CN109283626B - Compact Bragg reflector type concave diffraction grating wavelength division multiplexer and design method thereof - Google Patents
Compact Bragg reflector type concave diffraction grating wavelength division multiplexer and design method thereof Download PDFInfo
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- CN109283626B CN109283626B CN201811314398.0A CN201811314398A CN109283626B CN 109283626 B CN109283626 B CN 109283626B CN 201811314398 A CN201811314398 A CN 201811314398A CN 109283626 B CN109283626 B CN 109283626B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
Abstract
The invention discloses a compact Bragg reflector type concave diffraction grating wavelength division multiplexer and a design method thereof, wherein the compact Bragg reflector type concave diffraction grating wavelength division multiplexer comprises an MZI (Mach Zehnder interferometer) interleaving filter, two input waveguides, a Bragg reflector type concave diffraction grating, a free transmission area and two output waveguide arrays. Compared with the traditional concave diffraction grating wavelength division multiplexer, the invention respectively leads odd and even channel lights output by the MZI staggered filter to enter the diffraction grating at different angles, and reduces the frequency interval of the output light of the wavelength division multiplexer by half by utilizing the MZI staggered filter, thereby fully utilizing the circumferential length of a Rowland circle, effectively reducing the size of the device and reducing the process complexity.
Description
[ technical field ] A method for producing a semiconductor device
The invention belongs to the technical field of optical communication and optical detection, and relates to a compact Bragg reflector type concave diffraction grating wavelength division multiplexer and a design method thereof.
[ background of the invention ]
The wavelength division multiplexer is used as an important device in the fields of optical communication and optical detection, and is widely applied to optical communication capacity expansion, gas detection and the like. The planar optical waveguide type wavelength division multiplexer is beneficial to miniaturization and integration of devices and is the mainstream development direction of the wavelength division multiplexer. The planar optical Waveguide wavelength division multiplexer mainly includes an Arrayed Waveguide Grating (AWG), an Etched Diffraction Grating (EDG), and a Bragg reflector type concave Diffraction Grating as a novel EDG, which has been widely paid attention to due to its small size, high Diffraction efficiency, stable performance, and simple process. The Rowland circle imaging principle is utilized, the incident light waveguide is positioned on the Rowland circle, after being reflected by a series of grating tooth surfaces on the grating circle, the incident light waveguide is diffracted and interfered in a free transmission area and is refocused on the Rowland circle, and the integration level of the device is effectively improved.
Pierre Pottier et al designed an elliptic linear Bragg reflector concave Diffraction Grating based on the 1/4 wavelength theory, and based on this, designed and processed a micro spectrometer (Integrated Microspecrometer with Elliptical Bragg reflector Enhanced Diffraction Grating on Silicon Insulator, ACS Photonics,2014,1(5): 430-436); dougenzhen et al use one-dimensional photonic crystal band theory to control the center wavelength of the diffraction band of a Bragg reflector type concave diffraction grating (additive method based on photonic crystal for Bragg capacitive diffraction grating, Optics Communications,2017,385: 92-96). The above studies all have only one input waveguide, do not fully utilize the circumference of the rowland circle, and all face the problem of greatly increasing the device size to realize dense wavelength division multiplexing.
[ summary of the invention ]
The present invention is directed to overcoming the above-mentioned disadvantages of the prior art and providing a Bragg reflector type concave diffraction grating wavelength division multiplexer of a cascaded MZI interleaver filter which is advantageous for miniaturization of devices and a method of designing the same.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
a compact Bragg reflector type concave diffraction grating wavelength division multiplexer comprises an MZI (Mach-Zehnder interferometer) interleaving filter, a first input waveguide, a second input waveguide, a first output waveguide array and a second output waveguide array; the incident ports of the first input waveguide and the second input waveguide and the emergent ports of the first output waveguide array and the second output waveguide array are all on a Rowland circle, the Rowland circle is internally tangent to the grating circle, and the diameter of the Rowland circle is equal to the radius of the grating circle; a concave diffraction grating is arranged at the tangent position of the Rowland circle and the grating circle; the incident port is a free transmission area to the interior of the grating.
The invention further improves the following steps:
the MZI interleaved filter comprises a first straight waveguide and a second straight waveguide; a first curved waveguide, a second curved waveguide, a first coupling region, a third curved waveguide, a fourth curved waveguide, a first asymmetric arm, a second asymmetric arm, a fifth curved waveguide, a sixth curved waveguide, a second coupling region, a third straight waveguide, a seventh curved waveguide, and an eighth curved waveguide;
the first curved waveguide is formed by connecting two 1/4 circular arcs, and two ends of the first curved waveguide are respectively in tangential connection with the first straight waveguide and the first coupling area; the second curved waveguide is formed by connecting two 1/4 circular arcs, and two ends of the second curved waveguide are respectively in tangential connection with the second straight waveguide and the first coupling area; the first coupling area and the second coupling area are both composed of two sections of parallel straight waveguides, and a space is reserved between the two sections of straight waveguides; the third curved waveguide and the fourth curved waveguide are both an 1/4 circular arc, and two ends of the third curved waveguide and the fourth curved waveguide are respectively in tangential connection with the first coupling area and the asymmetric arm; the fifth curved waveguide and the sixth curved waveguide are both an 1/4 circular arc, and two ends of the fifth curved waveguide and the sixth curved waveguide are respectively in tangential connection with the asymmetric arm and the second coupling area; the seventh curved waveguide is an arc with two ends respectively connected with the third straight waveguide and the input waveguide in a tangent manner; the eighth curved waveguide is an arc with two ends respectively connected with the second coupling region and the input waveguide in a tangent mode.
The Rowland circle is inscribed in the grating circle, and the grating circle is O1Point as center of circle, O1C is a radius; rowland circle with O2Point as center of circle, O1C is the diameter, the tangent point C of the two circles is the pole, the pole C is the point O on the Rowland circle3Is connected to O1The included angle between C is a blaze angle theta; the concave diffraction grating is made of two materials n1、n2According to the thickness ratio h1:h2Alternately distributed circular Bragg reflectorsThe grating circle is periodically arranged; refractive index n2The material of (A) is distributed in the shape of O corresponding to the central circular arc of each fan ring3K concentric circles with points as circle centers and adjacent radiuses different by one Bragg period d, wherein the circle in the middle of the group of concentric circles intersects the grating circle at the pole C; the intersection point of each circle and the grating circle and the corresponding intersection point of the adjacent concentric circles behind the intersection point and O3The intersection point of the angular bisector of the connecting line between the points and the circle is the starting point of the taken circular arc, and each intersection point and O3And N layers of circular arcs are arranged in the direction of the connecting line between the points.
A method of designing a compact Bragg reflector type concave diffraction grating wavelength division multiplexer comprising the steps of:
step 1: to ensure that the output waveguides are completely separated, the difference between the incident angles of the two input waveguides relative to the grating tooth surface satisfies:
wherein, deltaλThe adjacent channel interval of the concave diffraction grating is designed, N is the number of output channels corresponding to two input waveguides respectively, β is the diffraction angle, lambda is the incident wavelength, a is the grating period, m is the diffraction order, N is the diffraction ordereffWhen the incident angle to the grating tooth surface is small and the blaze condition is approximately satisfied, β is approximately theta and d is approximately m lambda/2 neff；
Step 2: according to the relationship between the length difference of two branches of waveguides of the MZI interleaved filter and the wavelength interval of the concave grating:
completing the design of the MZI interleaving filter;
and step 3: the MZI interleaving filter is divided into two output branch waveguides
The incident angle is simultaneously input to the concave diffraction grating, so that the input and output waveguides are not crossed.
Compared with the prior art, the invention has the following beneficial effects:
the compact Bragg reflector type concave diffraction grating reduces the interval of an output waveguide channel by half through cascading MZI staggered filters. Compared with the existing design, the invention fully utilizes the circumference of the Rowland circle, and reduces the size of the device by half under the condition that the performances such as channel interval and the like are not changed. The invention provides feasible schemes for miniaturization and integration of a dense wavelength division multiplexer in optical communication and a high-precision micro spectrometer in optical detection.
[ description of the drawings ]
FIG. 1 is a schematic diagram of the structure of a Bragg reflector type concave diffraction grating of a cascaded MZI interleaved filter;
fig. 2 is an output (a) field profile and (b) normalized power spectrum of an SOI material MZI interleaver filter;
FIG. 3 is a diffraction pattern of the overall structure of the present invention.
[ detailed description ] embodiments
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The invention is described in further detail below with reference to the accompanying drawings:
referring to fig. 1, the compact Bragg reflector type concave diffraction grating wavelength division multiplexer of the present invention includes an MZI interleaver, a first input waveguide 10-1, a second input waveguide 10-2, a free transmission region 11, a concave diffraction grating 12, a first output waveguide array 13-1, and a second output waveguide array 13-2.
The MZI interleaved filter comprises a first straight waveguide 1-1, a second straight waveguide 1-2, a first curved waveguide 2-1, a second curved waveguide 2-2, a first coupling region 3, a third curved waveguide 4-1, a fourth curved waveguide 4-2, an asymmetric arm 5, a fifth curved waveguide 6-1, a sixth curved waveguide 6-2, a second coupling region 7, a third straight waveguide 8, a seventh curved waveguide 9-1, and an eighth curved waveguide 9-2.
The first curved waveguide 2-1 is formed by connecting two 1/4 circular arcs, and two ends of the first curved waveguide are respectively tangent to the first straight waveguide 1-1 and the first coupling area 3; the second curved waveguide 2-2 is formed by connecting two 1/4 circular arcs, and two ends of the second curved waveguide are respectively tangent to the second straight waveguide 1-2 and the first coupling area 3; the first coupling area 3 and the second coupling area 7 are both composed of two sections of straight waveguides which are arranged in parallel at a certain interval; the third and fourth curved waveguides 4-1 and 4-2 are both an 1/4 circular arc, and two ends of the 1/4 circular arc are respectively tangent with the first coupling area 3 and the asymmetric arm 5; the fifth curved waveguide 6-1 and the sixth curved waveguide 6-2 are both an 1/4 arc, and two ends of the arc are respectively in tangential connection with the asymmetric arm 5 and the second coupling area 7; the seventh curved waveguide 9-1 is an arc with two ends respectively connected with the third straight waveguide 8 and the input waveguide 10-1 in a tangent manner; the eighth curved waveguide 9-2 is an arc having two ends respectively tangentially connected to the second coupling region 7 and the input waveguide 10-2.
Grating circle with O1Point as center of circle, O1C is a radius; rowland circle with O2Point as center of circle, O1C is the diameter, the tangent point C of the two circles is called the pole, and the point C is the point O on the Rowland circle3Is connected withLine and O1The included angle between C is the blaze angle theta. The concave diffraction grating 12 is made of two materials n1、n2According to the thickness ratio h1:h2The circular Bragg reflectors distributed alternately are periodically arranged on the grating circle. Refractive index n2The material of (A) is distributed in the shape of O corresponding to the central circular arc of each fan ring3Points are circle centers, adjacent radiuses are different from each other by one Bragg period d on K concentric circles, and a circle in the middle of the group of concentric circles intersects with the grating circle at a pole C. The intersection point of each circle and the grating circle and the corresponding intersection point of the adjacent concentric circles behind the intersection point and O3The intersection point of the angular bisector of the connecting line between the points and the circle is the starting point of the taken circular arc, and each intersection point and O3And N layers of circular arcs are arranged in the direction of the connecting line between the points.
Input light is input through a first straight waveguide 1-1 and a second straight waveguide 2-1 of the MZI interleaved filter, enters a first coupling region 3 through a first curved waveguide 2-1 and a second curved waveguide 2-2 to perform 3dB light splitting, and obtains two beams of light which are approximately the same in a third curved waveguide 4-1 and a fourth curved waveguide 4-2. The two beams of light are transmitted through the asymmetric arm 5 to generate phase difference, interference is generated at the second coupling area 7, 3dB light splitting is carried out, and finally two beams of light with staggered wavelengths are obtained at the first input waveguide 10-1 and the second input waveguide 10-2. The connection line of the exit end of the first input waveguide 10-1 and the pole C and O3The angle between C is the angle of incidence of the first input waveguide 10-1 with respect to the grating tooth surface
The line connecting the exit end of the second input waveguide 10-2 and the pole C and O3The angle between C is the angle of incidence of the second input waveguide 10-2 with respect to the grating tooth surface
Emergent light of the first input waveguide 10-1 is transmitted through the free transmission area 11, diffracted and split by the concave diffraction grating 12 and then focused on the first output waveguide array 13-1, and emergent light of the second input waveguide 10-2 is transmitted through the free transmission area 11, diffracted and split by the concave diffraction grating 12 and then focused on the second output waveguide array 13-2.
The method for designing the Bragg reflector type concave diffraction grating wavelength division multiplexer of the cascade MZI staggered filter by adopting the device is characterized by comprising the following steps of:
1) to ensure that the output waveguides are completely separated, the difference between the incident angles of the two input waveguides relative to the grating tooth surface satisfies:
wherein, deltaλWhen the incidence angle relative to the grating tooth surface is small and the blaze condition is approximately met, β can be approximately theta, d can be approximately m lambda/2Neff；
2) According to the relationship between the length difference of two branches of waveguides of the MZI interleaved filter and the wavelength interval of the concave grating:
completing the design of the MZI interleaving filter;
3) the MZI interleaving filter is divided into two output branch waveguides
The incident angle is simultaneously input into the concave diffraction grating, and the reasonable layout ensures that all input and output waveguides are not crossed;
4) and finishing the design.
As shown in fig. 2 and 3, according to the principles of the present invention, a Bragg reflector type concave diffraction grating of SOI material for cascaded MZI interleaved filters is designed, and the parameters are as follows: the input wavelength range is 1.53-1.57 mu m, and the wavelength interval delta between adjacent channels of the concave diffraction gratingλ16 nm; free transmission region silicon refractive index n13.45, its effective refractive index neff2.849, SiO2 refractive index n21.44; the Bragg reflector period width d is 0.63 μm, the filling ratio h of Si10.7, blaze angle theta 45 deg., radius of grating circle R384 μm, input and output waveguide width t 4 μm, and grating scale K161, diffraction order m 2, two angles of incidence
(the absolute values of the two angles of incidence are not required to be equal); the difference Δ L between the two arm lengths of the MZI interleaved filter is 52.7 μm, the distance between the two coupling sections is 0.2 μm, the lengths are 18.8 μm and 56.4 μm, respectively, and the bending radius of each bending waveguide is 10 μm.
The simulation is carried out according to the parameters, and the simulation result shows that after two beams of light output by the MZI interleaving filter pass through the concave diffraction grating, high-efficiency light splitting is obtained on a Rowland circle, the diffraction efficiency is more than 80%, the two beams of output light are effectively separated, the final output wavelength interval is half of the wavelength interval of the designed concave diffraction grating, and the size of the device is greatly reduced.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (3)
1. A compact Bragg reflector type concave diffraction grating wavelength division multiplexer comprising an MZI interleaver, a first input waveguide (10-1), a second input waveguide (10-2), a first output waveguide array (13-1), a second output waveguide array (13-2); the incident ports of the first input waveguide (10-1) and the second input waveguide (10-2) and the emergent ports of the first output waveguide array (13-1) and the second output waveguide array (13-2) are all on a Rowland circle, the Rowland circle is internally tangent to the grating circle, and the diameter of the Rowland circle is equal to the radius of the grating circle; a concave diffraction grating (12) is arranged at the tangent position of the Rowland circle and the grating circle; the incident port is a free transmission area (11) to the interior of the grating;
the MZI interleaving filter comprises a first straight waveguide (1-1) and a second straight waveguide (1-2); a first curved waveguide (2-1), a second curved waveguide (2-2), a first coupling region (3), a third curved waveguide (4-1), a fourth curved waveguide (4-2), a first asymmetric arm (5-1), a second asymmetric arm (5-2), a fifth curved waveguide (6-1), a sixth curved waveguide (6-2), a second coupling region (7), a third straight waveguide (8), a seventh curved waveguide (9-1), and an eighth curved waveguide (9-2);
the first curved waveguide (2-1) is formed by connecting two 1/4 circular arcs, and two ends of the first curved waveguide are respectively in tangential connection with the first straight waveguide (1-1) and the first coupling area (3); the second curved waveguide (2-2) is formed by connecting two 1/4 circular arcs, and two ends of the second curved waveguide are respectively in tangential connection with the second straight waveguide (1-2) and the first coupling area (3); the first coupling area (3) and the second coupling area (7) are both composed of two sections of parallel straight waveguides, and a space is reserved between the two sections of straight waveguides; both the third curved waveguide (4-1) and the fourth curved waveguide (4-2) are 1/4 circular arcs, both ends of the third curved waveguide (4-1) are tangentially connected with the first coupling area (3) and the first asymmetric arm (5-1), and both ends of the fourth curved waveguide (4-2) are tangentially connected with the first coupling area (3) and the second asymmetric arm (5-2); both the fifth curved waveguide (6-1) and the sixth curved waveguide (6-2) are 1/4 circular arcs, two ends of the fifth curved waveguide (6-1) are tangentially connected with the first asymmetric arm (5-1) and the second coupling region (7), and two ends of the sixth curved waveguide (6-2) are tangentially connected with the second asymmetric arm (5-2) and the second coupling region (7); the seventh curved waveguide (9-1) is an arc with two ends respectively connected with the third straight waveguide (8) and the first input waveguide (10-1) in a tangent manner; the eighth curved waveguide (9-2) is an arc with two ends respectively connected with the second coupling region (7) and the second input waveguide (10-2) in a tangent mode.
2. The compact Bragg reflector type concave diffraction grating wavelength division multiplexer according to claim 1, wherein the rowland circle is inscribed in a grating circle, the grating circle being inscribed at O1Point as center of circle, O1C is a radius; rowland circle with O2Point as center of circle, O1C is the diameter, the tangent point C of the two circles is the pole, the pole C is the point O on the Rowland circle3Is connected to O1The included angle between C is a blaze angle theta; the concave diffraction grating (12) is made of two materials n1、n2According to the thickness ratio h1:h2The circular Bragg reflectors which are distributed alternately are periodically arranged on the grating circle; refractive index n2The material of (A) is distributed in the shape of O corresponding to the central circular arc of each fan ring3The point is the center of a circle, the adjacent radiuses have a Bragg circle differencePeriod of timedThe center circle of the group of concentric circles intersects with the grating circle at the pole C; the intersection point of each circle and the grating circle and the corresponding intersection point of the adjacent concentric circles behind the intersection point and O3The intersection point of the angular bisector of the connecting line between the points and the circle is the starting point of the taken circular arc, and each intersection point and O3And N layers of circular arcs are arranged in the direction of the connecting line between the points.
3. A method of designing a compact Bragg reflector type concave diffraction grating wavelength division multiplexer as claimed in claim 2, comprising the steps of:
step 1: to ensure that the output waveguides are completely separated, the difference between the incident angles of the two input waveguides relative to the grating tooth surface satisfies:
wherein, deltaλThe adjacent channel interval of the concave diffraction grating is designed, N is the number of output channels corresponding to two input waveguides respectively, β is the diffraction angle, lambda is the incident wavelength, a is the grating period, m is the diffraction order, N is the diffraction ordereffWhich is the free transmission area effective refractive index, when the incident angle to the grating tooth surface is small and the blaze condition is approximately satisfied, β is approximately theta,dis approximately m lambda/2 neff；
Step 2: according to the relationship between the length difference of two branches of waveguides of the MZI interleaved filter and the wavelength interval of the concave grating:
completing the design of the MZI interleaving filter;
and step 3: the MZI interleaving filter is divided into two output branch waveguides
The incident angle is simultaneously input to the concave diffraction grating, so that the input and output waveguides are not crossed.
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| CN112859246B (en) * | 2020-12-31 | 2023-08-18 | 武汉科宇智联信息技术有限公司 | Echelle grating flat-top type demultiplexer |
| CN113030139B (en) * | 2021-05-31 | 2021-08-13 | 中国工程物理研究院激光聚变研究中心 | Novel crystal and compact imaging device |
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