CN104470183B - Can self-tuning microwave magnetron source MPT, self-tuning device and control method - Google Patents
Can self-tuning microwave magnetron source MPT, self-tuning device and control method Download PDFInfo
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- CN104470183B CN104470183B CN201410726630.7A CN201410726630A CN104470183B CN 104470183 B CN104470183 B CN 104470183B CN 201410726630 A CN201410726630 A CN 201410726630A CN 104470183 B CN104470183 B CN 104470183B
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Abstract
The invention provides it is a kind of can self-tuning microwave magnetron source MPT, self-tuning device and control method, MPT includes coupled antenna（5）, regulating part（6）, device includes microwave magnetron source, control module（2）, transmission device（3）.The microwave magnetron source and the coupled antenna（5）It is connected, regulating part（6）With the transmission device（3）It is connected, the transmission device（3）With control module（2）It is connected, the control module（2）It is connected with the microwave magnetron source.Wherein, the microwave source produces microwave electromagnetic field and provides microwave energy for MPT, while from coupled antenna（5）MPT feedback information is obtained, the reflection power value in feedback information is extracted and feeds back to control module by microwave magnetron source（2）, control module is according to reflection power value and default parameters relationship curve to the transmission device（3）Send control signal, transmission device（3）Drive regulating part（6）It is mobile.
Description
Technical field
The present invention relates to technical field of chemical measurement, in particular it relates to it is a kind of can self-tuning microwave magnetron source MPT,
Self-tuning device and control method.
Background technology
Microwave plasma torch (MPT) is taught by Jin Qinhan to be invented in 1985, and the corresponding number of applying for a patent is CN
94205428.8.Microwave current plasma torch (MPT) commercial applications in sequential scanning-type spectrometer, compose direct-reading type entirely
Spectrometer etc..However, during the use of these MPT spectrometers, once the parameter of system changes, it is necessary to torch pipe
Reflection end face is adjusted.Change, the change of power of change, flow such as the change of working gas, analyte component and concentration
Change etc., or system impedance can not match, and cause the reflection power of the MPT under working condition to be in non-optimal state, energy
Cannot effectively it utilize, it is therefore desirable to which the position for reflecting torch pipe end face is adjusted, to make it be operated in optimum state
Under.
Traditional MPT torch pipes are realized with manual regulation, belong to opened loop control, there is following deficiency：(1) operator is needed
Experience；(2) MPT spectrometers are frequently switched on for regulation torch pipe, it is cumbersome, it is unfavorable for protection of instrumentation；(3) instrument during manual adjustment
Device is in not closed state, easily causes microwave leakage；(4) in some non-optimal working conditions, MPT torch pipes self-heating is to behaviour
Author brings inconvenience.
For these reasons, a kind of apparatus and method that can realize microwave plasma torch self-tuning are needed badly.
The content of the invention
For in the prior art the defects of, it is an object of the invention to provide it is a kind of can self-tuning microwave magnetron source MPT,
Self-tuning device and control method.
According to a kind of microwave magnetron source MPT self-tuning devices provided by the invention, the microwave plasma torch 4 includes
Coupled antenna 5, regulating part 6, it is characterised in that described device includes microwave magnetron source, control module 2, transmission device 3；
The microwave source is connected with the coupled antenna 5, and the regulating part 6 is connected with the transmission device 3, the transmission
Device 3 is connected with the control module 2, and the control module 2 is connected with the microwave magnetron source；
Wherein, the microwave magnetron source to：
Microwave electromagnetic field is produced, so as to provide microwave energy for microwave plasma torch 4；
The feedback information of microwave plasma torch 4 is obtained from coupled antenna 5, the reflection power value in feedback information is extracted
Out and feed back to control module 2；
The control module according to the reflection power value and default parameters relationship curve to the transmission filling
Put 3 and send control signal,
The transmission device 3 to according to the control signal drive regulating part 6 move.
Further, the microwave magnetron source includes magnetron 8, excitation waveguide 9, attenuator 12, wave detector 13, switching
Module 15；The magnetron 8, excitation waveguide 9, interconnecting module 15, coupled antenna 5 are sequentially connected；The interconnecting module 15, decay
Device 12, wave detector 13, control module 2 are also sequentially connected；The microwave electromagnetic field that the magnetron 8 is launched via excitation waveguide 9, turn
Connection module 15, coupled antenna 5 transmit successively, so as to provide microwave energy for the microwave plasma torch 4；The feedback information warp
Coupled antenna 5, the attenuator 12 of interconnecting module 15, wave detector 13 transmit successively, and the wave detector 13 is extracting the reflection power
It is worth and feeds back to control module 2.
Further, the interconnecting module 15 includes directional coupler 10 and waveguide-to-coaxial adapter 11；The orientation coupling
Clutch 10 is connected with the excitation waveguide 9, waveguide-to-coaxial adapter 11, attenuator 12 respectively；The waveguide-to-coaxial adapter 11
It is connected with coupled antenna 5, the waveguide-to-coaxial adapter 11 is the rectangular field microwave energy of directional coupler 10 to be converted into together
Axle electromagnetic field mode；
The microwave electromagnetic field that the magnetron 8 is launched is via excitation waveguide 9, directional coupler 10, waveguide-to-coaxial adapter
11st, coupled antenna 5 transmits successively；The feedback information via coupled antenna 5, waveguide-to-coaxial adapter 11, directional coupler 10,
Attenuator 12, wave detector 13 transmit successively.
Further, the interconnecting module 15 includes three port circulators 14；The first end of three port circulator 14
Mouth is connected with the excitation waveguide 9, and the second port of three port circulator 14 is connected with the coupled antenna 5, and described three
3rd port of port circulator 14 is connected with the attenuator 12；
The microwave electromagnetic field that the magnetron 8 is launched is via the excitation waveguide 9, the first end of three port circulators 14
Mouth, the second port of three port circulators 14, coupled antenna 5 transmit successively；The feedback information is via coupled antenna 5, three ends
The mouth second port of circulator 14, the 3rd port of three port circulators 14, attenuator 12, wave detector 13 transmit successively.
Further, the transmission device 3 includes motor and linkage, the motor respectively with the control module 2
Connected with linkage, the linkage is connected with the regulating part；
The motor rotates to the control signal exported according to control module 2, and drives regulating part 6 by linkage
It is mobile.
Further, the control module 2 is single-chip microcomputer.
Further, the control module 2 is computer.
The present invention also provide it is a kind of can self-tuning microwave magnetron source MPT, it is characterised in that it is micro- including above-mentioned magnetron
Wave source MPT self-tunings device and plasma torch 4.
The present invention also provides a kind of microwave magnetron source MPT self-tuning control methods, it is characterised in that includes following step
Suddenly：
S1：The threshold value of reflection power coefficient is set；
S2：Obtain reflection end face distance in real time；
S3：Real-time reflection power is read as the first reflection power value, it is anti-that first is asked for the reflection power value in real time
Penetrate power coefficient；
S4：Judge whether the first reflection power coefficient is more than the threshold value, be, then it is no into step S5, then return
Step S3；
S5：According to the relation curve of the reflection end face distance obtained in advance and reflection power coefficient and described anti-in real time
Penetrate the moving direction that power coefficient determines reflection end face；
S6：The increase of end face distance is controlled according to the moving direction or reduces reflection, return to step S2.
Further, the step S6 is specially：
S601：The transmission of reflection end face distance and the transmission device 3 is calculated according to motor speed, linkage parameter
Mechanical displacement relation between distance；
S602：Real-time reflection end face distance, the end face of acquisition reflection in advance in the mechanical displacement relation, step S2
The relation curve of distance and reflection power coefficient, threshold value, calculate and the first reflection power coefficient is reduced to needed for threshold value
The transmission distance wanted；
S603：Control signal increase is sent according to the transmission distance or reduces reflection end face distance；
S604：Return to step S2.
Compared with prior art, the present invention has following beneficial effect：
The present invention is used to control the microwave plasma torch in MPT spectrometers, and the present invention can effectively realize microwave plasma
The self-tuning of body torch, without carrying out manufal tuning, so as to reduce the skill requirement to MPT spectrometer users, and in instrument
Self-tuning process Instrumental is constantly in closed loop states, can be just self-regulated without frequently switching on MPT spectrometers, be advantageous to instrument
Protection, the leakage of microwave is also effectively avoided, improve the operability and service life of MPT spectrometers.
Brief description of the drawings
The detailed description made by reading with reference to the following drawings to non-limiting example, further feature of the invention,
Objects and advantages will become more apparent upon：
Fig. 1 is a kind of microwave magnetron source MPT self-tuning schematic devices；
Fig. 2 is a kind of microwave magnetron source MPT self-tuning schematic devices comprising directional coupler；
Fig. 3 is a kind of microwave magnetron source MPT self-tuning schematic devices for including three port circulators；
Fig. 4 is relation matched curve of the reflection power coefficient with reflecting end face distance；
Fig. 5 is a kind of flow chart of microwave plasma torch self-tuning control method.
Serial number in upper figure：1- microwave magnetrons source；2- control modules；3- transmission devices；4- microwave plasma torch；5-
Coupled antenna；6- regulating parts；7- reflects end face；8- magnetrons；9- encourages waveguide；10- directional couplers；11- Waveguide coaxials turn
Connect device；12- attenuators；13- wave detectors；The port circulators of 14- tri-；15- interconnecting modules.
Embodiment
The present invention is described in detail in a manner of specific embodiment below in conjunction with the accompanying drawings.Following examples will be helpful to
Those skilled in the art further understands the present invention, but the invention is not limited in any way.It should be pointed out that to ability
For the those of ordinary skill in domain, without departing from the inventive concept of the premise, various modifications and improvements can be made.These
Belong to protection scope of the present invention.
Embodiment 1：
A kind of microwave magnetron source MPT self-tuning devices as shown in Figure 1, the microwave plasma torch 4 include coupling
Antenna 5, regulating part 6, it is characterised in that described device includes microwave magnetron source (1), control module 2, transmission device 3；
The microwave magnetron source is connected with the coupled antenna 5, and the regulating part 6 is connected with the transmission device 3, institute
State transmission device 3 with the control module 2 to be connected, the control module 2 is connected with the microwave magnetron source；
Wherein, it is that microwave plasma torch 4 provides microwave energy that the microwave magnetron source (1), which produces microwave electromagnetic field, together
When the feedback information of microwave plasma torch 4 is obtained from coupled antenna 5, microwave magnetron source is by the reflection power in feedback information
Value extracts and feeds back to control module 2, and control module is according to the reflection power value and default parameters relationship curve
Control signal is sent to the transmission device 3, transmission device 3 drives regulating part 6 to move according to the control signal.
Microwave magnetron source is used to provide microwave energy, and extraction microwave etc. for microwave plasma torch 4 in the present embodiment
Reflection power value in the feedback information of gas ions torch 4, feeds back to control module 2.Control module 2 is used to pass through transmission device 3
Control the position of the regulating part 6.The regulating part 6 is used for the position for adjusting the reflection end face 7.As shown in figure 1, reflection end
Distance of the face 7 along outer tube 16 to coupled antenna 5 is reflection end face distance L1, by L1Control can realize to the microwave
The tuning of plasma torch 4.
Microwave source described in the present embodiment is microwave magnetron source, for providing microwave energy for microwave plasma torch 4, and
Feedback information is obtained from coupled antenna 5, the reflection power value in the feedback information is extracted, feeds back to control module 2.By controlling
Module 2 controls the transmission device 3 to work after carrying out analysis judgement, and the transmission device 3 drives the regulating part 6 along Fig. 1
Shown outer tube 16 moves.The tuning to microwave plasma torch is realized by the translational speed and position that control to adjust part 6.
Transmission device 3 described in the present embodiment includes motor and linkage, the motor respectively with the control module 2 and
Linkage is connected, and the linkage is connected with the regulating part.The motor is to the control that is exported according to control module 2
Signal rotates, and drives regulating part 6 to move by linkage.
Control module 2 of the present invention can be computer or single-chip microcomputer, as long as required for meeting the present invention
Multilevel iudge function, be not limited to the present embodiment.
Linkage of the present invention can use guide rail, gear drive (worm gear structure, bevel gear structure etc.), skin
The structures such as belt wheel, as long as the machine driving function required for the present invention can be met, it is not limited to the present embodiment.
Microwave source uses microwave magnetron source in the present embodiment, and control module 2 uses computer, and transmission device 3 uses tooth
Wheel transmission.
Microwave magnetron source described in the present embodiment is the microwave source using magnetron as signal source, can add other coherent signals
Processing apparatus is used for the optimization to signal.
Microwave magnetron source in the present embodiment provides microwave energy as power source for microwave plasma torch 4, is energizing
While can also obtain the feedback information of microwave plasma torch 4, include reflection power value, reflection power value in feedback information
With reflecting end face distance L1Relation it is as shown in Figure 4.Microwave magnetron source has the function of extraction reflection power value, and extraction is obtained
The reflection power value obtained feeds back to computer, and relation curve of the computer according to reflection power value and Fig. 4 is made analysis and sentenced
It is disconnected, motor sending action electric signal is given, motor drives pinion rotation according to the electric signal of reception, and gear mechanism interlocks regulating part 6
Moved up and down along outer tube 16.The movement of regulating part 6 causes to reflect end face distance L1Change, feedback information also changes, and counts
Calculation machine is controlled the working condition of microwave plasma torch 4 in real time according to the feedback information received, realize microwave etc. from
The self-tuning of daughter torch.
The present embodiment also provide it is a kind of comprising above-mentioned microwave magnetron source MPT self-tunings device and plasma torch 4 can
The microwave magnetron source MPT of self-tuning.Microwave magnetron source is realized by the microwave magnetron source MPT self-tunings device
MPT self-tuning function.
Embodiment 2：
As shown in Fig. 2 in the present embodiment microwave source using a kind of microwave magnetron source comprising directional coupler, its
In comprising magnetron 8, excitation waveguide 9, attenuator 12, wave detector 13, interconnecting module 15.The order of magnetron 8 and field wave
It is connected to lead 9, interconnecting module 15, coupled antenna 5, microwave plasma is received while providing microwave energy for microwave plasma torch 4
The feedback information of body torch 4；Meanwhile the order of interconnecting module 15 is connected with attenuator 12, wave detector 13, for declining feedback information
Subtract and transmit；Wave detector 13 is connected with the control module 2, for being transferred to control to the drawing Feedback Information reflection power value
Molding block 2.
Interconnecting module 15 described in the present embodiment includes directional coupler 10 and waveguide-to-coaxial adapter 11；The directional couple
Device 10 is connected with the excitation waveguide 9, waveguide-to-coaxial adapter 11, attenuator 12 respectively, is provided for microwave plasma torch 4
While microwave energy, by transmission of feedback information to attenuator 12；Waveguide-to-coaxial adapter 11 by the coupled antenna 5 with it is described
Microwave plasma torch 4 be connected, the waveguide-to-coaxial adapter 11 to by the rectangular field microwave energy of directional coupler 10 change
Into coaxial electromagnetic field mode.
Microwave source uses the microwave magnetron source comprising directional coupler in the present embodiment, and control module 2 uses single-chip microcomputer,
Transmission device 3 is driven using guide rail.
Magnetron 8 with excitation waveguide 9 by being connected output microwave electromagnetic field in the present embodiment, via the orientation being linked in sequence
Coupler 10, waveguide-to-coaxial adapter 11, coupled antenna 5 provide microwave energy to microwave plasma torch 4.Simultaneously.From coupling day
The feedback information of a microwave plasma torch 4 can be obtained at line 5, the feedback information is via waveguide-to-coaxial adapter 11, orientation coupling
Clutch 10 is transferred to attenuator 12.Transmission of feedback information after decay is extracted required anti-by wave detector 13 to wave detector 13
Performance number is penetrated, reflection power value is transferred to the single-chip microcomputer as control module 2.Single-chip microcomputer and and embodiment in the present embodiment
Computer in 1 has same function, and relation curve of the single-chip microcomputer according to reflection power value and Fig. 4 is made analysis and sentenced
It is disconnected, motor sending action electric signal is given, motor drives guide rail to work according to the electric signal of reception, and guide mechanism interlocks regulating part 6
Moved up and down along outer tube 16.The movement of regulating part 6 causes to reflect end face distance L1Change, feedback information also changes, single
Piece machine is controlled the working condition of microwave plasma torch 4 in real time according to the feedback information received, realize microwave etc. from
The self-tuning of daughter torch.
Embodiment 3：
As shown in figure 3, in the present embodiment microwave source using a kind of microwave magnetron source for including three port circulators,
Wherein comprising magnetron 8, excitation waveguide 9, attenuator 12, wave detector 13, three port circulators 14.The order of magnetron 8 with
Encourage waveguide 9, three port circulators 14, coupled antenna 5 to be connected, received while providing microwave energy for microwave plasma torch 4
The feedback information of microwave plasma torch 4；Meanwhile the order of three port circulator 14 is connected with attenuator 12, wave detector 13, is used for
By the decay and transmission of feedback information；Wave detector 13 is connected with the control module 2, for reflecting the drawing Feedback Information
Performance number is transferred to control module 2.
1 port of three port circulator 14 is connected with the excitation waveguide 9, and three port is inputted for microwave energy
Circulator 14；2 ports of three port circulator 14 are connected with the coupled antenna 5, for three port circulator 14
The output port of microwave energy, microwave energy is provided for microwave plasma torch 4；3 ports of three port circulator 14 with it is described
Attenuator 12 is connected, for the feedback information of microwave plasma torch 4 to be exported to attenuator 12.
Microwave source uses the microwave magnetron source for including three port circulators in the present embodiment, and control module 2 uses monolithic
Machine, transmission device 3 use belt sheave structure.
Magnetron 8 with excitation waveguide 9 by being connected output microwave electromagnetic field in the present embodiment, into three port circulators 14
1 port, exported from 2 ports of three port circulator 14 and provide microwave to microwave plasma torch 4 to coupled antenna 5
Energy.The feedback information of a microwave plasma torch 4 can be obtained at coupled antenna 5, the feedback information is via three port circulators
14 2 ports enter three port circulators 14, are exported from 3 ports of three port circulator 14 to attenuator 12.Follow-up step
Rapid similar to Example 2, the transmission of feedback information after decay is extracted required reflection power by wave detector 13 to wave detector 13
Value, the single-chip microcomputer as control module 2 is transferred to using reflection power value.Single-chip microcomputer in the present embodiment with embodiment 1
Computer has same function, and relation curve of the single-chip microcomputer according to reflection power value and Fig. 4 is made analysis and judged, to electricity
Machine sending action electric signal, motor drive belt sheave structure to work according to the electric signal of reception, and belt sheave structure mechanical linkage is adjusted
Section part 6 moves up and down along outer tube 16.The movement of regulating part 6 causes to reflect end face distance L1Change, feedback information also becomes
Change, single-chip microcomputer is controlled the working condition of microwave plasma torch 4 in real time according to the feedback information received, realizes microwave
The self-tuning of plasma torch.
Embodiment 4：
It is illustrated in figure 5 a kind of flow chart of microwave plasma torch self-tuning control method.Microwave magnetron source MPT
Self-tuning control method is a kind of self-tuning control method of the microwave magnetron source MPT based in above-described embodiment, the control
After molding block 2 obtains the relation curve of reflection end face distance and reflection power coefficient in advance.Self-tuning in the control module 2
Control method comprises the steps of：
S1：The threshold value of reflection power coefficient is set；
S2：Obtain reflection end face distance in real time；
S3：Real-time reflection power is read as the first reflection power value, it is anti-that first is asked for the reflection power value in real time
Penetrate power coefficient；
S4：Judge whether the first reflection power coefficient is more than the threshold value, be, then it is no into step S5, then return
Step S3；
S5：According to the relation curve of the reflection end face distance obtained in advance and reflection power coefficient and described anti-in real time
Penetrate the moving direction that power coefficient determines reflection end face；
S6：Control signal increase is sent according to the moving direction or reduces reflection end face distance, return to step S2.
Wherein step S6 is specially：
S601：The transmission of reflection end face distance and the transmission device 3 is calculated according to motor speed, linkage parameter
Mechanical displacement relation between distance；
S602：Real-time reflection end face distance, the end face of acquisition reflection in advance in the mechanical displacement relation, step S2
The relation curve of distance and reflection power coefficient, threshold value, calculate and the first reflection power coefficient is reduced to needed for threshold value
The transmission distance wanted；
S603：Control signal increase is sent according to the transmission distance or reduces reflection end face distance；
S604：Return to step S2.
The step of wherein reading real-time reflection power be specially：Averaged conduct after reading the reflection power of preset times
Real-time reflection power.The experiment for obtaining the relation curve of reflection end face distance and reflection power coefficient described in the present embodiment in advance obtains
Take method and steps as follows：
Step 1：Reflection end face distance L1 is set before activation as a certain constant value, then starts plasma, in plasma
Under body stable state, the reflection power value of 6 times is read by software, average write down the reflection end face distance that this time obtains and
Reflection power value is as a coordinate points.
Step 2：Close power supply and extinguish plasma, regulation reflection end face, that is, change L1Value, repeat step 1 is carried out again
Measurement, so repeatedly in L118 points are sampled in range-adjustable altogether, finally give different reflection end face distance L1Locate reflection power system
Several sizes.
Step 3：Above-mentioned 18 points are fitted using least square method, and calculated curve and experimental data are compared
To, amendment after obtain it is described reflection end face distance and reflection power coefficient relation curve.
It is reflection power P under working condition to define reflection power coefficientRRelative to the ratio P of incident power1."+" in Fig. 4
The corresponding reflection power coefficient being calculated according to measured data of experiment is represented, curve represents to use based on equivalent model
The matched curve that least square method obtains, two represent to assume to survey reflection in experiment parallel to line above in the dotted line of x-axis
Power coefficient is straight line corresponding to 20%, and the straight line is marked with the point that matched curve is handed over circle, will reflection in the present embodiment
Straight line of the power coefficient corresponding to 10% is as the reflection power coefficient threshold set in control method.The present embodiment starts
The full spectrometers of MPT, control microwave power, carrier gas, maintain gas and shield gas flow amount.It is 100W to keep microwave incident power, carrier gas and
It is 0.9L/min, shield gas flow amount 1.6L/min, L to maintain throughput2It is fixed as 13.5mm.
Specifically, obtain reflecting end face distance L by externally measured first1Value.Start instrument and software, in computer
Setting reflection end face distance L in software1With reflection power coefficient threshold, exemplified by 10%, as shown in Figure 4.Filled by lighting a fire
Put and light plasma, using the reflection power value of computer software reading now, take multivalue average value.It is anti-by what is be calculated
Power coefficient is penetrated compared with threshold value 10%, sees if fall out threshold range, if reflection power coefficient is less than 10%, no
Torch pipe need to be adjusted, continue to read reflection power value.If reflection power coefficient is beyond 10%, it is necessary to be adjusted by transmission device
Section torch pipe reflects endface position to reduce reflection power.Exemplified by 20%, as shown in Figure 4, it is with matched curve in reflection end
Face adjustable range is to have 4 crosspoints in 0-120mm, passes through the reflection end face distance L initially set1A certain friendship can be positioned as
Crunode, the direction that needs are adjusted is judged accordingly and torch pipe reflection endface position is adjusted by transmission device, can be according to step
Stepper motor rotating speed, gear parameter calculate step angle and reflection end face distance L1Between relation, regulation terminate after according to should
The original reflection end face distance L of relation real-time update1Value and preservation, continue thereafter with read reflection power value, so repeatedly.
This method should be noted at 2 points：1st, because gear rotation has certain error, therefore reflection end needs away from information
Regular calibration.2nd, the possibility of this method (threshold value setting is relatively low) erroneous judgement when reflectance factor is lower is bigger.Because now basis
Two positions that curve obtains are closer to, may be in the range of reflection end face distance measurement error.
But because this method is directly controlled according to empirical curve, therefore in the case of empirical curve is correct, profit
Faster reaction rate can be obtained by carrying out self-tuning with this method, realize the fast reaction of MPT self-tunings.
Presently preferred embodiments of the present invention is the foregoing is only, those skilled in the art know, are not departing from the essence of the present invention
In the case of refreshing and scope, various changes or equivalent substitution can be carried out to these features and embodiment.In addition, the present invention's
Under teaching, these features and embodiment can be modified to adapt to particular situation and material without departing from the present invention's
Spirit and scope.Therefore, the present invention is not limited to the particular embodiment disclosed, and the right for falling with the application will
Embodiment in the range of asking belongs to protection scope of the present invention.
Claims (2)
1. a kind of microwave magnetron source MPT self-tuning control methods, wherein microwave magnetron source MPT self-tunings device include microwave
Microwave magnetron source (1), control module (2), transmission device (3), plasma torch (4)；The plasma torch (4) includes coupling
Close antenna (5), regulating part (6)；The microwave magnetron source (1) is connected with the coupled antenna (5), the regulating part (6) with
The transmission device (3) is connected, and the transmission device (3) is connected with the control module (2), the control module (2) and institute
Microwave magnetron source (1) is stated to be connected；The transmission device (3) includes motor and linkage, the motor respectively with the control
Molding block (2) is connected with linkage, and the linkage is connected with the regulating part (6)；
Characterized in that, comprise the steps of：
S1：The relation curve of reflection end face distance and reflection power coefficient is obtained in advance, the threshold value of reflection power coefficient is set；
S2：Obtain reflection end face distance (L1) in real time；
S3：Real-time reflection power is read as the first reflection power value, the first reflection work(is asked for the reflection power value in real time
Rate coefficient；
S4：Judge whether the first reflection power coefficient is more than the threshold value of the reflection power coefficient, be, then into step
S5, then no, return to step S3；
S5：According to the relation curve and the first reflection work(of the reflection end face distance obtained in advance and reflection power coefficient
Rate coefficient determines the moving direction of reflection end face (7)；
S6：The increase or reduction of reflection end face distance (L1), return to step S2 are controlled according to the moving direction.
A kind of 2. microwave magnetron source MPT self-tuning control methods according to claim 1, it is characterised in that the step
Suddenly S6 is specially：
S601：The biography of reflection end face distance (L1) and the transmission device (3) is calculated according to motor speed, linkage parameter
Mechanical displacement relation between dynamic distance；
S602：The first reflection end face distance (L1), described obtain in advance in the mechanical displacement relation, step S2 reflect
The threshold value of the relation curve of end face distance and reflection power coefficient, the reflection power coefficient, calculates and is reflected described first
Power coefficient is reduced to the transmission distance required for the threshold value of the reflection power coefficient；
S603：Control signal increase is sent according to the transmission distance or reduces the reflection end face distance (L1)；
S604：Return to step S2.
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| CN105072793B (en) * | 2015-07-24 | 2017-11-14 | 浙江全世科技有限公司 | A kind of microwave plasma torch device |
| CN106374178A (en) * | 2016-09-29 | 2017-02-01 | 南京三乐微波技术发展有限公司 | Self-adaptive matching device and control method for microwave equipment |
| CN107426909B (en) * | 2017-05-23 | 2019-04-16 | 浙江全世科技有限公司 | A kind of screening arrangement of microwave plasma torch |
| CN107087339A (en) * | 2017-07-03 | 2017-08-22 | 李容毅 | A kind of enhanced microwave plasma torch generating means of two-chamber excitation |
| WO2019035130A1 (en) * | 2017-08-15 | 2019-02-21 | Goji Limited | Six port power measurements |
| CN114246964A (en) * | 2020-09-21 | 2022-03-29 | 陕西青朗万城环保科技有限公司 | Multimode mixed cavity adjusting method and control system thereof |
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| JP2779479B2 (en) * | 1993-11-29 | 1998-07-23 | 株式会社ニッシン | Automatic tuning method and apparatus for microwave circuit for plasma generation |
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