CN1490268A - Fibre-optical prefabricated bar processing apparatus by plasma technology - Google Patents
Fibre-optical prefabricated bar processing apparatus by plasma technology Download PDFInfo
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- CN1490268A CN1490268A CNA031573940A CN03157394A CN1490268A CN 1490268 A CN1490268 A CN 1490268A CN A031573940 A CNA031573940 A CN A031573940A CN 03157394 A CN03157394 A CN 03157394A CN 1490268 A CN1490268 A CN 1490268A
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Abstract
An equipment for preparing the prefabricated optical-fibre rod by plasma technique is composed of plasma resonance cavity, coaxial line and rectangular microwave waveguide. A microwave energy transmission converter with doorknob contact type coaxial waveguide conversion structure is also used, which features reliable contact during regulation and good heat dissipation. The water cooling and anti-leakage apparatus is also designed.
Description
Technical field
The present invention relates to a kind of preform processing units that utilizes plasma technique, relate in particular to improvement microwave energy transfer changing device in this equipment.
Background technology
In PCVD preform manufacturing system, microwave plasma system is the core key equipment that produces chemical vapour deposition.It is 2450MHz that frequency is normally adopted in the generation of microwave energy, and power is thousands of watts continuous wave magnetron.Magnetron excites microwave energy earlier in the waveguide of rectangle hollow, transfer to plasma reactor then.Plasma reactor adopts resonator cavity usually.And resonator cavity is usually with inductance or condenser coupling microwave energy.So just must connect with coaxial line.Therefore, must there be one to make the energy propagation and transformation device of microwave from the rectangular hollow waveguide pipe to coaxial line.
The pdp optical fiber prefabricated rods processing units of prior art shown in Figure 1 is open, for example in the specification sheets of CN1285008 and american documentation literature US6260510, US6372305 report is arranged all.In the prior art, the Waveguide coaxial changing device adopts the hanging type structure as shown in Figure 1, and promptly coaxial inner conductor inserts waveguide upper surface broadside middle part.Waveguide one terminal shortcircuit, and can regulate (not drawing among the figure), regulate the inner wire upper-lower position by another regulating mechanism (not drawing among the figure).Promptly regulate the coupling degree of depth of inserting resonator cavity, realize the coupling of coaxial line and resonator cavity.Because coaxial inner conductor length is certain.When regulating the insertion resonator cavity degree of depth, the degree of depth of the other end in waveguide influences coupling thereupon changing, and therefore needs the another set of setting device (not drawing among the figure) of the short circuit face of regulating.
The pdp optical fiber prefabricated rods processing units of prior art has following shortcoming: at first, regulate the cavity coupling and interact with adjusting transmodulator coupling; Secondly, because resonator cavity is worked in high temperature, resonator cavity and coaxial outer conductor all can adopt water cooling, and coaxial inner conductor is the hanging type structure, the heat radiation difficulty; The 3rd, regulate complexity, in order to improve above-mentioned two shortcomings, this patent has also increased the device (not drawing among the figure) of regulating the waveguide short face.
Summary of the invention
The object of the invention is to provide a kind of preform processing units that utilizes plasma technique, this equipment has overcome the above-mentioned shortcoming of prior art, the coupling that is coaxial inner conductor and rectangular waveguide and plasma resonant is independent of each other, be convenient to cooling and adjusting simply, serviceability is more reliable and more stable.
A kind of preform processing units of plasma technique that utilizes of the present invention comprises: a rectangle microwave waveguide, be provided with fixedly short circuit face at the one end, and the other end connects the microwave power generating unit; A plasma reactor is the coaxial shape cavity resonator structure of cylinder; A coaxial line is made up of inner wire and outer conductor; A microwave transmission body is the cover tubular and is enclosed within the coaxial inner conductor upper end, and sleeve is peripheral closely to be contacted with coaxial outer conductor; Described plasma reactor coupling is inserted together with the microwave transmission body in the inner wire upper end of described coaxial line, and described rectangular waveguide is passed in this inner wire lower end; Described coaxial outer conductor is communicated with the coaxial shape resonator cavity of the rectangular waveguide and the cylinder of plasma reactor; Described coaxial outer conductor and plasma reactor resonator cavity outside have water cooling plant; It is characterized in that: coaxial inner conductor is communicated with rectangular waveguide from outer conductor and enters rectangular waveguide, and runs through the whole wave guide tube section, passes waveguide and waveguide downside outer wall stretches out downwards; A door knob mode structure is enclosed within on the coaxial inner conductor in the rectangular waveguide, and this door knob mode structure bottom surface closely contacts with rectangular waveguide bottom tube wall, is provided with water cooled pipeline in the door knob mode inside configuration; A lifting structure is arranged on the coaxial inner conductor lower end and passes on the outer part of rectangular waveguide, with the coupling of adjusting coaxial inner conductor upper end with the coaxial shape resonator cavity of plasma reactor cylinder.
The feature of preform processing units of the present invention also is: described lifting structure is provided with a up-down counter, with the degree of coupling of metering coaxial inner conductor and plasma resonant; Described door knob mode structure is provided with a pawl profile shaft cover, and inner wire closely contacts with the door knob mode structure when guaranteeing that coaxial inner conductor moves up and down; Described coaxial outer conductor and position, rectangular waveguide junction are provided with device for preventing leakage.
The advantage of preform processing units of the present invention is to adopt the microwave energy transfer changing device of door knob contact Waveguide coaxial mapped structure in a kind of PCVD system.It is in waveguide-coaxial line transformer, coaxial inner conductor is connected with the door knob mode structure annular resilient of bottom surface in waveguide, annular resilient connects by special " claw type axle sleeve " realization, contact with the tight of door knob mode structure when guaranteeing the coaxial inner conductor up-down adjustment, and do not change the performance of Waveguide coaxial changing device; The favourable coaxial inner conductor heat radiation of contact.In addition, also design has water-cooled and device for preventing leakage, strengthens cooling and shield effectiveness.
The applied power of preform processing units of the present invention can reach 6KW, and microwave system realizes optimum matching, and reflective power is less than 4%, and promptly voltage standing wave ratio is less than 1.5, has used on production line after improving and respond well.
Description of drawings
Fig. 1 is the preform processing units structural representation of prior art;
Fig. 2 is a preform processing units embodiment of the present invention longitudinal section structural map.
In Fig. 1,1.PCVD device, 3. wave conductor (coaxial line), 4. hole, 5. resonator cavity, 7. Cylindorical rod, 9. inner cylinder wall, 11. outer cylindrical wall, 13. slits, 15. longitudinal axis, 17. microwave transmission bodies, 19. resonator surfaces, 21. resonator surfaces.
In Fig. 2,1. coaxial inner conductor, 2. coaxial outer conductor, 3. coaxial line (wave conductor), 4. waveguide, 5. waveguide-coaxial changing device, 6. water cooled pipeline, 7. pawl profile shaft cover, 8. door knob mode structure, 9. lifting structure, 10. fixing short circuit face, 11. microwave transmission bodies (high-frequency insulation material), 12. resonator cavity, 13. up-down counter, 14. device for preventing leakage, 15. water cooled pipelines.
Embodiment
Below in conjunction with specific embodiment the present invention is explained in detail.
As shown in Figure 2, preform processing units embodiment of the present invention is made up of several sections: the coaxial shape resonator cavity 12 of cylinder; The waveguide 4 of short circuit face 10; Coaxial line 3 (comprising inner wire 1 and outer conductor 2); The door knob mode structure 8 that has claw type axle sleeve 7; The lifting structure 9 and the additional unit (comprising water cooled pipeline 6,15, device for preventing leakage 14 and strut member fastening piece etc.) that have up-down counter 13.
This door knob mode structure is welded on the middle part of waveguide broadside, and the waveguide model is BJ-22 (being of a size of 109.2*54.6mm) or BJ-26 (being of a size of 86.4*43.2mm).Short circuit face position is welded on the waveguide after being determined by experiment.Because coaxial inner conductor is connected with the door knob mode structure of bottom surface in waveguide, there is special " a claw type axle sleeve " junction, contact with the tight of door knob mode structure when guaranteeing the coaxial inner conductor up-down adjustment, and do not change the performance of Waveguide coaxial changing device; The favourable coaxial inner conductor heat radiation of contact.In addition, also increase water-cooling system, strengthened cooling performance.
Waveguide coaxial changing device 5 takes door knob mode structure 8 that coaxial inner conductor 1 is connected with the bottom surface of waveguide 4.It is more effective to make it contact with claw type axle sleeve 7.The up-down adjustment of coaxial inner conductor is finished by lifting structure 9.Door knob mode structure 8 has water cooling tube 6, to guarantee the heat radiation of coaxial inner conductor 1.When the door knob mode structure design is suitable, can guarantee the matched well of waveguide-coaxial changing device, to guarantee effective power delivery.When the coupling between needs adjustment resonator cavity and the coaxial line, coaxial inner conductor 1 can be regulated with lifting structure 9, and can not influence the performance of waveguide-coaxial changing device, is more suitable for powerful transmission.
Claims (5)
1. preform processing units that utilizes plasma technique comprises:
A rectangle microwave waveguide is provided with fixedly short circuit face at the one end, and the other end connects the microwave power generating unit;
A plasma reactor is the coaxial shape cavity resonator structure of cylinder;
A coaxial line is made up of inner wire and outer conductor;
A microwave transmission body is the cover tubular and is enclosed within the coaxial inner conductor upper end, and sleeve is peripheral closely to be contacted with coaxial outer conductor;
Described plasma reactor coupling is inserted together with the microwave transmission body in the inner wire upper end of described coaxial line, and described rectangular waveguide is passed in this inner wire lower end;
Described coaxial outer conductor is communicated with the coaxial shape resonator cavity of the rectangular waveguide and the cylinder of plasma reactor;
Described coaxial outer conductor and plasma reactor resonator cavity outside have water cooling plant;
It is characterized in that:
Coaxial inner conductor is communicated with rectangular waveguide from outer conductor and enters rectangular waveguide, and runs through the whole wave guide tube section, passes waveguide and waveguide downside outer wall stretches out downwards;
A door knob mode structure is enclosed within on the coaxial inner conductor in the rectangular waveguide, and this door knob mode structure bottom surface closely contacts with rectangular waveguide bottom tube wall, is provided with water cooled pipeline in the door knob mode inside configuration;
A lifting structure is arranged on the coaxial inner conductor lower end and passes on the outer part of rectangular waveguide, with the coupling of adjusting coaxial inner conductor upper end with the coaxial shape resonator cavity of plasma reactor cylinder.
2. according to the preform processing units of claim 1, it is characterized in that described lifting structure has a up-down counter, with the degree of coupling of metering coaxial inner conductor and plasma resonant.
3. according to the preform processing units of claim 1, it is characterized in that further being provided with on the described door knob mode structure pawl profile shaft cover, inner wire closely contacts with the door knob mode structure when guaranteeing that coaxial inner conductor moves up and down.
4. according to the preform processing units of claim 1, it is characterized in that described coaxial outer conductor and position, rectangular waveguide junction are provided with device for preventing leakage.
5. according to the preform processing units of one of claim 1 to 4, it is characterized in that described rectangular waveguide tube section is of a size of 109.2 millimeters and takes advantage of 54.6 millimeters or 86.4 millimeters to take advantage of 43.2 millimeters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031573940A CN1188361C (en) | 2003-09-19 | 2003-09-19 | Fibre-optical prefabricated bar processing apparatus by plasma technology |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB031573940A CN1188361C (en) | 2003-09-19 | 2003-09-19 | Fibre-optical prefabricated bar processing apparatus by plasma technology |
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| CN1490268A true CN1490268A (en) | 2004-04-21 |
| CN1188361C CN1188361C (en) | 2005-02-09 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1333489C (en) * | 2005-03-23 | 2007-08-22 | 长飞光纤光缆有限公司 | Plasma resonant cavity tunable waveguide device |
| CN101346206B (en) * | 2005-12-23 | 2011-06-01 | 朗姆研究公司 | Plasma system |
| CN102263000A (en) * | 2011-06-24 | 2011-11-30 | 长飞光纤光缆有限公司 | Plasma microwave cavity |
| CN104090331B (en) * | 2014-06-30 | 2017-01-11 | 北京工业大学 | Efficient compact rectangular ring resonant cavity waveguide type optical filter |
| CN106410351A (en) * | 2016-12-02 | 2017-02-15 | 中国船舶重工集团公司第七二四研究所 | Detachable multipath high-power waveguide synthesizer and realization method thereof |
| CN107331929A (en) * | 2017-08-09 | 2017-11-07 | 上海至纯洁净系统科技股份有限公司 | A kind of microwave plasma system and its waveguide coaxial converter |
| CN107601846A (en) * | 2017-10-30 | 2018-01-19 | 长飞光纤光缆股份有限公司 | Optical fiber cooling apparatus for high-speed wire-drawing |
| CN110418486A (en) * | 2019-07-19 | 2019-11-05 | 武汉光盛通设备咨询有限公司 | A kind of double plasma resonator |
| CN117105521A (en) * | 2023-10-25 | 2023-11-24 | 武汉市飞瓴光电科技有限公司 | Device and method for preparing doped silicon dioxide material |
-
2003
- 2003-09-19 CN CNB031573940A patent/CN1188361C/en not_active Expired - Lifetime
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1333489C (en) * | 2005-03-23 | 2007-08-22 | 长飞光纤光缆有限公司 | Plasma resonant cavity tunable waveguide device |
| CN101346206B (en) * | 2005-12-23 | 2011-06-01 | 朗姆研究公司 | Plasma system |
| CN102263000A (en) * | 2011-06-24 | 2011-11-30 | 长飞光纤光缆有限公司 | Plasma microwave cavity |
| CN102263000B (en) * | 2011-06-24 | 2013-05-15 | 长飞光纤光缆有限公司 | Plasma microwave cavity |
| US8807078B2 (en) | 2011-06-24 | 2014-08-19 | Yangze Optical Fibre And Cable Company Ltd. | Plasma microwave resonant cavity |
| CN104090331B (en) * | 2014-06-30 | 2017-01-11 | 北京工业大学 | Efficient compact rectangular ring resonant cavity waveguide type optical filter |
| CN106410351A (en) * | 2016-12-02 | 2017-02-15 | 中国船舶重工集团公司第七二四研究所 | Detachable multipath high-power waveguide synthesizer and realization method thereof |
| CN107331929A (en) * | 2017-08-09 | 2017-11-07 | 上海至纯洁净系统科技股份有限公司 | A kind of microwave plasma system and its waveguide coaxial converter |
| CN107601846A (en) * | 2017-10-30 | 2018-01-19 | 长飞光纤光缆股份有限公司 | Optical fiber cooling apparatus for high-speed wire-drawing |
| CN107601846B (en) * | 2017-10-30 | 2020-08-11 | 长飞光纤光缆股份有限公司 | Optical fiber cooling device for high-speed wire drawing |
| CN110418486A (en) * | 2019-07-19 | 2019-11-05 | 武汉光盛通设备咨询有限公司 | A kind of double plasma resonator |
| CN117105521A (en) * | 2023-10-25 | 2023-11-24 | 武汉市飞瓴光电科技有限公司 | Device and method for preparing doped silicon dioxide material |
| CN117105521B (en) * | 2023-10-25 | 2024-01-19 | 武汉市飞瓴光电科技有限公司 | Device and method for preparing doped silicon dioxide material |
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| CN1188361C (en) | 2005-02-09 |
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