CN1670997A - Plasma resonant cavity tunable waveguide device - Google Patents
Plasma resonant cavity tunable waveguide device Download PDFInfo
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- CN1670997A CN1670997A CN 200510018418 CN200510018418A CN1670997A CN 1670997 A CN1670997 A CN 1670997A CN 200510018418 CN200510018418 CN 200510018418 CN 200510018418 A CN200510018418 A CN 200510018418A CN 1670997 A CN1670997 A CN 1670997A
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- 238000000034 method Methods 0.000 description 5
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- 238000003754 machining Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000003708 ampul Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 239000003595 mist Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
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Abstract
This invention refers to the tunable wave-guide device of plasma resonant cavity for PCVD optical fiber fabricated bar working machine, which contains vertical crossed two-section wave-guide, horizontal set rectangular wave-guide connected with vertical column wave-guide or coaxial wave-guide through adapter, another end of rectangular wave-guide connected with bi-directional oriented coupler with incident and reflection energy sensor, the automatic tuner is set in rectangular wave-guide. Said invention has advantages of 1, making fine matching of wave-guide system with resonant cavity load to realize real time control for energy couple, 2, raising PCVD working precision and efficiency and service life, 3, simple structure and high automation.
Description
Technical field
The present invention relates to a kind of plasma resonant cavity tunable waveguide device of the PCVD of being used for preform machining tool, is the improvement to existing plasma resonant cavity waveguide assembly.
Background technology
PCVD is that Plasma Enhanced Chemical Vapor Deposition (PECVD) is one of main technique of preform processing, the processing mechanism of PCVD technology is by the direct effect of high-frequency microwave to reactant gas, make its rapid generation physical-chemical reaction and form pure silicon dioxide or doped silica, directly deposit with glassy state at the quartz ampoule inwall.PCVD technology has the characteristics of flexible precision, and the plasma resonant microwave system is the core of PCVD process equipment.The plasma resonant microwave system includes plasma resonant, microwave generator and waveguide assembly three parts and forms, wherein waveguide assembly need be complementary and the microwave transmission that microwave generator produces could be coupled to plasma resonant with plasma resonant, finishes PCVD processes process by plasma resonant emission high-frequency microwave energy.The coupling of waveguide assembly and plasma resonant is very important in this process, otherwise not matching between the two not only can influence coupling effect, causes the loss of energy, but also fragile system device, and influences the machining accuracy of PCVD technology.In the prior art, coaxial waveguide normally is set in waveguide assembly, adjust the matching performance of waveguide assembly by the adjusting of coaxial inner conductor in the coaxial waveguide (antenna) being inserted the rectangular waveguide degree of depth, yet, it is very limited to adopt said structure to adjust function, be difficult to tackle the variation of equivalent load in the course of processing of plasma resonant, more can't realize the real-time control of plasma resonant microwave system energy coupling.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of plasma resonant cavity tunable waveguide device at the deficiency of above-mentioned prior art existence, it can regulate the matching performance of waveguide assembly and the load of plasma resonant vibration chamber effectively, realize the real-time control of plasma resonant microwave system energy coupling, further improve the machining accuracy and the efficient of PCVD technology.
The present invention for the technical scheme that problem adopted of the above-mentioned proposition of solution is: include two sections waveguides that intersect vertically, horizontally disposed rectangular waveguide 4 is connected with vertically disposed cylindrical waveguide 2 or coaxial waveguide by adapter 3, the other end of rectangular waveguide links to each other with bidirectional oriented coupler 6, be provided with projectile energy transducer 7 and reflected energy transducer 8 in the bidirectional oriented coupler, its difference is to be provided with self-seeker in rectangular waveguide.
Press such scheme, described self-seeker is included in rectangular waveguide 4 barrels and offers pin-and-hole, installs tuned post 5 in the pin-and-hole, and the outer end of tuned post links to each other with a retractable driving device, constitutes flexible pin self-seeker; Tuned post can be provided with 1～3, along vertically being provided with at interval side by side of rectangular waveguide; Described retractable driving device can be screw rod retractable driving device or tooth bar retractable driving device.
When the present invention uses, one end of bidirectional oriented coupler is connected with microwave generator, the high-frequency microwave that microwave generator is produced transfers to rectangular waveguide forward, and make high-frequency microwave be coupled to the plasma resonant vibration chamber through adapter and cylindrical waveguide (or coaxial waveguide), by the plasma resonant vibration chamber mist that the high-frequency microwave energy is transmitted in the work piece glass bushing pipe is finished the PCVD course of processing.When the load in the energy of waveguide assembly transmission and plasma resonant vibration chamber is not complementary, detection by projectile energy transducer and reflected energy transducer, signal data is reached microprocessor, microprocessor is according to the variation of incident and reflected energy, the degree of depth of tuned post insertion rectangular waveguide changes the equiva lent impedance of Wave guide system in the controlling and driving self-seeker, make plasma resonant vibration chamber load impedance and source impedance coupling, to reach the minimum reflected energy, make the plasma resonant vibration chamber be coupled to the purpose of ceiling capacity.Even the waveguide assembly system well with the resonant cavity load matched, thereby realize the real-time control of energy coupling.
Beneficial effect of the present invention is: 1, by self-seeker being set at Wave guide system, can make waveguide assembly well with the resonant cavity load matched, adapting to the continuous variation of resonant cavity equivalent load in the course of processing, thereby realize the real-time control of energy coupling; 2, help to improve the machining accuracy and the efficient of PCVD technology, avoid the damage of microwave simultaneously, improve the Acceptable life of plasma resonant microwave system system device; 3, simple in structure, use adjusting function reliable, the automaticity height.
Description of drawings
Fig. 1 is the structure chart of facing of one embodiment of the invention.
Fig. 2 is the three-dimensional structure diagram of self-seeker part in the one embodiment of the invention.
Fig. 3 is the three-dimensional structure diagram of adapter part in the one embodiment of the invention.
Fig. 4 is the three-dimensional structure diagram of adapter part in the another embodiment of the present invention.
Embodiment
Further specify embodiments of the invention below in conjunction with accompanying drawing, first embodiment such as Fig. 1,2, shown in 4, include horizontally disposed rectangular waveguide 4 and vertically disposed coaxial waveguide 2, the cross section of rectangular waveguide is a rectangle, last following greater than the side height, rectangular waveguide one end is connected with coaxial waveguide by adapter 3, described coaxial waveguide includes coaxial outer conductor and coaxial inner conductor 11 constitutes, described adapter includes the rectangular conduit 9 with the rectangular waveguide phase configuration, the top capping of rectangular conduit, a top and pipe 10 of rectangular conduit intersects vertically, the other end of pipe and coaxial waveguide phase configuration, wherein the coaxial inner conductor in the coaxial waveguide extends downward in the rectangular conduit of adapter; On rectangular waveguide 4, offer pin-and-hole on the barrel, install tuned post 5 in the pin-and-hole, the outer end of tuned post links to each other with a tooth bar retractable driving device 14, the tooth bar retractable driving device is included in the tooth bar that the tuned post back segment is provided with, a tooth bar and a gears engaged, gear and stepping motor link, and constitute flexible pin self-seeker thus; Tuned post can be provided with 1～3, the vertically setting at interval side by side at center above rectangular waveguide, and the diameter of tuned post can be 6～16mm, and the degree of depth that stretches into the rectangular waveguide inner chamber is 0～14mm; The other end of rectangular waveguide links to each other with bidirectional oriented coupler 6, be provided with projectile energy transducer 7 and reflected energy transducer 8 in the bidirectional oriented coupler, the signal end of projectile energy transducer and reflected energy transducer all is connected with microprocessor, and the Stepping Motor Control end also links with microprocessor.In addition, coaxial waveguide directly is communicated with plasma resonant 1 as the output one end of waveguide assembly, and bidirectional oriented coupler joins as the input and the microwave generator of Wave guide system.The coupling power output maximum of present embodiment ionic medium body resonant cavity can be 10kw, and all available self-seeker carries out automatic tuning in 0～10kw scope.
Second embodiment of the invention such as Fig. 1,2, shown in 3, the main difference part of it and a last embodiment is that vertically disposed waveguide is a cylindrical waveguide, cylindrical waveguide is made of a pipe, the pipe diameter is identical with the edge lengths up and down of rectangular waveguide, the lower end of cylindrical waveguide links to each other with adapter 3, described adapter includes the rectangular conduit 9 with the rectangular waveguide phase configuration, the top of rectangular conduit and a pipe 12 intersect vertically, be provided with a reflecting plate 13 in their intersection, reflecting plate is inclined in the intersection, with the angle of adapter bottom surface be 10～50 °, the upper end of adapter pipe connects with cylindrical waveguide.The other parts of present embodiment are identical with a last embodiment.
Claims (7)
1, a kind of plasma resonant cavity tunable waveguide device, include two sections waveguides that intersect vertically, horizontally disposed rectangular waveguide (4) is connected with vertically disposed cylindrical waveguide (2) or coaxial waveguide by adapter (3), the other end of rectangular waveguide links to each other with bidirectional oriented coupler (6), be provided with projectile energy transducer (7) and reflected energy transducer (8) in the bidirectional oriented coupler, it is characterized in that in rectangular waveguide, being provided with self-seeker.
2, by the described plasma resonant cavity tunable waveguide device of claim 1, it is characterized in that described self-seeker is included in rectangular waveguide (4) barrel and offers pin-and-hole, install tuned post (5) in the pin-and-hole, the outer end of tuned post links to each other with a retractable driving device, constitutes flexible pin self-seeker.
3, by the described plasma resonant cavity tunable waveguide device of claim 2, it is characterized in that described tuned post (5) is provided with 1～3, along vertically being provided with at interval side by side of rectangular waveguide.
4, by claim 2 or 3 described plasma resonant cavity tunable waveguide devices, it is characterized in that the diameter of tuned post can be 6～16mm, the degree of depth that stretches into the rectangular waveguide inner chamber is 0～14mm.
5, by claim 2 or 3 described plasma resonant cavity tunable waveguide devices, it is characterized in that described retractable driving device can be screw rod retractable driving device or tooth bar retractable driving device.
6, by the described plasma resonant cavity tunable waveguide device of claim 5, it is characterized in that described tooth bar retractable driving device (14) is included in the tooth bar that the tuned post back segment is provided with, a tooth bar and a gears engaged, gear and stepping motor link.
7, by claim 1 or 2 described plasma resonant cavity tunable waveguide devices, it is characterized in that cylindrical waveguide is made of a pipe, the lower end of cylindrical waveguide links to each other with adapter, described adapter includes the rectangular conduit (9) with the rectangular waveguide phase configuration, the top of rectangular conduit and a pipe (12) intersect vertically, be provided with a reflecting plate (13) in their intersection, reflecting plate is inclined in the intersection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100184186A CN1333489C (en) | 2005-03-23 | 2005-03-23 | Plasma resonant cavity tunable waveguide device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100184186A CN1333489C (en) | 2005-03-23 | 2005-03-23 | Plasma resonant cavity tunable waveguide device |
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| Publication Number | Publication Date |
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| CN1670997A true CN1670997A (en) | 2005-09-21 |
| CN1333489C CN1333489C (en) | 2007-08-22 |
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| CNB2005100184186A Expired - Fee Related CN1333489C (en) | 2005-03-23 | 2005-03-23 | Plasma resonant cavity tunable waveguide device |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101390249B (en) * | 2006-02-28 | 2012-05-30 | 电力波科姆特克公司 | Directional coupler |
| CN104470183A (en) * | 2014-12-04 | 2015-03-25 | 浙江中控研究院有限公司 | Self-tuning magnetron microwave source MPT, self-tuning device and control method |
| CN105846025A (en) * | 2016-05-06 | 2016-08-10 | 南京三乐微波技术发展有限公司 | Electrically tunable three-screw tuner |
| CN106545899A (en) * | 2016-10-08 | 2017-03-29 | 广东美的厨房电器制造有限公司 | Rectangular waveguide component and the micro-wave oven with which |
| CN107331929A (en) * | 2017-08-09 | 2017-11-07 | 上海至纯洁净系统科技股份有限公司 | A kind of microwave plasma system and its waveguide coaxial converter |
| CN107708283A (en) * | 2017-11-06 | 2018-02-16 | 清华大学 | The temprature control method and equipment of a kind of microwave plasma |
| CN107978830A (en) * | 2017-11-23 | 2018-05-01 | 中国电子科技集团公司第四十研究所 | A kind of large power waveguide harmonic wave directional coupler |
| CN108624870A (en) * | 2018-07-05 | 2018-10-09 | 成都纽曼和瑞微波技术有限公司 | A kind of tunable circle throwing cavate high power microwave plasma chemical vapor deposition unit |
| CN109001980A (en) * | 2018-08-28 | 2018-12-14 | 中国科学院近代物理研究所 | High-frequency resonant cavity tuning methods |
| CN109786922A (en) * | 2018-12-11 | 2019-05-21 | 北京铭安博运科技有限公司 | A kind of microwave coaxial transmission coupled resonator |
| CN109802217A (en) * | 2018-12-11 | 2019-05-24 | 北京铭安博运科技有限公司 | A kind of microwave dielectric resonator coaxially coupled |
| CN112533348A (en) * | 2020-12-15 | 2021-03-19 | 成都迈频汇能科技有限公司 | High-power microwave automatic blending device |
| CN112972747A (en) * | 2021-02-20 | 2021-06-18 | 四川锦誉天成科技有限公司 | Sterilization system based on microwave energy transmission |
| US11972930B2 (en) | 2015-10-29 | 2024-04-30 | Applied Materials, Inc. | Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5389153A (en) * | 1993-02-19 | 1995-02-14 | Texas Instruments Incorporated | Plasma processing system using surface wave plasma generating apparatus and method |
| JPH0974083A (en) * | 1995-09-06 | 1997-03-18 | Sony Corp | Plasma ashing apparatus |
| US5869817A (en) * | 1997-03-06 | 1999-02-09 | General Mills, Inc. | Tunable cavity microwave applicator |
| CN1117176C (en) * | 1997-12-31 | 2003-08-06 | 等离子光纤维股份有限公司 | PCVD apparatus and a method of manufacturing optical flber, preform rod and jacket tube as well as the optical fiber manufactured therewith |
| EP1461820A2 (en) * | 2001-12-04 | 2004-09-29 | Draka Fibre Technology B.V. | Device for applying an electromagnetic microwave to a plasma container |
| CN1188361C (en) * | 2003-09-19 | 2005-02-09 | 烽火通信科技股份有限公司 | Fibre-optical prefabricated bar processing apparatus by plasma technology |
-
2005
- 2005-03-23 CN CNB2005100184186A patent/CN1333489C/en not_active Expired - Fee Related
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101390249B (en) * | 2006-02-28 | 2012-05-30 | 电力波科姆特克公司 | Directional coupler |
| CN104470183A (en) * | 2014-12-04 | 2015-03-25 | 浙江中控研究院有限公司 | Self-tuning magnetron microwave source MPT, self-tuning device and control method |
| CN104470183B (en) * | 2014-12-04 | 2017-11-21 | 浙江全世科技有限公司 | Can self-tuning microwave magnetron source MPT, self-tuning device and control method |
| US11972930B2 (en) | 2015-10-29 | 2024-04-30 | Applied Materials, Inc. | Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide |
| CN105846025A (en) * | 2016-05-06 | 2016-08-10 | 南京三乐微波技术发展有限公司 | Electrically tunable three-screw tuner |
| CN106545899A (en) * | 2016-10-08 | 2017-03-29 | 广东美的厨房电器制造有限公司 | Rectangular waveguide component and the micro-wave oven with which |
| CN107331929A (en) * | 2017-08-09 | 2017-11-07 | 上海至纯洁净系统科技股份有限公司 | A kind of microwave plasma system and its waveguide coaxial converter |
| CN107708283A (en) * | 2017-11-06 | 2018-02-16 | 清华大学 | The temprature control method and equipment of a kind of microwave plasma |
| CN107978830B (en) * | 2017-11-23 | 2020-01-31 | 中国电子科技集团公司第四十一研究所 | high-power waveguide harmonic directional coupler |
| CN107978830A (en) * | 2017-11-23 | 2018-05-01 | 中国电子科技集团公司第四十研究所 | A kind of large power waveguide harmonic wave directional coupler |
| CN108624870A (en) * | 2018-07-05 | 2018-10-09 | 成都纽曼和瑞微波技术有限公司 | A kind of tunable circle throwing cavate high power microwave plasma chemical vapor deposition unit |
| CN108624870B (en) * | 2018-07-05 | 2023-07-28 | 成都纽曼和瑞微波技术有限公司 | Tunable round-parabolic cavity type high-power microwave plasma chemical vapor deposition device |
| CN109001980A (en) * | 2018-08-28 | 2018-12-14 | 中国科学院近代物理研究所 | High-frequency resonant cavity tuning methods |
| CN109001980B (en) * | 2018-08-28 | 2021-09-24 | 中国科学院近代物理研究所 | Tuning method of high-frequency resonant cavity |
| CN109786922A (en) * | 2018-12-11 | 2019-05-21 | 北京铭安博运科技有限公司 | A kind of microwave coaxial transmission coupled resonator |
| CN109802217A (en) * | 2018-12-11 | 2019-05-24 | 北京铭安博运科技有限公司 | A kind of microwave dielectric resonator coaxially coupled |
| CN109802217B (en) * | 2018-12-11 | 2022-01-18 | 北京铭安博运科技有限公司 | Coaxial coupling microwave medium resonant cavity |
| CN112533348A (en) * | 2020-12-15 | 2021-03-19 | 成都迈频汇能科技有限公司 | High-power microwave automatic blending device |
| CN112972747A (en) * | 2021-02-20 | 2021-06-18 | 四川锦誉天成科技有限公司 | Sterilization system based on microwave energy transmission |
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| Publication number | Publication date |
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| CN1333489C (en) | 2007-08-22 |
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Owner name: YANGTZE OPTICAL FIBRE AND CABLE CO., LTD Free format text: FORMER NAME: CHANGFEI FIBRE-OPTICAL + OPTICAL CABLE CO., LTD. |
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Address after: 430073 Hubei city of Wuhan province Wuchang two Guanshan Road No. four Patentee after: YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK Ltd. Address before: 430073 Hubei city of Wuhan province Wuchang two Guanshan Road No. four Patentee before: YANGZE OPTICAL FIBRE AND CABLE Co.,Ltd. |
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