CN1428642A - Optical attenuator module with automatic regulation function - Google Patents

Abstract

The optical attenuator module with automatic regulation function includes input optical fibre array, optical attenuator array, output optical fibre array, photoelectric detector array, control circuit and driven circuit, in which between the input optical fibre array, optical attenuator array and output optical fibre array a high-efficiency alignment coupling is implemented, the photoelectric detector array is placed on the top of optical attenuator array and output optical fibre array, and a high-efficiency alignment coupling is ipmlemented. The optical attenuator array, drive circuit, control circuit and photoelectric detector array can implement electric interconnection, and after the incoming optical signal coupled by input optical fibre array is attenuated by optical attenuator array.

Description

Optical attenuator module with automatic regulatory function

Technical field

The present invention relates to the Waveguide mode optical attenuator of light signal strength decay, the present invention is specifically related to a kind of Waveguide mode optical attenuation device that is integrated with the automatic adjusting light signal strength of having of photodetector and control circuit, reflection and the refraction of light beam on the fiber array end face that utilization is come out from the Waveguide mode optical attenuator, the light signal of output is divided into and has fixedly two parts of splitting ratio, wherein export in the optical fiber in the refract light coupled into optical fibres array, reflected light is accepted by the receiving plane of photodetector, utilize detected light signal strength size in the photodetector to judge the damping capacity of optical attenuator, then signal feedback is handled to control circuit, regulate the size of power in the driving circuit by control circuit, thereby reach the order ground of automatic adjustment waveguide type optical attenuator damping capacity.

Background technology

Be accompanied by the develop rapidly of the universal and next Internet net of PC, the revolution of the general communication that causes by digital mobile communication professional guiding personal communication, and the appearance of multimedia communication service.Information explosion has stimulated increasing rapidly of communication service, so-called " optical fiber exhausts " phenomenon has appearred in the most direct result of this growth exactly, because the early stage investment of Fiber Optical Communication System is very huge, mainly be on the one hand because the laying expense of lightguide cable link is very high; On the other hand, existing Fiber Optical Communication System has just taken the sub-fraction of optical fiber low-consumption optical window; In order to make full use of existing fiber optic cable facility to realize dilatation to greatest extent, people generally believe that dense wavelength division multiplexing system (DWDM) is the optimal path that addresses this problem.The commercial Fiber Optical Communication System that maybe will build of building at present all is wavelength-division multiplex system basically.

Along with increasing of port number, the intrinsic problem of dwdm system just comes out.Its subject matter shows the following aspects:

1 with regard to existing the having with regard to the technical merit of laser instrument, also is difficult to accomplish the power level stable and consistent of the wavelength optical signals of coming out from different laser instruments.

2 because the absorption coefficient of optical waveguide material, fiber optic materials is relevant with wavelength, so the power attenuation of the wavelength optical signals of transmitting in optical device and optical fiber is different.

3 owing to the present smooth problem of gain of EDFA also is not well solved, so the light signal of different channels also is different by the resulting gain of Erbium-Doped Fiber Amplifier (EDFA).

If 4 adopt interference filter as demodulation multiplexer, then because the order of reflection difference of wavelength optical signals experience also is different thereby cause the optical power loss of each passage.

So the power level of the light signal in dense wavelength division multiplexing system in each passage is different, the power equalization problem that how to solve each passage be dense wavelength division multiplexing system move towards practicability the problem that must at first solve.

If adopt a kind of device the power attenuation of the light signal that power is bigger in each passage can be got off, so just can realize the power equalization of light signal in each passage, such device is exactly an optical attenuator.The optical attenuator of commercialization at present comprises the displacement type optical attenuator, attenuator type optical attenuator, plated film type optical attenuator, the liquid crystal type optical attenuator, the problem of the existing maximum of optical attenuator of these types is that volume is bigger, the device production technology and the conventional semiconductor technology that are adopted are incompatible, thereby can not be integrated with other optoelectronic device, and can not realize light signal continuously at line attenuation, perhaps stable not good enough (as the environmental performance extreme difference of liquid crystal type optical attenuator) can not satisfy modern communication systems to device miniaturization, the requirement of integrated and high environmental stability.

And employing plane light wave waveguide technology, the Waveguide mode optical attenuator that utilizes the principle of Mach-Zehnder interferometer to make does not then have these restrictions fully, not only can realize miniaturization of devices with the optical attenuator that this technology is made, and owing to adopt conventional semiconductor technology, easily and other optoelectronic device integrated, owing to adopt charge carrier to inject or the mode of heating realizes plasma effect of dispersion or thermo-optic effect, thus realize easily light signal continuously at line attenuation.By appropriate design, it is little to obtain inserting loss, the optical attenuator that power consumption is low.Yet in actual applications, usually need the intensity of the light signal that comes out from optical attenuator is accurately controlled, and require the intensity of light signal to do dynamic adjustment along with the variation of input optical signal, the realization of these functions only depends on optical attenuator not accomplish.

Summary of the invention

The object of the present invention is to provide a kind of optical attenuator module, simple and effective Integrated Solution between a kind of Waveguide mode optical attenuator and the photodetector is provided with automatic regulatory function.Owing to utilized the natural reflection loss of incident light at the fiber array end face, do not need from main light path, to tell light signal and monitor and control, thus the insertion loss that has improved entire device greatly.In addition because this scheme does not need design and integrated beam splitter, and implement on the technology simply, thereby have more practicality.

A kind of optical attenuator module of the present invention with automatic regulatory function, it is characterized in that: this module comprises the input optical fibre array, the optical attenuator array, the output optical fibre array, the photodetector array, control circuit, driving circuit is totally six parts, input optical fibre array wherein, the optical attenuator array, realize high efficiency aligning coupling between the output optical fibre array, the photodetector array places the top of optical attenuator array and output optical fibre array, and realize that high efficiency aligning is coupled, the optical attenuator array, driving circuit, control circuit, the photodetector array realizes interconnected on the electricity, through light signal that the input optical fibre array is coupled into after the decay of optical attenuator array, reflection and refraction take place in the end face in the output optical fibre array, wherein refract light is by the output of output optical fibre array, reflected light becomes electric signal by the photodetector array and sends into control circuit and handle, and return signal reaches the order ground of accurate control optical attenuator damping capacity to driving circuit by the watt level of adjusting driving circuit.

Input optical fibre array, optical attenuator array, output optical fibre array three will realize accurately aiming at coupling, guarantee between input optical fibre array and the optical attenuator array, has maximum coupling efficiency between optical attenuator array and the output optical fibre array, also require their threes to leave certain clearance each other, guaranteeing to enter the input optical fibre array as few as possible, can enter the optical attenuator array as few as possible from the light signal of output optical fibre array end face reflection from the light signal of optical attenuator array input end face reflection.

Optical attenuator adopts Y branching type structure, or adopt the type structure that directly is coupled, or employing multi-mode interference-type structure, no matter adopt which kind of structure, this optical attenuator all comprises one or several input port and output port, and optical attenuator all is the order ground that using plasma effect of dispersion or thermo-optic effect reach modulated light signal intensity, in addition, the input end face of optical attenuator array should be thrown into 8 degree angles, enter the input optical fibre array and influence total system from the light signal of optical attenuator end face reflection avoiding, another end face should be thrown as much as possible and meet at right angles, to reduce the reflection loss of light signal at this end face.

The end face of input optical fibre array should be thrown as much as possible and meet at right angles, and reducing the reflection of light signal on this surface, thereby influences total system.

The end face of output optical fibre array will be thrown into 8 degree angle or other angles, does not enter the optical attenuator array to guarantee the light signal of returning from output optical fibre array end face reflection, but is gathered by the receiving plane of photodetector array.

This functional module also comprises a photodetector array, the number of the photodetector that this photodetector array comprises is equal to, or greater than the number of optical attenuator array output port, require this photodetector to have the ability that feeble signal is responded, and the receiving plane of this photodetector wants enough greatly, to guarantee to collect the light signal of returning from the fiber array end face reflection.

The photodetector array places the top at optical attenuator array and output optical fibre array interface place, its light receiving surface is on the plane at optical attenuator array and output optical fibre array place, and require each photodetector of photodetector array and corresponding optical attenuator on same plane, realize high efficiency coupling between this photodetector array and optical attenuator row, the output optical fibre array, to guarantee that the receiving plane that can be entirely photodetector from the light signal that output optical fibre array end face reflection is returned is received.

To stay the support of large-area not etch areas on this optical attenuator array as the photodetector array, with the waveguide figure of avoiding pushing, external force reason such as collision has been destroyed the optical attenuator array, the existence that guarantee this residual region does not have any impact to the optical characteristics of optical attenuator or can ignore fully in actual applications.

Description of drawings

For further specifying technology contents of the present invention, be described in detail as follows below in conjunction with accompanying drawing, wherein:

Fig. 1 is the floor map of Mache-Zender interferometer;

Fig. 2 is the floor map of type optical attenuator of directly being coupled;

Fig. 3 is the floor map of multi module interference type optical attenuator;

Fig. 4 is the index path that a branch of light reflects and reflects on the interface that is made of three kinds of media;

Fig. 5 is the functional diagram with optical attenuator of automatic intensity adjustments function;

Fig. 6 is the structural representation that does not have the optical attenuator of integrated photodetector;

Fig. 7 is the relation curve between the transmission coefficient at the interface between medium 602 and the medium 603 and reflection coefficient and matching fluid refractive index that calculates according to embodiment.

Fig. 8 is the structural representation with integrated Waveguide mode optical attenuator functional module of automatic regulatory function, photodetector is not fixed on the top of optical attenuator and fiber array, but for for the purpose of directly perceived, photodetector has been drawn as unsettled laying state;

Fig. 9 is the structural representation with integrated Waveguide mode optical attenuator functional module of automatic regulatory function, and photodetector is fixed on the top of optical attenuator and fiber array.

Embodiment

Be used to realize that the structure of optical attenuator mainly contains following three kinds: Y branching type optical attenuator (as shown in Figure 1), directly be coupled type optical attenuator (as shown in Figure 2), multi module interference type optical attenuator (as shown in Figure 3).No matter adopt which kind of structure, its ultimate principle all is the principle of Mache-Zender interferometer, at first introduces this principle below.

The Gaussian beam of coming out from single-mode fiber is coupled into device by input waveguide, enter the single mode waveguide of two symmetries in node A punishment respectively for two bundles that intensity equates, because the structural symmetry on both sides, so the intensity of two-beam equates, the position is also identical mutually, near " Y " font branched structure node A (being called for short Y branched structure 101) has mainly been finished the function that a branch of smooth equal proportion is divided into two bundles, and the electric field component of this two-beam can be as follows with the mathematical expression subrepresentation: $E_1=(A/\sqrt{2})\&CenterDot;\exp \left(\mathrm{i\&omega;t}\right)$ ${\mathrm{<figure-callout\; id="2"\; label="E"\; filenames="A0113169200191.png"\; state="\{\{state\}\}">E</figure-callout>}}_2=(A/\sqrt{2})\&CenterDot;\exp \left(\mathrm{i\&omega;t}\right)$

E ₁And E ₂It is the Electric Field Distribution in two single mode waveguides, ω is the frequency of light signal, A is the amplitude of light signal electric field component, t is the time, because two single mode waveguides are about the central shaft symmetry, and what be concerned about here is the relative phase change of light signal in two single mode waveguides, thus the position relevant with propagation distance mutually part do not show.If change the wherein refractive index of one or two single mode waveguide, then the light signal of propagating therein will be introduced extra phasic difference, in general, can change the refractive index of material by two kinds of physical influences, a kind of is the plasma effect of dispersion, and a kind of is thermo-optic effect.So-called plasma effect of dispersion, the refractive index that is meant material can realize by the mode of mixing or electricity injects with the phenomenon that the variation of carrier concentration changes.So-called thermo-optic effect is meant the phenomenon that the refractive index of material changes with variation of temperature.The electric field component of the light signal in two single mode waveguides of ovennodulation is expressed as follows with formula (2):

This two-beam is combined into a branch of at the Node B place, note: near the Y branched structure 101 Node B mainly is to have finished two-beam is synthesized a branch of function.The electric field component of output light signal is the stack of light signal electric field component in two waveguides, and its total intensity is:

=I _InCos ²Δ in (Δ /2) formula ₁With Δ ₂Represent two single mode waveguides respectively because the extra bits phase that modulation is introduced if only modulate, then has one to be zero in the two on a single mode waveguide.Δ =Δ in the formula ₁-Δ ₂, I _OutBe the intensity of output light field, I _InBe the intensity of input light field, the size of its value is A2.So just can obtain the output intensity of Strength Changes by the size that changes phasic difference Δ between two waveguides, thereby reach the purpose of modulated light signal intensity.

Because two the node A of Mach-Zender interferometer and the light signal of B near zone often are subjected to very big energy loss, so in actual applications in order to improve the performance of device, often adopt the structure of other type to replace.The structure that has beam splitting with other and close beam function at two node locations replaces Y branched structure 101, as direct coupling mechanism 201 and multimode interference 301.

Directly coupling mechanism 201 is to utilize the mutual interference of two mutual spacings between the pattern of very near parallel waveguide to realize beam splitting and close beam function, because the tail end of tunnelling ray is overlapped in two waveguides, so cause intercoupling of energy of electromagnetic field, electromagnetic field energy just shifts between two parallel waveguides mutually, by rational design, can realize that the light signal energy evenly distributes between two parallel waveguides, electromagnetic field is divided into two bundles that intensity equates, thereby has realized the geometric beam-splitting function of light signal.According to the principle of reversibility of optics, this structure can realize closing beam function equally.Multimode interference 301 utilizes be multimode waveguide from map principle, so-calledly just be meant the phenomenon that one or more maps of input electromagnetic field repeat in multimode waveguide from map principle.Multiple-mode interfence type optical attenuator utilizes multimode interference to form double map, and formed two map intensity equate, the position is mutually identical.If utilize two single mode waveguides that these two maps are drawn, just realized the function of equal proportion beam splitting; Equally, utilize opposite process just can realize closing beam function.

Yet in actual applications, usually need accurately to control the damping capacity of light signal, so only have the optical attenuator of introducing above can't realize the function that light signal strength is accurately controlled, also usually need to add other feedback control unit.Consider the factor of actual needs and cost in actual applications, usually the optical attenuator with several same models integrates formation optical attenuator array, because the optical attenuator array is the simple repetition of a plurality of optical attenuators, so we just introduce the realization of the accurate control function of certain concrete optical attenuator light signal strength in the optical attenuator array in conjunction with Fig. 4.

The array of mentioning among the present invention all is meant the combination of a plurality of unit, just be meant the combination of a plurality of inputs, output optical fibre as input, output optical fibre array, the photodetector array is exactly the combination of a plurality of photodetectors, and the optical attenuator array is the combination of a plurality of optical attenuators.So all be meant certain concrete unit in the array when being specifically related to function in the present invention, generally do not do very strict differentiation.

After a branch of light enters optical attenuator 402 by input optical fibre 401, regulate the relative phase change of light signal by the variations in refractive index of regulating 402 two single mode waveguides of optical attenuator, thereby make light signal obtain to a certain degree decay, the light signal that comes out from optical attenuator 402 has to be divided into behind the beam splitting unit 403 of branch beam function by one and has fixedly two bundles of splitting ratio (generally needing not be 1: 1), a branch of output optical fibre 404 that passes through that intensity is bigger in this two-beam is exported, the system that gives uses, only wherein the less a part of light signal of intensity is given photodetector 405, convert light signal to electric signal by photodetector 405, then electric signal being sent to the control circuit 406 with feedback control function handles, and give driving circuit 407 with control signal, realize accurate control by the watt level of regulating driving circuit 407 to optical attenuator 403 damping capacitys.

See also Fig. 5, at first look at below by input optical fibre array 501, optical attenuator array 502, the optical attenuator module that does not have feedback control unit that output optical fibre array 503 constitutes, light signal enters optical attenuator array 502 through input optical fibre array 501, obtain to export from output optical fibre array 503 after the decay to a certain degree, in input 501, filling index-matching fluid between output optical fibre array 503 and the optical attenuator array 502, light signal will experience four optical interfaces in this process, both: the interface that input optical fibre array 501 and index-matching fluid constitute, the optical interface that index-matching fluid and optical attenuator array 502 constitute, the optical interface that optical attenuator array 502 and index-matching fluid constitute, the optical interface that index-matching fluid and output optical fibre array 503 constitute.According to the ultimate principle of optics, reflection and refraction will take place in light at the interface of different medium.

Consider the structure of forming by three kinds of media as shown in Figure 6: when light beam incides the interface of medium 601 and medium 602, with some light reflected back medium 601, in addition some refraction of optical beam enters medium 602, has according to the reflection and the refraction law of optics:

i＝r $\frac{\sin i}{\sin t}=\frac{n_2}{n_1}$ Wherein i is an incident angle, and r is a reflection angle, and t is an angle of transmission, n ₁Be the material refractive index of medium 601, n ₂Material refractive index for medium 602.At this moment reflection R ₁For $R_1=\frac{1}{2}[\frac{{\sin }^2(i-t)}{{\sin }^2(i+t)}+\frac{{\mathrm{tg}}^2(i-t)}{{\mathrm{tg}}^2(i+t)}]$ Transmission coefficient t ₁For $T_1=1-R_1=1-\frac{1}{2}[\frac{{\sin }^2(i-t)}{{\sin }^2(i+t)}+\frac{{\mathrm{tg}}^2(i-t)}{{\mathrm{tg}}^2(i+t)}]$ $\mathrm{\&alpha;}+i=\frac{\mathrm{\&pi;}}{2}$

α is the inclination angle, bottom of medium 601.When light incides the interface of medium 602 and medium 603, reflection and refraction also will take place, have according to the reflection and the refraction law of optics:

θ=, wherein θ is an incident angle, is a reflection angle. $\frac{\sin \mathrm{\&theta;}}{\sin \mathrm{\&beta;}}=\frac{n_3}{{\mathrm{<figure-callout\; id="2"\; label="n"\; filenames="A0113169200191.png"\; state="\{\{state\}\}">n</figure-callout>}}_2},$ Wherein θ is an incident angle, and β is the refraction angle, n ₃Material refractive index for medium 603.Reflection R ₂For ${\mathrm{<figure-callout\; id="2"\; label="R"\; filenames="A0113169200191.png"\; state="\{\{state\}\}">R</figure-callout>}}_2=\frac{1}{2}[\frac{{\sin }^2(\mathrm{\&theta;}-\mathrm{\&beta;})}{{\sin }^2(\mathrm{\&theta;}+\mathrm{\&beta;})}+\frac{{\mathrm{tg}}^2(\mathrm{\&theta;}-\mathrm{\&beta;})}{{\mathrm{tg}}^2(\mathrm{\&theta;}+\mathrm{\&beta;})}]$ Transmission coefficient t ₂For ${\mathrm{<figure-callout\; id="2"\; label="T"\; filenames="A0113169200191.png"\; state="\{\{state\}\}">T</figure-callout>}}_2=1-{\mathrm{<figure-callout\; id="2"\; label="R"\; filenames="A0113169200191.png"\; state="\{\{state\}\}">R</figure-callout>}}_2=1-\frac{1}{2}[\frac{{\sin }^2(\mathrm{\&theta;}-\mathrm{\&beta;})}{{\sin }^2(\mathrm{\&theta;}+\mathrm{\&beta;})}+\frac{{\mathrm{tg}}^2(\mathrm{\&theta;}-\mathrm{\&beta;})}{{\mathrm{tg}}^2(\mathrm{\&theta;}+\mathrm{\&beta;})}]$

θ=π-a-b-t, b are the inclination angle, bottom of medium 603.

A branch of light advances medium 602 from medium 601 refractions, and reflection and refraction take place on the interface of medium 602 and medium 603, and its reflection R and transmission coefficient t are respectively

R＝T ₁·R ₂

T＝T ₁·T ₂

Select following embodiment:

The material refractive index of supposing medium 601 and medium 603 is respectively n ₁=3.5, n ₃=1.5, the bottom inclination alpha of medium 601 is 89 degree, and inclination angle, the bottom b of medium 603 is 80 degree, and medium 602 is an index-matching fluid, its refractive index the unknown, then the material refractive index n of transmission coefficient R of Ji Suaning and medium 102 ₂Relation as shown in Figure 7, as can be seen from the figure by suitably selecting suitable matching fluid, can realize that total reflectance is nearly 10% reflection, thus we just can by gather this part light signal realize to output light signal monitoring function.

Equation above being satisfied equally by the interface that constitutes between optical attenuator array 501, index-matching fluid, output optical fibre array 503 threes obviously, the conclusion that is drawn is suitable for too.If we utilize photodetector array 801 to collect the light signal of returning from output optical fibre array 503 end face reflections, just can realize the monitoring function of light signal, specific embodiment such as Fig. 8, shown in Figure 9:

Left end is the output terminal of optical attenuator array 502 among the figure, it can be an optical attenuator, it also can be the array that a plurality of optical attenuators constitute, right-hand member is an output optical fibre array 503, the fiber count that comprises in the output optical fibre array 503 should be equal to, or greater than the port number of optical attenuator array 502, center top is an optical detector array 801, the number of the detector that wherein comprises is corresponding with the number of optical attenuator, if it is convenient in order to aim in the practicality, also can adopt photodetector, require the spacing of two adjacent fibers of spacing and fiber array of two adjacent devices in optical attenuator array 502 and the photodetector array 801 identical more than the optical attenuator number.In order to reduce the insertion loss of device, require us to reduce the reflection loss of light signal as much as possible at optical attenuator array 502 and matching fluid interface, thus need be with the polishing of the end face of optical attenuator array 502, the inclination angle that makes end face is right angle or near the right angle.The end face of fiber array needs certain inclination angle, to guarantee the having light of certain ratio to return the index-matching fluid from end face reflection, for and optical fiber between bigger coupling efficiency is arranged, the sectional dimension of general fiber waveguide device end face is close with the sectional dimension of optical fiber, because the core diameter of standard single-mode fiber is generally 9 microns, so the sectional dimension of the light beam that comes out from fiber waveguide device should also be micron dimension, because the spacing between optical attenuator array 502 and the output optical fibre array 503 is very little, so even light beam has some to disperse, the radius of its light beam also can not be very big, and general photodetector receiving plane is of a size of a millimeter magnitude, so photodetector receives easily from the light beam of fiber array end face reflection, if the selected matching fluid of having got well, for having the fixedly output optical fibre array at end face inclination angle, the ratio of the intensity of its folded light beam and transmitted light beam also just is fixed up, the intensity of our folded light beam that just can detect according to photodetector is judged the intensity of the transmitted light beam in the optical fiber so, for the optical attenuator in the duty, we just can judge by this method whether the light signal strength of optical attenuator output is the intensity that we need, if the damping capacity that the damping capacity of optical attenuator needs less than us, detector just can return a signal and give control function module, improve the electric current or the voltage of control circuit by control function module, thereby increase the damping capacity of optical attenuator; If the damping capacity that the damping capacity of optical attenuator needs greater than us, detector just can return a signal and give control function module, reduce the electric current or the voltage of driving circuit by control function module, thereby reduce the damping capacity of optical attenuator, so just realized the robotization control function of optical attenuator.

Below introduce in detail the manufacture craft of the integrated optical attenuator functional module that adopts present design with robotization regulatory function, this technology may further comprise the steps:

(1) on the ducting layer on the silicon substrate film, etches the figure of optical attenuator array 502, this optical attenuator can be the Y branching type, type directly is coupled, or the optical attenuator of multiple-mode interfence type structure, when etching waveguide figure, reserve from optical attenuator array 502 figure a distance large-area zone be not etched as subsequent operation in the support 901 of photodetector array 801 (in practical operation, this step is just to have considered during reticle in system), the optical characteristics of optical attenuator is not had any impact in the existence that guarantee this residual region or its influence can be ignored in actual applications fully.

(2) realize the optical attenuator of phase modulation (PM) for the using plasma effect of dispersion, to realize on the ad-hoc location of waveguide modulator zone that behind completing steps (1) N type and P type mix, sputter or thermal evaporation layer of metal again, form the figure of contact conductor then by the method for conventional dry method or wet etching, cover one deck top covering subsequently thereon, attention will be reserved bigger zone (area size of generally reserving should greater than the area of pressure welding point) near the pressure welding point position of the contact conductor of optical attenuator array 502 chips, with guarantee in subsequent technique, to realize between optical attenuator and the control circuit electric can be with comparalive ease when interconnected with contacting that the tinsel of drawing from this pressure welding point and corresponding pressure welding point the control circuit realize; To adopting thermo-optic effect to realize the optical attenuator of phase modulation (PM), after etching the waveguide figure, to before forming contact conductor, cover one deck top covering, avoid causing the electromagnetic field energy loss owing to the absorption of METAL HEATING PROCESS electrode and contact conductor, sputter or thermal evaporation layer of metal then, form the figure of heating electrode and contact conductor then by the method for conventional dry method or wet etching, consider the adhesiveness of metal and covering layer material in the practical application, and the resistance assignment problem between METAL HEATING PROCESS electrode and the contact conductor, usually form heating electrode and contact conductor respectively with different materials, general material such as the titanium that adopt with big resistivity, nickel-chrome waits and forms heating electrode, contact conductor then adopts material such as the silver with less resistive rate, gold, aluminium etc. are so need twice alignment.

(3) optical attenuator array 502 scribings that etching is good, clamp to be placed on the buffing machine with special fixtures then end face is polished, make the input end end face of optical attenuator array 502 become oblique 8 degree angles, the end face that makes optical attenuator array 502 output terminals is right angle or as much as possible near the right angle, do not enter the input optical fibre array 501 and as much as possible little from the light signal of optical attenuator array 502 input end faces reflection guaranteeing, to reduce the energy loss of light signal in the reflection efficiency of optical attenuator array 502 output end faces.

(4) on common silicon chip, utilize wet etching or dry corrosion process to carve and form a series of V-shaped groove or U-lag, then optical fiber is placed V-shaped groove or U-lag internal fixation, cover upper cover plate then, the fiber array made clipped to be placed on unit clamp carry out the end face polishing on the buffing machine, with input optical fibre array 501 end face throw and to meet at right angles or, the end face of output optical fibre array 503 is thrown the structure that becomes to have certain inclination angle (general desirable 8 degree angles) near the right angle.

(5) with the input optical fibre array of making 501, optical attenuator array 502 and output optical fibre array 503 are placed on six accent core systems and aim at coupling, guarantee input optical fibre array 501, realize the highest coupling efficiency between optical attenuator array 502 and the output optical fibre array 503, and make and stay certain spacing between them, avoid on the one hand causing the damage of device end face owing to extrusion or reason such as expand with heat and contract with cold, guarantee that on the other hand the end face that can not be transfused to fiber array 501 from the light signal of optical attenuator array 502 input end faces reflection stops, also to guarantee can be not stopped, put adhesive curing then by the end face of optical attenuator array 502 from the light signal of output optical fibre array 503 end face reflections.

(6) structure of formation specific light electric explorer array 801 on a substrate slice, require the distance between adjacent two optical fiber of spacing of adjacent two photodetectors identical with fiber array, also require the width of substrate slice to be greater than adjacent two spacings of the support that constitutes of etch areas not of optical attenuator simultaneously, to guarantee that large tracts of land that when photodetector array 801 being fixed on the top of optical attenuator array 502 and output optical fibre array 503 its main weight drops on the optical attenuator chip is not on the etch areas, the waveguide figure of avoiding optical attenuator array 801 is because collision, extrusion waits the effect of other external force and damages, thereby improves yield rate.

(7) photodetector array 801 is placed six transfer cores to be coupled and aligned in the system, whether the receiving plane of judging photodetector array 801 by the size of photodetector array 801 output signals is in suitable position, to guarantee realizing high efficiency coupling between photodetector array 801 and optical attenuator array 502, the output optical fibre array 503, to put glue between the photodetector array 801 that be coupled and aligned and optical attenuator array 502 and the output optical fibre array 503, solidify then.

(8) will realize interconnected on the electricity between optical attenuator array 502 and the driving circuit 407, will have and realize interconnected on the electricity between the control circuit 405 of feedback control function and photodetector and the driving circuit 407.Also driving circuit 407 and control circuit 406 can be made in on a slice silicon chip, then as long as realize interconnected between itself and optical attenuator row 502 and the photodetector array 801.

Claims (8)

1, a kind of optical attenuator module with automatic regulatory function, it is characterized in that: this module comprises the input optical fibre array, the optical attenuator array, the output optical fibre array, the photodetector array, control circuit, driving circuit is totally six parts, input optical fibre array wherein, the optical attenuator array, realize high efficiency aligning coupling between the output optical fibre array, the photodetector array places the top of optical attenuator array and output optical fibre array, and realize that high efficiency aligning is coupled, the optical attenuator array, driving circuit, control circuit, the photodetector array realizes interconnected on the electricity, through light signal that the input optical fibre array is coupled into after the decay of optical attenuator array, reflection and refraction take place in the end face in the output optical fibre array, wherein refract light is by the output of output optical fibre array, reflected light becomes electric signal by the photodetector array and sends into control circuit and handle, and return signal reaches the order ground of accurate control optical attenuator damping capacity to driving circuit by the watt level of adjusting driving circuit.

2, optical attenuator module with automatic regulatory function according to claim 1, it is characterized in that: the input optical fibre array, the optical attenuator array, output optical fibre array three will realize accurately aiming at coupling, guarantee between input optical fibre array and the optical attenuator array, has maximum coupling efficiency between optical attenuator array and the output optical fibre array, also require their threes to leave certain clearance each other, guaranteeing to enter the input optical fibre array as few as possible, can enter the optical attenuator array as few as possible from the light signal of output optical fibre array end face reflection from the light signal of optical attenuator array input end face reflection.

3, optical attenuator module with automatic regulatory function according to claim 1, it is characterized in that: optical attenuator adopts Y branching type structure, or adopt the type structure that directly is coupled, or employing multi-mode interference-type structure, no matter adopt which kind of structure, this optical attenuator all comprises one or several input port and output port, and optical attenuator all is the order ground that using plasma effect of dispersion or thermo-optic effect reach modulated light signal intensity, in addition, the input end face of optical attenuator array should be thrown into 8 degree angles, enter the input optical fibre array and influence total system from the light signal of optical attenuator end face reflection avoiding, another end face should be thrown as much as possible and meet at right angles, to reduce the reflection loss of light signal at this end face.

4, the optical attenuator module with automatic regulatory function according to claim 1 is characterized in that: the end face of input optical fibre array should be thrown as much as possible and meet at right angles, and reducing the reflection of light signal on this surface, thereby influences total system.

5, the optical attenuator module with automatic regulatory function according to claim 1, it is characterized in that: the end face of output optical fibre array will be thrown into 8 degree angle or other angles, the light signal of returning from output optical fibre array end face reflection with assurance does not enter the optical attenuator array, but is gathered by the receiving plane of photodetector array.

6, the optical attenuator module with automatic regulatory function according to claim 1, it is characterized in that: this functional module also comprises a photodetector array, the number of the photodetector that this photodetector array comprises is equal to, or greater than the number of optical attenuator array output port, require this photodetector to have the ability that feeble signal is responded, and the receiving plane of this photodetector wants enough greatly, to guarantee to collect the light signal of returning from the fiber array end face reflection.

7, optical attenuator module with automatic regulatory function according to claim 1, it is characterized in that: the photodetector array places the top at optical attenuator array and output optical fibre array interface place, its light receiving surface is on the plane at optical attenuator array and output optical fibre array place, and require each photodetector of photodetector array and corresponding optical attenuator on same plane, this photodetector array and optical attenuator row, realize high efficiency coupling between the output optical fibre array, to guarantee that the receiving plane that can be entirely photodetector from the light signal that output optical fibre array end face reflection is returned is received.

8, the optical attenuator module with automatic regulatory function according to claim 1, it is characterized in that: will stay the support of large-area not etch areas on this optical attenuator array as the photodetector array, with the waveguide figure of avoiding pushing, external force reason such as collision has been destroyed the optical attenuator array, the existence that guarantee this residual region does not have any impact to the optical characteristics of optical attenuator or can ignore fully in actual applications.

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