CN1479126A

CN1479126A - Semiconductor laser V shaped groove fixed optical fiber coaxial device

Info

Publication number: CN1479126A
Application number: CNA021421099A
Authority: CN
Inventors: 陈振宇; 祝宁华
Original assignee: Institute of Semiconductors of CAS
Current assignee: Institute of Semiconductors of CAS
Priority date: 2002-08-26
Filing date: 2002-08-26
Publication date: 2004-03-03
Anticipated expiration: 2022-08-26
Also published as: CN1181369C

Abstract

A coaxial device with semiconductor laser and optical fibre fixed in V-shaped slot is composed of a circular case, a substrate fixed to one end of circular case, an internal supporter, a thermal silicon sink on which there are semiconductor laser and optical fibre, a back light detector, pins, and interconnection wires. Its advantages are high packing productivity and low cost.

Description

Semiconductor laser V-shaped groove fixed fiber coaxial component

Technical field

The invention belongs to technical field of optical fiber communication, the semiconductor laser V-shaped groove fixed fiber coaxial component of more specifically saying so.

Background technology

In Fibre Optical Communication Technology, be extensive use of semiconductor laser as signal source.Because the laser coupled that semiconductor laser need be sent enters optical fiber and can be used for optical fiber telecommunications system, this has just produced the device of the different coupling packing forms of many kinds, for example coaxial packaging, dip and butterfly encapsulation etc.The device of coaxial packaging form is owing to itself have characteristics cheaply, by a large amount of uses in occasions such as Access Network, Metropolitan Area Network (MAN), frame exchange and CATV (cable television).Common coaxial parts of semiconductor laser, optical fiber and laser instrument must carry out the artificial work that is coupled and aligned.Detailed process normally with the exiting surface of optical fiber align laser instrument, after obtaining maximum fiber power, is fixed on optical fiber on the support by laser bonding, soldering or gluing way, then puts shell, and is in package shape.In this process, because the sensitive surface of optical fiber and semiconductor laser and exiting surface physical dimension are all on micron dimension, the two is accurately aimed at this needs a large amount of labour of the cost adjustment work that is coupled the time, and proposes higher technical merit requirement to being engaged in coupling operating technology personnel.This makes the cost of coaxial parts of semiconductor laser be difficult to further reduction, influences its further widespread use.

Summary of the invention

In order to overcome the above problems, the object of the present invention is to provide a kind of semiconductor laser V-shaped groove fixed fiber coaxial component, this device can reach the laser that semiconductor laser is sent and be coupled in the optical fiber with higher efficient, and need not the artificial position of accurately adjusting optical fiber.

The technical scheme that the present invention solves its technical matters is:

A kind of semiconductor laser V-shaped groove of the present invention fixed fiber coaxial component is characterized in that, comprising: a shell, this shell are a circular shell; One base is fixed on an end of shell; One inner support is fixed on the one side of the base in the shell; One has heat sink being fixed on the inner support of silicon of semiconductor laser and optical fiber; One back light detector is fixed on the one side of the base in the shell; Base pin is plugged on the base; Connect semiconductor laser, back light detector and base pin with the interconnection spun gold.

Wherein silicon is formed with a heat sink high table top and a heat sink low table on heat sink, on heat sink high table top a V-shaped groove is arranged vertically, is manufactured with plane electrode and alignment mark on heavy low table; Semiconductor laser is fixed on the plane electrode; One head is that conical optical fiber is fixed in the V-shaped groove with curing glue.

The wherein other end of shell fluid sealant shutoff.

There is a metal level at the back side that wherein said silicon is heat sink.

The invention has the beneficial effects as follows: can fast and conveniently reliably carry out the coupling encapsulation of coaxial parts of semiconductor laser efficiently, need not the artificial fiber position of accurately adjusting, reach and enhance productivity, the purpose that reduces production costs.

Description of drawings

For further specifying technology contents of the present invention, the invention will be further described below in conjunction with drawings and Examples, wherein:

Fig. 1 is the heat sink vertical view that semiconductor laser and optical fiber are installed of going up of the present invention.

Fig. 2 is the heat sink side view that semiconductor laser and optical fiber are installed of going up of the present invention.

Fig. 3 is a semiconductor laser V-shaped groove fixed fiber coaxial component cross sectional plan view of the present invention.

Fig. 4 is a semiconductor laser V-shaped groove fixed fiber coaxial component cross sectional side view of the present invention.

Embodiment

See also Fig. 1 and Fig. 2, in the embodiment of Fig. 1 and Fig. 2, on silicon heat sink 9, make heat sink high table top 1, heat sink low table 2 and V-shaped groove 3 respectively in conjunction with the micromachining technology of dry etching and wet etching.Use microelectronic technique on heat sink low table 2, to make plane electrode 4 and alignment mark 5 then, make back side gold layer at the back side of silicon heat sink 9.In this process, utilize the accuracy of micromachining technology and microelectronic technique to be easy to guarantee the strict center line of aiming at V-shaped groove 3 and alignment mark 5.The waveguide of semiconductor laser 7 and cleavage plane are alignd with the corresponding sign of alignment mark 5, and on the plane electrode 4 that freezes.The head of optical fiber 6 obtains conical shape by the way that grinds or high temperature draws moulding, can improve the numerical aperture NA of optical fiber 6, thereby improves the coupling efficiency of optical fiber 6 and semiconductor laser 7.Optical fiber 6 is adjusted front and back position in V-shaped groove 3, and is fixed in the V-shaped groove 3 with ultra-violet curing glue 8.Because the waveguide position of semiconductor laser 7 utilizes the center of alignment mark 5 and V-shaped groove 3 accurately to aim at, and the degree of depth of heat sink high table top 1 and heat sink low table 2 differences in height, V-shaped groove 3, the diameter of optical fiber 6 have all passed through accurate Calculation, this has just guaranteed the accurate contraposition that optical position of optical fiber 6 and semiconductor laser 7, thereby is easy to such an extent that just can obtain very high coupling efficiency (looking the coupling efficiency of different situations acquisition 20%～60%).In the process of being coupled and aligned, do not need a lot of labour's time, technical merit to the tradesman requires also lower, in the coupling efficiency that guarantees semiconductor laser V-shaped groove fixed fiber coaxial component, reached and enhanced productivity like this, reduced the purpose of production cost.

Please consult Fig. 3 and Fig. 4 again, in the embodiment of Fig. 3 and Fig. 4, the silicon heat sink 9 and the back light detector 14 that will have semiconductor laser 7 and optical fiber 6 freeze respectively on the base inner support 15 of base 10, and fixedly silicon heat sink 9.Connect semiconductor laser 7, back light detector 14 and base pin 13 with interconnection spun gold 16, put shell 11, weld or stick with glue fixedly shell 11 and base 10.With package closure glue 12 sealing shells 11, guarantee the impermeability in the shell 11.

Claims

1, a kind of semiconductor laser V-shaped groove fixed fiber coaxial component is characterized in that, comprising:

One shell, this shell are a circular shell;

One base is fixed on an end of shell;

One inner support is fixed on the one side of the base in the shell;

One has heat sink being fixed on the inner support of silicon of semiconductor laser and optical fiber;

One back light detector is fixed on the one side of the base in the shell;

Base pin is plugged on the base;

Connect semiconductor laser, back light detector and base pin with the interconnection spun gold.

2, semiconductor laser V-shaped groove fixed fiber coaxial component according to claim 1, it is characterized in that, wherein silicon is formed with a heat sink high table top and a heat sink low table on heat sink, on heat sink high table top a V-shaped groove is arranged vertically, is manufactured with plane electrode and alignment mark on heavy low table; The waveguide position of semiconductor laser utilizes the center of alignment mark and V-shaped groove accurately to aim at, and semiconductor laser is fixed on the plane electrode; One head is that conical optical fiber is fixed in the V-shaped groove with curing glue.

3, semiconductor laser V-shaped groove fixed fiber coaxial component according to claim 1 is characterized in that the wherein other end of shell fluid sealant shutoff.

4, semiconductor laser V-shaped groove fixed fiber coaxial component according to claim 1 is characterized in that there is a metal level at the back side that wherein said silicon is heat sink.