CN1482071A - Ultrapure water recovery pipe line system of quartz tube rinsing table - Google Patents
Ultrapure water recovery pipe line system of quartz tube rinsing table Download PDFInfo
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- CN1482071A CN1482071A CNA021369674A CN02136967A CN1482071A CN 1482071 A CN1482071 A CN 1482071A CN A021369674 A CNA021369674 A CN A021369674A CN 02136967 A CN02136967 A CN 02136967A CN 1482071 A CN1482071 A CN 1482071A
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Abstract
The present invention provides one hyperpure water recovering pipeline system for quartz tube cleaning bench. The quartz tube cleaning bench has one hyperpure water cleaning tank, the first chemical cleaning tank and the second chemical cleaning tank. The hyperpure water recovering pipeline system includes: the first cleaned water draining pipe connected between the hyperpure water cleaning tank and a hyperpure water recovering pre-treatment system; the first air valve; the second cleaned water draining pipe connected between the first cleaned water draining pipe and the hyperpure water recovering pre-treatment system; the second air valve; one dilute acid draining pipe; the third air valve; one concentrated acid draining pipe; the first chemical cleaning tank water draining pipe; the fourth air valve; the second chemical cleaning tank water draining pipe; and the fifth air valve. The drained waste water is recovered via controlling the air valve.
Description
Technical field
The present invention refers in particular to a kind of ultrapure water recovery pipe line system of quartz tube rinsing table about a kind of pipeline system of quartz tube rinsing table.
Background technology
In manufacture of semiconductor, quartz tube rinsing table (tube cleaner) is a kind of commonly used to clean the board of silica tube.See also Fig. 1, it is traditional quartz tube rinsing table structural representation.As shown in Figure 1, traditional quartz tube rinsing table 1 comprises: a ultrapure water rinse bath (ultra pure water rinse bath) 11, the first matting groove (first chemical bath), 12, the second matting groove (second chemical bath) 13, and a water discharge line configuration-system 14.Wherein, this ultrapure water rinse bath 11 provides the ultrapure water (ultrapure water.UPW) of a cleaning to clean silica tube, this first matting groove 12 and 13 of the second matting grooves provide respectively required acid solution (for example: fluoric acid HF), to clean silica tube.14 of this water discharge line configuration-systems comprise: one acid/corrosive wastewater water shoot 110, the first matting groove water shoot 120, the second matting groove water shoot 130, a concentrated acid water shoot 140, first air valve 150, second air valve 160, the 3rd air valve 170 and the 4th air valve 180 wherein should have first branching pipe 1101 by acid/corrosive wastewater water shoot.
Please consult Fig. 1 again.As shown in Figure 1, an end of this acid/corrosive wastewater water shoot 110 is connected with this ultrapure water rinse bath 11, and the other end then is directed to the receiving tank (not shown) of system, with the acid-base neutralisation system.Be adjacent to ultrapure water rinse bath 11 places on this acid/corrosive wastewater water shoot 110 this first air valve 150 is set, between this first air valve 150 and this ultrapure water rinse bath 11, then be connected with this first branching pipe 1101 in addition, wherein this first branching pipe 1101 is provided with this second air valve 160 in contiguous itself and this acid/corrosive wastewater water shoot 110 junctions, and the other end then is connected to concentrated acid water shoot 140.By the Push And Release of control this first air valve 150 and second air valve 160, then the waste liquid that ultrapure water rinse bath 11 discharged can be looked its concentration and be adjusted and be disposed to acid/corrosive wastewater water shoot 110 or concentrated acid water shoot 140, in order to the utilization of system.
Please consult Fig. 1 again.As shown in Figure 1, an end of this first matting groove water shoot 120 is connected with this first matting groove 12, and the other end then is connected with this concentrated acid water shoot 140, in order to the waste liquid that discharges this first matting groove 12 to this concentrated acid water shoot 140.In addition, an end of this second matting groove water shoot 130 is connected with this second matting groove 13, and the other end then is connected with this concentrated acid water shoot 140, with the waste liquid that discharges this second matting groove 13 to this concentrated acid water shoot 140.Be the discharging of control waste liquid, the 3rd vent valve 170 and 180 of the 4th vent valves are arranged at respectively on this first matting groove water shoot 120 and this second matting groove water shoot 130, use the control discharging of waste liquid to this concentrated acid water shoot 140.
Cooperate above-mentioned quartz tube rinsing table system architecture, its operating process is as follows: at first, silica tube is carried out pre-wash step in this ultrapure tank 11, after pre-washing, this first air valve 150 is opened, other air valves are closed, then acid/the corrosive wastewater of discharging by this ultrapure water rinse bath 11 just can be via acid/corrosive wastewater water shoot 110 system that is disposed to the acid-base neutralisation system.
Then, silica tube is cleaned respectively at this first matting groove 12 or this second matting groove 13, and respectively by the unlatching of controlling the 3rd air valve 170 or the 4th air valve 180, with closing of other air valves, the concentrated acid waste liquid can be disposed to concentrated acid receiving tank (not shown) via concentrated acid water shoot 140.
Then, to place ultrapure water rinse bath 11 to carry out the ultrapure water cleaning first time again through the silica tube that chemical solution cleans is crossed, in cleaning this second air valve 160 of back control for opening, all the other air valves are for closing, and the waste liquid that then has diluted acid just can be disposed in the concentrated acid receiving tank by this concentrated acid water shoot 140.
Subsequently, in ultrapure tank 11, carry out secondary cleaning again, this moment since first of the process ultrapure water that takes second place clean, so the waste liquid acid content is not high, can be collected into acid/corrosive wastewater water shoot 110 with the system of being disposed to the acid-base neutralisation system.Therefore in cleaning this first air valve 150 of back may command for opening, other air valves are for closing, so that waste liquid is discharged by acid/corrosive wastewater water shoot 110.
At last, in ultrapure tank, clean for the last time again, the samely first air valve 150 opened and closed other air valves simultaneously, with waste collection to acid/corrosive wastewater water shoot 110 in order to discharge.
Yet, because the export pipeline of the discharging of waste liquid circuit of conventional quartz pipe rinsing table has only two kinds, that is acid/corrosive wastewater water shoot 110 and concentrated acid water shoot 140, acid wherein/corrosive wastewater water shoot 110 is with the acid-base neutralisation system in order to the waste liquid of collecting ultrapure water rinse bath 11, concentrated acid water shoot 140 then can be collected the waste liquid of waste liquid, the first matting groove 12 and the second matting groove 13 of ultrapure water rinse bath 11, with the concentrated acid receiving tank of fluoric acid treatment system.Yet, can understand traditional design according to the piping system of above-mentioned flow process and quartz tube rinsing table and have following shortcoming:
1. traditional mode can so will increase the capacity of dense fluoric acid receiving tank after silica tube is carried out the ultrapure water cleaning first time with discharging of waste liquid to concentrated acid water shoot 140, and causes the fluoric acid change in concentration of fluoric acid system water inlet big, and dosing is wayward.
2. the draining water quality of ultrapure water rinse bath is fine, satisfies callable requirement, as it directly being disposed to system's disacidify alkali neutralized system, has not only wasted but also increased the load of system.
So traditional method there is no the mechanism of efficient recovery ultrapure water, therefore how to develop the ultrapure water recovery pipe line system of an Improvement type quartz tube rinsing table, real is main research and development problem of the present invention.
Summary of the invention
Main purpose of the present invention is for providing a kind of ultrapure water recovery pipe line system of rinsing table, and wherein this rinsing table has a ultrapure water rinse bath, the first matting groove and the second matting groove.This ultrapure water recovery pipe line system comprises the first rinse water water shoot, and the one end is connected with this ultrapure water rinse bath, and the other end then is directed to a ultrapure water and reclaims pretreatment system; First air valve, it is arranged at and is adjacent to this ultrapure water rinse bath place on this first rinse water water shoot; The second rinse water water shoot, one end are connected between this first rinse water water shoot and this first air valve, and the other end then is directed to this ultrapure water and reclaims pretreatment system; Second air valve, it is arranged at and is adjacent to this first rinse water water shoot junction on this second rinse water water shoot; One diluted acid water shoot, one end are connected between this first rinse water water shoot and this first air valve, and the other end then is directed to a diluted acid receiving tank; The 3rd air valve, it is arranged at and is adjacent to this first rinse water water shoot junction on this diluted acid water shoot; One concentrated acid water shoot is used and is collected the concentrated acid waste liquid and be directed to a concentrated acid receiving tank; The first matting groove water shoot, the one end is connected with this first matting groove, the other end then is connected with this concentrated acid water shoot, in order to the waste liquid that discharges this first matting groove to the concentrated acid water shoot; The 4th air valve, it is arranged on this first matting groove water shoot; The second matting groove water shoot, the one end is connected with this second matting groove, the other end then is connected with this concentrated acid water shoot, in order to the waste liquid that discharges this second matting groove to this concentrated acid water shoot; And one the 5th air valve, it is to be arranged on this second matting groove water shoot.By these air valves of control, to reclaim the waste water that this ultrapure water rinse bath is discharged.
According to conception of the present invention, wherein this rinsing table is a quartz tube rinsing table.
According to conception of the present invention, wherein when this first air valve open and this second, third, the 4th, when closing with the 5th air valve, this first rinse water water shoot can drain into the waste water of this ultrapure water rinse bath this ultrapure water and reclaim pretreatment system.
According to conception of the present invention, wherein when this second air valve open and this first, the 3rd, the 4th, when closing with the 5th air valve, this second rinse water water shoot can drain into the waste water of this ultrapure water rinse bath this ultrapure water and reclaim pretreatment system.
According to conception of the present invention, wherein when the 3rd air valve open and this first, second, the 4th, when closing with the 5th air valve, this diluted acid water shoot can drain into the waste water of this ultrapure water rinse bath in this diluted acid receiving tank.
According to conception of the present invention, wherein when the 4th air valve open and this first, second, third, when closing with the 5th air valve, this first matting groove water shoot and this concentrated acid water shoot can drain into the waste water of this first matting groove in the concentrated acid receiving tank.
According to conception of the present invention, wherein when the 5th air valve open and this first, second, third, when closing with the 4th air valve, this second matting groove water shoot and this concentrated acid water shoot can drain into the waste water of this second matting groove in the concentrated acid receiving tank.
Another object of the present invention is for providing a kind of quartz tube rinsing table, and it comprises: a ultrapure water rinse bath, and its ultrapure water that cleaning is provided is to clean silica tube; The first matting groove, it provides an acid solution, to clean this silica tube; The second matting groove, it provides this acid solution, to clean this silica tube; An and draining recovery line configuration-system.This draining recovery line configuration-system comprises: the first rinse water water shoot, and the one end is connected with this ultrapure water rinse bath, and the other end then is directed to a ultrapure water and reclaims pretreatment system; First air valve, it is arranged on this ground one rinse water water shoot and is adjacent to this ultrapure water rinse bath place; The second rinse water water shoot, one end are connected between this first rinse water water shoot and this first air valve, and the other end then is directed to this ultrapure water and reclaims pretreatment system; Second air valve, it is arranged at and is adjacent to this first rinse water water shoot junction on this second rinse water water shoot; One diluted acid water shoot, one end are connected between this first rinse water water shoot and this first air valve, and the other end then is directed to a diluted acid receiving tank; The 3rd air valve, it is arranged at and is adjacent to this first rinse water water shoot junction on this diluted acid water shoot; One concentrated acid water shoot is used and is collected the concentrated acid waste liquid and be directed to a concentrated acid receiving tank; The first matting groove water shoot, the one end is connected with this first matting groove, the other end then is connected with this concentrated acid water shoot, in order to the waste liquid that discharges this first matting groove to the concentrated acid water shoot; The 4th air valve, it is arranged on this first matting groove water shoot; The second matting groove water shoot, the one end is connected with this second matting groove, the other end then is connected with this concentrated acid water shoot, in order to the waste liquid that discharges this second matting groove to this concentrated acid water shoot; And the 5th air valve, it is arranged on this second matting groove water shoot.By these air valves of control, to reclaim the waste water that this ultrapure water rinse bath is discharged.
The present invention must can get a more deep understanding by following accompanying drawing and detailed description:
Description of drawings
Fig. 1 is the structural representation of a conventional quartz pipe rinsing table.
Fig. 2 is the quartz tube rinsing table structural representation of preferred embodiment of the present invention.
Embodiment
See also Fig. 2, it is for the quartz tube rinsing table structural representation of preferred embodiment of the present invention.As shown in Figure 2, quartz tube rinsing table 2 of the present invention comprises: a ultrapure water rinse bath 21, the first matting groove 22, the second matting groove 23, and a draining recovery line configuration-system 24.Wherein this ultrapure water rinse bath 21 ultrapure water that a cleaning is provided to be cleaning silica tube, this first matting groove 22 and 23 of the second matting grooves provide respectively required acid solution (for example: fluoric acid), with the cleaning silica tube.This 24 of draining recovery line configuration-system comprises: the first rinse water water shoot 241, the second rinse water water shoot 242, a diluted acid water shoot 243, the first matting groove water shoot 244, the second matting groove water shoot 245, a concentrated acid water shoot 246, first air valve 247, second air valve, 248, the three air valves 249, the 4th air valve 250 and the 5th air valve 251.
Please consult Fig. 2 again.As shown in Figure 2, an end of this first rinse water water shoot 241 is connected with this ultrapure water rinse bath 21, and the other end then is directed to ultrapure water and reclaims pretreatment system (not shown), to carry out the recovery of ultrapure water.Be adjacent to ultrapure water rinse bath 21 places on this first rinse water water shoot 241 this first air valve 247 is set, between this first air valve 247 and this ultrapure water rinse bath 21, then be connected with this second rinse water water shoot 242 and this diluted acid water shoot 243 in addition.This second rinse water water shoot 242 is provided with this second air valve 248 in contiguous these first rinse water water shoot, 241 junctions, and its other end then is connected to ultrapure water and reclaims pretreatment system (not shown), to carry out the recovery of ultrapure water.And this diluted acid water shoot 243 is provided with the 3rd air valve 249 in contiguous these first rinse water water shoot, 241 junctions, and its other end then is connected to diluted acid receiving tank (not shown).Control by this first air valve 247, second air valve 248 and the 3rd air valve 249, visual its of the waste liquid that ultrapure water rinse bath 21 discharged contains acid concentration and is disposed to ultrapure water with diluted acid water shoot 243 and reclaims in pretreatment system or the diluted acid receiving tank by the first rinse water water shoot 241, the second rinse water water shoot 242 adjustably, uses in order to reclaiming.
Please consult Fig. 2 again.As shown in Figure 2, an end of this first matting groove water shoot 244 is connected with this first matting groove 22, and the other end then is connected with this concentrated acid water shoot 246, with the waste liquid that discharges this first matting groove 22 to concentrated acid water shoot 246.In addition, an end of this second matting groove water shoot 245 is connected with this second matting groove 23, and the other end then is connected with this concentrated acid water shoot 246, with the waste liquid that discharges this second matting groove 23 to this concentrated acid water shoot 246.Be the discharging of control waste liquid, the 4th vent valve 250 and 251 of the 5th vent valves are arranged at respectively on this first matting groove water shoot 244 and this second matting groove water shoot 245, use the control discharging of waste liquid to this concentrated acid water shoot 246.
Cooperate above-mentioned quartz tube rinsing table structure, its operating process is as follows: at first, silica tube is carried out pre-wash step in ultrapure water rinse bath 21, after pre-washing, this second air valve 248 is opened, other air valves are closed, then the waste water of being discharged by this ultrapure water rinse bath 21 just can be disposed to ultrapure water via the second rinse water water shoot 242 and reclaim pretreatment system, uses in order to reclaiming.
Then, with silica tube respectively at cleaning in this first matting groove 22 or this second matting groove 23, and respectively by the unlatching of controlling the 4th air valve 250 or the 5th air valve 251, with closing of other air valves, the concentrated acid waste liquid can be disposed to concentrated acid receiving tank (not shown) via concentrated acid water shoot 246.
Then, will place ultrapure water rinse bath 21 to carry out the ultrapure water cleaning first time again through the silica tube that chemical solution cleans is crossed.In cleaning back control the 3rd air valve 249 for opening, all the other air valves are for closing, and the waste liquid that then has diluted acid just can be disposed to diluted acid receiving tank (not shown) by this diluted acid water shoot 243.
Subsequently, carry out second cleaning of taking second place in ultrapure tank 21 again, this moment is owing to passed through primary ultrapure water and cleaned, so the waste liquid acid content is not high.Therefore, in cleaning this second air valve 248 of back may command for opening, other air valves reclaim pretreatment system for closing so that waste liquid is disposed to ultrapure water by the second rinse water water shoot 242.
At last, clean for the last time in ultrapure tank 21 again, after cleaning, first air valve 247 is opened, close other air valves simultaneously, reclaim pretreatment system so that waste liquid row is disposed to ultrapure water by the first rinse water water shoot 241.
In sum, compared to traditional structure and method, the present invention system has increased by two new pipelines with known pipeline system framework, that is second rinse water water shoot 242 and rare fluoric acid water shoot 243, and traditional acid/corrosive wastewater water shoot 110 is replaced to the first rinse water water shoot 242, and no longer with its import system with the acid-base neutralisation system, reclaim pretreatment system to carry out the recovery of ultrapure water but import ultrapure water.In addition, the second rinse water water shoot 242 that is increased also can import waste liquid ultrapure water and reclaim the recovery of pretreatment system in order to ultrapure water.Therefore, by the waste water after structure of the present invention and recyclable most of cleaning of method, can reduce the load of waste water system again.
The present invention can appoint and executes that the craftsman thinks and be to modify as all by being familiar with present technique field person, right neitherly takes off the protection of being desired as attached claim scope.
Claims (13)
1. the ultrapure water recovery pipe line system of a rinsing table, wherein this rinsing table has a ultrapure water rinse bath, the first matting groove and the second matting groove, and this ultrapure water recovery pipe line system comprises:
The first rinse water water shoot, the one end is connected with this ultrapure water rinse bath, and the other end then is directed to a ultrapure water and reclaims pretreatment system;
First air valve, it is arranged at and is adjacent to this ultrapure water rinse bath place on this first rinse water water shoot; The second rinse water water shoot, one end are connected between this first rinse water water shoot and this first air valve, and the other end then is directed to this ultrapure water and reclaims pretreatment system;
Second air valve, it is arranged at and is adjacent to this first rinse water water shoot junction on this second rinse water water shoot;
One diluted acid water shoot, one end are connected between this first rinse water water shoot and this first air valve, and the other end then is directed to a diluted acid receiving tank;
The 3rd air valve, it is arranged at and is adjacent to this first rinse water water shoot junction on this diluted acid water shoot;
One concentrated acid water shoot is used and is collected the concentrated acid waste liquid and be directed to a concentrated acid receiving tank;
The first matting groove water shoot, the one end is connected with this first matting groove, the other end then is connected with this concentrated acid water shoot, in order to the waste liquid that discharges this first matting groove to the concentrated acid water shoot;
The 4th air valve, it is arranged on this first matting groove water shoot;
The second matting groove water shoot, the one end is connected with this second matting groove, and the other end then is connected with this concentrated acid water shoot, in order to discharge this second matting groove waste liquid to this concentrated acid water shoot; And
The 5th air valve, it is arranged on this second matting groove water shoot,
By these air valves of control, to reclaim the waste water that this ultrapure water rinse bath is discharged.
2. the ultrapure water recovery pipe line system of rinsing table as claimed in claim 1 is characterized in that, this rinsing table is a quartz tube rinsing table.
3. the ultrapure water recovery pipe line system of the described rinsing table of claim 1, it is characterized in that, when this first air valve open and this second, third, the 4th, when closing with the 5th air valve, this first rinse water water shoot can drain into the waste water of this ultrapure water rinse bath this ultrapure water and reclaim pretreatment system.
4. the ultrapure water recovery pipe line system of the described rinsing table of claim 1, it is characterized in that, when this second air valve open and this first, the 3rd, the 4th, when closing with the 5th air valve, this second rinse water water shoot can drain into the waste water of this ultrapure water rinse bath this ultrapure water and reclaim pretreatment system.
5. the ultrapure water recovery pipe line system of the described rinsing table of claim 1, it is characterized in that, when the 3rd air valve open and this first, second, the 4th, when closing with the 5th air valve, this diluted acid water shoot can drain into the waste water of this ultrapure water rinse bath in this diluted acid receiving tank.
6. the ultrapure water recovery pipe line system of the described rinsing table of claim 1, it is characterized in that, when the 4th air valve open and this first, second, third, when closing with the 5th air valve, this first matting groove water shoot and this concentrated acid water shoot can drain into the waste water of this first matting groove in the concentrated acid receiving tank.
7. the ultrapure water recovery pipe line system of the described rinsing table of claim 1, it is characterized in that, when the 5th air valve open and this first, second, third, when closing with the 4th air valve, this second matting groove water shoot and this concentrated acid water shoot can drain into the waste water of this second matting groove in the concentrated acid receiving tank.
8. quartz tube rinsing table, it comprises:
One ultrapure water rinse bath, its ultrapure water that cleaning is provided is to clean silica tube;
The first matting groove, it provides an acid solution, to clean this silica tube;
The second matting groove, it provides this acid solution, to clean this silica tube; And
One draining recovery line configuration-system, it comprises:
The first rinse water water shoot, the one end is connected with this ultrapure water rinse bath, and the other end then is directed to a ultrapure water and reclaims pretreatment system;
First air valve, it is arranged at and is adjacent to this ultrapure water rinse bath place on this first rinse water water shoot;
The second rinse water water shoot, one end are connected between this first rinse water water shoot and this first air valve, and the other end then is directed to this ultrapure water and reclaims pretreatment system;
Second air valve, it is arranged at and is adjacent to this first rinse water water shoot junction on this second rinse water water shoot;
One diluted acid water shoot, one end are connected between this first rinse water water shoot and this first air valve, and the other end then is directed to a diluted acid receiving tank;
The 3rd air valve, it is arranged at and is adjacent to this first rinse water water shoot junction on this diluted acid water shoot;
One concentrated acid water shoot is used and is collected the concentrated acid waste liquid and be directed to a concentrated acid receiving tank;
The first matting groove water shoot, the one end is connected with this first matting groove, the other end then is connected with this concentrated acid water shoot, in order to the waste liquid that discharges this first matting groove to the concentrated acid water shoot;
The 4th air valve, it is arranged on this first matting groove water shoot;
The second matting groove water shoot, the one end is connected with this second matting groove, and the other end then is connected with this concentrated acid water shoot, in order to discharge this second matting groove waste liquid to this concentrated acid water shoot; And
The 5th air valve, it is arranged on this second matting groove water shoot,
By these air valves of control, to reclaim the waste water that this ultrapure water rinse bath is discharged.
9. the described quartz tube rinsing table of claim 8, it is characterized in that, when this first air valve open and this second, third, the 4th, when closing with the 5th air valve, this first rinse water water shoot can drain into the waste water of this ultrapure water rinse bath this ultrapure water and reclaim pretreatment system.
10. the described quartz tube rinsing table of claim 8, it is characterized in that, when this second air valve open and this first, the 3rd, the 4th, when closing with the 5th air valve, this second rinse water water shoot can drain into the waste water of this ultrapure water rinse bath this ultrapure water and reclaim pretreatment system.
11. the described quartz tube rinsing table of claim 8 is characterized in that, when the 3rd air valve open and this first, second, the 4th, when closing with the 5th air valve, this diluted acid water shoot can drain into the waste water of this ultrapure water rinse bath in this diluted acid receiving tank.
12. the described quartz tube rinsing table of claim 8, it is characterized in that, when the 4th air valve open and this first, second, third, when closing with the 5th air valve, this first matting groove water shoot and this concentrated acid water shoot can drain into the waste water of this first matting groove in the concentrated acid receiving tank.
13. the described quartz tube rinsing table of claim 8, it is characterized in that, when the 5th air valve open and this first, second, third, when closing with the 4th air valve, this second matting groove water shoot and this concentrated acid water shoot can drain into the waste water of this second matting groove in the concentrated acid receiving tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02136967 CN1253376C (en) | 2002-09-13 | 2002-09-13 | Ultrapure water recovery pipe line system of quartz tube rinsing table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02136967 CN1253376C (en) | 2002-09-13 | 2002-09-13 | Ultrapure water recovery pipe line system of quartz tube rinsing table |
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| Publication Number | Publication Date |
|---|---|
| CN1482071A true CN1482071A (en) | 2004-03-17 |
| CN1253376C CN1253376C (en) | 2006-04-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02136967 Expired - Fee Related CN1253376C (en) | 2002-09-13 | 2002-09-13 | Ultrapure water recovery pipe line system of quartz tube rinsing table |
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| CN (1) | CN1253376C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102071727A (en) * | 2010-12-23 | 2011-05-25 | 浙江精功新能源有限公司 | Reuse technology for photovoltaic ultrapure water wastewater and dual-pipeline water supply device |
| CN103817116A (en) * | 2014-02-28 | 2014-05-28 | 连云港市东海县宏伟石英制品有限公司 | Large-caliber quartz tube cleaning method and cleaning machine |
| CN105598097A (en) * | 2016-03-04 | 2016-05-25 | 东海县宝盛石英制品有限公司 | Process for cleaning large-diameter quartz tubes |
| CN106799381A (en) * | 2016-12-21 | 2017-06-06 | 北京七星华创电子股份有限公司 | The classification recovery line system and classified reclaiming method of quartz tube cleaner |
| CN106824901A (en) * | 2017-02-28 | 2017-06-13 | 北京北方华创微电子装备有限公司 | A kind of horizontal quartz boat cleaning machine and cleaning method |
| CN112588691A (en) * | 2020-12-10 | 2021-04-02 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning equipment |
| CN114308848A (en) * | 2022-01-24 | 2022-04-12 | 北京北方华创微电子装备有限公司 | Cleaning equipment |
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2002
- 2002-09-13 CN CN 02136967 patent/CN1253376C/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102071727A (en) * | 2010-12-23 | 2011-05-25 | 浙江精功新能源有限公司 | Reuse technology for photovoltaic ultrapure water wastewater and dual-pipeline water supply device |
| CN102071727B (en) * | 2010-12-23 | 2012-12-12 | 浙江精功新能源有限公司 | Reuse technology for photovoltaic ultrapure water wastewater and dual-pipeline water supply device |
| CN103817116A (en) * | 2014-02-28 | 2014-05-28 | 连云港市东海县宏伟石英制品有限公司 | Large-caliber quartz tube cleaning method and cleaning machine |
| CN103817116B (en) * | 2014-02-28 | 2016-03-02 | 连云港市东海县宏伟石英制品有限公司 | Heavy caliber quartz ampoule cleaning method and cleaning machine |
| CN105598097A (en) * | 2016-03-04 | 2016-05-25 | 东海县宝盛石英制品有限公司 | Process for cleaning large-diameter quartz tubes |
| CN106799381A (en) * | 2016-12-21 | 2017-06-06 | 北京七星华创电子股份有限公司 | The classification recovery line system and classified reclaiming method of quartz tube cleaner |
| CN106824901A (en) * | 2017-02-28 | 2017-06-13 | 北京北方华创微电子装备有限公司 | A kind of horizontal quartz boat cleaning machine and cleaning method |
| CN112588691A (en) * | 2020-12-10 | 2021-04-02 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning equipment |
| CN112588691B (en) * | 2020-12-10 | 2023-02-14 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning equipment |
| CN114308848A (en) * | 2022-01-24 | 2022-04-12 | 北京北方华创微电子装备有限公司 | Cleaning equipment |
| CN114308848B (en) * | 2022-01-24 | 2023-08-18 | 北京北方华创微电子装备有限公司 | Cleaning equipment |
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| CN1253376C (en) | 2006-04-26 |
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