CN107331929A - A kind of microwave plasma system and its waveguide coaxial converter - Google Patents
A kind of microwave plasma system and its waveguide coaxial converter Download PDFInfo
- Publication number
- CN107331929A CN107331929A CN201710675174.1A CN201710675174A CN107331929A CN 107331929 A CN107331929 A CN 107331929A CN 201710675174 A CN201710675174 A CN 201710675174A CN 107331929 A CN107331929 A CN 107331929A
- Authority
- CN
- China
- Prior art keywords
- waveguide coaxial
- coaxial
- waveguide
- coaxial converter
- circular hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims abstract description 44
- 238000001816 cooling Methods 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 7
- 238000010276 construction Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000005571 horizontal transmission Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000005570 vertical transmission Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000233855 Orchidaceae Species 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/08—Coupling devices of the waveguide type for linking dissimilar lines or devices
- H01P5/10—Coupling devices of the waveguide type for linking dissimilar lines or devices for coupling balanced with unbalanced lines or devices
- H01P5/103—Hollow-waveguide/coaxial-line transitions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
Abstract
The invention discloses a kind of waveguide coaxial converter of microwave plasma system, for connecting the tuner (3) and vertically arranged coaxial line conductor part that are horizontally mounted, inside has hollow cavity, one end of the cavity has open ports and the open ports are connected with the output port of the tuner (3), the cavity is provided with cone (4), the first circular hole is provided with along the cone (4) axis, coaxial inner conductor (5) is inserted in first circular hole.The waveguide coaxial converter efficiently solves the problems such as microwave plasma system stability in use is poor.Include the microwave plasma system of above-mentioned waveguide coaxial converter the invention also discloses a kind of.
Description
Technical field
The present invention relates to prefabricated rods technical field of processing equipment, more particularly to a kind of waveguide coaxial converter.In addition, this
Invention further relates to a kind of include the microwave plasma system of above-mentioned waveguide coaxial converter.
Background technology
PCVD is that Plasma Enhanced Chemical Vapor Deposition (PECVD) is one of main technique of preform processing, microwave plasma
System is the peculiar part different from other techniques of the technique, is core.Microwave plasma system is by being horizontally arranged at
Microwave head, isolator, three pin tuners, waveguide elements and vertically arranged coaxial elements, plasma on motion stage
Resonator is constituted.Waveguide elements and vertically arranged coaxial elements are linked together by waveguide coaxial converter.Waveguide coaxial
Converter is not only become electromagnetic wave energy by square tube transmission to vertical transmission, and electromagnetic wave energy by horizontal transmission deflecting
Circle is sent to microwave reaction cavity, and its transmittability and efficiency are critically important, to the design requirement of waveguide coaxial converter
It is very high.In the prior art, waveguide coaxial converter is complicated, and processing difficulties, inconvenient debugging, transmittability is poor, efficiency
Relatively low, stability in use is poor.
In summary, the problems such as microwave plasma system stability in use is poor how is efficiently solved, is current sheet
Art personnel's urgent problem.
The content of the invention
It is an object of the invention to provide a kind of waveguide coaxial converter, the waveguide coaxial converter efficiently solves microwave
The problems such as plasma system stability in use is poor；Include above-mentioned Waveguide coaxial it is a further object of the present invention to provide one kind to turn
The microwave plasma system of parallel operation.
In order to solve the above technical problems, the present invention provides following technical scheme：
A kind of waveguide coaxial converter of microwave plasma system, the tuner being horizontally mounted for connecting and vertical peace
The coaxial line conductor part of dress, inside has hollow cavity, and one end of the cavity has open ports and the open ports and institute
The output port connection of tuner is stated, the cavity is provided with cone, is provided with along the cone axis in the first circular hole, coaxial line
Conductor is inserted in first circular hole.
Preferably, the center of circle of first circular hole is on the axis of the cone, and the side bus of the cone is straight line；
The cone is by screw or is weldingly fixed on the bottom surface of the waveguide coaxial changer.
Preferably, the aperture of first circular hole is identical with the diameter of the coaxial inner conductor.
Preferably, the waveguide coaxial converter is cuboid, and the open ports are rectangle hole, the chi of the open ports
It is very little identical with the output port size of the tuner.
Preferably, there is ring flange, the output port of the open ports and the tuner passes through method at the open ports
Orchid connection.
Preferably, the top surface of the waveguide coaxial converter is offered outside the second circular hole, second circular hole and coaxial line
Conductor is connected, and the aperture of second circular hole is identical with the internal diameter of the coaxial outer conductor.
Preferably, the periphery of second circular hole has the counterbore for being used for positioning the coaxial outer conductor.
Preferably, there is water-cooling channel in the bottom surface of the waveguide coaxial changer.
Preferably, the offside of the open ports of the waveguide coaxial changer is by guard seal, and the baffle plate is used
Screw or welding are connected with the bottom surface of the waveguide coaxial changer and top surface, cambered surface are shaped as inside the baffle plate or flat
Face.
The present invention also provides a kind of microwave plasma system, including be horizontally arranged on motion stage microwave head, every
From device, tuner and vertically arranged coaxial line conductor part, plasma resonant and connect the tuner and described
The waveguide coaxial converter of coaxial line conductor part, the waveguide coaxial converter is specially that the waveguide described in any of the above-described is same
Axle converter.
The waveguide coaxial converter of microwave plasma system provided by the present invention, for connecting the tuning being horizontally mounted
Device and vertically arranged coaxial line conductor part, coaxial line conductor part include coaxial inner conductor and coaxial outer conductor.Ripple
There is inside guiding coaxial converter hollow cavity, the open at one end of cavity, with open ports, and the output of open ports and tuner
Port is connected, and waveguide coaxial converter not only transmits electromagnetic wave energy to vertical by horizontal transmission deflecting, and electromagnetic wave
Energy is become coaxially to be sent to plasma resonant by rectangular waveguide transmission, and its transmittability and efficiency are higher, conversion efficiency
Height, energy reflection very little, voltage standing wave ratio is below 1.2.Cavity is provided with cone, such as is circular cone, simple in construction, and processing is held
Easily, cone and the material of waveguide coaxial converter can be such as copper with identical, can also be different.The first circle is provided with along cone axis
Hole, coaxial inner conductor is inserted in the first circular hole, it is easy to fixing coaxial line inner wire, is provided to coaxial inner conductor reliable
Support and position, the good concentricity of coaxial inner conductor, debugging is convenient, using reliable and stable, transmission performance is more preferable.
The present invention also provides a kind of microwave plasma system, including be horizontally arranged on motion stage microwave head, every
Led from device, tuner and vertically arranged coaxial line conductor part, plasma resonant and connection tuner and coaxial line
The waveguide coaxial converter of body component, the waveguide coaxial converter is specially any of the above-described kind of waveguide coaxial converter.Due to upper
The waveguide coaxial converter stated has above-mentioned technique effect, and the microwave plasma system with the waveguide coaxial converter also should
With corresponding technique effect.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
The structural representation for the microwave plasma system that Fig. 1 is provided for a kind of embodiment in the present invention.
Marked in accompanying drawing as follows：
1- microwave heads, 2- isolators, 3- tuners, 4- cones, 5- coaxial inner conductors, 6- coaxial outer conductors, 7- water
Cold passage, 8- plasma resonants, 9- waveguide coaxial converters.
Embodiment
The core of the present invention is to provide a kind of waveguide coaxial converter, and the waveguide coaxial converter efficiently solves microwave
The problems such as plasma system stability in use is poor；Another core of the present invention is to provide a kind of including above-mentioned Waveguide coaxial turn
The microwave plasma system of parallel operation.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
It refer to Fig. 1, the structure for the microwave plasma system that Fig. 1 is provided for a kind of embodiment in the present invention
Schematic diagram.
In a kind of embodiment, the waveguide coaxial converter of microwave plasma system provided by the present invention,
For connecting the tuner 3 and vertically arranged coaxial line conductor part that are horizontally mounted, coaxial line conductor part includes coaxial line
Inner wire 5 and coaxial outer conductor 6.The inside of waveguide coaxial converter 9 has hollow cavity, the open at one end of cavity, with spacious
It is open, and open ports are connected with the output port of tuner 3, waveguide coaxial converter 9 is not only passed electromagnetic wave energy by level
Deflecting is sent to vertical transmission, and electromagnetic wave energy is become coaxially to be sent to plasma resonant 8 by rectangular waveguide transmission,
Its transmittability and efficiency are higher, high conversion efficiency, energy reflection very little, and voltage standing wave ratio is below 1.2.Plasma resonance
The housing of chamber 8 is cylindrical type resonator or Coaxial resonator or the cavity of other structures.Cavity is provided with cone 4, such as is circle
The material of cone, simple in construction, handling ease, cone 4 and waveguide coaxial converter 9 can be such as copper with identical, can also be different.
The first circular hole is provided with along the axis of cone 4, coaxial inner conductor 5 is inserted in the first circular hole, it is easy to fixing coaxial line inner wire 5, given
Coaxial inner conductor 5 provides reliable support and positioned, the good concentricity of coaxial inner conductor 5, and debugging is convenient, using stable
Reliably, transmission performance is more preferable.
Above-mentioned waveguide coaxial converter is only a kind of preferred scheme, is specifically not limited thereto, on this basis can basis
It is actually needed and makes with targetedly adjusting, so as to obtain different embodiments, the axle of the center of circle of the first circular hole in cone 4
On line, the side bus of cone 4 is straight line, is standard cone, simple in construction, more regular, it is easy to process.Cone 4 can pass through
Screw is fixed on the bottom surface of waveguide coaxial changer, is detachably connected, it is easy to dismantled, and is convenient for changing.Cone 4 can also pass through
It is weldingly fixed on the bottom surface of waveguide coaxial changer, is fixedly connected, fixation, stability is higher.
On the basis of above-mentioned embodiment, those skilled in the art can be according to the difference of specific occasion, to ripple
Guiding coaxial converter carries out some changes, and the aperture of the first circular hole is identical with the diameter of coaxial inner conductor 5, such as cavity broadside
For 86mm, narrow side is 43mm, and depth is 140mm, cone 4 basal diameter 43mm, high 20mm, shaft hole diameter 8mm, coaxial inner conductor
5 a diameter of 8mm, now the aperture of the first circular hole is identical with the diameter of coaxial inner conductor 5, and both are fitted close, and contact with each other,
Thermal conductivity is preferable, it is easy to the radiating of coaxial inner conductor 5.
Obviously, under the guidance of this thought, those skilled in the art can be according to the difference of specific occasion to above-mentioned
Embodiment carries out some changes, and waveguide coaxial converter 9 is cuboid, and open ports are rectangle hole, the chi of open ports
Very little identical with the output port size of tuner 3, waveguide coaxial converter 9 is electromagnetic wave energy by horizontal transmission deflecting to vertically
Electromagnetic wave energy, is become coaxial by rectangular waveguide transmission and is sent to plasma resonant 8 by transmission, transmittability and efficiency compared with
Height, energy reflection very little.
It is important to note that waveguide coaxial converter provided by the present invention is not intended to be limited to such a situation, open
There is ring flange, the output port of open ports and tuner 3 is connected by flange, simple in construction, easy to connect at opening, it is easy to
Dismounting.
Waveguide coaxial converter provided by the present invention, in the case of other parts are immovable, waveguide coaxial converter 9
Top surface offer the second circular hole, the second circular hole is connected with coaxial outer conductor 6, is led outside the aperture of the second circular hole and coaxial line
The internal diameter of body 6 is identical, it is easy to process, high conversion efficiency.
For the waveguide coaxial converter in each above-mentioned embodiment, the periphery of the second circular hole, which has, to be used to position coaxial line
The counterbore of outer conductor 6, counterbore can be identical with the periphery of coaxial outer conductor 6, facilitates coaxial outer conductor 6 to position, positioning compared with
Accurately.
There is water-cooling channel 7 to further optimize in above-mentioned technical proposal, the bottom surface of waveguide coaxial changer, be passed through water cooling
Liquid, cools down whole waveguide coaxial converter 9.Coaxial inner conductor 5 and the contact height of cone 4 reach 17-34mm, area of dissipation
Greatly, whole system good heat dissipation, beneficial to high-power applications.
On the basis of each above-mentioned specific embodiment, the offside of the open ports of waveguide coaxial changer is close by baffle plate
Envelope, sealing is preferable.Baffle plate is connected using screw or welding and the bottom surface of waveguide coaxial changer and top surface, is fixed conveniently.Gear
Cambered surface or plane are shaped as inside plate, it is simple in construction, it is easy to process.
Based on the waveguide coaxial converter provided in above-described embodiment, present invention also offers a kind of microwave plasma system
System, the microwave plasma system includes being horizontally arranged at microwave head 1 on motion stage, isolator 2, tuner 3 and vertical
Coaxial line conductor part, plasma resonant 8 and the Waveguide coaxial for connecting tuner 3 and coaxial line conductor part of installation
Converter 9, wherein waveguide coaxial converter are any one waveguide coaxial converter in above-described embodiment.Due to the microwave etc. from
Daughter system employs the waveguide coaxial converter in above-described embodiment, so the beneficial effect of the microwave plasma system please
With reference to above-described embodiment.
In the description of the invention, it is necessary to illustrate, the orientation or position relationship of the instruction such as term top surface, bottom surface are base
In orientation shown in the drawings or position relationship, it is for only for ease of the description present invention and simplifies description, rather than indicate or imply
Signified device or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this
The limitation of invention.
The embodiment of each in this specification is described by the way of progressive, and what each embodiment was stressed is and other
Between the difference of embodiment, each embodiment identical similar portion mutually referring to.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or using the present invention.
A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and principles disclosed herein and features of novelty phase one
The most wide scope caused.
Claims (10)
1. a kind of waveguide coaxial converter of microwave plasma system, the tuner (3) that is horizontally mounted for connecting and vertically
The coaxial line conductor part of installation, it is characterised in that inside has hollow cavity, and one end of the cavity has open ports and institute
The output port that open ports are stated with the tuner (3) is connected, and the cavity is provided with cone (4), along the cone (4) axis
The first circular hole is provided with, coaxial inner conductor (5) is inserted in first circular hole.
2. waveguide coaxial converter according to claim 1, it is characterised in that the center of circle of first circular hole is in the cone
On the axis of body (4), the side bus of the cone (4) is straight line；
The cone (4) is by screw or is weldingly fixed on the bottom surface of the waveguide coaxial changer.
3. waveguide coaxial converter according to claim 1, it is characterised in that the aperture of first circular hole with it is described same
The diameter of axis inner wire (5) is identical.
4. waveguide coaxial converter according to claim 1, it is characterised in that the waveguide coaxial converter is rectangular
Body, the open ports are rectangle hole, and the size of the open ports is identical with the output port size of the tuner (3).
5. waveguide coaxial converter according to claim 4, it is characterised in that there is ring flange, institute at the open ports
The output port for stating open ports and the tuner (3) is connected by flange.
6. the waveguide coaxial converter according to claim any one of 1-5, it is characterised in that the waveguide coaxial converter
Top surface offer the second circular hole, second circular hole is connected with coaxial outer conductor (6), the aperture of second circular hole with
The internal diameter of the coaxial outer conductor (6) is identical.
7. waveguide coaxial converter according to claim 6, it is characterised in that the periphery of second circular hole, which has, to be used for
Position the counterbore of the coaxial outer conductor (6).
8. the waveguide coaxial converter according to claim any one of 1-5, it is characterised in that the waveguide coaxial changer
Bottom surface in have water-cooling channel (7).
9. waveguide coaxial converter according to claim 8, it is characterised in that the described of the waveguide coaxial changer opens
The offside of opening is by guard seal, bottom surface and top surface of the baffle plate using screw or welding with the waveguide coaxial changer
Cambered surface or plane are shaped as inside connection, the baffle plate.
10. a kind of microwave plasma system, including microwave head (1), isolator (2), the tune being horizontally arranged on motion stage
Humorous device (3) and vertically arranged coaxial line conductor part, plasma resonant (8) and the connection tuner (3) and institute
State the waveguide coaxial converter of coaxial line conductor part, it is characterised in that the waveguide coaxial converter is specially claim 1
To the waveguide coaxial converter described in 9 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710675174.1A CN107331929A (en) | 2017-08-09 | 2017-08-09 | A kind of microwave plasma system and its waveguide coaxial converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710675174.1A CN107331929A (en) | 2017-08-09 | 2017-08-09 | A kind of microwave plasma system and its waveguide coaxial converter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107331929A true CN107331929A (en) | 2017-11-07 |
Family
ID=60199941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710675174.1A Pending CN107331929A (en) | 2017-08-09 | 2017-08-09 | A kind of microwave plasma system and its waveguide coaxial converter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107331929A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108931538A (en) * | 2018-06-29 | 2018-12-04 | 中国科学院合肥物质科学研究院 | A kind of experimental provision for carrying out rock-boring research using microwave |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2425475Y (en) * | 2000-05-17 | 2001-03-28 | 中国科学院金属研究所 | High-pressure microwave plasma excitation device |
| CN1324207A (en) * | 2000-05-17 | 2001-11-28 | 中国科学院金属研究所 | High-pressure microwave plasma exciter |
| CN1490268A (en) * | 2003-09-19 | 2004-04-21 | 烽火通信科技股份有限公司 | Fibre-optical prefabricated bar processing apparatus by plasma technology |
| CN1670997A (en) * | 2005-03-23 | 2005-09-21 | 长飞光纤光缆有限公司 | Plasma resonant cavity tunable waveguide device |
| CN101127413A (en) * | 2007-08-21 | 2008-02-20 | 西安电子科技大学 | Microwave resonance cavity |
| CN103531877A (en) * | 2013-10-25 | 2014-01-22 | 西南交通大学 | Power divider from over-mode coaxial waveguide to two-way rectangular waveguide |
| CN206992279U (en) * | 2017-08-09 | 2018-02-09 | 上海至纯洁净系统科技股份有限公司 | A kind of microwave plasma system and its waveguide coaxial converter |
-
2017
- 2017-08-09 CN CN201710675174.1A patent/CN107331929A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2425475Y (en) * | 2000-05-17 | 2001-03-28 | 中国科学院金属研究所 | High-pressure microwave plasma excitation device |
| CN1324207A (en) * | 2000-05-17 | 2001-11-28 | 中国科学院金属研究所 | High-pressure microwave plasma exciter |
| CN1490268A (en) * | 2003-09-19 | 2004-04-21 | 烽火通信科技股份有限公司 | Fibre-optical prefabricated bar processing apparatus by plasma technology |
| CN1670997A (en) * | 2005-03-23 | 2005-09-21 | 长飞光纤光缆有限公司 | Plasma resonant cavity tunable waveguide device |
| CN101127413A (en) * | 2007-08-21 | 2008-02-20 | 西安电子科技大学 | Microwave resonance cavity |
| CN103531877A (en) * | 2013-10-25 | 2014-01-22 | 西南交通大学 | Power divider from over-mode coaxial waveguide to two-way rectangular waveguide |
| CN206992279U (en) * | 2017-08-09 | 2018-02-09 | 上海至纯洁净系统科技股份有限公司 | A kind of microwave plasma system and its waveguide coaxial converter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108931538A (en) * | 2018-06-29 | 2018-12-04 | 中国科学院合肥物质科学研究院 | A kind of experimental provision for carrying out rock-boring research using microwave |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206992279U (en) | A kind of microwave plasma system and its waveguide coaxial converter | |
| JPH0395899A (en) | Microwave plasma generating device | |
| CN105789805A (en) | Waveguide coaxial conversion device | |
| CN107331929A (en) | A kind of microwave plasma system and its waveguide coaxial converter | |
| CN106653523A (en) | Output device of TE1,1 mode gyro traveling wave tube | |
| CN103526187A (en) | Large-area microwave plasma chemical vapor deposition system | |
| CN111063974A (en) | Ultra-high power synthesizer | |
| CN100373688C (en) | Adjustable single hole coaxial output directional coupler | |
| CN107039738A (en) | It is a kind of to be used for the millimeter wave coupling device of beam direction and power monitoring | |
| CN209843655U (en) | Radio frequency coil for eliminating inductively coupled plasma mass spectrometer tube and secondary discharge | |
| CN104009275B (en) | A kind of high power input coupler | |
| CN110957098B (en) | High-temperature superconducting magnet supporting device and magnetic levitation train | |
| CN106469641B (en) | A kind of vacuum-ultraviolet light source device | |
| CN1188361C (en) | Fibre-optical prefabricated bar processing apparatus by plasma technology | |
| CN106772160B (en) | High-temperature radio frequency coil with cooling structure | |
| CN208782045U (en) | It is a kind of to be easily installed the router antenna dismantled and increase signal | |
| CN107069149A (en) | The high-power Cyclotron wave converter coupling input unit of X-band | |
| CN108878243A (en) | Surface wave plasma process equipment | |
| CN110379692B (en) | Flattened magnetron for microwave oven adopting symmetrical magnetic circuit | |
| CN114189973A (en) | Microwave plasma torch device with double microwave resonant cavities and using method thereof | |
| CN207602511U (en) | A kind of magnetron tuner and magnetron | |
| CN101740296B (en) | Lateral side cooling structure for drift section of sheet beam klystron | |
| RU2468544C1 (en) | Device for exciting and maintaining microwave discharges in plasma chemical reactors | |
| CN205680520U (en) | A kind of high frequency transformer and the module of composition thereof | |
| CN216649645U (en) | Easy-to-mount crystal oscillator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |