ??2.1 | ??3.6 | ??4.8 | ??10.5 | ??3.6 | ??1.5 | |
| First side | Surface roughness: Ra | ??nm | ????0.8 | ??0.9 | ??1.1 | ??0.6 | ??0.5 | ?0.4 | ??3.5 | ??4.5 | ?0.8 | ??0.5 | ??0.5 | ??0.6 | ??11.1 |
| Maximum surface roughness: Rmax | ??nm | ????5.6 | ??5.8 | ??8.2 | ??7.2 | ??2.3 | ?8.8 | ??6.2 | ??9.2 | ?2.3 | ??6.2 | ??7.5 | ??8.6 | ??57.2 | |
| Second side | Surface roughness: Ra | ??nm | ????0.3 | ??0.5 | ??0.6 | ??0.4 | ??0.4 | ?2.1 | ??0.7 | ??0.5 | ?0.4 | ??0.6 | ??0.8 | ??0.5 | ??2.5 |
| Maximum surface roughness: Rmax | ??nm | ????5.6 | ??4.8 | ??4.5 | ??7.6 | ??5.1 | ?5.9 | ??6.5 | ??5.8 | ?7.6 | ??8.2 | ??7.3 | ??6.5 | ??11.2 | |
| Result of the test | The minute crack incidence | ??％ | ????0 | ??0 | ??0 | ??0 | ??0 | ??0 | ??＜0.1 | ??0.2 | ?1.8 | ??1.6 | ??1.1 | ??2.1 | ??2.3 |
| The small skew incidence | ??％ | ????0 | ??0 | ??0 | ??0 | ??0 | ??0 | ??＜0.1 | ??＜0.1 | ??1.5 | ??0.9 | ??2.1 | ??0.5 | ??1.3 | |
| The injurious surface mark incidence | ??％ | ???0 | ???0 | ???0 | ?0 | ???0 | ???0 | ????0 | ????0 | ??0.2 | ??0.3 | ???0.4 | ???0.3 | ???0.9 | |
| Adhere to the foreign matter incidence | ??％ | ???0 | ???0 | ???0 | ?＜0.1 | ???0 | ???0 | ????0 | ??＜0.1 | ??0.5 | ??0.1 | ???0.2 | ???0.1 | ???1.1 |
To as a comparison case, sample P, sample Q, sample R and sample S, also be to adopt the laser scribing line processing of chapping, when forming first side, the conscious relative moving speed of longitudinal direction and transverse direction laser beam that makes changes in 25～40% scope, laser output power is changed in the scope of 90～220W, this make ratio (Z-Za)/Za} surpassed 20%, distance has surpassed 3% than (thickness of slab of distance/plate glass between line end) between line end.In addition, to sample R and sample S, the stress that the irradiating angle of conscious change laser beam and pressure break add man-hour applies direction, and results sample R second side surpasses 8 ° to the first side angulation, sample S first machined surface to the transparent surface angulation above 95 °.To sample T, use the shaping processing of machinery section carrying out first side, use pressure break processing to carry out the shaping of second side.
Then, utilize the contact pin type surface roughness to measure the surface roughness that machine (Tayler-Hobson corporate system) is measured each sample.Condition determination is, measures long 1mm, instrumentation speed 0.025mm/sec, and filter 0.33Hz amplifies 1,000,000 times.In addition, to the angle of distance, first side and second side between the line end on the crest line, use projection to measure machine, laser microscope, micrometer etc. respectively and measure.
As a result, as each sample of embodiment, the Ra value of the first side surface rugosity is in 0.1～5.0nm scope, and the Rmax value is in 1.0～15nm scope, and the Ra value of the second side surface rugosity is in 0.1～3.0nm scope, and the Rmax value is in 1.0～12nm scope.Sample P as a comparative example, sample Q, sample R and sample S, their surface roughness and embodiment are in same scope, but the first side Ra value of sample T is greater than 10nm, and the Rmax value is greater than 30nm.
Ratio (Z-Za)/Za} aspect, embodiment is below 20%.Sample P as a comparison case and sample Q, this ratio has all surpassed 20%, gets a sample detection, has surpassed 200 μ m approximately apart from summation between the line end on its crest line, and through microscopic examination, the surface roughness at crest line place is greater than first side.And in an embodiment, the line endpoints on the crest line all below 200 μ m, to the microscopic examination of crest line place, does not have Comparative Examples coarse surface state like that apart from summation yet.Embodiment sample H, sample J, sample K, sample L and sample M, their ratio (Z-Za)/Za} is below 5%, gets a sample detection, between the line end on its crest line apart from summation approximately less than 40 μ m.In the line end spacing from aspect (thickness of slab of distance/plate glass between line end), embodiment is between 1.0% to 14.5%, again through microscopic examination, those ratios are at the sample H below 3.0%, sample I, sample J, sample K, sample L and sample M, the surface roughness at their crest line places is identical with first side even littler, and those ratios are at the sample K below 1.0%, sample L and sample M, and this tendency is more obvious.Sample T as a comparison case, ratio (Z-Za)/Za} is little, but because the surface roughness of first side is big, so the crest line place is also comparatively coarse accordingly.
Then, to have each embodiment and comparative sample through last profile grade, in the plastic pallet that the shipment of all packing into is used, putting temperature together into remains on 80 ℃, humidity and remains in 80% the high temperature and humidity test device, after spending 1000 hours, one reinstate the corrugated board packing again, utilize automobile carrier, (more than the about 450km of one way) comes and goes 10 times between big Jinshi City of Shiga Prefecture and Prefectura de Kanagawa Teng Ze city, implements to amount to the above driving vibration test of 9000km.Like this, behind hot and humid environment, with the form of packing, the very harsh vibration test in the conveyance process has been implemented in combination to plate glass again in long preservation.After the off-test,, implement entity microscope observing, the observation of 50 power microscopes and scan-type microscopic examination to underproof embodiment and Comparative Examples.
As a result, to embodiment sample H～M, no matter adopt entity microscope observing, still 50 power microscopes are observed, and all do not find minute crack and small skew.Having found minute crack and small skew on sample N and sample O, but further investigation reveals that, is to have adhered to metallic foreign body when being loaded on plastic pallet, has therefore produced crack and inclination, irrelevant with plate glass itself.In addition, finding to adhere to foreign matter at the surface of plate glass of sample K and sample O, by analysis, also is because the dirty place of plastic pallet causes, and is not glass foreign.Therefore can think, do not find among the embodiment because of plate glass cause unusual.
The situation of Comparative Examples is just different, and sample P～T has found minute crack and small skew.Sample P particularly, when determining the position that minute crack takes place, find, incidence is 9 one-tenth of 3.5% minute crack, all is because be positioned at the plate glass bight, and first side on the crest line and the position of the second side boundary line (zone between line end) existing problems cause.In addition, 7 one-tenth tilt problem of sample P, also all be owing on the crest line between line end the zone reason cause.Side beyond the bight of sample S, the probability that minute crack takes place is also bigger, further investigation reveals that, has 4 one-tenth to be to occur near first side and boundary, second side of bight with lateral surface.
Sample T as a comparative example has 1000 and has participated in detection, wherein has the side of 23 test bodies to confirm to have occurred the preceding undiscovered minute crack of test, and incidence is 2.3%.Wherein having 6, is because the glass dust that the inclination of first side produces causes.In addition, also have the side of 13 test bodies, found to adhere to foreign matter by what glass stripping composition constituted, incidence is 1.3%.Also have 2 test bodies, owing to accompany glass dust between plastic pallet and plate glass, glass pane surface has produced scar in the conveyance way.
According to following evaluation result as can be known, this Cloche for solid camera element weather resistance is good, and the plate glass side processing mode is suitable, has the superperformance that strength problem can not take place in processes such as conveyance, can keep stable grade.
As mentioned above, this Cloche for solid camera element can significantly reduce because of the minute crack of the plate glass side of generations such as plate glass manufacturing operation and e-machine assembling operation and the chips of glass that small skew is caused, improve the impact strength be equipped on behind the solid-state imager and the cleannes of plate glass, so, can effectively be used in the solid-state imager by giving full play to the performance that it meets the design of high-performance solid imaging apparatus.
This Cloche for solid camera element is being sealed in solid-state imager, when carrying out assembling operation, the adjustment of position aligns than being easier between cloche and solid-state imager, so can high accuracy, carry out the assembling of solid-state imager rapidly, the high performance solid-state imager of stable production is very helpful.
This Cloche for solid camera element can effectively reduce the surface roughness Ra value of plate glass side, maximum surface roughness Ra value, can reduce the incidence of the minute crack of the plate glass side that exists with ... surface textures such as surface roughness, so enlarged the scope of utilizing of solid-state imager more, can arouse new needs of consumer and purposes.
This Cloche for solid camera element can reduce the probability that plate glass intensity decreases problem that the crest line because of plate glass side causes produces, can realize having the production of the Cloche for solid camera element of stable grade, so can simplify the operations of utilizing in the Cloche for solid camera element operation such as inspection, in a large number cheap the and high-quality solid-state imager of production prices.
After this Cloche for solid camera element is assembled as solid-state imager, can not make the intensity of plate glass significantly descend in time because of the side crest line, realizing stable grade, thus can require in the high-intensity field in portable type etc., as the cloche that is equipped on solid-state imager.
Those protected assemblies such as semi-conductive cloche in the past; because intensity is more weak can't to be adopted; and this Cloche for solid camera element can be brought into play the performance of high-performance semiconductor element when being equipped on solid-state imager fully, and this just makes the present invention can be to more various application expansion.
This Cloche for solid camera element satisfies the kind specific character as the desired optics of the material of this cloche, chemistry and mechanical aspects, not only can be used for carrying purposes, and can extensively be used in the solid-state imager as the electro part carrying of various e-machines.
This Cloche for solid camera element is aspect the weather resistance of surface of plate glass, the long-term strength characteristics of using, can bring into play the necessary high-performance of cloche of solid-state imager, so can be for the information transmission aspect that utilizes solid-state imager, all further developing of optical communication industry are made very big contribution.
Claims (7)
1, a kind of Cloche for solid camera element, form by inorganic oxide plate glass, comprise with the lower part: be in the plate glass thickness direction, first transparent surface that the position is relative and second transparent surface, and the side that constitutes the plate glass periphery, wherein the side is divided first side adjacent with first transparent surface again, second side adjacent with second transparent surface with first side, it is characterized in that: the surface roughness of first side is greater than the surface roughness of second side, the Ra value of the first side surface rugosity is 0.1～10nm, the Rmax value is 0.1～30nm, the Ra value of the second side surface rugosity is 0.01～5nm, the Rmax value is 0.01～20nm, first side and the first transparent surface angulation are in 90 ° ± 5 ° scope, and second side and the first side angulation are below 8 °.
2, Cloche for solid camera element as claimed in claim 1 is characterized in that: first side shared ratio in whole side is 0.1～0.3.
3, Cloche for solid camera element as claimed in claim 1 or 2, it is characterized in that: plate glass slightly is square, all there is own corresponding side on its 4 limits, in all sides, ask boundary line from first side and second side to first transparent surface, the mean value of distance on the slab-thickness direction, and to establish this mean value be Za, then from the boundary line of first side and second side to first transparent surface, on the slab-thickness direction, satisfy-0.2≤(Z-Za)/Za≤0.2 this relation apart from Z.
4, Cloche for solid camera element as claimed in claim 3, it is characterized in that: crest line place in adjacent two sides, first side of one of them side and the boundary line head of second side are actually same point with first side of another side and the boundary line head of second side.
5, as each described Cloche for solid camera element of claim 1 to 4, it is characterized in that: the straight line internal transmission coefficient of the straight line internal transmission coefficient of the visible rays of wavelength 500nm and the visible rays of wavelength 600nm is respectively all more than 95%.
6, accessory rights requires each described Cloche for solid camera element of 1 to 5, and it is characterized in that: % represents with quality, contains 50～70% SiO
2, 2～20% Al
2O
3, 4～30% RO.
7, as each described Cloche for solid camera element of claim 1 to 6, it is characterized in that: according to JIS-R3502, the alkali cleaning amount of carrying is below 0.1mg, and density is at 2.8g/cm
3Below, the yang type modulus ratio is at 27Gpa/gcm
-3More than, DPH (Diamond Pyramid Hardness) is at 500kg/mm
2More than.
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| Application Number | Priority Date | Filing Date | Title |
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| JP2002331949 | 2002-11-15 | ||
| JP2002331949 | 2002-11-15 | ||
| JP2002377509 | 2002-12-26 | ||
| JP2002377509 | 2002-12-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB031052800A Expired - Lifetime CN1275460C (en) | 2002-11-15 | 2003-02-26 | Cloche for solid camera element |
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| KR (1) | KR100904002B1 (en) |
| CN (1) | CN1275460C (en) |
| TW (1) | TWI314135B (en) |
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| CN104520249A (en) * | 2012-05-31 | 2015-04-15 | 康宁股份有限公司 | Cover glass article |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR19980036778A (en) * | 1996-11-19 | 1998-08-05 | 김광호 | CCD chip package structure |
| DE10016628A1 (en) | 2000-04-04 | 2001-10-18 | Schott Glas | Process for the production of small thin glass panes and larger thin glass panes as a semi-finished product for this manufacture |
| JP4143797B2 (en) | 2000-08-03 | 2008-09-03 | 日本電気硝子株式会社 | Solid-state image sensor package manufacturing method and solid-state image sensor package |
| JP2002323752A (en) | 2001-04-24 | 2002-11-08 | Asahi Glass Co Ltd | Pellicle |
-
2003
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104520249A (en) * | 2012-05-31 | 2015-04-15 | 康宁股份有限公司 | Cover glass article |
| US9512029B2 (en) | 2012-05-31 | 2016-12-06 | Corning Incorporated | Cover glass article |
| CN104520249B (en) * | 2012-05-31 | 2017-09-08 | 康宁股份有限公司 | Cover-plate glass product |
| US10051753B2 (en) | 2012-05-31 | 2018-08-14 | Corning Incorporated | Cover glass article |
| US10575422B2 (en) | 2012-05-31 | 2020-02-25 | Corning Incorporated | Cover glass article |
| US11297726B2 (en) | 2012-05-31 | 2022-04-05 | Corning Incorporated | Cover glass article |
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| KR100904002B1 (en) | 2009-06-22 |
| CN1275460C (en) | 2006-09-13 |
| KR20040042771A (en) | 2004-05-20 |
| TW200407270A (en) | 2004-05-16 |
| TWI314135B (en) | 2009-09-01 |
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| CX01 | Expiry of patent term |