CN104570208A - Wavelength divider and power divider on basis of stereoscopic straight arrayed waveguide grating - Google Patents

Wavelength divider and power divider on basis of stereoscopic straight arrayed waveguide grating Download PDF

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Publication number
CN104570208A
CN104570208A CN201510054821.8A CN201510054821A CN104570208A CN 104570208 A CN104570208 A CN 104570208A CN 201510054821 A CN201510054821 A CN 201510054821A CN 104570208 A CN104570208 A CN 104570208A
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waveguide
array
interleaver
star coupler
straight
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CN201510054821.8A
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CN104570208B (en
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孙小菡
蒋卫锋
李元
吕涛
崔晗
田勇
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Southeast University
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Southeast University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention discloses a wavelength divider and a power divider on the basis of stereoscopic straight arrayed waveguide grating. AWG (arrayed waveguide grating) chips which are arranged on bottom plates are different from the traditional crank arm type arrayed waveguide structures and are of sinusoidal crank arm arrayed waveguide structures, and the purpose of acquiring optical path difference can be achieved by means of changing cycle numbers of sinusoidal waves; waveguide coupling structures are further arranged above output FPR (floating point routine) (star couplers), so that purposes of the power divider can be achieved. Integrated devices are different from the traditional AWG structures, can be of straight AWG structures and can have waveguide coupling and power dividing functions, AWG elements can be greatly diminished, processes are easy to implement, and the wavelength divider and the power divider have the advantages of small size, light weight, easiness in integration and the like and are applicable to mass production.

Description

a kind of based on the straight array waveguide grating interleaver of solid and power splitter
Technical field
The invention belongs to integrated photonic device field, relate to a kind of based on the straight array waveguide grating wavelength-division/power splitter of solid.
Background technology
AWG (Arrayed Waveguide Grating) is the one preferred technique in dense wavelength division multiplexing system (DWDM).The grating that one group of Waveguide array with equal length difference is formed, uses the ability with partial wave.Its principle is: the multiplexed signals light containing multiple wavelength, after center input channel waveguide exports, in input planar waveguide, diffraction occurs, and arrives on input concave grating and carries out power division, and be coupled into Waveguide array district.Because Waveguide array end face is positioned at grating circle circumferentially, so diffraction light arrives on Waveguide array end face with identical phase place.After Waveguide array transmission, because adjacent Waveguide array maintains identical length difference Δ L, thus at the output light of a certain wavelength exporting adjacent array waveguide on concave grating, there is identical phase differential, this phase differential of light for different wave length is different, so the light of different wave length diffraction occurs in output planar waveguide and focuses on different output channel waveguide positions, complete Wavelength Assignment and demultiplexing function through exporting after channel waveguide exports.The inverse process of this process, if namely flashlight oppositely inputs, then complete multiplexing function, principle is identical.At present both at home and abroad the DWDM technology of exploitation mainly contains 3 types, and they are respectively based on array waveguide grating and dielectric coating filter (TFF) and fiber grating (FBG) technology.AWG is a kind of plane waveguiding device, is the array waveguide grating utilizing PLC technology to make on a chip substrate.As compared to FBG with TTF, AWG has that integrated level is high, number of active lanes is many, insertion loss is little, be easy to the advantages such as batch automatic production.
The technology of current AWG development is developing to integrated, microminiaturization, but AWG connects, interference forces AWG to adopt Stack Technology and concatenation technology, and the bending volume that takies of Rowland ring causes AWG device volume huge and is difficult to integrated, bulky especially after combining with power splitter, with high costs.
Summary of the invention
technical matters:the invention provides and a kind ofly can realize separating different wave length, reduce device size, highly integrated and reliability is high based on the straight array waveguide grating interleaver of solid, provide simultaneously a kind of based on this interleaver, power splitter that power averaging distributes.
technical scheme:of the present invention based on the straight array waveguide grating interleaver of solid, comprise the input waveguide, input star coupler, the sinusoid that connect successively crank arm Waveguide array, export star coupler, output waveguide, the configuration of described input star coupler and output star coupler is right-angled trapezium, equal and the hypotenuse in the two base angle is oppositely arranged, and described sinusoid Waveguide array of cranking arm is made up of the multiple sinusoids be arranged in parallel waveguide of cranking arm.
In the preferred version of interleaver of the present invention, the crank arm shape of cranking arm of waveguide of sinusoid is sinusoidal waveform.
In the preferred version of interleaver of the present invention, sinusoid is cranked arm in Waveguide array, and the crank arm length difference of waveguide of two adjacent sinusoids is determined according to the capacity of interleaver.By the wavelength-division capacity determined, can calculate tradition to crank arm Waveguide array length according to existing AWG computing method, its every root waveguide length and sinusoid waveguide length of cranking arm of cranking arm is consistent.
Of the present invention based on the straight array waveguide grating power splitter of solid, by above-mentioned based on solid straight array waveguide grating interleaver be arranged in described interleaver the merit separation structure exported directly over star coupler and form, described merit separation structure comprises the coupled waveguide array, coupling output star coupler and the coupling output waveguide that connect successively, described coupled waveguide array is made up of the multiple coupled waveguides be arranged in parallel, and described coupling output star coupler is completely the same with the shape exporting star coupler.
In the preferred version of power splitter of the present invention, the shape of cranking arm of described coupled waveguide is sinusoidal waveform, and length is determined according to curved waveguide coupling principle arranged side by side, and the section of the input side of coupled waveguide is parallel with the trapezoidal inclined plane of coupling output star coupler.
In the preferred version of power splitter of the present invention, be provided with separation layer based between the straight array waveguide grating interleaver of solid and merit separation structure.
Device of the present invention adopts deposited silicon dioxide silicon (SiO2) rete on Silicon Wafer; recycling micro-photographing process (Photolithography) and reactive ion etch method (Reactive Ion Etch) define Waveguide array and beam splitter etc.; the method of now in the superiors coated with protective seam; waveguide comprises input waveguide; sinusoid Waveguide array, final output waveguide and the coupled waveguide on upper strata in the middle of two trapezoidal FPR.Sinusoid Waveguide array is due to the trapezoidal shape of FPR, and the cycle of each waveguide is different, thus light path is also different, reach the object of partial wave, and waveguide three-dimensional coupling structure by user's requirement power-take-off, can reach the effect that power splitter is integrated.
beneficial effect:compared with prior art, the present invention has the following advantages:
There is merit simultaneously divide and wavelength-division function.Current existing Waveguide array major part, for meeting the Waveguide array of rowland sphere principle, utilizes the optical path difference characteristic of rowland curved surface to reach the object of wavelength-division.And the present invention utilizes the cycle changing sinusoid Waveguide array to change optical length, by changing the slope of trapezoidal star coupler hypotenuse and changing the means such as sinusoidal wave amplitude and can obtain different periodic inequalities, reach the object leaching required wavelength.Utilizing evanscent field coupling principle simultaneously, the object of the two-way separating the luminous power that user requires can be reached by changing coupling layer thickness.
Integrated level is high, compact conformation, and cost is low.The device of traditional AWG Waveguide array carries out designing according to rowland curved surface principle, and be warp architecture, size is very large but space availability ratio is not high, occupies most of space of wavelength division component.And the sinusoid Waveguide array that the present invention utilizes changes the structure of traditional AWG, making AWG become through type from cranking arm, substantially reducing device length, improve space availability ratio, save material, reduce cost.Solve the problem that the maximum volume of AWG is excessive simultaneously, make raising AWG integrated level, adopt that AWG Stack Technology is integrated becomes possibility.The function of power splitter and interleaver is concentrated on one chip by the present invention, adopts three-dimensional levels structure, compares the plane simple cascade of existing interleaver and power splitter more compact and save material.
Merit divides error low.The present invention utilizes evanscent field to be coupled the light signal obtained through different light path, and the loss of signal of acquisition is little, and fidelity is high.Compared to the method for traditional AWG plane simple cascade power splitter, this method loss is less.
Accompanying drawing explanation
Fig. 1 is a kind of based on the straight array waveguide grating interleaver of solid and power splitter front view;
Fig. 2 is a kind of based on the straight array waveguide grating interleaver of solid and power splitter left view;
Fig. 3 is a kind of based on the straight array waveguide grating interleaver of solid and power splitter right view;
Fig. 4 is a kind of based on the straight array waveguide grating interleaver of solid and power splitter vertical view.
Have in figure: input waveguide 10, input star coupler 20, sinusoid crank arm Waveguide array 30, export star coupler 40, multiple input waveguides that output waveguide 50, coupled waveguide array 60, coupling output star coupler 70, coupling output waveguide 80,101,102,103,104,105 and 106 be the setting of input star coupler end arranged cells.
Embodiment
For further illustrating content of the present invention and feature, below in conjunction with embodiment and Figure of description, the present invention will be further described, but the present invention is not restricted to embodiment.
Of the present invention being structurally provided with based on the straight array waveguide grating interleaver of solid inputs star coupler 20, export star coupler 40, the straight input waveguide 10(number connected successively is adjustable), the output waveguide 50(number connected successively is adjustable), sinusoid is cranked arm Waveguide array 30.
Of the present inventionly structurally be provided with based on the straight array waveguide grating power splitter of solid the coupled waveguide array 60 connected successively, coupling output star coupler 70 and coupling output waveguide 80(number adjustable).
Fig. 1 is that the device realized with this structure has the function of interleaver and power splitter two kinds of devices simultaneously, reduces device volume, reduces costs based on the straight array waveguide grating wavelength-division/power splitter schematic diagram of solid.This embodiment is the AWG device of a 6*4, and adopt SOI material, its Free Spectral Range FSR is 6 △ λ, and △ λ is determined by AWG design capacity, and this example takes 12nm, then centered by FSR wavelength by user's input wavelength λ 0determine, adopt the centre wavelength of 1550nm herein.Then the diffraction progression of this AWG is 22, and in sinusoid array waveguide grating 30, each waveguide length differences is not less than 11 μm, and wherein the shortest waveguide length is not less than 20 μm.Input optical signal is inputted by input waveguide 10, the Waveguide array 30 of cranking arm of the sine wave type structurally arranged is inputted through FPR star coupler 20, structure due to FPR is trapezoidal, can reach and arranges different periodicities and obtain different light path, thus separates the object of different wavelength.So the periodicity of Waveguide array is different, cause light path different, the optical path difference of its every root waveguide is 11 μm, reaches wavelength-division effect.Before arrival output terminal FPR40, above the FPR that ground floor exports, be provided with another FPR, and FPR up has small-sized waveguide-coupled structure.Waveguide-coupled structure can divide light power equably, reaches the object of power splitter.And waveguide-coupled structure direct-coupling on FPR is up through the light wave of different light path, can save the part of cranking arm of AWG.Finally exported by output waveguide 50 and coupling output waveguide 80.
Fig. 2 is right view, and Fig. 3 is left view, and Fig. 4 is vertical view.
Above-described embodiment is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention; some improvement and equivalent replacement can also be made; these improve the claims in the present invention and are equal to the technical scheme after replacing, and all fall into protection scope of the present invention.

Claims (6)

1. one kind based on the straight array waveguide grating interleaver of solid, it is characterized in that: this interleaver comprise connect successively input waveguide (10), input star coupler (20), sinusoid crank arm Waveguide array (30), export star coupler (40), output waveguide (50), the configuration of described input star coupler (20) and output star coupler (40) is right-angled trapezium, equal and the hypotenuse in the two base angle is oppositely arranged, and described sinusoid Waveguide array (30) of cranking arm is made up of the multiple sinusoids be arranged in parallel waveguide of cranking arm.
2. according to claim 1 based on the straight array waveguide grating interleaver of solid, it is characterized in that: the crank arm shape of cranking arm of waveguide of described sinusoid is sinusoidal waveform.
3. according to claim 1 and 2 based on the straight array waveguide grating interleaver of solid, it is characterized in that: described sinusoid is cranked arm in Waveguide array (30), the crank arm length difference of waveguide of two adjacent sinusoids is determined according to the capacity of interleaver.
4. one kind based on the straight array waveguide grating power splitter of solid, it is characterized in that: this power splitter is by claim 1, merit separation structure composition directly over star coupler (40) is exported based on solid straight array waveguide grating interleaver and being arranged in described interleaver described in 2 or 3, described merit separation structure comprises the coupled waveguide array (60) connected successively, coupling output star coupler (70) and coupling output waveguide (80), described coupled waveguide array (60) is made up of the multiple coupled waveguides be arranged in parallel, described coupling output star coupler (70) is completely the same with the shape exporting star coupler (40).
5. according to claim 4 based on the straight array waveguide grating power splitter of solid, it is characterized in that: the shape of cranking arm of described coupled waveguide is sinusoidal waveform, length is determined according to curved waveguide coupling principle arranged side by side, and the section of the input side of coupled waveguide is parallel with the trapezoidal inclined plane of coupling output star coupler (70).
6. according to claim 4 or 5 based on the straight array waveguide grating power splitter of solid, it is characterized in that: be describedly provided with separation layer based between the straight array waveguide grating interleaver of solid and merit separation structure.
CN201510054821.8A 2015-02-03 2015-02-03 One kind is based on three-dimensional straight array waveguide grating interleaver and power splitter Active CN104570208B (en)

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Cited By (6)

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Publication number Priority date Publication date Assignee Title
CN104865639A (en) * 2015-05-06 2015-08-26 东南大学 Three-dimensional integrated optical power splitter/wave splitter based on adjustable grating type microring
CN109301420A (en) * 2018-04-02 2019-02-01 珠海纳睿达科技有限公司 Waveguide power divider
CN109541744A (en) * 2017-09-22 2019-03-29 北京万集科技股份有限公司 A kind of silicon-based optical antenna and preparation method based on reflecting layer
CN111708116A (en) * 2020-07-17 2020-09-25 南京大学 High-density integrated optical waveguide
CN113568095A (en) * 2021-09-23 2021-10-29 长沙思木锐信息技术有限公司 Wide-body surface grating, antenna system thereof and laser radar three-dimensional scanning system
CN113671624A (en) * 2020-05-13 2021-11-19 华为技术有限公司 Optical switching device, redirection method, reconfigurable optical add-drop multiplexer and system

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104865639B (en) * 2015-05-06 2017-10-31 东南大学 Three-dimensionally integrated smooth work(based on tunable optical grid-type micro-loop point/interleaver
CN104865639A (en) * 2015-05-06 2015-08-26 东南大学 Three-dimensional integrated optical power splitter/wave splitter based on adjustable grating type microring
CN109541744A (en) * 2017-09-22 2019-03-29 北京万集科技股份有限公司 A kind of silicon-based optical antenna and preparation method based on reflecting layer
US11194099B2 (en) 2017-09-22 2021-12-07 Vanjee Technology Co., Ltd. Silicon-based optical antenna with reflective layer and preparation method therefor
CN109301420A (en) * 2018-04-02 2019-02-01 珠海纳睿达科技有限公司 Waveguide power divider
CN113671624A (en) * 2020-05-13 2021-11-19 华为技术有限公司 Optical switching device, redirection method, reconfigurable optical add-drop multiplexer and system
CN113671624B (en) * 2020-05-13 2022-11-11 华为技术有限公司 Optical switching device, redirection method, reconfigurable optical add-drop multiplexer and system
WO2022012434A1 (en) * 2020-07-17 2022-01-20 南京大学 High-density integrated optical waveguide
CN111708116B (en) * 2020-07-17 2021-06-08 南京大学 High-density integrated optical waveguide
GB2602757A (en) * 2020-07-17 2022-07-13 Nanjing University High-density integrated optical waveguide
CN111708116A (en) * 2020-07-17 2020-09-25 南京大学 High-density integrated optical waveguide
CN113568095A (en) * 2021-09-23 2021-10-29 长沙思木锐信息技术有限公司 Wide-body surface grating, antenna system thereof and laser radar three-dimensional scanning system
CN113568095B (en) * 2021-09-23 2022-01-28 长沙思木锐信息技术有限公司 Wide-body surface grating, antenna system thereof and laser radar three-dimensional scanning system

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