TWI314135B - Cover glass for solid-state image pickup device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a protective glass for a solid-state photographic element composed of flat glass, which is mounted on the front side of a kit containing a solid-state photographic element, and can protect the solid-state photographic element. Used as a light transmission hole. [Prior Art] In front of the solid-state imaging element, in order to protect the element, a cover glass having a flat transparent surface is disposed. The cover glass is sealed with a ceramic material such as alumina, a metal material or a plastic material with various adhesives to protect the solid-state photographic elements inside the kit, and has a function as a light-transmitting hole such as visible light. As a solid-state imaging element in the kit, optical semiconductors that are often used today include a CCD (Charge Coupled Device), a CMOS (Complementary Metal Oxide Semiconductor), and the like. Among them, CMOS is also called a complementary MOS semiconductor. Compared with CCD, it can be miniaturized. The power consumption can be reduced to about 5 points, and because there is a microprocessor manufacturing project, there is less equipment investment. Low manufacturing cost, etc., often used in image input devices such as mobile phones and small computers. On the other hand, CCDs and CMOSs need to correctly convert images into electronic information. Therefore, there are strict standards for stains, scars, and foreign matter adhering to the surface of the protective glass to be used, and high-quality cleanliness is required. In addition, in addition to the cleanliness of the surface, it is necessary to prevent crystal defects in the glass and the incorporation of foreign matter such as platinum, and to prevent the occurrence of soft errors in the generation of α-rays caused by trace amounts of radioactive energy components and Th. Therefore, for these various aspects, 10843pifl 4 1314135 complex problems, there are many solutions to the use of high-purity raw materials. In the case of f, the special offer 1, 2 is the countermeasure for improving the cost or weather resistance and micro-inclusion of the composition. In addition, since the solid glass and the optical glass have the same sentence-likeness, and the addition of the surface = mark and the tilt, etc., will affect the correct transmission of the image information, so it is necessary to take a countermeasure. Even in the case of the problem of the edge tilt which affects the strength of the protective glass for the solid-state photographic element, the research on the countermeasures thereof has been carried out in the manner of "3", and the inspection accuracy of the edge tilt can be improved. Further, according to the method of Patent Document 4, chamfering processing for preventing edge inclination can be efficiently performed. [Patent Document 1] Japanese Patent Application Laid-Open No. Hei No. Hei No. Hei No. Hei No. 6-211539 (Patent Document 3)

Fig.) Japanese Patent Special Kaiping 12 side (page 2, page 4, top [patent document 4J Lit Kaiping 6 rhyme 469 (page 2 _ 3) has a particularly wide range; ^ state _ metamorphism + , CM〇SijUS' is a cheaper, and can be used for impact and external stress on the above-mentioned machines - all in the easy-to-equip CMOS, 'so they are protected to protect them as a translucent tooth The solid-state camera and shadow elements used are required to have a higher strength than the wire, and the shaft is required to have impact strength and weather resistance. Therefore, it is necessary to use the protective glass for these photographic elements. In addition to being cheap and light, it must also have high strength and stable weather resistance. At present, in terms of weatherability and weather resistance, as mentioned above, there has been a certain degree of solution to the roll, but in The direction of weight and strength has not yet fully reached the level used above.

The research object of the present invention is to provide a protective glass for a solid-state photographic element which is high in quality, inexpensive, and weather-resistant in terms of surface and internal defects, and which is lighter in weight and higher in strength. SUMMARY OF THE INVENTION In order to solve the above problems, the protective glass bulb for a solid-state imaging device of the present invention is composed of an inorganic oxidized flat glass, and the protective glass for the solid-state photographic element has a first light-transmissive surface which is opposite in position in the thickness direction of the flat glass and a second light transmissive surface, and a side surface constituting a periphery of the flat glass, wherein the side surface includes a first side surface adjacent to the first light transmitting surface, and a second side surface adjacent to the first side surface and the second light transmitting surface, The surface roughness of one side surface is larger than the surface roughness of the second side surface, the Ra value of the surface roughness of the first side surface is 〇·1~10 nm, the Rmax value is 0.1~30 nm, and the Ra value of the surface roughness of the second side surface is 〇. 〇1~5nm, the Rmax value is 〇.〇1~2〇nm, and the angle between the first side surface and the first light transmitting surface is 90°. ±5. In the range of the second side, the angle between the second side and the first side is 8° or less. In the above configuration, the first side surface and the second side surface on the side surface of the flat glass are formed according to the difference in surface properties and state, and the main surface roughness. l〇843pifl 6 1314135

The boundary line is zoned, and if 帛5QH can clearly communicate the material. The fiscal glass is circumferentially adjacent to the first light transmissive surface; the second side is also a circumference and is adjacent to the first side and the second light transmissive surface. The angle between the first side and the first-transmissive surface needs to be 9 〇. The ±5 circumference is based on the following reasons. If the above angle is less than 85. Or greater than %. , in the assembly work, the position of the photographic element is recorded. Further, according to the shape of the flat glass, the side surface is divided into a plurality of portions along the periphery of the flat glass, and when the ridge line is formed between the adjacent side surfaces, the ridge line portion of the first side surface, that is, the vicinity of the corner portion of the first light transmitting surface, It is prone to problems such as tiny cracks and slight tilting, especially when handling and armoring. Therefore, after the solid-state imaging device is assembled, there may be a problem in the strength of the product, which causes an obstacle in use. The angle between the second side and the first side needs to be 8. The following are based on the following reasons. If it is greater than 8°', it can be said that if the angle between the second side and the first light-transmissive surface is less than 77° or greater than 103°, the adjustment of the distance between the special-purpose items of the plastic tray loaded with it will be changed when the protective glass is transported. It is very difficult to 'improperly set up'. When it is transported, it is subject to external stress such as vibration and impact. It protects the side edges of the glass and the ridge line of the second side, that is, near the corner of the second light-transmissive surface, which is prone to micro-cracks and slight tilting. . Further, after being mounted on a solid-state imaging element, the same problem as described above is likely to occur in terms of mechanical strength characteristics. The first side surface and the second side surface ' of the side surface may be any method as long as the above conditions are satisfied. This kind of structure on the side of the flat glass has l-843pifi 7 1314135 tree surface properties and the state of the first side and the second side, which can be used to make the photographic element secret glass, effectively reducing the occurrence of tiny (four) and The slight slanting __ machine.μ and slight tilting, etc. caused by the swarf of the glass smear on the smear surface of the smear surface, that is, the tiny cracks in the corners of the flat glass, etc., which can effectively solve the problem of low strength of the flat glass. solve. Then, in the manufacturing process, the above structure is confirmed by engineering sampling inspection and forced acceleration enthalpy test, etc., and it is preferable to have a flat glass having the composition and characteristics to be described below, which is processed and cleaned in the manufacturing process. , transport, inspection, etc. - in the series, the side, especially the side ridge line, that is, the corner of the flat glass is difficult to be defective, and the protective glass for protecting the solid-state photographic element is also very good in the test of the impact test after assembly. Strong tolerance. The solid-state photographic element has a light-transmissive surface having the largest area among the protective glass. Since it has a function of transmitting visible light and correctly transmitting image information, the surface thereof must be very flat. The same is true for the side surface, and even if there are fine cracks on the surface, the strength of the flat glass is remarkably lowered. In addition, the surface of the flat glass must also be very clean. If there is adhesion or stain, it will become a barrier to visible light transmission or cause a decrease in mechanical strength. In order to achieve a more stable product λ', the protective glass for the solid-state photographic element adopts the following preferable structure: the Ra value of the first side surface roughness is 〇1 to 5. 〇nm, and the Rmax value is 10 to 15 nm. The Ra of the second side surface has a Ra value of 0.1 to 3.0 nm, an Rmax value of 0.5 to 12 nm, and the first l〇843pifl 8 I314135 = an angle with the -M plane of 9 (Γ±3. The angle between the second side and the side of the younger one is 5. Below. By increasing the frequency of the operation management of the processing process, improving the accuracy of the opening _ position determination, and improving the uniformity of the processed raw material glass plate on the f series process Improvement, stable production state can be achieved, so that the surface roughness of the surface and the second side can reach higher quality. The speed can effectively suppress the generation of glass swarf. At this time, the surface reduction can reach the ideal state: the first side Ra of surface roughness

Umn, Rmax value is 2.0 to 12.0 nm, surface roughness of the second side surface, Ra value is 〇.3~i.〇nm, and Rmax value is 】5~1〇 〇 fine. The protective glass for the solid-state imaging device of the present invention having the above configuration has a size of 2 to 50 mm, a width of 2 to 50 mm, a thickness of 11 to imm, and a mirror-like surface. Further, foreign matter, bubbles, and the like were not observed inside the glass, and the color tone formed by the transmitted light in the thickness direction of the plate was colorless. . 'In the above configuration, the ratio of the first side area to the entire side area ratio = the first side area / (the first side area + the second side area) is preferably 〇 1 to 〇. In the cover glass for a solid-state photographic element of the present invention, the side faces include the first side surface and the second side surface having different surface properties and states, which are also necessary from the viewpoint of the manufacturing process. Usually the first side is formed by cracking and the second side is formed by splitting. If the ratio of the first side area to the entire side area is less than 01, the inclination is liable to occur at the side of the split processing. In addition, since the surface roughness of the first surface (Ra value, Rmax value) is larger than the surface of the second side surface, the coarse wheel l〇843pifl 1314135^f 2 is preferably relatively small, and the whole surface is rotated by t. Α3, it is easy to produce a higher quality for the transfer, the touch is ^ ^ 0.", more preferably 0.25. The shape of the 疋 分 分 将 将 将 将 将 分 分 分 分 分 分 分 分 分 分 分 分 分 分 分 分 分 形状 形状 形状 形状 形状 形状 形状The phase product rotation indicates the first-wide area (the sum of the first side areas of each side). It is divided into a plurality of ages. When the flat glass is slightly square, its side is divided into 4's in the circumferential direction and has 4 sides. The above area ratio means four sides., one/knife (with the sum of the ratios of the sum of the four side areas. When the n product = the ratio of the side, the area ratio of each side is not the same as 'there may be The ratio of the area of the side faces exceeds ^. Preferably, the area ratio of each side is in the above range. The two sides of the four sides may have the same face in the above configuration, and the flat glass is slightly square. , from the corresponding side, in all sides, the sides of the solid side have sides The relationship between the boundary line and the first-transparent surface in the thickness direction of the flat plate to the surface of the first-transparent surface in the thickness direction of the flat plate is the relationship between the parent and the 〇_2 宁 。. (Z-Za)/Za} may be the same, or the two sides of the ratio pair of different faces may have the same ratio. The four sides are from the boundary between the first side and the second side to the first The distance z of a light-transmissive surface in the direction of the flat plate 10843pifl 10 1314135 = usually in each side. When the adjacent distances z are different, the upper=boundary line in the side is on both sides. The ridge line between the two is discontinuous. Therefore, the boundary between the two first side faces of the ridge line j and the boundary between the two side faces between the two second side faces are composed of 13 kinds of properties and state boundaries. The inventor has found that the boundary line is discontinuous at the ridge line due to repeated tests and touches, causing micro cracks and slight tilt, which occurs when the ratio {(Z_Za)/Za } is not in the range of _0.2 to 〇·2. : The probability of problems will increase significantly. This kind of tiny cracks and tiny tilts are especially problematic. Due to various defects, the probability of occurrence of the process in the process of forming the reel after the flat plate is formed is high, and the risk is large, and it is troublesome to take countermeasures. That is, if a problem occurs during the forming, it can be passed. Screening, only retaining quality products, and if there is a problem in the inspection, transportation and assembly of the work towel after forming, it will increase the non-performing rate and waste more time or cost', resulting in greater losses. It has also been found that such a boundary line is discontinuous at the ridge line on the side of the flat glass, not only the complex shape of the ridge line itself is liable to form micro cracks and tiny sag, but the graded ribs have different surface thick chain degrees. - The boundary between the side and the second side, which also causes problems such as minute cracks and slight tilting. That is to say, the surface roughness of the boundary between the first side surface and the second side surface having the same surface roughness at the ridge line position does not change, but the boundary between the first side surface and the second side surface having different surface roughness forms a boundary. The surface roughness will be larger than the first side and the second side 10843pifl 11 1314135 ^. Therefore, the first side and the second side are at the ridge line, and the length of the boundary should be reduced as much as possible. From this point of view, the above ratio -Za)/Za } is ideal in the range of 〇 2 to 〇 2 . When the ratio is small = - 〇. 2 or larger than 〇. 2', the flat glass is processed, conveyed, assembled, and the like, and the corners of the glass sheet, that is, the micro slits at the side ridges are easily generated. Therefore, by controlling the value of {(Z-Za)/Za } within the range of _〇.2 to 〇2, it is possible to satisfy the high-strength characteristics required for the protective glass for solid-state photographic elements in actual use. More stable conditions are required, and the protective glass is required to have a higher °° ’. The above ratio {(Z-Za)/Za } is preferably in the range of -〇·〇5~·〇.〇5. Thereby, the incidence of minute cracks can be reduced in the work after forming, and the incidence of micro cracks during processing can be improved. Preferably, the boundary line between the first side and the second side of the one of the side edges and the first side and the second side of the other side is at the ridge line between the two adjacent sides. The end is essentially the same as ». It would be better if there were no more tiny cracks in the ridgeline. As used herein, "substantially the same point" means, in addition to the end of the boundary line between the first side and the second side of one side and the end of the first side and the second side of the other side, The fact that the ridge line is completely the same point and the outer portion 'includes the distance between the two wire ends is smaller than the thickness of the flat glass by 3°/〇, and the distance is preferably less than 1%. When the distance between the two wire ends is greater than 3% of the thickness of the flat glass, the boundary between the first side surface and the second side surface having different surface roughness at the ridge line I〇843pifl 12 1314135 is long, which may result in a surface at the ridge line. Problems such as a significant increase in the degree of gorge. Not only will micro cracks occur during processing, but the same problem occurs in ΐ. Therefore, the quality requirements are strict, and it is necessary to ensure that the distance between the two ends (4) is preferably smaller than that of the flat glass f, for example, by using the side of the thin-cut glass. , the relative movement speed of the precise tube beam when adding the longitudinal direction of the flat glass and the first side of the horizontal direction of the flat glass, and (4) the speed change is within +5% of the set value, The output of the laser beam is preferably (4) within ±5%. There is no micro-crack at the ridge line" means that the length from the start point to the end point of the crack exceeds the surface margin of the surface (10), that is, the surface roughness of the ridge line Ra ^ A crack of 10 times or more does not exist in the ridge portion. In the case of cracks, the large size is of course a major defect, but even small-sized cracks are liable to form micro-tilts depending on the direction in which the cracks are located, causing some problems 'affecting optical characteristics, such as the generated fine glass shards may adhere. On the light transmissive surface of flat glass. However, it is not possible to despise small-sized cracks, but on the other hand, with reference to the quality required for the protective glass for solid-state photographic elements, if the management of those extremely small cracks that are negligible is managed, the manufacturing cost and the management cost are increased. That is to increase the cost of the product, so it is not practical. By combining these factors, it is possible to ensure the quality of the solid-state photographic element to protect the glass by controlling the micro-cracks at the ridge line according to the above criteria. The flat glass that controls the tiny cracks at the ridge line according to the above standard, completely 10843pifl 13 .1314135 can maintain high strength in processing, can complete the high quality requirements of the solid shadow shadow element, the inspection, transportation, assembly and other operations after the operation Medium, characteristics. First, the external _ _ photographic element with protective glass, the internal transmittance of the line for the wavelength test and the visible light line of the = _ surface are more than 95% respectively 'is satisfactory.

Here # '直助部透(四),,,, refers to the straight-through transmitted light from one side of the translucent surface of the human-shot flat glass, through the flat glass flip, from the other side of the surface when the 'material reflection loss grading The rate of incidence indicates the ratio of the amount of light incident to the amount of incident light. By measuring the transmission coefficient, it is very important to determine whether the solid-state photographic element of the image is capable of satisfying the required performance. The internal transmission coefficient of the line is less than 95%, it is difficult to use as a protective glass for solid-state photographic elements. The material composition of the protective glass for the solid-state photographic element is expressed by mass %, preferably containing 50 to 70% of Si〇2, 2 to 20% of A1203, 4 to 30% of RO (RO=Mg〇+CaO+ZnO.SrO+BaO). Si02 is the main backbone component of the protective glass for the solid-state imaging device. 'If the content of the component is less than 5%, the solid state When the photographic element is used, especially when it is used for a portable information terminal such as a mobile phone, which has not received much attention before, there is a problem of weather resistance, which cannot be satisfied by seven people. In order to achieve stable weather resistance, si〇 2 content It is better than 53%. However, if the content of SiO2 exceeds 70%, it will become difficult to dissolve the glass raw material. In order to overcome this problem, it is necessary to prepare a more expensive dissolution equipment, which leads to manufacturing cost, that is, product cost. Rising, 1〇843pifl 14 1314135 is also not practical. A1203 is a component that helps to improve the weather resistance of the glass. The addition amount of this component is less than 2%, and the effect is not obvious. However, if the addition amount of A1203 is more than 20% ' When the glass is dissolved, the initial solubility of the component is deteriorated, which affects the production of a homogeneous product. As a result, the solid-state photographic element is protected from damage. In actual use, 'optical and mechanical properties are prone to problems. To achieve stable solubility' The upper limit of the amount of A1203 added is preferably 16%. R〇(RO=MgO+CaO+ZnO+SrO+BaO) is obtained by adding soil metal elements to the glass] ^, 0, 211, 81*, ugly The oxide of 3 is used to improve the weather resistance of the glass, and the viscosity of the glass is lowered to improve the solubility of the glass, thereby effectively improving the homogenization of the product. The addition amount of R〇 is less than 4%, and the above effects are obtained. It is difficult to fully embody. On the contrary, the addition amount of R〇 is 30%. When dissolved, it tends to form crystal precipitates, and the tendency of devitrification increases, which has a bad influence on the transmission coefficient of glass, resulting in low glass homogeneity and sometimes Decrease the strength of the glass. Among the added domain oxides, the mass % of CaO added is preferably 1.25 / 〇. This is because the effect of Ca 是 is to improve the weather resistance of the glass, ^ is less than 〇 .1%' is not effective. In order to achieve stable f addition, the amount of fruit added is preferably above 〇.4%. However, if the addition of Ca = = 夕 'anti-riding leads to a decrease in tolerance, the amount of addition The upper limit of I, ', 25% is better. When the amount added exceeds 25%, there is a problem in the water resistance that '% is stable, and the upper limit of the added amount is preferably 23%. 〇 and 〇 are used to suppress the X and composition of B203 and alkali metal components in molten glass. When the addition amount is less than 3%, there is no effect. For l〇843pifl 15 1314135, the effect is obvious. G7% or more. However, if the amount of Zn〇 added is too large, the weather resistance is poor, and the upper limit is 4%. If it exceeds this standard, it will have a bad influence on weather resistance. In order to achieve stable weather resistance, the upper limit of the added amount is preferably 3 7%. The cover glass for a solid-state photographic element of the present invention has the above-described composition, and can be finely adjusted by using a high-purity raw material and a perfect molten environment, so that u (#hTh(l£), Fe(^).pb(^)> (^).BaC^)' • aa), Sn(^), As(_), Sb(^), S(^), Zn(#), P (phosphorus), Μη (manganese), Zr (鍅The content of the material, especially the effect on the transmission coefficient near the ultraviolet region (iron), pb (lead), Ti (titanium), Cl$ gas), Mn (manganese), can be achieved at 1 〇〇 ppm~ Management of 1 〇 ppb, uranium and Th (钍) which cause soft errors due to 〇: line, can be managed in units of lOppb~O.lppb. The cover glass for solid-state photographic elements of the present invention preferably has an alkali elution amount of less than im.img according to JIS-R3502, a density of preferably less than 28 g/cm3, and a Young's modulus ratio (Yan's coefficient/density). 27 Gpa/g · cm-3 or more, > The Vickers hardness is preferably 500 kg/mm2 or more. Here, the "dissolution amount is based on JIS-R3502 below 〇.img", and the quality of the protective glass for stencil solid-state photographic elements in terms of weather resistance is meaning by application according to 曰 工业 industrial specifications (JISR35〇2: 1995) When the amount of alkali elution of the protective glass product for solid-state imaging elements is measured, the measured value is 0.1 mg or less. In order to obtain more stable weather resistance, the above-mentioned alkali elution amount is preferably 〇. The density is below 2.8g/cm3, because the need to hold the use of the 10843pifl 16 I3l4l35 in the mobile phone, etc., is required to be used. in. When used in a portable electronic machine, the strength of the protective glass is very important. The % coefficient indicates the degree of deformation of the protective glass when a certain external force is applied. The larger the Young's coefficient, the more difficult it is to protect the glass. By controlling the Young's coefficient ratio (-Young's coefficient / Weng degree) to 27 Gpa/g.cm-3 or more, that is, ^

It is suitable for protective glass for solid-state photographic elements in portable electronic equipment, which is light in weight and resistant to deformation.

The hardness of Hewei's hardness is above 500kg/mm2, which makes the surface of the protective glass not easily scratched. This feature is important because even if it is used in a portable electronic _ after being used in a tilted state, it is still necessary to use a material that is not easy to cause cancer in the assembly and transport of the loaded electronic machine H. . This is because, if it is due to the assembly and moving of the electronic machine, the island is guaranteed? In the case of a micro-crack on the surface of a glass, it is not possible to enter the market because the image is defective after being mounted on a solid-state imaging device. However, if the German = do not = now side, etc. "There are no direct _ control of the bear image, ^ the place 'is easy to adjust the solid-state photography when performing the detection of the image such as the image, it will protect There is a problem with the glass, and the cow is used to carry the ▼ type electronic machine. When it is subjected to the slanting ## 1 of the landing, etc., or when it is subjected to a large bending force in the pocket of the work trousers, it is better to see the soil. Strong stresses and cracks above the tiny cracks. Therefore, the Vickers hardness of the surface of the vine glass is preferably 500 kg/mm: l 843 pifl 17 1314135 The protective glass for a solid-state photographic element of the present invention preferably satisfies the following characteristics at the same time. In the acid resistance evaluation test according to JOGIS06-1999, the powder mass reduction rate after 60 minutes of immersion treatment was preferably 0.20%. Further, the flat scented towel preferably has no texture and (four) substances which affect uniformity, and can maintain a high degree of uniformity. The flat glass produced by the present invention can be used as a thin plate of a laser diode by using a method of adding a quantitative amount of a metal element or a colloidal precipitation of a noble metal. Window, and = optical functional components in the electronic device. Further, the optical properties can be adjusted by evaporating a film or the like on the surface of the flat glass by various methods such as CVD. As described above, since the surface roughness of the first side surface of the cover glass for the solid-state photographic element of the present invention is larger than the surface roughness of the second side surface, the Ra value of the surface roughness of the first side surface is 〇·ι~i〇nm, Rmax value. The Ra value of the surface roughness of the second side surface is 〇〇1 to 5 nm, and the Rmax value is '0:01~20 nm'. The angle between the first side surface and the first light transmitting surface is 9 〇. ±5. In the range of the second side, the angle between the second side and the first side is 8. In the following, in the process of manufacturing the flat glass and assembling the electronic device, it is possible to significantly reduce the micro cracks generated on the side surface of the flat glass and the resulting glass swarf, thereby improving the impact strength after being loaded on the solid-state imaging element. And the cleanliness of the glass plate. Since the first side surface of the cover glass for the solid-state photographic element of the present invention has a 90 ± 5 angle with the light-transmissive surface and is slightly vertical, it is easy to seal the protective glass with the group 〇 843pifl 18 1314135 to fix the '% photographic element. Adjust the position of the protective glass and solid-state photographic elements. Since the ratio of the first side area of the protective glass for the solid-state imaging element of the present invention to the entire side surface area is 0.1 to 0.3, the Ra value and the Rmax value of the side surface roughness can be reduced, and the surface roughness can be lowered. And the incidence of tiny cracks on the side of the derivation. Since the protective glass for a solid-state photographic element of the present invention is slightly square and satisfies the relationship of -〇·2$ (Z-Za)/Za$0.2, the incidence of the problem of the strength reduction of the flat glass caused by the ridge lines between the side faces can be reduced. A protective glass for solid-state photographic elements having a stable quality can be produced. ~ because in the adjacent two sides of the protective glass for the solid-state multi-element of the present invention, the ridge line between them, wherein the first side and the second side of the side towel, the end of the parent line, and the other side The parent side line of the first side and the second side is substantially the same point, and there is no micro crack at the ridge line. Therefore, after the solid-state photographic member is assembled, the flat glass is not caused by the ridge line. Significantly reduced, resulting in stable quality. Since the solid-state photographic element of the present invention uses a protective glass, the linear internal transmission coefficients of the wavelength 500 leg and the wavelength _nm identifiable line are respectively 95-like, so the function of the fully high-performance semiconductor element is repaired when the _ shadow element is repaired. . Since the composition of the flat glass for protecting the glass for the solid-state photographic element of the present invention is expressed by mass%, it contains 5 〇 to 7 〇% of si 〇 2, 2 〜 2 〇 A / 203 ' 〇. 〇 1 〜 3 〇 % Since R〇(R〇, g〇+Ca0+Zn0+Sr0+Ba0), it can satisfy various optical, chemical, and mechanical properties required for the protective glass material of the 10843pifl 19 1314135 photographic element. The amount of alkali elution of the protective glass bottle for the solid-state imaging device of the present invention (according to JIS-R3502 specification) is below 〇.img, the density is below 28 g/cm3, and the Young's modulus ratio is above 27 Gpa/g.cm_3, and Wisteria. The hardness is 5 〇〇kg/mm2 or more, so that the surface of the flat glass has high weather resistance required for the glass as a solid-state photographic element and high-strength characteristics for long-term use. The above and other objects and features of the present invention are The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

Fig. 1 is a view showing a protective glass for a solid-state imaging device according to an embodiment of the present invention. The enamel photographic element 1G plate glass composition 1 has a first = smooth surface Ua and a second light transmission llb' in the thickness direction of the flat surface, and a side surface 12 constituting the periphery of the flat glass. The flat glass is slightly square. The side 12 is along the circumference of the flat glass and the knife is '4' (the side portions (each side to be separated below) are collectively referred to as "partial side from 12"). The side surface 12 of each portion is slightly perpendicular to the first side, and the surface roughness of the side surface of the surface 11a and the second side surface 12b which is inclined at an angle from the first side is greater than the surface roughness of the first side surface 12b. . The first side automatically surrounds the entire circumference of the flat glass, and the first side of each side 12 is directly connected to the first transparent surface 10843pifl 20 1314135 lla, and the second side 12b also surrounds the entire circumference of the flat glass. The second side faces 12b of the respective side faces 12 are directly connected to the second light transmitting face lib. As described above, 'the first side 12a and the second side 12b are both surfaces," and 12 is because it is difficult to manufacture a flat glass composed only of the - surface. That is to say, if the entire side surface is formed only by the first side surface, the flat glass is formed to impair the linearity of the side surface and form a curved side surface shape. If the entire side is formed only by the second side, if the flat glass is formed, the accuracy of the table Φ of the (four) surface will be greatly reduced. In the case of the job, it can also be improved by the mirror surface _ positive side _ table _ degree, but will greatly improve The manufacturing cost of flat glass cannot provide the inexpensive protective glass required by the market. Therefore, the method of mirror polishing the flat side is physically feasible, but not practical. The side surface 12 is divided along the boundary line 14 into a portion 13 between the two portions _12 adjacent to the first side surface 12a and the second side surface Ub'. The line end (the end point of the line) of the boundary line 14 of one partial side 12, and the line end (the end point of the line) of the parent boundary line 14 of the other part side 12 are located at substantially the same point 13a on the ridge line 13. . As shown in Fig. 1(b), the first side surface 12a forms an angle α with the first light transmitting surface na, and the angle α is 90 ° ± 5. . The second side face 12b forms an angle with the first side face 12a' which is 8 or less. If the $ corner is at 8. Hereinafter, as shown in the figure, the flat glass is ideal both in the inner side angle and the outer side angle. Figure 2 is an enlarged view of the one side of the side 12. The side portion 10843pifl 1314135 12 is formed by the first side, which is the same as the first light-transmissive surface, and the boundary line 14 is different from the boundary line 14: another: =::la in the thickness direction ζ is almost - the steady state of the flat glass 'The area shown in Fig. 2 / (the first value, that is, {the first side 12a on the side of each part 12 :: product: the area of the second side 12b'' «Z_Zayz:aj〃, 0.1 〇.3. The above ratio (a ZaVZa η, side * 12 is -0.2 ~ 〇.2. Within the ratio, it can be obtained ideally, especially if it can be in -0.05~0.05, it can be η ° stable The mass of the 。. These ratios in the 4 parts of the side 丄 2 can be the same 'may be different. f 夂 line 13 疋 flat crater corner of the horn with the top (5) connected to the line 'the above point i3a (substantially The same point is located on the ridge line 13: Fig. 3 is an enlarged view showing the corner portion of the flat glass. In the present embodiment, the distance z between the adjacent two side portions 12 (as shown in Fig. 2) It is not the same 'so that the boundary line 14a and the boundary line 14b in the two partial side faces 12 are not continuous on the ridge line 13. This distance is on the ridge line, one part The distance between the line end (end point of the line) 13al of the boundary line 14a in the side φ 12 and the line end (end point of the line) 13a2 of the boundary line (10) in the other part side φ 12 is preferably in the flat plate The glass thickness τ is 3 〇 /. hereinafter, more preferably 1% or less. Therefore, the ridge line 13 includes the boundary between the adjacent first side surface 12a1 and the first side surface i2a2, and the boundary between the second side surface 12b1 and the second side surface 12b2. The first side 12a2 and the side 10843pifl 22 1314135 of the second side 12bb are composed of three kinds of boundaries. The boundary between the first side 12al and the first side 12a2 on the ridgeline 13, that is, from the vertex i5a of the corner of the flat glass to The distance between the end points 13al of the boundary line is shown as distance 2 in Fig. 2. Thus, the smaller the ratio RZ_Za)/Za}, the boundary between the first side 12a2 and the second side 12Μ on the ridge line 13, i.e., the boundary The smaller the distance between the line end point 13a1 and the boundary line end point 13a2, the ratio {(ZZa)/Za丨 is preferably in the range of -0.2 to 0.2, more preferably in the range. 5~〇〇5. The distance between the end point 13al of the boundary line and the end point 13a2 of the boundary line is It is more than 3% of the thickness Τ of the flat glass, more preferably 1% or less, and it can be regarded as the substantially same point l3a by the naked eye. The boundary between the first side 12a2 and the second side 12Μ on the rib and the line 13 , the area between the end point 13al of the P乂^ line and the end point 13a2 of the boundary line, including the boundary of the surface having different surface roughness, the two surface states are mixed together, and the surface is thicker than the surface. (The first side starts from the production (four)". Therefore, it is easy to use this area of the ridge line 13 as a slit. By controlling the length of the region in the ridge line 13, i.e., the distance 3 between the intersection line & point 13al, the distance θ between the 3β/^ = of the glass thickness τ of the green slab is controlled to be less than 1%. The lower part can prevent the occurrence of the above-mentioned micro cracks, and the surface condition of the (3) is as close as possible by moderately adjusting the processing conditions, and the distance between the flat ends is determined by the second check: _ sentence (4) 5a (four) line ^ 10843pifl 23 1314135 The difference between the average values (Za) of the distance is ± 10% or less, preferably + 8% or less, more preferably ± 5% or less. Next, the method for producing the cover glass for a solid-state image sensor and the results of the performance evaluation test will be described.

First of all, the initial work of flat glass manufacturing is to make a large glass plate of 3 mm in size. There are two types of work, one is extended to open method, and the other is a method using only precision grinding and grinding. . In the case of the extension forming method, a raw glass plate which is placed in a melting furnace for melting can be prepared to have a width of 850 mm, a thickness of 5 mm, and a length of 3 m. Next, 'this raw material glass plate 2G is placed on a rotating grinder with human leather, and a bonding liquid formed by dispersing free cerium particles such as cerium oxide in a substance such as water is automatically added, and polishing is performed until formation. The surface roughness value is a mirror surface of 1.1 nm, and after washing and drying, a thick plate glass having a thickness of 4 $±〇.5 mm_ is obtained. Then, the slab glass 2 is placed in the extension molding apparatus 3 shown in Fig. 4, 'heating by means of a hot pot furnace' to maintain the glass dryness at 105 dPa·s, and then mounted underneath. The removable heat-resistant rolling shaft 3〇b is carried out at a speed of 1 () times the loading speed, that is, a thin glass plate 4' is formed, and both sides of the thin glass plate 4 are formed by scribing to form a piece of 300 mm. Thin plate-shaped large glass plate. The method of precision grinding and grinding is used to add the first glass, which is dissolved and smeared, and then formed by a washing method, for example, according to the size of the brain X fine X: and then cut with a steel ore (using free impurities). A thin glass plate with a thickness of 1.5. Next, the thin glass plate was placed in a rotary grinding machine to be grooved and polished to obtain a thin plate-shaped 10843pifi 24 1314135 large glass plate. The large glass sheets manufactured by the above two methods can be in the range of 50 to 600 mm in length, 50 to 600 mm in width, and 0.1 to 50 mm in thickness, and can be changed according to actual needs. Then, there are two methods for finely cutting the thin plate-shaped large glass plate. One is to use a laser dicing blade with a laser cutting device, and the other is to use a heated projection roller with a heated ceramic powder. When using laser dicing, 'the first use of the hot-worked laser cutting device, on the side of the thin glass plate, the first-cutting process is performed according to the checkerboard pattern. (4) The depth is 20/〇 of the thickness of the glass plate, and the speed of the beam of the beam is π. Soil 5mm/sec or 220 soil 5mm/sec, laser output power is 12〇±5W or 16〇±5W. Next, as shown in Fig. 5, 'on the opposite side of the first machined surface 15 of the thin glass plate 17, the wire-shaped machine m direction of the metal material is mixed, and the first-twisted surface 15 of the thin glass plate 17 is clamped. Pressing causes the first machined surface 15 of the thin glass sheet 17 to be stress fractured. In this way, the predetermined line-shaped rectangular glass plate formed along the first-addition can be obtained by the second processing cutting operation. Then, use the real board to transfer the rectangular board to the next smuggling process. Then, the rectangular panel was again subjected to county processing to obtain a glass plate for the solid-state imaging device. The method of adding jade with heated heating roller for heating is now in the development stage, the general process is such that the tip surface is attached with the powder of the 13⁄4 ley rolling piece - the side is tight Pressing on the glass 5' causes the surface of the glass plate to heat up, and immediately after using the pre-cooling _ ear clip element) 'the crack head along the surface of the glass plate exposes the glass surface and the direction of the laser movement, the surface of the glass plate l 843 pifl 25 I3i4135 By applying a continuous tension in the vertical direction, it can be cut off without using cooling water like a squirting cut. The processing effect is not the same as using laser dicing.

_ Regardless of the above-described processing method, a flat glass having a side appearance as shown in Fig. 6 and having a thickness of 0.1 mm to 1 mm can be obtained. Fig. 6 is actually a photograph of the vicinity of the side corner portion of the cover glass for solid-state photographic elements, and the side surface is composed of two surfaces of the first side surface V formed by the first processing and the second side surface W formed by the second processing. . The first side surface V formed by the first processing has a surface property and state subjected to a heat treatment effect, and is a mirror surface having an Ra value of 〇 3 to 2 of the surface roughness.

The Rmax value is 2.0 to 20.0 nm. The side surface V is characterized in that the speed at which the cross-section is broken is fast, and the surface of the mechanical dicing such as the seed-type machine is mechanically cut, that is, the cross-section has a thread having a small gap and a large unevenness (Rib). The mark, which occurs only when the section is broken at a high speed, but at the same time, the surface roughness is significantly different from that of the section where the Ra value is larger than 5 〇 nm and the Rmax value is larger than lOOmn. The second side W formed by the second processing sometimes has a plurality of curved and spaced apart threaded ribs around the corners and has a large mirror-mirror surface.

The Ra value is 〇.3~10nm, and the Rmax value is 2.〇~2〇 〇nm. Preferably, the surface of the two sides can be as small as possible by management, and there is no deposit such as foreign matter or stains. Moreover, the measures taken on the -series are carried out, for example, the R-value-protection T is performed more frequently, so that the surface of the first side V is succeeded.

Ra value is 〇·3~1.2 nm, Rmax value Λ 1 η λ λ ^3·〇~9·〇ηηι' 10843pifl of the second side w 26 1314135 Surface roughness Ra value is 0_3~l.Onm 'Rmax value 2 5 to 8 〇 nm 0 (Performance Evaluation 1) Then, a performance evaluation test was performed on the cover glass for solid-state photographic elements of the present invention formed by the above method. The following are the specific results. First, a glass raw material which was previously blended in accordance with the composition shown in Table 1 was placed in a remelting furnace having a stirring function by using a platinum crucible having a volume of 1,000 cc to be 1550. The temperature of (: is kept for 2 hours, the raw material is melted, and the molten glass is poured into a carbon mold, and it is slowly cooled to become an appropriate shape capable of measuring various properties. Then, each of the obtained glass samples is used in the following manner. The amount of alkali elution was measured in accordance with JIS R35〇2. The item labeled ND in the table indicates that the detection is difficult. The density is measured according to the general Archimedes method. The Young's coefficient ratio is the use of bell spinning ( Co., Ltd., non-destructive elastic modulus measuring device (KM1) 'The harmonic resonance method, the Young's coefficient' is then compared with the density. The Vickers hardness is measured according to yeah ^ 992. The surface of the polishing work used for the measurement is the same as the glass plate manufacturing operation described above. When the thickness of the plate is the same as that of the glass plate for solid-state imaging devices, the spectroscopic system manufactured by Konica Minolta Co., Ltd. Photometer. 10843pifl 27 1314135

Table 1 Sample No. 1 2 3 4 5 6 7 8 (% by mass) Si02 68.5 54.0 60.0 53.5 69.5 68.5 69.1 55.4 ai2o3 4.1 13.9 14.6 15.0 6.4 5.1 5.5 11.1 B2〇3 3.1 8.1 10.1 8.5 12.3 10.8 10.8 6.8 CaO 6.5 22.3 5.3 9.2 1.5 3.2 0.6 7.0 SrO 0.3 5.8 1.0 BaO 0.5 2.4 5.7 2.3 2.6 14.4 ZnO 0.1 0.1 0.6 0.1 0.1 0.9 1.0 3.5 MgO 2.4 0.1 0.2 6.8 0.1 L120 0.1 NazO 14.0 0.2 6.4 11.5 8.4 K20 1.0 0.2 0.9 1.3 2.0 AS2O3 0.1 0.6 Zr〇2 0.1 0.1 0.3 0.1 Sn02 0.1 0.1 Ti〇2 0.1 Sb2〇3 0.2 0.5 0.1 0.1 0.01 Alkali dissolution (mg) 0.02 0.01 ND ND 0.08 0.07 0.05 ND Density (g/cm3) 2.51 2.62 2.73 2.61 2.36 2.43 2.45 2.75 Young's modulus Ratio (Gpa/g · cm'3 ) 30.2 32.5 27.1 31.8 30.0 28.1 29.4 27.3 Vickers hardness (Kg/mm2 ) 580 680 660 600 680 640 650 640 Linear internal transmission coefficient (%) Wavelength · 500 nm Wavelength: 600 nm 99.0 99.2 98.9 99.1 98.7 99.1 99.1 99.0 99.2 98.8 99.0 99.0 98.9 98.8 99.1 98.8 β From the results shown in Table 1, it is known that the alkali dissolution amount, regardless of which sample Degrees, Young's coefficient ratio, Vickers hardness, _ a straight portion of the present transmission coefficients = f out conditions. However, it is necessary to realize the protective glass for the solid-state photographic element and the right side not only satisfies these compositions and various touches, but also makes the surface properties and states as described above. L〇843pifl 28 1314135 Next, make protective glass for solid-state photographic elements (samples A to e confirm the surface properties and state of the side surface. Sample Α~β is converted into the following raw materials, and the raw material glass plate that satisfies the characteristics of the domain first (four) Then, it is processed into a thin glass plate, and then a first side surface is formed by laser dicing (first processing), and a third side surface, that is, a fracturing operation is formed via a cutting process (second processing). Sample E (Comparative Example) The first side of the side: the surface is formed by mechanical dicing, and the second side is formed by a fracturing operation. Then, (NanoScopellll Tapping Mode AFM) and stylus type surface roughness measuring machine (Digital Instruments) are used. The surface roughness of the first = surface and the second side of each sample side was measured by Tayler-Hobsoii Co., Ltd. The results are shown in Table 2. Table 2 Sample name --~~_ v Example nm ; Comparative example A Ϊ C Γ) First side surface roughness: Ra 1.2 1.1 1.1 1.2 0.9 1.3 L· 72 5 Maximum surface roughness: Rmax 7.5 7.8 10.3 10.5 8.9 12.6 132.0 Second side surface roughness :Ra 0.6 0.6 0.8 0.6 0.7 0.9 7.5 Maximum surface roughness: Rmax 4.8 5.9 5.6 6.2 4.5 5.8 15.2 Measuring foot method (: original inter-microscope microscope: stylus type measurement) Surface coarse chain measurement using atomic force microscope In the case of measurement, the measurement was performed 10 times with a measurement length of 4 〇β m, and the average value was obtained (the value is shown in the column of Table 2). When the measurement was performed by a stylus type surface roughness measuring machine, the measurement length was 0.25 mm. The measurement speed is 0.0025 inm/sec, the filter is 10843pifl 29 1314135 〇·33ΗΖ, and the magnification is 200,000 times (the value is shown in the column in Table 2). Both methods are used to measure the side of the sample in parallel directions. From the measurement results of f2, the (6) value and the knit value of the first side and the first side surface of the sample Α to D (Example) satisfy the strip of the present invention, and 'have a good surface property f. And the state E. While the sample E (prospective) of the surface roughness of the surface roughness of more than 72.5nm and 50nm, very thick round 'even if observed with a ray mirror, can also clearly see ii} and the surface properties of the sample A ~ D The difference with the state. The angles of the first side of the products A to D (in the embodiment) and the light-transmissive surface are 88 to 93°. The angle between the second side and the first side is 2 to 7. The mouth is such that A~D has any towel. - The parts satisfy the side form necessary for the glass of the imaging element. The protective glass for the solid-state imaging device (samples F and G) was produced, and the surface state of the surface of the surface of the company was measured by a stylus type surface roughness measuring machine. When the large glass plate was processed, the sample ==IT Different processing methods, samples _ with precision parts, measuring Μ _ _ extension forming method. The following measurements are used to determine the length of the Niuchuan 为 as imm, measuring speed 〇 25mm / sec 0.33Hz, magnification 1G million times. The results are shown in Table 3. Show. 丄10843pifl 30 4, 1314135 Table 3 (unit: nm)

The measurement results of the surface:: It is known that the smoothness of the light transmission of the sample F and the sample G 、 ', and the 70 pieces of the solid image are sufficient for the protection of the glass: the table test, the evaluation of the following impact strength characteristics is carried out. Can be used in the real _ shadow, miscellaneous (four) photography yuan ^ will be with Γ Γ ^ solid-state photography 70 pieces with protective glass, sealed with a dry agent on the sheet: Second: hole, f and solid-state photographic components of the same weight of oxidation The aluminum-based impact is mounted on the mobile phone instead of the solid-state photographic element, and is used as a paste element=mobile phone. Then install the solid-state camera to install the two vinyl corners at the distance of the test phone. 'Be sure to become the test mobile phone impact point = the milky _-shaped guide rail, and the cylindrical guide rails in the home; hang 3, the main shape branch, and then make Test the phone from the lm high, Luo on a 3cm thick oak board. L〇843pifl 31 1314135 In the test, 30 protective glass (size: 7x7x0.3mm) for this solid-state photographic element was used as an example, and 30 optical glass B K7 of the same size processed by mechanical slicing were used as a comparative example. And sealed them on an alumina substrate, respectively. The test method is: each test body is dropped 200 times from two meters, and after the end, the alumina substrate is taken out, observed and observed with a 20-fold solid microscope, and 50 times of the crack is considered to be broken. Microscopic observation and observation by scanning electron microscopy is φ No micro cracks. As a result, no abnormality was observed in the three test pieces for protecting the glass for the solid-state image sensor of the present invention, and it was observed by a scanning electron microscope for the sake of caution, and the occurrence of new minute cracks could not be confirmed. In the test body formed by mechanical sectioning on the side of the flat glass used, it was found in the investigation before the test that there was a thin band-shaped plastic deformation zone between the first side of the side surface and the light-transmissive surface, and micro cracks were found in the part. The Ra value of the surface roughness is 1〇5~320nm. After the test, two test bodies are broken due to the tiny g crack. The wavefront analysis of the two test bodies by scanning electron microscopy revealed that the two test bodies were caused by tiny cracks on the side of the side of the flat glass, so they were broken with the fracture profile when subjected to the impact stress. The face will show up. Further, the remaining test piece which did not rupture was observed with a microscope of 50 times, and it was confirmed that there were three first side faces of the side faces of the flat glass, and there was a slight tilt due to minute cracks. According to the above experiment, in the face of the impact test which easily causes the strength of the original flat glass, the protective glass for the solid-state photographic element of the present invention exhibits sufficient bearing capacity and good practical performance. (Performance Evaluation 3) In order to evaluate the strength characteristics of the cover glass for solid-state imaging devices, the following long-term strength characteristic comparison experiment was carried out. This test is a combination of the weather resistance test and the strength test, and the strength of the long-term use is reproduced very strongly by the use of the conveyance stroke in the actual use stage for evaluation. f w Following the publication of the glass plate of the size of the glass plate for the night-time photographic element, as an example (sample Η ~ 〇), another 3000 pieces were prepared as the comparative example (sample ρ τ τ). The appearance, surface properties and state of the flat glass used and the results at the end of the test are shown in Table 4. The second term 'the ratio '(Z_Za) / Za in θ) has been mentioned above, the intersection of the first side and the second side of the π π plane on the =rr_ line, == 3⁄4). Line end point 13al and line end point [Table 4] l〇843pifl 33 1314135

Comparative Example Η 0.52 <5 rn 00 ο 92.1 in fH TH I- 57.2 (N 11.2 <N rn 1-H σ\ 00 00 0.49 20.3 10.6 95.8 rn Ό d 00 in d CN iT) d c5 d Pi 0.51 21.2 10.4 88.3 10.5 d 00 d rn cvi inch d (N d σ 0.52 22.1 cn 1-Η 91.3 00 inch · in o CS vd o fSJ οό VO iH ON 〇moo Oh 0.72 27.5 15.6 92.3 Ό cn 00 o cn cs inch o Ό OO CN 〇o Example Ο 0.71 18.8 14.5 90.1 (N in CN On i〇o 00 CM d <0.1 o <0.1 〇.69 14.9 Κ 92.3 — CN 卜o' <0.1 <0.1 o 〇0.71 Ο ) 00 Ο 94.2 m rn inch d 00 od CN On 〇〇oo hJ Ι> rn rn ί-Η Ό Ο 91.1 inch d in om (N inch o 〇〇oo Μ 0.49 Ο inch Ο 89.6 1-H Ό d CN inch Oo 〇o <0.1 <-ϊ 0.51 inch ri ρ 1—Η 90.7 CN (N od 〇一o 〇o 〇ΗΗ 0.52 'Ο — Ο) 90.2 in rn Os d oo o 00 ooo 〇κ 0.51 mm 87.8 ^ T) 〇〇o rn oooo Unit i _ 1 ° ° i 1 ii Sample name glass thickness {(Z-Za)/Za}xl00 {distance between line ends/plate thickness of sheet glass}><100 First side Angle with the light-transmissive surface: α Angle between the second side and the first side: /3 Surface roughness: Ra Maximum surface roughness: Rmax Surface roughness: Ra Maximum surface roughness: Rmax Small crack incidence Micro-inclination rate Surface flaw incidence Adhesive foreign matter The first side of the first side of the test results ε ε & £ inch 801 1314135, the sample preparation sample correction 5 〇 0 block as the implementation of each 500 block and sample T1_ block as a comparison. . ^ , σσ Η ~ 0, Laser dicing is used to process the tortoise line on the side of the flat glass. The laser beam moving speed is 120±5mm/sec or 15 55mm/sec' recording output power is 12 ,, and then the fracturing operation is used.

^Opening and forming, the surface of the first side and the second side of the coarse wheel, the ratio { (Z-Za) /Za}, the distance between the ends of the line (the distance between the ends of the line /, the thickness of the glass), Table 4 shows the values of the angle formed by the first side and the first side of the second side disk. ,

For the comparative example, sample p, sample Q, sample R, and sample s are also subjected to laser dicing for crack line processing, and the relative movement speeds of the longitudinal and transverse laser beams are intentionally formed when the first side is formed. Change in the range of 25~4〇% to make the laser output power change within the circumference of 90~2 shoulders. This makes the ratio { (Z_Za) /Za} exceed 2()%, and the line ratio is between the lines. The distance/plate thickness of the flat glass exceeds 3%. In addition, the angle of the beam of the sample R and the sample S' intentional beam and the direction of the stress during the cracking process are applied, and as a result, the angle of the second side of the sample R to the first order surface exceeds 8° 'sample s-processed face The angle of the light-transmissive surface exceeds 95°. For the sample T, mechanical sectioning was used to perform the first side 剌 processing, and the second side molding was performed using the fracturing processing. Then, the surface susceptibility of each sample was measured by a stylus type surface roughness measuring machine (manufactured by Tayler_H〇bs Co., Ltd.). The condition is just determined, measuring seven 1mm, measuring speed 0.025mm/sec, filter 〇 33Hz, amplification 1〇|10,000 times. In addition, the distance between the line ends on the ridge line, the angle of the first side and the angle of the second side of the 35 1314135 surface are measured using a projection measuring machine, a laser microscope, a micrometer, and the like, respectively. Results 'As a sample of the example, the first side surface has a rough degree

The Ra value is in the range of 〇.1 to 5.0 nm, and the Rmax value is in the range of ι·〇 to i5 nm. The Ra value of the rough surface of the first side surface is in the range of 0.1 to 3.0 nm, and the Rmax value is in the range of 1.0 to 12 nm. As a comparative example, sample p, sample q, sample R, and sample S, their surface roughness is in the same range as in the example, but the first side Ra of the sample T is greater than i 〇 nm, and the Rmax value is greater than 30 nm ° In terms of the ratio { (Z-Za) /Za}, the examples are all below 20%. As a comparative sample of sample P and sample q, the ratio exceeds 2%. When a sample is taken, the sum of the distances between the ends of the ridge line exceeds about 2 (8) m, and the surface roughness at the ridge line is observed by a microscope. Greater than the first side. In the embodiment, the sum of the line end points on the ridge line is less than 2 〇〇 / / m, and the ridge line is observed by a microscope, and there is no surface state as rough as the comparative example. Example sample H, sample j, sample κ, sample L and sample enamel, their ratio { (z_Za) /Za} is below 5%, taking a sample to detect 'the sum of the distances between the ends of the ridge line is less than about 4〇#m. The ratio of the distance between the ends of the wire (the distance between the ends of the wires / the thickness of the flat glass), the examples are between 1.0% and 14_5%, and the samples are observed under the microscope, those samples with a ratio of 3 〇% = , sample j, sample κ, sample L, and sample M, the surface roughness at the ridge line is the same or even smaller than the first side, and those samples K, sample L, and sample M with a ratio below 1.0% are more inclined. obvious. As the sample τ of the comparative example, the ratio {(z_za) / Za} is small, 36 1314135, so the ridge line is also correspondingly smaller because the surface roughness of the first side is larger than the coarse wheel. Product, all ί人# Various examples and comparative examples. . In the plastic tray, the temperature is kept at 80 ° and then the high temperature and high humidity test is shaken. After _ small, it is packed with Wabold cardboard, using #运卡车,在,,(四), Fujisawa, Kawasaki (one way) It is approximately 45 Gkm or more). In this way, after the flat group of people ft Ti^ in the South Wennan wet environment, in a packaged form, the very harsh vibration test in the mouth. End of the experiment ‘Sakizaki’s microscopic observation, 50乜 microscopic observation and scanning microscope observation. The results of the sample η Μ ’ ' of the example were observed by a stereoscopic microscope, and no microscopic cracks and slight tilting were observed by a microscope observation of 50 times. Minor cracks and slight tilts were found on the sample rafts and sample rafts, but it was found that the metal foreign matter was added to the reduction and the cracks and inclinations, which were independent of the flat glass itself. In addition, the adhesion of foreign matter found on the surface of the flat glass of sample K and sample enamel was also caused by contamination of the plastic tray, not glass foreign matter. Therefore, it can be considered that no abnormality due to the flat glass was found in the examples. The case of the comparative example was different, and samples P~ Ding found tiny cracks and slight tilts. In particular, the sample p, when determining the position where the microcrack occurred, found that 90% of the micro cracks having a rate of 3.5% were due to the boundary between the first side and the second side of the ridge line at the corner of the flat glass. 1314135 'Set (the area between the ends of the line) is caused by a problem. In addition, the problem of the inclination of the sample p of 70% is also caused by the area between the ends of the rib line. On the side surface other than the corner portion of the sample S, the probability of occurrence of minute cracks was also large. As a result of investigation, it was found that 40% occurred in the vicinity of the boundary between the first side surface and the second side surface on the side surface other than the corner portion. A total of 1000 samples of the sample T as a comparative example participated in the test, and the side of 23 test bodies confirmed that the incidence of micro-cracks not found before the test was 2.3%. There are six of them, which are caused by the broken glass produced by the inclination of the first side. In addition, there were 13 sides of the test piece, and a foreign matter adhering to the glass-dissolving component was found, and the incidence was 13.3%. There are also two test bodies, because the glass powder is sandwiched between the plastic tray and the flat glass. The surface of the broken board has been scratched during transportation. According to the results of the following evaluations, the protective glass for solid-state imaging devices has good weather resistance, and the flat glass side processing method is appropriate, and has excellent performance without causing a problem of strength during transportation or the like, and can maintain a stable quality. [Effects of the Invention] As described above, the protective glass for a solid-state image sensor of the present invention can remarkably reduce glass swarf caused by minute cracks and minute inclination of the side surface of the flat glass caused by the flat glass manufacturing operation and the electronic device assembly work. The impact strength of the solid-state imaging device and the cleanliness of the flat glass can be effectively utilized in solid-state imaging devices by fully utilizing the performance of high-performance solid-state imaging devices. When the protective glass for a solid-state photographic element of the present invention is sealed and sealed for solid-state photography, the position of the position between the protective glass and the solid-state photographic element is relatively good, so that the solid state can be accurately and quickly performed. The assembly of photographic elements, for the stable production of high-performance photographic components; The protective glass for a solid-state photographic element of the present invention can effectively reduce the surface roughness _Ra value and the maximum surface thickness of the flat glass side surface, and can reduce the occurrence of micro cracks depending on the surface of the surface material and the state of the flat glass side of the surface material table. The rate has increased the scope of use of solid-state photographic components, which can evoke new needs and uses of consumers. The cover glass for a solid-state photographic element of the present invention can reduce the occurrence of the flat plate _ strength drop caused by the ridge line of the flat glass side 2, and the production of the solid-state photographic element protective glass having stable quality can be achieved. Simplified use of protective glass for solid-state photographic components: inspection process, which can mass produce inexpensive and high-quality solid-state photography elements. The solid-state photographic element of the invention is assembled after solid-state photography. Because the side lining makes the flat severance (four degrees) decrease with time = the quality of 敎 can be achieved, it can be used as a protective glass for carrying the _ shadow element in the required height of the lining type. When the protective glass for the solid-state imaging device of the present invention is mounted on a pneumatic element, the performance of the high-performance semiconductor component can be fully utilized if the strength is relatively high. The invention can be extended to a wider variety of applications. The protective glass for a solid-state photographic element of the present invention satisfies the optical, chemical, and mechanical properties required for the material of the protective 39 1314135 glass, = can only be used for carrying purposes, and can be widely used as an electronic component of various devices. Mounted in solid-state photography components. After the shooting, the solid-state photography is based on the surface of the flat surface, and the strength characteristics of the long-term use can be used to protect the solid state. The present invention has been disclosed in a preferred embodiment as described above, and is not limited to any one skilled in the art, and does not deviate from the essence of the present invention. More movements, no decoration, so the protection of the present invention, the track circumference s in the details of the full-time _ defined. [Flat Description] (4) The f 1 diagram is a (a) oblique view and a (b) partial sectional view of the cover glass for a solid-state image sensor of the present invention. Figure 2 is a side view of the secret glass of the solid image element of the present invention. Fig. 3 is a perspective view of the corner of the solid-state photographic element glass of the present invention. FIG. 4 is a thin glass plate made of a thick raw material glass plate. Explanation of the method of the garden 0 Fig. 5 is an explanatory view of the method of processing the thin glass sheet after the processing. Fig. 6 is an enlarged micrograph of the surface of the protective glass portion 1314135 of the solid-state photographic element of the invention. [Description of main component symbols] ίο: Protective glass for solid-state imaging elements 11a: First light-transmissive surface lib: Second light-transmissive surface 12: Side surface 12a' 12al, 12a2: First side surface 12b, 12b, 12b2: Second side surface 13 : ridge lines 13a, 13al, 13a2: line ends (line end points) of the boundary line on the ridge line 14, 14a, 14b: boundary line α: angle formed by the light transmitting surface and the first side surface /3: first side and first Angle formed by the two sides 41

Claims (1)

1314135 VII. Patent application scope: ι A protective glass for solid-state photographic components. The solid-state photographic component is composed of inorganic oxidized flat glass and has a first position in the thickness direction of the flat glass. a smooth surface and a second light transmissive surface ′ and a side surface constituting the periphery of the flat glass, wherein: the side surface is provided with a first side surface adjacent to the first light transmissive surface, and the first side surface and the a second side adjacent to the second light transmissive surface; The rough surface of the first side surface is larger than the surface roughness of the second side. The Ra of the first side surface roughness is 01~1〇nm, the Rmax value is 0.1~30nm, and the second side surface is rough. The value of the degree is 〇.〇1 〜5nm 'the Rmax value is 〇.〇1 〜2〇nm; and the first side is at an angle of 9〇 to the first light transmitting surface. ±5. The second side is at an angle of 8 to the first side. the following. 2. The solid-state photographic element according to the invention of claim 2, characterized in that the ratio of the first side to the entire side is, for example, 0·1 to 0,3 〇3. The solid element glass according to the item i is characterized in that the four words have a corresponding one of the respective side faces, and in all of the side faces, the boundary between the face and the second side is obtained. The average value of the distance of the first light-transmitting surface on the flat surface, and the average value is Za, the distance Z from the == boundary line to the first light-transmitting surface in the thickness direction of the flat plate satisfies _G. 2S(z_Za)/Za^ 2 is further related to 4. The solid element imaging protection 1314135 broken glass according to item 2 of the patent application scope is characterized in that the flat glass is slightly square, and each of its four sides has its own Corresponding to each of the side faces, a mean value from the boundary line between the first side surface and the second side surface to the distance of the first light transmitting surface in the thickness direction of the flat plate is determined and The average value is Za, and the boundary line between the first side surface and the second side surface is thicker to the first light transmitting surface. The distance Z in the direction of the degree satisfies the relationship of -〇.2g(Z-Za)/ZaS0.2. 5. The cover glass for a solid-state photographic element according to claim 3, characterized in that at a ridge line of two adjacent sides, a boundary line between the first side and the second side of one of the sides The head is substantially identical to the head of the boundary between the first side and the second side of the other side. 6. The cover glass for a solid-state photographic element according to claim 4, wherein a boundary between the first side and the second side of one of the side faces is at a ridge line of two adjacent side faces. The line head is substantially the same point as the head line of the first side and the second side of the other side. The protective glass for a solid-state photographic element according to any one of the items 1 to 6, which is characterized by a linear internal transmission coefficient of a visible light having a wavelength of 5 〇〇 nm and a wavelength of 6 The linear internal transmission coefficients of the visible light of 〇〇nm are all above 95%. The protective glass for a solid-state photographic element according to any one of the items 1 to 6, which is characterized by a mass %, containing 50 to 70% of SiO 2 and 2 to 20% of A 1203 4 to 30% of R 〇 (RO = MgO + CaO + ZnO + SrO + BaO). 43 1314135 9. The cover glass for solid-state photographic elements according to claim 7, wherein the protective glass is characterized by mass%, containing 50 to 70% of Si〇2, 2 to 20% of A1203, 4-30%. The protective glass for a solid-state photographic element according to any one of the items 1 to 6 of the present invention, characterized in that JIS_R35〇2, the alkali elution amount is below 0.1 mg, the density is 2.8 g/cm3 or less, the Young's modulus φ ratio is 27 GPa/g.cm_3 or more, and the Vickers hardness is 500 kg/mm2 or more. 11. The protective glass for solid-state photographic elements according to claim 7 is characterized in that the alkali elution amount is below 0.1 mg according to JIS-R3502, the density is below 2.8 g/cm3, and the Young's coefficient ratio is at 27 Gpa. /g.cm-3 or more 'William hardness is 500kg/mm2 or more. 12. The cover glass for solid-state photographic elements according to claim 8 is characterized in that, according to JIS-R3502, the amount of alkali elution is below 〇.img, and the degree is below 2-8 g/cm3, and the ratio of Young's coefficient is 27 Gpa. /g.cm-3 or more 'William hardness is 500kg/mm2 or more. 1. The protective glass for solid-state photographic elements according to claim 9 is characterized in that the alkali elution amount is less than mg1 mg according to JIS_R35〇2, and the 'fee is below 2.8 g/cm3'. 27Gpa/g.cm-3 or more 'Willith hardness is 500kg/mm2 or more. 1314135 IV. Designation of representative drawings: (1) The representative representative of the case is: (1) Figure (2) The symbol of the symbol of the representative figure is simple: 10: Protective glass for solid-state photographic components lla. The first transparent surface lib: Second light transmissive surface 12: side faces 12a, 12al, 12a2: first side faces 12b, 12M, 12b2: second side faces 13: ridgelines 13a, 13al, 13a2: line ends (line end points) of the boundary line on the ridge line 14, 14a 14b: the boundary line α: the angle formed by the light-transmissive surface and the first side surface/3: the angle formed by the first side surface and the second side surface shows the chemistry of the invention. 5. If there is a chemical formula in this case, please reveal the most obvious Type: i〇S43pin 3