CN103817116B - Heavy caliber quartz ampoule cleaning method and cleaning machine - Google Patents
Heavy caliber quartz ampoule cleaning method and cleaning machine Download PDFInfo
- Publication number
- CN103817116B CN103817116B CN201410070982.1A CN201410070982A CN103817116B CN 103817116 B CN103817116 B CN 103817116B CN 201410070982 A CN201410070982 A CN 201410070982A CN 103817116 B CN103817116 B CN 103817116B
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- Prior art keywords
- quartz ampoule
- cleaning
- sparge pipe
- soak
- minutes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/023—Cleaning the external surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
A kind of heavy caliber quartz ampoule cleaning method, first puts into the descaling bath that hydrofluoric acid concentration is 15%-20%, soaks 10-15 minute by quartz ampoule; Quartz ampoule is put into the descaling bath that hydrofluoric acid concentration is 7%-10% again, soak 15-20 minute; Again quartz ampoule is put into tank from the beginning, soak 4-6 minute; Again quartz ampoule is put into de-ionized water tank, soak 4-6 minute; Quartz ampoule after immersion is put into cleaning machine rinse, rinse 18-25 minute, clean complete.The present invention, by carrying out substep cleaning to quartz ampoule, makes the impurity on quartzy tube wall soak thoroughly; By establishing horizontal slide and slide block, can realize reciprocal flushing, scope of rinsing is large; If upper nozzle and side spray head, do not exist cleaning dead angle, ensure that comprehensive cleaning of quartz ampoule; If multi-pass connecting joint, realize, once to the cleaning of many group quartz ampoules, improving cleaning efficiency; The water consumption of this device is few, saves water resource, have also obtained good cleaning performance.
Description
Technical field
The present invention relates to a kind of quartz ampoule process equipment, particularly a kind of heavy caliber quartz ampoule cleaning method and cleaning machine.
Background technology
In existing quartz ampoule cleaning technique, because quartz ampoule is made up of silica, there is stable chemistry and physical property, employing hydrofluoric acid more in cleaning, common practices be quartz ampoule is placed on fill hydrofluoric acid horizontal descaling bath in foam washing, the water flushing that the complete rear use of foam washing is a large amount of, dry again, although do simple, quick like this, but there is the problem of the following aspects: the first, if the concentration of acid is grasped bad, then can affect cleaning performance, cause quartz ampoule surface impurity not wash clean clearly, or affect the performance of quartz ampoule; The second, rinse with large water gaging after acid bubble, not only can cause serious waste to water resource, also have residual acid solution and stay on quartzy tube wall, cause cleaning not thorough, affect cleaning quality.
Summary of the invention
Technical problem to be solved by this invention is for the deficiencies in the prior art, provides a kind of reasonable in design, improves the heavy caliber quartz ampoule cleaning method of cleaning quality under the prerequisite of superperformance ensureing quartz ampoule.
Another technical problem to be solved by this invention is for the deficiencies in the prior art, provides a kind of reasonable in design, easy to use, saves water resource, improve the cleaning machine of the heavy caliber quartz ampoule cleaning method of cleaning efficiency and quality.
Technical problem to be solved by this invention is realized by following technical scheme, and the present invention is a kind of heavy caliber quartz ampoule cleaning method, is characterized in, first quartz ampoule is put into the descaling bath that hydrofluoric acid concentration is 15% ~ 20%, soaks 10 ~ 15 minutes; Quartz ampoule is put into the descaling bath that hydrofluoric acid concentration is 7% ~ 10% again, soak 15 ~ 20 minutes; Again quartz ampoule is put into tank from the beginning, soak 4 ~ 6 minutes; Again quartz ampoule is put into de-ionized water tank, soak 4 ~ 6 minutes; Quartz ampoule after soaking vertically is contained in dolly, dolly is pushed in cleaning machine and repeatedly rinses, described cleaning machine is provided with the side spray head that the upper nozzle of spray downwards and left and right back and forth spray, the irrigation pressure of upper nozzle is 0.1 ~ 0.5MPa, the injection diameter of upper nozzle is 1 ~ 5mm, rinse after 18 ~ 25 minutes, clean complete.
Another technical problem to be solved by this invention is realized by following technical scheme, a kind of cleaning machine of heavy caliber quartz ampoule cleaning method described above, be characterized in, comprise rack for cleaning, horizontal slide is provided with on the top of rack for cleaning, horizontal slide is equipped with slide block, slide block is fixed with the vertical tube connector arranged, the side of tube connector is provided with the upper nozzle of spray downwards, the sparge pipe that upper nozzle comprises horizontally set and the three row's spray orifices be located on the tube wall of sparge pipe bottom, the axis being parallel often arranging spray orifice and sparge pipe is arranged, described sparge pipe connects with the lower end of tube connector, the side spray head that left and right back and forth sprays quartz ampoule outer wall is housed in the outer end of sparge pipe, described three row's spray orifices comprise the straight spray orifice of a row and are located at the jet orifice of the straight spray orifice both sides of row, the water spraying direction of jet orifice and the angle of straight spray orifice water spraying direction are 20 ° ~ 60 °.
Technical problem to be solved by this invention can also be realized further by following technical scheme, in above-described cleaning machine, be provided with multi-pass connecting joint between described sparge pipe and tube connector, multi-pass connecting joint is contained in the lower end of tube connector, and sparge pipe is contained on multi-pass connecting joint.
The present invention is by carrying out substep cleaning to quartz ampoule, and the impurity on quartzy tube wall is soaked thoroughly, facilitates the flushing in later stage, repeatedly acid bubble makes impurity easily come off; By establishing horizontal slide and slide block, can realize reciprocal flushing, scope of rinsing is large; If upper nozzle and side spray head, upper nozzle is responsible for the inwall rinsing quartz ampoule back and forth, and side spray head is responsible for the outer wall rinsing quartz ampoule back and forth, there is not cleaning dead angle, ensure that comprehensive cleaning of quartz ampoule; If multi-pass connecting joint, multiple upper nozzle can be connected, realize, once to the cleaning of many group quartz ampoules, improving cleaning efficiency; The water consumption of this device is few, saves water resource, have also obtained good cleaning performance.Compared with prior art, it is reasonable in design, easy to use, saving resource, ensure that good cleaning performance, improves cleaning efficiency.
Accompanying drawing explanation
Fig. 1 is the structural representation of cleaning machine in the present invention.
Detailed description of the invention
Referring to accompanying drawing, further describe concrete technical scheme of the present invention, so that those skilled in the art understands the present invention further, and do not form the restriction to its right.
With reference to Fig. 1, a kind of heavy caliber quartz ampoule cleaning method, first puts into the descaling bath that hydrofluoric acid concentration is 15% ~ 20% by quartz ampoule, soak 10 ~ 15 minutes; Quartz ampoule is put into the descaling bath that hydrofluoric acid concentration is 7% ~ 10% again, soak 15 ~ 20 minutes; Again quartz ampoule is put into tank from the beginning, soak 4 ~ 6 minutes; Again quartz ampoule is put into de-ionized water tank, soak 4 ~ 6 minutes; Quartz ampoule after soaking vertically is contained in dolly, dolly is pushed in cleaning machine and repeatedly rinses, described cleaning machine is provided with side spray that the upper nozzle of spray downwards and left and right back and forth spray 8, the irrigation pressure of upper nozzle is 0.1 ~ 0.5MPa, the injection diameter of upper nozzle is 1 ~ 5mm, rinse after 18 ~ 25 minutes, clean complete.
A kind of cleaning machine of heavy caliber quartz ampoule cleaning method described above, comprise rack for cleaning 1, horizontal slide 2 is provided with on the top of rack for cleaning 1, slide block 3 horizontal slide 2 is equipped with, slide block 3 is fixed with the vertical tube connector 4 arranged, the side of tube connector 4 is provided with the upper nozzle of spray downwards, the sparge pipe 7 that upper nozzle comprises horizontally set and the three row's spray orifices 6 be located on the tube wall of sparge pipe 7 bottom, often arrange spray orifice 6 to arrange with the axis being parallel of sparge pipe 7, described sparge pipe 7 connects with the lower end of tube connector 4, the side spray 8 of the reciprocal spray quartz ampoule outer wall in left and right is housed in the outer end of sparge pipe 7, described three row's spray orifices 6 comprise the straight spray orifice of a row and are located at the jet orifice of the straight spray orifice both sides of row, the water spraying direction of jet orifice and the angle of straight spray orifice water spraying direction are 20 ° ~ 60 °.
In described cleaning machine, be provided with multi-pass connecting joint 5 between described sparge pipe 7 and tube connector 4, multi-pass connecting joint 5 is contained in the lower end of tube connector 4, and sparge pipe 7 is contained on multi-pass connecting joint 5, the multiple sparge pipe 7 of convenient interpolation, realizes the flushing to many group quartz ampoules.
Claims (2)
1. a heavy caliber quartz ampoule cleaning method, is characterized in that: first quartz ampoule is put into the descaling bath that hydrofluoric acid concentration is 15% ~ 20%, soaks 10 ~ 15 minutes, quartz ampoule is put into the descaling bath that hydrofluoric acid concentration is 7% ~ 10% again, soak 15 ~ 20 minutes, again quartz ampoule is put into tank from the beginning, soak 4 ~ 6 minutes, again quartz ampoule is put into de-ionized water tank, soak 4 ~ 6 minutes, quartz ampoule after soaking vertically is contained in dolly, dolly is pushed in cleaning machine and repeatedly rinses, rinse after 18 ~ 25 minutes, clean complete, described cleaning machine comprises rack for cleaning, horizontal slide is provided with on the top of rack for cleaning, horizontal slide is equipped with slide block, slide block is fixed with the vertical tube connector arranged, the side of tube connector is provided with the upper nozzle of spray downwards, the sparge pipe that upper nozzle comprises horizontally set and the three row's spray orifices be located on the tube wall of sparge pipe bottom, the axis being parallel often arranging spray orifice and sparge pipe is arranged, described sparge pipe connects with the lower end of tube connector, the side spray head that left and right back and forth sprays quartz ampoule outer wall is housed in the outer end of sparge pipe, described three row's spray orifices comprise the straight spray orifice of a row and are located at the jet orifice of the straight spray orifice both sides of row, the water spraying direction of jet orifice and the angle of straight spray orifice water spraying direction are 20 ° ~ 60 °, the irrigation pressure of upper nozzle is 0.1 ~ 0.5MPa, the injection diameter of upper nozzle is 1 ~ 5mm.
2. heavy caliber quartz ampoule cleaning method according to claim 1, it is characterized in that: be provided with multi-pass connecting joint between described sparge pipe and tube connector, multi-pass connecting joint is contained in the lower end of tube connector, and sparge pipe is contained on multi-pass connecting joint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410070982.1A CN103817116B (en) | 2014-02-28 | 2014-02-28 | Heavy caliber quartz ampoule cleaning method and cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410070982.1A CN103817116B (en) | 2014-02-28 | 2014-02-28 | Heavy caliber quartz ampoule cleaning method and cleaning machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103817116A CN103817116A (en) | 2014-05-28 |
| CN103817116B true CN103817116B (en) | 2016-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410070982.1A Active CN103817116B (en) | 2014-02-28 | 2014-02-28 | Heavy caliber quartz ampoule cleaning method and cleaning machine |
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| CN (1) | CN103817116B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105598097A (en) * | 2016-03-04 | 2016-05-25 | 东海县宝盛石英制品有限公司 | Process for cleaning large-diameter quartz tubes |
| AT519215B1 (en) * | 2016-11-21 | 2018-07-15 | Hubert Palfinger Tech Gmbh | TOOL FOR CLEANING LARGE SURFACES |
| CN114260263B (en) * | 2021-12-27 | 2023-03-10 | 亚太轻合金(南通)科技有限公司 | Coil pipe inner wall processing apparatus |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1482071A (en) * | 2002-09-13 | 2004-03-17 | 中芯国际集成电路制造（上海）有限公 | Ultrapure water recovery pipe line system of quartz tube rinsing table |
| CN201524673U (en) * | 2009-09-22 | 2010-07-14 | 上海宝钢工业检测公司 | Washing showering apparatus for bearing washer |
| CN201728210U (en) * | 2010-06-04 | 2011-02-02 | 中芯国际集成电路制造(上海)有限公司 | Blow-sweep device |
| CN201832829U (en) * | 2010-09-29 | 2011-05-18 | 张家港市超声电气有限公司 | Spray device on cleaning machine |
| CN201988534U (en) * | 2011-03-02 | 2011-09-28 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040000327A1 (en) * | 2002-06-26 | 2004-01-01 | Fabio Somboli | Apparatus and method for washing quartz parts, particularly for process equipment used in semiconductor industries |
| JP2005319370A (en) * | 2004-05-07 | 2005-11-17 | Matsushita Electric Ind Co Ltd | Part washing apparatus |
-
2014
- 2014-02-28 CN CN201410070982.1A patent/CN103817116B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1482071A (en) * | 2002-09-13 | 2004-03-17 | 中芯国际集成电路制造（上海）有限公 | Ultrapure water recovery pipe line system of quartz tube rinsing table |
| CN201524673U (en) * | 2009-09-22 | 2010-07-14 | 上海宝钢工业检测公司 | Washing showering apparatus for bearing washer |
| CN201728210U (en) * | 2010-06-04 | 2011-02-02 | 中芯国际集成电路制造(上海)有限公司 | Blow-sweep device |
| CN201832829U (en) * | 2010-09-29 | 2011-05-18 | 张家港市超声电气有限公司 | Spray device on cleaning machine |
| CN201988534U (en) * | 2011-03-02 | 2011-09-28 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
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| CN103817116A (en) | 2014-05-28 |
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Address after: 222300 hump new area, Lianyungang, Jiangsu, Donghai County Patentee after: Jiangsu Hongwei quartz Technology Co., Ltd Address before: 222300 hump new area, Lianyungang, Jiangsu, Donghai County Patentee before: Lianyungang Hongwei Quarts Product Co., Ltd. |
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