CN105979693A - High-power microwave plasma generation device - Google Patents
High-power microwave plasma generation device Download PDFInfo
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- CN105979693A CN105979693A CN201610410659.3A CN201610410659A CN105979693A CN 105979693 A CN105979693 A CN 105979693A CN 201610410659 A CN201610410659 A CN 201610410659A CN 105979693 A CN105979693 A CN 105979693A
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- microwave
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- coaxial
- torch pipe
- torch
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
Abstract
The invention provides a high-power microwave plasma generation device. The high-power microwave plasma generation device mainly consists of a microwave generator, a three-terminal circulator, a load, a three-pin tuning unit, a waveguide conversion coaxial connector and a torch tube. The position at the distance of at least one half of wavelength from the upper end face of the torch tube is selected at a microwave coupling position, the overheating problem of the coaxial microwave transmission connector under high power can be prevented, and the outer surface of the torch tube is attached with a radiating fin structure, so that the radiating problem when the torch tube works is further solved, kilowatt power can be borne, and good working condition of the plasma generation device under a high-power working condition is guaranteed.
Description
Technical field
The invention belongs to microwave plasma torch technology and ICP-AES field, be specially a kind of microwave etc. from
Daughter generating means, this device can bear multikilowatt power, can produce plasma source, and plasma source is applicable to launch
Spectrum analysis purposes.
Background technology
Plasma is partially ionized gas, and plasma source can serve as atomic emission spectrum light source, microwave plasma
It it is a class critically important in plasma source.
Traditional atomic emission spectrum microwave plasma mainly comprises electroded capacitively coupled microwave plasma
(Capacitively Coupled Microwave Plasma, CMP) and the Microwave Induced Plasma (Microwave without electrode
Induced Plasma,MIP).CMP and MIP has respective deficiency, if CMP is without centre gangway, it is difficult to sample introduction, and MIP sample
Product ability to bear is weak.
Professor Jin Qinhan is equal to having invented microwave plasma torch (MPT) for 1985, and the correspondence number of applying for a patent is CN 94205428.8,
The invention of MPT is a major progress of microwave plasma field of atomic emission spectroscopy, and it has centre gangway and sample holds
Strong by ability.MPT torch pipe has three metal tube coaxial configurations of one end open, and microwave energy passes through coaxial cable with conductance/electric capacity coupling
The mode closed enters torch pipe, and microwave forms standing wave in cavity, and plasma is formed at torch pipe opening.MPT torch pipe generally exists
Work with multiple working gas (argon, helium, nitrogen, air etc.) in the range of 10-500W, but under high-power state
(> 500W) limited power capacity of microwave transmission joint, cannot long-time stable work under high-power.
High-power MPT has bigger volume of plasma, higher plasma gas temperature, it is possible to bring plasma
The lifting of energy, expansive approach field.It is thus desirable to develop the MPT Microwave Plasma Torch Source of high-power lower work, Jin Qinhan
Deng " waveguide direct-feed-type microwave plasma torch device " (publication number: CN 103269561A) applied in May, 2013, will
Waveguiding structure and MPT structure directly in conjunction with, eliminate such as microwave coupling parts in the middle of coaxial cable, coupling ring etc. so that MPT
The range of application of MPT torch pipe can be expanded in high-power lower work, the invention provides another kind of solution and make MPT
Microwave plasma torch can be operated in multikilowatt power.
Summary of the invention
It is an object of the invention to overcome the problem of microwave transmission joint limited power capacity used by tradition MPT torch pipe, it is provided that Yi Zhong great
Power microwave plasma producing apparatus, this device by microwave generator, three end circulators, load, three pin tuners, ripple
Lead and turn coaxial fitting and torch pipe composition, microwave generator and the connection of three end circulators, three end circulators and load, three pins tunings
Device connects, and three pin tuners turn coaxial fitting and are connected waveguide and turn coaxial fitting and be connected with torch pipe with waveguide.
Microwave generator can be all solid state microwave generator or microwave magnetron generator, and the output of microwave generator needs
More than 1000W to be reached, it is therefore desirable to use the BJ26 rectangular waveguide transmission microwave of standard, microwave generator and three end ring shapes
The connection of device, three end circulators and load, the connection of three pin tuners, three pin tuners and waveguide turn the company of coaxial fitting
Connecing the BJ26 rectangular waveguide interface all using standard, what waveguide turned coaxial fitting and torch pipe is connected by L29 coaxial fitting.
Three pipe coaxial configurations of torch pipe are similar to the coaxial cable of one end open, and the top of open end three pipe is upper surface, middle pipe and interior
Pipe is metal thin-wall tubular construction, and on outer tube, the position near upper surface needs out microwave interface, and microwave interface distance upper surface is minimum
It it is 1/2nd wavelength length, it is ensured that microwave coupling joint is at a distance sufficiently large with torch pipe upper surface so that work gas during torch pipe work
Body can play preferable cooling effect, substantially reduces the heat transfer of plasma, heat radiation to coaxial microwave transfer connector
Impact, enables coaxial microwave transfer connector steady operation at a suitable temperature.
Torch pipe outer surface has air-cooled heat dissipation structure, it is ensured that the heat that torch pipe operation produces can distribute in time, maintaining member
In relatively low operating temperature, the coaxial microwave transfer connector being connected with torch pipe is protected, it is ensured that system is at normal temperature range
Interior work.
It is a further object to provide described a kind of HIGH-POWERED MICROWAVES plasma producing apparatus in spectrochemistry field
Application, the especially application in plasma process field.
For microwave source, it is desirable to have stable continuous microwave output, described microwave generator is to produce stable continuous microwave
The device of output, it can be with the microwave source or the microwave source of all solid state form that are magnetron form.Three end circulators are by microwave
The device of isolation, isolates the microwave of output with reflection, prevents microwave reflection from entering microwave generator and causes the damage of microwave source
Bad.Load is connected to the microwave reflection output port of three end circulators, is used for absorbing microwave reflection.Three pin tuners are to pass through
The regulation of manual pin controls microwave reflection power, it is ensured that just ensureing system microwave transmission during the change of plasma load standing-wave ratio
Often.It is coaxial transmission mould microwave transmission mode in rectangular waveguide being changed into and can being coupled into torch pipe that waveguide turns coaxial fitting
Formula, owing to the coupling employing of torch pipe design can bear the L29 joint of kilowatt microwave power, waveguide turns coaxial fitting
Coaxial fitting form is L29 coaxial interface.
Torch pipe is the core of the present invention, is the core component forming plasma source.It has the three coaxial knots of pipe of metal
Structure, at least one path is used for providing plasma to form gas, and electromagnetic energy enters outer tube from microwave junction by coupling loop coupling,
Torch pipe has the reflection end of metal and the middle pipe of metal, inner tube, has the spacer ring of metal material between middle pipe and inner tube.
For torch pipe, its three pipes coaxial configuration is similar to the coaxial cable of one end open, and the top of open end three pipe is upper surface,
Middle pipe and inner tube are metal thin-wall tubular constructions, and on outer tube, the position near upper surface needs out microwave interface, in microwave interface distance
End face is minimum is 1/2nd wavelength length.The inner diameter size of outer tube is generally less than 30mm.Assembling gold between middle pipe and outer tube
The reflection end face belonged to, it is to the odd-multiple that distance is 1/4th microwave wavelengths of upper surface, and reflects end face and upper surface
Distance needs the distance more than microwave interface Yu upper surface.The interior diameter of outer tube and the outer diameter dimension ratio of middle pipe are at 2-5 (preferably
About 3).The axiality of middle pipe and outer tube can be ensured by the assembling of reflection end face, in order to further ensure that axiality, also
The spacer ring of insulation can be assembled between middle pipe and outer tube.
For torch pipe, between middle pipe and inner tube, needing to add the spacer ring of metal, the distance of this spacer ring and upper surface is four/
Near the odd-multiple of one microwave wavelength, the overall diameter of middle pipe and the outer diameter dimension ratio of inner tube between 2-5 (preferably about 3).
Needing out aperture above spacer ring, to facilitate gas to pass through, the axiality of middle pipe and inner tube can be by spacer ring centering pipe and inner tube
Position limitation ensures.
For torch pipe, to normally work and must at least be passed through by working gas, working gas by outer tube and middle pipe (between logical
Entering, if as plasma spectrochemical analysis light source, sample needs to introduce from inner tube, and the interior space of inner tube is carrier gas
Passage.Space between outer tube and middle pipe can introduce shroud gas, carries out constriction for plasma or limits peripheral gas
Body enters plasma, must open a shielding gas intake to introduce shroud gas outer tube wall, and shielding gas intake is necessary
Near one end of upper surface above reflection end face.
For torch pipe, torch pipe outer surface has air-cooled heat dissipation structure, structure ensures gaseous coolant can be carried by torch pipe
Walk amount of heat.Ensureing that the heat that torch pipe operation produces can distribute in time, maintaining member is in relatively low operating temperature, right
The coaxial microwave transfer connector being connected with torch pipe is protected, it is ensured that system works in normal temperature range.
The invention provides a kind of under high-power (1000W), it is possible to make the energy coupled modes of MPT torch pipe steady operation.
Coupling position distance torch pipe upper surface (18) minimum 1/2nd wavelength location, due to microwave coupling joint (9) and torch pipe upper end
The increasing of face (18) distance, coordinate torch pipe work time working gas cooling effect, substantially reduce plasma heat transfer,
The heat radiation impact on coaxial microwave transfer connector, enables coaxial microwave transfer connector steady operation at a suitable temperature.
Additionally, the invention provides a kind of torch pipe outer surface radiator structure, it is possible to reduce the device temperature of torch pipe operation, fall
Low device aging speed, extends device service life.
A kind of use microwave energy to obtain additionally, the invention provides and maintain the microwave plasma generation device of plasma.Should
Device can use multiple gases (argon, helium, nitrogen etc.) to work, and can maintain at ambient pressure.
Additionally, the invention provides a kind of plasma source forming method for spectrochemical analysis, it can be by microwave electromagnetic
Field energy is coupled to plasma torch, persistently excites plasma to form gas and produces stable plasma.Owing to power increases
Greatly, more power is coupled into plasma, and volume of plasma can be allowed to increase, and goes molten ability higher, it is possible to reach stronger
Tolerance to aqueous aerosol.
According to the present invention, device be operated in multikilowatt high-power under, each parts in microwave transmission unit be required to bear as
This big power.The torch pipe worked under small-power before this uses the coupling position coupled modes near torch pipe upper surface,
Close to plasma source, bearing bigger heat radiation and conduction of heat heat, the heating of coaxial microwave transfer connector is serious, shadow
Ring its service life and work.Minimum 1/2 wavelength location in coupling position distance torch pipe upper surface in the present invention, due to microwave coupling
Joint and the increasing of torch pipe upper surface distance, when coordinating torch pipe work, the cooling effect of working gas, substantially reduces plasma
Heat transfer, the heat radiation impact on coaxial microwave transfer connector, enable coaxial microwave transfer connector the most steady
Fixed work.
According to the present invention, the air-cooled heat dissipation structure of torch pipe outer surface can play the effect that protection device is not affected by high temperatures, and extends
Device service life, and air-cooled heat dissipation structure is simple, it is only necessary to increase simple heat radiating fin structure at torch pipe outer surface, without it
Its infrastructure cost, compares water-cooling, and simple in construction is with low cost.
According to the present invention, the plasma that the torch pipe of high-power lower work produces has higher gas temperature, goes molten ability higher,
Can directly nebulization sampling and plasma does not affect, moreover it is possible to obtain preferable atomic emission spectrum stimulation effect.
According to the present invention, equal within 1985, having invented microwave plasma torch, (the correspondence number of applying for a patent is CN to professor Jin Qinhan
94205428.8) can only operate under small-power, present invention employs different coupling positions, coupling position distance torch pipe upper end
Identity distance from minimum be 1/2nd wavelength location, coordinate the fin on outer tube, it is possible to greatly reduce heat radiation and heat transfer to micro-
The impact of ripple joint, reduces its impact on coaxial microwave joint performance so that it is be maintained at suitable operating temperature, single unit system
It is able at high-power lower steady operation.The present invention, extending operating power when, solves the heating of microwave coaxial transfer connector
Problem so that single unit system can steady operation.
" waveguide direct-feed-type microwave plasma torch device " (publication number: CN 103269561 that Jin Qinhan etc. applied in May, 2013
A) using the mode of waveguide coupling, torch pipe is inside waveguide, and radiator structure itself cannot be added in torch pipe surface, and heat radiation is asked
Topic is relatively big, and the present invention uses torch pipe to be externally exposed, and is beneficial to heat radiation, and uses the structure of fin at torch pipe outer surface, can
To greatly reduce the operating temperature of device itself, improve device service life.
The present invention at minimum 1/2nd wavelength in chosen distance torch pipe upper surface, is possible to prevent high-power on the coupling position of microwave
The problem that lower coaxial microwave transfer connector is overheated, adds gelled structure at torch pipe outer surface, solves torch pipe work further
When making, the problem of heat radiation, can bear multikilowatt power, it is ensured that plasma producing apparatus work shape under high power work state
State is good.The feature of the present invention essentially consist in heat transfer that the change of (1) coupling position makes microwave coaxial transfer connector bear,
Heat radiation greatly reduces, and parts can normally work.(2) torch pipe outer surface has good heat dissipation characteristics, it is possible to reduction portion
Part operating temperature, improves service life.(3) metal torch pipe structure is used, sturdy durable.The present invention uses a kind of microwave
Coupled modes solve the problem that coaxial microwave transfer connector portion temperature is too high so that MPT under high-power (1000W) state
Can steady operation, by using distance plasma by the way of more distant positions couples, working gas when coordinating torch pipe work
Cooling effect, substantially reduce the heat transfer of plasma, the heat radiation impact on coaxial microwave transfer connector, make the most micro-
Ripple transfer connector can steady operation at a suitable temperature.
Accompanying drawing explanation
Fig. 1 is the HIGH-POWERED MICROWAVES plasma producing apparatus structural representation of embodiment 1.
Fig. 2 is the torch pipe structural representation used in embodiment 2.
Fig. 3 is torch pipe built-in field distribution schematic diagram in embodiment 3.
Detailed description of the invention
The present invention is further described in conjunction with the accompanying drawings and embodiments.Should be understood that be no matter summation above or under
The detailed description in face is all exemplary and explanatory and is not intended to invention required for protection.
Embodiment 1
Seeing Fig. 1, a kind of HIGH-POWERED MICROWAVES plasma producing apparatus, by microwave generator 1, three end circulators 2, loads 3,
Three pin tuners 4, waveguide turns coaxial fitting 5 and torch pipe 6 forms, and microwave generator 1 is connected with three end circulators 2, and three
End circulator 2 is connected with load 3, three pin tuners 4, and three pin tuners 4 turn coaxial fitting 5 and are connected waveguide with waveguide
Turn coaxial fitting 5 to be connected with torch pipe 6.
The output of microwave generator 1 needs to reach more than 1000W, it is therefore desirable to use the BJ26 rectangular waveguide of standard to pass
Defeated microwave, therefore microwave generator 1 and the connection of three end circulators 2, three end circulators 2 and load 3, three pin tuners 4
Connection, three pin tuners 4 and waveguide turn the connection of coaxial fitting and all use the BJ26 rectangular waveguide interface of standard, and waveguide turns
Coaxial fitting 5 and torch pipe 6 be connected by is standard L29 coaxial fitting.
Three pipe coaxial configurations of torch pipe 6 are similar to the coaxial cable of one end open, and the top of open end three pipe is upper surface 18, middle pipe
13 and inner tube 14 be metal thin-wall tubular construction, outer tube 12 needs out microwave interface 19, microwave near the position of upper surface 18
Interface 19 is minimum apart from upper surface 18 is 1/2nd wavelength length, it is ensured that microwave coupling joint 9 and torch pipe upper surface 18 distance
Sufficiently large so that torch pipe work time working gas can play preferable cooling effect, substantially reduce plasma heat transfer,
The heat radiation impact on coaxial microwave transfer connector, enables coaxial microwave transfer connector steady operation at a suitable temperature.
Torch pipe 6 outer surface has air-cooled heat dissipation structure, it is ensured that the heat that torch pipe operation produces can distribute in time, maintenance portion
The coaxial microwave transfer connector being connected with torch pipe, in relatively low operating temperature, is protected, it is ensured that system is at normal temperature model by part
Enclose interior work.
The core of microwave plasma device is microwave generator 1 and torch pipe 6, and microwave generator 1 provides maintenance plasma
The microwave energy of body continuous firing, that civilian microwave frequency is more is 915 ± 50MHz and 2450 ± 50MHz, at plasma
Required for body microwave source kilowatt about in power bracket, typically select the continuous wave high power magnetron of 2450 ± 50MHz,
Full-solid state high power microwave generator part can also be selected.
Three end circulators 2 are by the device of microwave isolation, are isolated by the microwave of output with reflection, prevent microwave reflection from entering
Enter microwave generator 1 and cause the damage of microwave source.Load 3 is connected to the microwave reflection output port of three end circulators 2, is used for
Absorb microwave reflection.Three pin tuners 4 are that manually pin regulation controls microwave reflection power, it is ensured that plasma load
The normal of system microwave transmission is ensured during standing-wave ratio change.It is by microwave transmission in rectangular waveguide that waveguide turns coaxial fitting 5
Mode change is the coaxial propagating modes that can be coupled into torch pipe 6, can bear thousand owing to the coupling of torch pipe 6 design uses
The L29 joint of watt grade microwave power, it is L29 coaxial interface that waveguide turns the coaxial fitting form of coaxial fitting 5.
Torch pipe 6 is to have the metal tube of three pipe coaxial configurations, and the coaxial cable of similar one end open, electromagnetic field is in torch pipe cavity
Form certain field structure, it is possible to be conducive to the formation of plasma.
Embodiment 2
Seeing Fig. 2, torch pipe has three pipe coaxial configurations of metal, and electromagnetic energy is coupled into by coupling ring 10 from microwave junction 9
Outer tube 12, outer tube 12 has the reflection end 7 of metal and the middle pipe 13 of metal and the inner tube 14 of metal, middle pipe 13 and inner tube
The spacer ring 11 of metal material is had between 14.
For torch pipe, three pipe coaxial configurations of torch pipe are similar to the coaxial cable of one end open, and the top of open end three pipe is upper
End face 18, the structure of torch pipe to ensure that the electromagnetic field at upper surface 18 is in stronger state.Middle pipe 13 and outer tube 12 it
Between be equipped with the reflection end face 7 of metal, its odd-multiple that distance is 1/4th microwave wavelengths with torch pipe upper surface 18, at this
Preferably 3/4ths wavelength in invention.Needing out microwave interface 19 on outer tube, according to the present invention, microwave interface 19 is opened in distance
The position of upper surface 1/18th 2 wavelength.Microwave is coupled into torch pipe, microwave junction 9 and coupling ring 10 by microwave junction 9
Being connected, coupling ring 9 is metal material, the electric conductivity having had, and coupling ring 9 is close to middle pipe, by the way of conductive coupling
Transmission microwave energy.Torch pipe defines a resonator cavity that microwave can be allowed to produce standing wave, and at upper surface 18, electric field intensity is the strongest.
Needing to add the spacer ring 11 of metal between middle pipe 13 and inner tube 14, this spacer ring is quarter-wave with the distance of upper surface 18
Long odd-multiple, according to the present invention, spacer ring 11 is placed in quarter-wave position, chosen distance upper surface 18.On spacer ring 11
Face needs out aperture, and to facilitate gas to pass through, the axiality of middle pipe 13 and inner tube 14 can pass through spacer ring 11 centering pipe 13 He
The position limitation of inner tube 14 ensures.The overall diameter of middle pipe 13 and the outer diameter dimension ratio of inner tube 14 are about 3.
Forming plasma and can not lack working gas, torch pipe has 3 road working gas, maintains gas 17, carrier gas 16 and shielding gas 8.
Maintaining gas 17 is to maintain plasma to form necessary working gas, generally argon, it is also possible to select helium, nitrogen.Maintain
Gas 17 transmits after entering torch pipe between middle pipe 13 and inner tube 14, needs by aperture reserved on spacer ring 11.At electromagnetic field
Effect under, maintain gas 17 be ionized, formed plasma 20, plasma 20 is formed at middle pipe 13 and inner tube 14 top
Space up.If as plasma spectrochemical analysis light source, sample needs to bring into by carrier gas 16 from inner tube 14,
The passage that interior space is carrier gas of inner tube 14.Shielding gas 8 can be introduced, for plasma between outer tube 12 and middle pipe 13
Carry out constriction or limit peripheral gas entrance plasma plasma formation interference.
Surface Machining at outer tube 12 has fin 15, and torch pipe can be generated heat work when, and heating cause includes that microwave transmission is produced
Raw heat, plasma heat radiation, fin can be with auxiliary heat dissipation.Microwave junction 9 has certain operating temperature range, no
Being suitable at high temperature working long hours, fin 15 coordinates gaseous coolant (such as air) can take away amount of heat, it is ensured that torch
The heat that pipe operation produces can distribute in time, and maintaining member is in relatively low operating temperature, the most micro-to be connected with torch pipe
Ripple transfer connector and microwave junction 9 are protected, and improve the normal working hours of parts.
Microwave interface 19 is at the wavelength of upper surface 1/18th 2, and farther out, heat radiation and heat transfer are imitated in distance upper surface 18
Fruit substantially weakens, it is possible to ensure that coaxial microwave transfer connector and microwave junction 9 work in suitable temperature range.Device is operated in
Under multikilowatt is high-power, each parts in microwave transmission unit are required to bear the biggest power.In small-power before this
The torch pipe of lower work uses the microwave interface 19 coupled modes near upper surface 18, close to plasma source, bears
Bigger heat radiation and conduction of heat heat, coaxial microwave transfer connector and microwave junction heating are serious, affect its service life with
Work.In the present invention, microwave interface 19 is apart from torch pipe upper surface 1/18th 2 wavelength location, due to microwave junction 9 and upper end
The increasing of face 18 distance, the maintenance gas 17 in work process, carrier gas 16, oxygen 8 all can take away amount of heat, and microwave connects
Microwave interface 19, apart from farther, is compared near upper surface 18 in mouthfuls 19 distance upper surfaces 18, the present invention substantially reduce etc. from
The impact on coaxial microwave transfer connector of the heat transfer of daughter, heat radiation, and the cooling effect of working gas is more preferable, makes coaxial
Microwave transmission joint and microwave junction 9 can steady operations at a suitable temperature.
Embodiment 3
Seeing Fig. 3, phantom is set up with reference to torch pipe practical structures, torch pipe material be set as perfact conductor, other parts are
Vacuum.The microwave entrance 23 distance apart from upper surface 27 is 1/2nd wavelength, reflection end face 22 apart from upper surface 27 away from
From being three pipe coaxial configurations for 3/4ths wavelength, middle pipe 25, inner tube 26 and outer tube 21, in have between 25 and inner tube 26
The spacer ring 24 of metal.
Microwave enters cavity from microwave entrance 23 can form certain electric magnetic field structure, and the direction instruction of arrow 28 is direction of an electric field,
What the gray scale of arrow 28 indicated is the intensity of electric field, and scale 29 has indicated the relative intensity size of electric field, the deepest electric field of color
Intensity is the strongest.From simulation result it can be seen that the electric field between outer tube 21 and middle pipe 25 forms stationary field structure in cavity, on
Just at the position that electric field is the strongest near end face 27.Between middle pipe 25 and inner tube 26 there is electricity in the part on spacer ring 24
, middle pipe 25 and inner tube 26 top have the strongest electric field intensity, and this is also the formation region of plasma.Plasma is tieed up
Holding gas to move from lower to upper between middle pipe 25 and inner tube 26, therefrom pipe 25 top is out, if in middle pipe 25 and inner tube 26
Apex zone provides an initiating electron, and electronics will collide the gas molecule maintaining gas under the effect of electric field, produces new electricity
Son and ion, new electronics continue under the effect of electric field with other gas molecule collision, this process maintains poised state and i.e. produces
Give birth to stable plasma, formed at middle pipe 25 and inner tube 26 top.
Claims (6)
1. a HIGH-POWERED MICROWAVES plasma producing apparatus, it is characterised in that by microwave generator (1), three end circulators (2),
Load (3), three pin tuners (4), waveguide turns coaxial fitting (5) and torch pipe (6) and forms, microwave generator (1) and
Three end circulators (2) connect, and three end circulators (2) are connected with load (3), three pin tuners (4), three pin tunings
Device (4) turns coaxial fitting (5) and is connected waveguide and turns coaxial fitting (5) and be connected with torch pipe (6) with waveguide.
A kind of HIGH-POWERED MICROWAVES plasma producing apparatus the most according to claim 1, it is characterised in that microwave generator (1)
Being connected with three end circulators (2), three end circulators (2) are connected with load (3), three pin tuners (4), and three pins are adjusted
Humorous device (4) turns coaxial fitting (5) and is connected with waveguide, all uses the BJ26 rectangular waveguide interface of standard, and waveguide turns coaxial fitting
(5) it is connected by L29 coaxial fitting with torch pipe (6).
A kind of HIGH-POWERED MICROWAVES plasma producing apparatus the most according to claim 1, it is characterised in that torch pipe (6)
Three pipe coaxial configurations be similar to the coaxial cable of one end open, the top of open end three pipe is upper surface (18), middle pipe (13) and
Inner tube (14) is metal thin-wall tubular construction, and the upper position near upper surface (18) of outer tube (12) needs out microwave interface (19),
Microwave interface (19) distance upper surface (18) is minimum is 1/2nd wavelength length, it is ensured that microwave coupling joint (9) and torch pipe
Upper surface (18) is at a distance sufficiently large so that during torch pipe work, working gas can play preferable cooling effect, substantially reduces
The impact on coaxial microwave transfer connector of the heat transfer of plasma, heat radiation, enables coaxial microwave transfer connector suitably
At a temperature of steady operation.
A kind of HIGH-POWERED MICROWAVES plasma producing apparatus the most according to claim 1, it is characterised in that torch pipe (6) is outward
Surface has air-cooled heat dissipation structure, it is ensured that the heat that torch pipe operation produces can distribute in time, and maintaining member is in relatively low work
Make temperature, the coaxial microwave transfer connector being connected with torch pipe is protected, it is ensured that system works in normal temperature range.
A kind of HIGH-POWERED MICROWAVES plasma producing apparatus the most according to claim 1 application in spectrochemistry field.
The application of a kind of HIGH-POWERED MICROWAVES plasma producing apparatus the most according to claim 5, it is characterised in that waiting
Application in gas ions manufacture field.
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| CN201610410659.3A CN105979693A (en) | 2016-06-12 | 2016-06-12 | High-power microwave plasma generation device |
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