CN103817116A - Large-caliber quartz tube cleaning method and cleaning machine - Google Patents
Large-caliber quartz tube cleaning method and cleaning machine Download PDFInfo
- Publication number
- CN103817116A CN103817116A CN201410070982.1A CN201410070982A CN103817116A CN 103817116 A CN103817116 A CN 103817116A CN 201410070982 A CN201410070982 A CN 201410070982A CN 103817116 A CN103817116 A CN 103817116A
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- CN
- China
- Prior art keywords
- cleaning
- minutes
- quartz ampoule
- spray
- sparge pipe
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/023—Cleaning the external surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
Abstract
The invention provides a large-caliber quartz tube cleaning method, which comprises the following steps that firstly, quartz tubes are placed into an acid washing groove with the hydrofluoric acid concentration being 15 percent to 20 percent to be soaked for 10 to 15 minutes; then, the quartz tubes are placed into an acid washing groove with the hydrofluoric acid concentration being 7 percent to 10 percent to be soaked for 15 to 20 minutes; then, the quartz tubes are placed into a tap water groove to be soaked for 4 to 6 minutes; next, the quartz tubes are placed into a deionized water groove to be soaked for 4 to 6 minutes; the soaked quartz tubes are placed into a cleaning machine to be flushed for 18 to 25 minutes, and the cleaning is completed. The large-caliber quartz tube cleaning method has the advantages that the step-by-step cleaning is carried out on the quartz tubes, so impurities on the quartz tube walls can be thoroughly soaked; through the arrangement of a horizontal slide passage and a slide block, the reciprocating flushing can be realized, and the flushing range is wide; an upper spray head and a lateral spray head are adopted, cleaning dead corners do not exist, and the overall cleaning of the quartz tubes is ensured; a multi-way connecting head is arranged, the cleaning on several groups of quartz tubes in one step can be realized, and the cleaning efficiency is improved; the water consumption of a device is low, the water resources are saved, and good cleaning effects are also obtained.
Description
Technical field
The present invention relates to a kind of quartz ampoule process equipment, particularly a kind of heavy caliber quartz ampoule cleaning method and cleaning machine.
Background technology
In existing quartz ampoule cleaning technique, because quartz ampoule is made up of silica, there is stable chemistry and physical property, more employing hydrofluoric acid in cleaning, common practices is that quartz ampoule is placed on to foam washing in the horizontal descaling bath that fills hydrofluoric acid, the a large amount of water of the complete rear use of foam washing rinses, dry again, although do so simple, quick, but there is the problem of the following aspects: the first, bad if the concentration of acid is grasped, can affect cleaning performance, cause quartz ampoule surface impurity not wash clean clearly, or affect the performance of quartz ampoule; The second, after acid bubble, rinse with large water gaging, not only can cause serious waste to water resource, also have residual acid solution and stay on quartzy tube wall, cause cleaning not thorough, affect cleaning quality.
Summary of the invention
Technical problem to be solved by this invention is for the deficiencies in the prior art, provides a kind of reasonable in design, improves the heavy caliber quartz ampoule cleaning method of cleaning quality under the prerequisite of superperformance that guarantees quartz ampoule.
Another technical problem to be solved by this invention is for the deficiencies in the prior art, provides a kind of reasonable in design, easy to use, saves water resource, the cleaning machine that the heavy caliber quartz ampoule cleaning method of raising cleaning efficiency and quality is used.
Technical problem to be solved by this invention is to realize by following technical scheme, and the present invention is a kind of heavy caliber quartz ampoule cleaning method, is characterized in, first quartz ampoule is put into hydrofluoric acid concentration and be 15%～20% descaling bath, soaks 10～15 minutes; Again quartz ampoule is put into hydrofluoric acid concentration and be 7%～10% descaling bath, soak 15～20 minutes; Again quartz ampoule is put into tank from the beginning, soaked 4～6 minutes; Again quartz ampoule is put into de-ionized water tank, soak 4～6 minutes; Quartz ampoule after soaking is vertically contained in dolly, dolly is pushed in cleaning machine and repeatedly rinsed, described cleaning machine is provided with upper nozzle and the back and forth side spray head of spray of left and right of downward spray, the water spray pressure of upper nozzle is 0.1～0.5MPa, the injection diameter of upper nozzle is 1～5mm, rinse after 18～25 minutes, clean complete.
Another technical problem to be solved by this invention is to realize by following technical scheme, the cleaning machine that a kind of heavy caliber quartz ampoule cleaning method described above is used, be characterized in, comprise rack for cleaning, top at rack for cleaning is provided with horizontal slide, slide block is housed on horizontal slide, on slide block, be fixed with the tube connector of vertical setting, one side of tube connector is provided with the upper nozzle of downward spray, upper nozzle comprises the sparge pipe of horizontally set and is located at the row of three on the tube wall of sparge pipe bottom spray orifice, the axis of every row's spray orifice and sparge pipe be arranged in parallel, the lower end of described sparge pipe and tube connector joins, the back and forth side spray head of spray quartz ampoule outer wall of left and right is housed in the outer end of sparge pipe, described three row's spray orifices comprise the straight spray orifice of a row and are located at the jet orifice of the straight spray orifice of row both sides, the water spraying direction of jet orifice is 20 °～60 ° with the angle of straight spray orifice water spraying direction.
Technical problem to be solved by this invention can also further realize by following technical scheme, in above-described cleaning machine, between described sparge pipe and tube connector, be provided with multi-pass connecting joint, multi-pass connecting joint is contained in the lower end of tube connector, and sparge pipe is contained on multi-pass connecting joint.
The present invention cleans by quartz ampoule is carried out to substep, and the impurity on quartzy tube wall is soaked thoroughly, facilitates the flushing in later stage, and repeatedly acid bubble easily comes off impurity; By establishing horizontal slide and slide block, can realize reciprocal flushing, flushing scope is large; If upper nozzle and side spray head, upper nozzle is responsible for rinsing back and forth the inwall of quartz ampoule, and side spray head is responsible for rinsing back and forth the outer wall of quartz ampoule, does not exist and cleans dead angle, has guaranteed comprehensive cleaning of quartz ampoule; If multi-pass connecting joint, can connect multiple upper nozzles, realize the once cleaning to many groups quartz ampoule, improve cleaning efficiency; The water consumption of this device is few, has saved water resource, has also obtained good cleaning performance.Compared with prior art, it is reasonable in design, easy to use, and saving resource has guaranteed good cleaning performance, has improved cleaning efficiency.
Accompanying drawing explanation
Fig. 1 is the structural representation of cleaning machine in the present invention.
The specific embodiment
Referring to accompanying drawing, further describe concrete technical scheme of the present invention, so that those skilled in the art understands the present invention further, and do not form the restriction to its right.
With reference to Fig. 1, a kind of heavy caliber quartz ampoule cleaning method, first puts into quartz ampoule hydrofluoric acid concentration and is 15%～20% descaling bath, soaks 10～15 minutes; Again quartz ampoule is put into hydrofluoric acid concentration and be 7%～10% descaling bath, soak 15～20 minutes; Again quartz ampoule is put into tank from the beginning, soaked 4～6 minutes; Again quartz ampoule is put into de-ionized water tank, soak 4～6 minutes; Quartz ampoule after soaking is vertically contained in dolly, dolly is pushed in cleaning machine and repeatedly rinsed, described cleaning machine is provided with the back and forth side spray 8 of spray of the upper nozzle of downward spray and left and right, the water spray pressure of upper nozzle is 0.1～0.5MPa, the injection diameter of upper nozzle is 1～5mm, rinse after 18～25 minutes, clean complete.
The cleaning machine that a kind of heavy caliber quartz ampoule cleaning method described above is used, comprise rack for cleaning 1, be provided with horizontal slide 2 on the top of rack for cleaning 1, slide block 3 is housed on horizontal slide 2, on slide block 3, be fixed with the tube connector 4 of vertical setting, one side of tube connector 4 is provided with the upper nozzle of downward spray, upper nozzle comprises the sparge pipe 7 of horizontally set and is located at the row of three on sparge pipe 7 bottom tube walls spray orifice 6, every row's spray orifice 6 be arranged in parallel with the axis of sparge pipe 7, described sparge pipe 7 joins with the lower end of tube connector 4, the back and forth side spray 8 of spray quartz ampoule outer wall of left and right is housed in the outer end of sparge pipe 7, described three row's spray orifices 6 comprise the straight spray orifice of a row and are located at the jet orifice of the straight spray orifice of row both sides, the water spraying direction of jet orifice is 20 °～60 ° with the angle of straight spray orifice water spraying direction.
In described cleaning machine, between described sparge pipe 7 and tube connector 4, be provided with multi-pass connecting joint 5, multi-pass connecting joint 5 is contained in the lower end of tube connector 4, and sparge pipe 7 is contained on multi-pass connecting joint 5, and the multiple sparge pipes 7 of convenient interpolation, realize the flushing to many groups quartz ampoule.
Claims (3)
1. a heavy caliber quartz ampoule cleaning method, is characterized in that: first quartz ampoule is put into hydrofluoric acid concentration and be 15%～20% descaling bath, soak 10～15 minutes; Again quartz ampoule is put into hydrofluoric acid concentration and be 7%～10% descaling bath, soak 15～20 minutes; Again quartz ampoule is put into tank from the beginning, soaked 4～6 minutes; Again quartz ampoule is put into de-ionized water tank, soak 4～6 minutes; Quartz ampoule after soaking is vertically contained in dolly, dolly is pushed in cleaning machine and repeatedly rinsed, described cleaning machine is provided with upper nozzle and the back and forth side spray head of spray of left and right of downward spray, the water spray pressure of upper nozzle is 0.1～0.5MPa, the injection diameter of upper nozzle is 1～5mm, rinse after 18～25 minutes, clean complete.
2. the cleaning machine that described in claim 1, heavy caliber quartz ampoule cleaning method is used, it is characterized in that: comprise rack for cleaning, top at rack for cleaning is provided with horizontal slide, slide block is housed on horizontal slide, on slide block, be fixed with the tube connector of vertical setting, one side of tube connector is provided with the upper nozzle of downward spray, upper nozzle comprises the sparge pipe of horizontally set and is located at the row of three on the tube wall of sparge pipe bottom spray orifice, the axis of every row's spray orifice and sparge pipe be arranged in parallel, the lower end of described sparge pipe and tube connector joins, the back and forth side spray head of spray quartz ampoule outer wall of left and right is housed in the outer end of sparge pipe, described three row's spray orifices comprise the straight spray orifice of a row and are located at the jet orifice of the straight spray orifice of row both sides, the water spraying direction of jet orifice is 20 °～60 ° with the angle of straight spray orifice water spraying direction.
3. cleaning machine according to claim 2, is characterized in that: between described sparge pipe and tube connector, be provided with multi-pass connecting joint, multi-pass connecting joint is contained in the lower end of tube connector, and sparge pipe is contained on multi-pass connecting joint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410070982.1A CN103817116B (en) | 2014-02-28 | 2014-02-28 | Heavy caliber quartz ampoule cleaning method and cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410070982.1A CN103817116B (en) | 2014-02-28 | 2014-02-28 | Heavy caliber quartz ampoule cleaning method and cleaning machine |
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| Publication Number | Publication Date |
|---|---|
| CN103817116A true CN103817116A (en) | 2014-05-28 |
| CN103817116B CN103817116B (en) | 2016-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410070982.1A Active CN103817116B (en) | 2014-02-28 | 2014-02-28 | Heavy caliber quartz ampoule cleaning method and cleaning machine |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105598097A (en) * | 2016-03-04 | 2016-05-25 | 东海县宝盛石英制品有限公司 | Process for cleaning large-diameter quartz tubes |
| CN109982925A (en) * | 2016-11-21 | 2019-07-05 | 休伯特帕尔菲格技术有限公司 | Tool for clean surface |
| CN114260263A (en) * | 2021-12-27 | 2022-04-01 | 亚太轻合金(南通)科技有限公司 | Coil pipe inner wall processing apparatus |
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| CN1482071A (en) * | 2002-09-13 | 2004-03-17 | 中芯国际集成电路制造（上海）有限公 | Ultrapure water recovery pipe line system of quartz tube rinsing table |
| JP2005319370A (en) * | 2004-05-07 | 2005-11-17 | Matsushita Electric Ind Co Ltd | Part washing apparatus |
| US20060237054A1 (en) * | 2002-06-26 | 2006-10-26 | Stmicroelectronics S.R.L. | Apparatus and method for washing quartz parts, particularly for process equipment used in semiconductor industries |
| CN201524673U (en) * | 2009-09-22 | 2010-07-14 | 上海宝钢工业检测公司 | Washing showering apparatus for bearing washer |
| CN201728210U (en) * | 2010-06-04 | 2011-02-02 | 中芯国际集成电路制造(上海)有限公司 | Blow-sweep device |
| CN201832829U (en) * | 2010-09-29 | 2011-05-18 | 张家港市超声电气有限公司 | Spray device on cleaning machine |
| CN201988534U (en) * | 2011-03-02 | 2011-09-28 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
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2014
- 2014-02-28 CN CN201410070982.1A patent/CN103817116B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060237054A1 (en) * | 2002-06-26 | 2006-10-26 | Stmicroelectronics S.R.L. | Apparatus and method for washing quartz parts, particularly for process equipment used in semiconductor industries |
| CN1482071A (en) * | 2002-09-13 | 2004-03-17 | 中芯国际集成电路制造（上海）有限公 | Ultrapure water recovery pipe line system of quartz tube rinsing table |
| JP2005319370A (en) * | 2004-05-07 | 2005-11-17 | Matsushita Electric Ind Co Ltd | Part washing apparatus |
| CN201524673U (en) * | 2009-09-22 | 2010-07-14 | 上海宝钢工业检测公司 | Washing showering apparatus for bearing washer |
| CN201728210U (en) * | 2010-06-04 | 2011-02-02 | 中芯国际集成电路制造(上海)有限公司 | Blow-sweep device |
| CN201832829U (en) * | 2010-09-29 | 2011-05-18 | 张家港市超声电气有限公司 | Spray device on cleaning machine |
| CN201988534U (en) * | 2011-03-02 | 2011-09-28 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105598097A (en) * | 2016-03-04 | 2016-05-25 | 东海县宝盛石英制品有限公司 | Process for cleaning large-diameter quartz tubes |
| CN109982925A (en) * | 2016-11-21 | 2019-07-05 | 休伯特帕尔菲格技术有限公司 | Tool for clean surface |
| CN114260263A (en) * | 2021-12-27 | 2022-04-01 | 亚太轻合金(南通)科技有限公司 | Coil pipe inner wall processing apparatus |
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| Publication number | Publication date |
|---|---|
| CN103817116B (en) | 2016-03-02 |
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Address after: 222300 hump new area, Lianyungang, Jiangsu, Donghai County Patentee after: Jiangsu Hongwei quartz Technology Co., Ltd Address before: 222300 hump new area, Lianyungang, Jiangsu, Donghai County Patentee before: Lianyungang Hongwei Quarts Product Co., Ltd. |
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| CP01 | Change in the name or title of a patent holder |