CN1487333A - Prepn process of NEMS electrically adjustable light attenuator chip - Google Patents
Prepn process of NEMS electrically adjustable light attenuator chip Download PDFInfo
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- CN1487333A CN1487333A CNA031288014A CN03128801A CN1487333A CN 1487333 A CN1487333 A CN 1487333A CN A031288014 A CNA031288014 A CN A031288014A CN 03128801 A CN03128801 A CN 03128801A CN 1487333 A CN1487333 A CN 1487333A
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Abstract
The present invention belongs to the field of microelectronic device preparing technology, and the preparation process of MEMS electrically adjustable light attenuator chip includes 14 technological steps of: preparing substrate and lower electrode, growing SiO2 film, preparing cavity, sputtering the first aluminum film, preparing sacrificial layer, depositing SiN film, sputtering the second aluminum film, photoetching to form hole, eliminating glue and the second aluminum film, photoetching the upper electrode pattern, sputtering Ti-Pt-Au film, preparing Ti-Pt-Au electrode, etching to eliminate the sacrificial layer to obtain cavity, and dewatering and drying to obtain the attenuator chip. The process is simple and suitable for mass production, and the product has small volume and high performance. The MEMS electrically adjustable light attenuator chip and corresponding device is used in wavelength division multiplexing fiber network, etc.
Description
The present invention relates to a kind of preparation method of MEMS electricity adjustable optical attenuator chip, belong to the microelectronic component preparing technical field.
Background technology
Electricity adjustable optical attenuator (Variable Optical Attenuator is called for short VOA) is a kind of core devices in the modern broadband light net.In wavelength-division multiplex optical fiber optical-fiber network (WDM FiberOptical Networks), be used for adjusting the power of balanced each channel optical signal.Can also be used for simultaneously the optical power loss of the long Distance Transmission of analog optical fiber or the dynamic range of detected transmission system.
In Dec, 2002, the inventor applied for a utility model patent " electric adjustable optical attenuator ", application number is 02288433.5, this utility model only relates to the structure of MEMS electricity adjustable optical attenuator, does not provide the core of this attenuator, chip production method.
Summary of the invention
The present invention aims to provide a kind of preparation method of MEMS electricity adjustable optical attenuator chip.
Technical scheme of the present invention is characterised in that, comprises 14 technological operation steps: preparation substrate and bottom electrode 1; Silicon dioxide thin film growth 2; Preparation cavity 22; The sputtered aluminum film; Preparation sacrifice layer 5; Deposition silicon nitride film 6; Sputtered aluminum film 7; Photoetching corrosion hole 4; Remove positive glue 3 and aluminium film 7; Photoetching top electrode figure 8; Sputtered titanium platinum film; Preparation titanium platinum electrode; Corrosion sacrifice layer 5 gets cavity body 10; Dehydrate, get attenuator chip 12.
Now be described with reference to the accompanying drawings technical scheme of the present invention.Preparation method according to above-described MEMS electricity adjustable optical attenuator chip is characterized in that operation steps:
The first step prepares substrate and bottom electrode 1
Select for use n type silicon to do substrate, the thickness of substrate is 350 μ m, adopts diffusion technique, and substrate is carried out phosphorus doping, and test diffusion sheet resistance Rs≤5 Ω/, substrate will be as the bottom electrodes 1 of related attenuator chip 12, and it is drawn from the surface;
The second one-step growth silica membrane 2
Alternately adopting dry-oxygen oxidation and wet-oxygen oxidation technology growth thickness on substrate of thermal oxidation process is the silica membrane 2 of 1 ± 0.05 μ m;
The 3rd step preparation cavity 22
On silica membrane 2, be coated with positive glue 3, after adopting the photoetching of circular-shaped, concave cavity mask, the positive glue 3 at place, central, circular district is developed, the positive glue 3 in other zone is retained as next step corrosion mask, erode the silica membrane at place, central, circular district then with hydrofluorite, form cavity 22, the diameter of cavity 22 is 300～500 μ m;
The 4th step sputtered aluminum film
Do not remove photoresist, at the thick aluminium film of direct sputter 1 ± 0.05 μ m of silicon chip surface;
The 5th step preparation sacrifice layer 5
Adopt ultrasonic stripping technology, remove on the silica membrane 2 positive glue 3 and on the aluminium film, make sacrifice layer 5;
The 6th step deposition silicon nitride film 6
Using plasma strengthens chemical vapor deposition method, is the silicon nitride film 6 of 300 ± 5nm at the silicon chip surface deposition thickness;
The 7th step sputtered aluminum film 7
On silicon nitride film 6, the sputtered aluminum film 7 once more, and the thickness of aluminium film 7 is 500 ± 5nm;
The 8th step photoetching corrosion hole 4
On aluminium film 7, be coated with positive glue 3, after adopting the photoetching of circular corrosion hole mask, on positive glue 3, form the pattern of corrosion hole 4, fall aluminium film 7 in the corrosion hole 4 with phosphoric acid corrosion then, masking protection layer when the aluminium film 7 that stays is made the silicon nitride film etching, the sulfur hexafluoride plasma is used in the oven dry back, etches away the silicon nitride film in the corrosion hole 4, get corrosion hole 4, the number of corrosion hole 4 and diameter are respectively 32 and 8 ± 0.05 μ m;
The 9th step was removed positive glue 3 and aluminium film 7
Whole silicon wafer is immersed in the acetone soln, adopt ultrasonic stripping technology to remove the positive glue 3 in surface, then whole silicon wafer is immersed in the sodium hydroxide solution, erode aluminium film 7, get the surfacial pattern of related attenuator chip 12;
The tenth step photoetching top electrode figure 8
Be coated with positive glue at silicon chip surface, after the photoetching of employing top electrode mask, obtain top electrode figure 8;
The 11 step sputtered titanium platinum film
At silicon chip surface sputtered titanium platinum film, the titanium film of sputter, platinum film and golden film thickness are respectively 50 ± 0.5nm, 100 ± 0.5nm and 200 ± 0.5nm;
The 12 step preparation titanium platinum electrode, promptly top electrode 9
Adopt ultrasonic stripping technology, remove positive glue and on titanium platinum film, the titanium platinum electrode, promptly top electrode 9;
The 13 step corrosion sacrifice layer 5 gets cavity body 10
Whole silicon wafer is immersed phosphoric acid, glacial acetic acid, nitric acid and water with 80%: 10%: 5%: in the acid solution that 5% volume ratio mixes, acid solution erodes sacrifice layer 5 by corrosion hole 4, gets cavity body 10;
The 14 step dehydrated, and got attenuator chip 12
Whole silicon wafer immersed in the solution that ethanol and ether mix with 1: 1 volume ratio dewater, it is dry to put into drying agent then, remove the moisture content in the cavity body 10, formation is suspended in the movable membrane structure of drum-type on the cavity body 10, it is optical window reflectance coating 11, the diameter of optical window reflectance coating 11 is 100～150 μ m, and so far, 12 preparations of attenuator chip finish.
Whole technology preparation process is shown in Fig. 1～13.
The present invention has following outstanding effect:
1, preparation technology is simple, and is easy to implement.
2, be suitable for producing in batches, cost is low.
3, small product size is little, and performance is good, and the response time is short, only 6 microseconds.
Description of drawings
Fig. 1 is the synoptic diagram that heavy doping n type silicon chip is made substrate and bottom electrode 1.
Fig. 2 is the synoptic diagram of silicon dioxide thin film growth 2 on silicon substrate.
Fig. 3 is the synoptic diagram of preparation cavity 22.
Fig. 4 is the synoptic diagram at silicon chip surface sputtered aluminum film.
Fig. 5 is the synoptic diagram of preparation sacrifice layer 5.
Fig. 6 is the synoptic diagram at silicon chip surface deposition silicon nitride film 6.
Fig. 7 is the synoptic diagram of sputtered aluminum film 7 on silicon nitride film 6.
Fig. 8 is the synoptic diagram in photoetching corrosion hole 4.
Fig. 9 is positive glue 3 and the aluminium film 7 on the denitrification silicon thin film 6, gets the synoptic diagram of the surfacial pattern of related attenuator.
Figure 10 is the synoptic diagram of photoetching top electrode figure 8.
Figure 11 is the synoptic diagram at silicon chip surface sputtered titanium platinum film.
Figure 12 is preparation titanium platinum electrode, the i.e. synoptic diagram of top electrode 9.
Figure 13 is a corrosion sacrifice layer 5, gets the synoptic diagram of cavity body 10.
Figure 14 is the top plan view structural representation of the related electric adjustable optical attenuator chip 12 of the present invention.
Figure 15 is the structural representation of the related integrated encapsulation of electric adjustable optical attenuator of the present invention, the 12nd, related optical attenuator chip, 13 and 14 is the two optical fiber of input and output single mode, the 15th, collimation lens, the 16th, bonding agent, the 17th, quartzy pedestal, the 18th, extraction electrode, the 19th, fixed cover, the 20th, quartzy pipe box, the 21st, shell.
Embodiment
In the foregoing invention content, technical scheme of the present invention is illustrated in detail that this scheme is exactly an embodiment, just no longer repeat here.The present invention is particularly suitable for being used for preparing MEMS electricity adjustable optical attenuator chip 12.Only need with this chip and collimation lens 15 and the two optical fiber 13 of input and output single mode and 14 integrated be encapsulated in the quartzy pipe box 20 after, add shell 21, just can make the electric adjustable optical attenuator device of MEMS.This device can be used for adjusting the power of balanced each channel optical signal in wavelength-division multiplex optical fiber optical-fiber network, can also be used for the optical power loss of the long Distance Transmission of analog optical fiber or the dynamic range of detected transmission system simultaneously.
Claims (2)
1. the preparation method of MEMS electricity adjustable optical attenuator chip; It is characterized in that, comprise 14 technological operation steps: preparation substrate and bottom electrode 1; Silicon dioxide thin film growth 2; Preparation cavity 22; The sputtered aluminum film; Preparation sacrifice layer 5; Deposition silicon nitride film 6; Sputtered aluminum film 7; Photoetching corrosion hole 4; Remove positive glue 3 and aluminium film 7; Photoetching top electrode figure 8; Sputtered titanium platinum film; Preparation titanium platinum electrode; Corrosion sacrifice layer 5 gets cavity body 10; Dehydrate, get attenuator chip 12.
2. the preparation method of MEMS electricity adjustable optical attenuator chip according to claim 1 is characterized in that operation steps:
The first step prepares substrate and bottom electrode 1
Select for use n type silicon to do substrate, the thickness of substrate is 350 μ m, adopts diffusion technique, and substrate is carried out phosphorus doping, and test diffusion sheet resistance Rs≤5 Ω/, substrate will be as the bottom electrodes 1 of related attenuator chip 12, and it is drawn from the surface;
The second one-step growth silica membrane 2
Alternately adopting dry-oxygen oxidation and wet-oxygen oxidation technology growth thickness on substrate of thermal oxidation process is the silica membrane 2 of 1 ± 0.05 μ m;
The 3rd step preparation cavity 22
On silica membrane 2, be coated with positive glue 3, after adopting the photoetching of circular-shaped, concave cavity mask, the positive glue 3 at place, central, circular district is developed, the positive glue 3 in other zone is retained as next step corrosion mask, erode the silica membrane at place, central, circular district then with hydrofluorite, form cavity 22, the diameter of cavity 22 is 300～500 μ m;
The 4th step sputtered aluminum film
Do not remove photoresist, at the thick aluminium film of direct sputter 1 ± 0.05 μ m of silicon chip surface;
The 5th step preparation sacrifice layer 5
Adopt ultrasonic stripping technology, remove on the silica membrane 2 positive glue 3 and on the aluminium film, make sacrifice layer 5;
The 6th step deposition silicon nitride film 6 using plasmas strengthen chemical vapor deposition method, are the silicon nitride film 6 of 300 ± 5nm at the silicon chip surface deposition thickness;
The 7th step sputtered aluminum film 7
On silicon nitride film 6, the sputtered aluminum film 7 once more, and the thickness of aluminium film 7 is 500 ± 5nm;
The 8th step photoetching corrosion hole 4
On aluminium film 7, be coated with positive glue 3, after adopting the photoetching of circular corrosion hole mask, on positive glue 3, form the pattern of corrosion hole 4, fall aluminium film 7 in the corrosion hole 4 with phosphoric acid corrosion then, masking protection layer when the aluminium film 7 that stays is made the silicon nitride film etching, the sulfur hexafluoride plasma is used in the oven dry back, etches away the silicon nitride film in the corrosion hole 4, get corrosion hole 4, the number of corrosion hole 4 and diameter are respectively 32 and 8 ± 0.05 μ m;
The 9th step was removed positive glue 3 and aluminium film 7
Whole silicon wafer is immersed in the acetone soln, adopt ultrasonic stripping technology to remove the positive glue 3 in surface, then whole silicon wafer is immersed in the sodium hydroxide solution, erode aluminium film 7, get the surfacial pattern of related attenuator chip 12;
The tenth step photoetching top electrode figure 8
Be coated with positive glue at silicon chip surface, after the photoetching of employing top electrode mask, obtain top electrode figure 8;
The 11 step sputtered titanium platinum film
At silicon chip surface sputtered titanium platinum film, the titanium film of sputter, platinum film and golden film thickness are respectively 50 ± 0.5nm, 100 ± 0.5nm and 200 ± 0.5nm;
The 12 step preparation titanium platinum electrode, promptly top electrode 9
Adopt ultrasonic stripping technology, remove positive glue and on titanium platinum film, the titanium platinum electrode, promptly top electrode 9;
The 13 step corrosion sacrifice layer 5 gets cavity body 10
Whole silicon wafer is immersed phosphoric acid, glacial acetic acid, nitric acid and water with 80%: 10%: 5%: in the acid solution that 5% volume ratio mixes, acid solution erodes sacrifice layer 5 by corrosion hole 4, gets cavity body 10;
The 14 step dehydrated, and got attenuator chip 12
Whole silicon wafer immersed in the solution that ethanol and ether mix with 1: 1 volume ratio dewater, it is dry to put into drying agent then, remove the moisture content in the cavity body 10, formation is suspended in the movable membrane structure of drum-type on the cavity body 10, it is optical window reflectance coating 11, the diameter of optical window reflectance coating 11 is 100～150 μ m, and so far, 12 preparations of attenuator chip finish.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03128801 CN1289942C (en) | 2003-05-26 | 2003-05-26 | Prepn process of NEMS electrically adjustable light attenuator chip |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 03128801 CN1289942C (en) | 2003-05-26 | 2003-05-26 | Prepn process of NEMS electrically adjustable light attenuator chip |
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| CN1487333A true CN1487333A (en) | 2004-04-07 |
| CN1289942C CN1289942C (en) | 2006-12-13 |
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| CN 03128801 Expired - Fee Related CN1289942C (en) | 2003-05-26 | 2003-05-26 | Prepn process of NEMS electrically adjustable light attenuator chip |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1321054C (en) * | 2004-07-06 | 2007-06-13 | 华东师范大学 | Preparation method of silicon-based micro mechanical photomodulator chip |
| CN100417587C (en) * | 2005-03-14 | 2008-09-10 | 清华大学 | Manufacturing method of micro-nano combined structure device |
| CN100420620C (en) * | 2005-03-29 | 2008-09-24 | 中国科学院微电子研究所 | Method for preparing electric tunable optical filter chip of micro-electromechanical system |
| CN100509610C (en) * | 2005-11-24 | 2009-07-08 | 中国科学院微电子研究所 | Preparation method of micro-electro-mechanical system vibration jet actuator |
| CN107505702A (en) * | 2017-09-06 | 2017-12-22 | 四川梓冠光电科技有限公司 | A kind of micro electronmechanical type adjustable optical attenuator |
| CN111879796A (en) * | 2020-08-11 | 2020-11-03 | 厦门大学 | Transmission electron microscope high-resolution in-situ fluid freezing chip and preparation method thereof |
| CN113260897A (en) * | 2019-10-25 | 2021-08-13 | 深圳市海谱纳米光学科技有限公司 | Adjustable optical filter device |
| CN115209324A (en) * | 2022-06-12 | 2022-10-18 | 广东氢芯智能科技有限公司 | MEMS microphone chip based on piezoelectric film and preparation method of suspension film unit |
-
2003
- 2003-05-26 CN CN 03128801 patent/CN1289942C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1321054C (en) * | 2004-07-06 | 2007-06-13 | 华东师范大学 | Preparation method of silicon-based micro mechanical photomodulator chip |
| CN100417587C (en) * | 2005-03-14 | 2008-09-10 | 清华大学 | Manufacturing method of micro-nano combined structure device |
| CN100420620C (en) * | 2005-03-29 | 2008-09-24 | 中国科学院微电子研究所 | Method for preparing electric tunable optical filter chip of micro-electromechanical system |
| CN100509610C (en) * | 2005-11-24 | 2009-07-08 | 中国科学院微电子研究所 | Preparation method of micro-electro-mechanical system vibration jet actuator |
| CN107505702A (en) * | 2017-09-06 | 2017-12-22 | 四川梓冠光电科技有限公司 | A kind of micro electronmechanical type adjustable optical attenuator |
| CN107505702B (en) * | 2017-09-06 | 2020-01-03 | 四川梓冠光电科技有限公司 | Micro-electromechanical variable optical attenuator |
| CN113260897A (en) * | 2019-10-25 | 2021-08-13 | 深圳市海谱纳米光学科技有限公司 | Adjustable optical filter device |
| CN111879796A (en) * | 2020-08-11 | 2020-11-03 | 厦门大学 | Transmission electron microscope high-resolution in-situ fluid freezing chip and preparation method thereof |
| CN115209324A (en) * | 2022-06-12 | 2022-10-18 | 广东氢芯智能科技有限公司 | MEMS microphone chip based on piezoelectric film and preparation method of suspension film unit |
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| CN1289942C (en) | 2006-12-13 |
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Granted publication date: 20061213 Termination date: 20100526 |