CN110989102A - Silicon-based WDM optical transmission device based on VCSEL array hybrid integration and optical fiber vertical packaging - Google Patents
Silicon-based WDM optical transmission device based on VCSEL array hybrid integration and optical fiber vertical packaging Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
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- G—PHYSICS
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
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- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
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- H04B10/501—Structural aspects
- H04B10/503—Laser transmitters
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Abstract
The invention discloses a silicon-based WDM optical transmission device based on VCSEL array hybrid integration and optical fiber vertical packaging, which comprises a VCSEL laser, a silicon-based optical transmission chip, a silicon substrate and a single-mode optical fiber, and is characterized in that: the VCSEL laser is adopted to vertically emit light downwards and is coupled into the silicon-based optical transmitting chip, and module optical output is completely vertically coupled and output into the vertically placed single-mode optical fiber, so that interconnection and intercommunication are realized with an external optical communication network; the invention provides a high-density integrated, low-power consumption and low-cost silicon photonic integrated high-speed optical communication transmitting device based on an advanced silicon-based optoelectronic integration technology, which is different from other existing schemes in the market and can meet the requirements of VCSEL array hybrid integration and optical fiber vertical packaging, thereby creating conditions for low-cost light source integration and optical fiber packaging.
Description
Technical Field
The invention relates to the technical field of silicon-based optoelectronic integration and optical communication, in particular to a silicon-based WDM optical transmission device based on VCSEL array hybrid integration and optical fiber vertical packaging.
Background
At present, with the rapid expansion of applications such as cloud computing, mobile internet, data center, and the like, a traditional communication mode is suffering from an increasingly serious bandwidth bottleneck, which directly results in the development of the global optical fiber communication industry towards a mode with higher integration level and lower power consumption, and as a key technology in optical fiber communication, how to realize an integrated small-size, low-power consumption, and low-cost optical communication transceiver module becomes a direct and urgent demand of the market. In order to realize a highly integrated optical module, scientists propose a solution of a silicon-based optical communication module, and develop a series of optoelectronic devices based on a silicon substrate material and by utilizing a mature CMOS process and integrate the optoelectronic devices on the same substrate to form an optoelectronic monolithic integrated circuit or an optoelectronic hybrid integrated circuit. Due to the mature and cheap silicon process and the microminiaturization characteristic of a silicon-based optical waveguide device, a silicon-based optical module has the advantages of high integration level, low cost and the like, and attracts a plurality of communication internet huge heads such as Intel, IBM, Luxtera, Cisco, Huawei, Mellanox, Oracle and the like to enter the field. Some companies already have related products, and typically include a 2 × 100G-PSM4 embedded optical transceiver module manufactured by Luxtera corporation and a 100G CWDM4 QSFP28 optical transceiver module manufactured by Intel corporation.
Although the silicon-based optical transceiver module has the advantages of CMOS process compatibility, high integration level, etc., the cost advantage is difficult to be embodied due to the limited yield of the silicon optical wafer and the high packaging cost, and the performance advantage is not fully embodied due to the low optical coupling efficiency and the large transmission loss. It can be seen that a low cost light source integration package and a high efficiency optical coupling package are critical to silicon-based optical modules. Taking products of Intel and Luxtera as examples, a light source integration scheme and an optical packaging technology are both key technologies in product research and development, and the Intel integrated light source is based on heterogeneous integration and evanescent wave optical coupling technologies between an InP laser and a silicon wafer. The Luxtera corporation, based on discrete InP laser micro-optics packaging and grating coupling, has the advantages that laser performance can be guaranteed, and has the disadvantages that laser micro-packaging process is complex, cost is high, and optical coupling efficiency of the laser is only 15%. Obviously, the difficulty of low-cost integrated light source and high-efficiency optical coupling prevents the silicon-based optical module from fully realizing market potential, and the research on the integrated light source scheme and the high-efficiency optical coupling packaging scheme of the silicon optical transmitting chip has important research significance and potential market application value.
Therefore, it is an urgent need to solve the problem of providing a high-density integrated, low-power consumption and low-cost silicon photonic integrated high-speed optical communication transmission device, which meets the requirements of VCSEL array hybrid integration and optical fiber vertical packaging, and realizes low-cost light source integration and optical fiber packaging.
Disclosure of Invention
In view of the above, the present invention provides a silicon-based WDM optical transmission apparatus based on VCSEL array hybrid integration and fiber vertical package.
In order to achieve the purpose, the invention adopts the following technical scheme:
silicon-based WDM optical transmission device based on VCSEL array hybrid integration and optical fiber vertical packaging comprises a VCSEL laser, a silicon-based optical transmission chip, a silicon substrate and a single-mode optical fiber, and is characterized in that: the VCSEL laser is adopted to vertically emit light downwards and is coupled into the silicon-based optical transmitting chip, and module optical output is completely vertically coupled and output into the vertically placed single-mode optical fiber, so that interconnection and intercommunication are realized with an external optical communication network;
the silicon-based optical transmitting chip comprises: the optical fiber coupling device comprises at least one silicon-based electro-optical modulator, at least one silicon optical waveguide, a first 1 xN optical wavelength division multiplexer, a second 1 xN optical wavelength division multiplexer, a 1 x 2 Mach-Zehnder type optical multiplexer and a single-mode optical fiber, wherein the output end of a VCSEL laser is connected with the input end of the 1 xN optical wavelength division multiplexer through the silicon-based electro-optical modulator and the silicon optical waveguide, and the output end of the 1 x 2 Mach-Zehnder type optical multiplexer is coupled and output through the vertically arranged single-mode optical fiber;
the silicon-based electro-optical modulator adopts a bidirectional grating complete vertical optical interface as an optical coupling interface of the VCSEL laser and the silicon-based electro-optical modulator; the bidirectional grating complete vertical optical interface divides the light beam and transmits the light beam to the input end of the silicon-based electro-optical modulator;
the 1 multiplied by 2 Mach-Zehnder type optical multiplexer adopts a bidirectional grating completely vertical optical interface as an optical coupling interface of the 1 multiplied by 2 Mach-Zehnder type optical multiplexer and the single-mode optical fiber; and the bidirectional grating complete vertical optical interface is used for combining two beams of light in the 1 multiplied by 2 Mach-Zehnder type optical multiplexer and then transmitting the combined light to the single-mode optical fiber.
Preferably, the silicon-based electro-optic modulator comprises the bidirectional grating complete vertical optical interface, the silicon optical waveguide, a silicon thermal optical phase shifter, two silicon electro-optic phase shifters, an on-chip integrated terminal matching load, a coplanar waveguide traveling wave electrode, and an optical beam combiner, and the VCSEL laser outputs direct current light which is coupled into the two silicon optical waveguides through the bidirectional grating complete vertical optical interface and passes through the silicon thermal optical phase shifter and the two silicon electro-optic phase shifters to be connected with the optical beam combiner and outputs modulated light.
Preferably, the 1 × 2 mach-zehnder optical multiplexer and the two 1 × N optical wavelength division multiplexers satisfy wavelength matching, and are cascaded to form an optical wavelength division multiplexing demultiplexer with a total channel number of 2N; the 1 × 2 mach-zehnder type optical multiplexer is composed of the bidirectional grating complete vertical optical interface, the silicon optical waveguide, two silicon thermo-optical phase shifters and a 2 × 2 optical coupler, and light passing through the 1 × 2 mach-zehnder type optical multiplexer is coupled and output through the bidirectional grating complete vertical optical interface and enters the vertically placed single-mode optical fiber.
Preferably, the bi-directional grating perfectly vertical optical interface has two waveguide output ports, and adopts sub-wavelength grating and apodized grating structures to improve the upward directivity of the grating and the mode field matching between the grating diffraction field and the fiber mode field, thereby increasing the total coupling efficiency of the grating and reducing spurious light reflections.
According to the technical scheme, compared with the prior art, the invention discloses a silicon-based WDM light sending device which adopts a silicon-based optoelectronic integration technology to combine a three-five-group VCSEL laser and a silicon-based optoelectronic device to form a silicon-based WDM light sending module, gives full play to the advantages of high silicon optoelectronic integration level and low cost, simultaneously gives play to the characteristics of low cost and high light efficiency of the VCSEL, provides convenience for low-cost light source integration, adopts a bidirectional grating complete vertical optical interface to construct a Mach-Zehnder type optical multiplexer, is cascaded with two matched optical wavelength division multiplexers to realize an interleaved optical wavelength division multiplexer, provides a complete vertical optical interface for the silicon-based WDM light sending module, and accordingly realizes low-cost optical fiber packaging based on VCSEL array hybrid integration and optical fiber vertical packaging.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a block diagram of a structure of a silicon-based wdm optical transmission module according to the present invention.
Fig. 2 is a schematic structural diagram of a silicon-based electro-optic modulator provided by the present invention.
Fig. 3 is a schematic diagram of a 1 × 2 mach-zehnder optical multiplexer according to the present invention.
Fig. 4 is a schematic structural diagram of a 1 × 2 optical wavelength division multiplexer implemented by using a two-channel AMMI according to the present invention.
Fig. 5 is a schematic diagram of a bidirectional grating complete vertical optical interface structure provided by the present invention.
FIG. 6 shows a simulation result of a 4-channel 20Gb/s optical transmission eye diagram implemented by the present invention according to an embodiment.
Wherein: 100 is a silicon substrate, 101 is a VCSEL laser, 102 is a silicon-based electro-optic modulator, 103 is a bidirectional grating complete vertical optical interface, 104 is a silicon optical waveguide, 105 is a first 1 xN optical wavelength division multiplexer, 106 is a second 1 xN optical wavelength division multiplexer, 107 is a 1 x 2 Mach-Zehnder type optical multiplexer, and 108 is a single-mode optical fiber;
201 is a spot size converter, 202 is a silicon thermoelectric phase shifter, 203 is a silicon electro-optic phase shifter, 204 is an on-chip integrated transmission line terminal load, 205 is an MMI optical combiner, and 206 is a coplanar waveguide traveling wave electrode;
302 is a 2 × 2 optical coupler;
401 is an output tapered waveguide, 402 is an output waveguide, 403 is a multi-mode interference waveguide, 404 is an input waveguide, and 405 is an input tapered waveguide;
501 is a side waveguide, 502 is a grating structure, 503 is a silica buried oxide layer, and 504 is a silica upper cladding layer.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention discloses a silicon-based WDM optical transmission device based on VCSEL array hybrid integration and optical fiber vertical packaging.
As shown in fig. 1, the wdm-on-silicon optical transmission apparatus includes a plurality of functional units integrated on the same silicon substrate 100. In fig. 1, a VCSEL laser 101 as a light source of an optical transmission module is hybrid integrated and flip-chip bonded with a silicon-based optoelectronic chip, and is coupled into a silicon-based electro-optical modulator 102 through a bidirectional grating full-vertical optical interface 103. When the incident center of the VCSEL laser 101 is exactly at the center of the bidirectional grating perfect vertical optical interface 103, the coupled light will be divided into two beams to be transmitted in the waveguides at the two sides of the silicon-based electro-optical modulator 102. Fig. 1 shows, for example, four different incident wavelengths λ 1, λ 2, λ 3, λ 4 implemented by four sets of VCSEL lasers 101, where the four different incident wavelengths are modulated by four sets of silicon-based electro-optical modulators 102 and loaded with electrical information, and are connected to two 1 × 2 optical wavelength division multiplexers through four silicon optical waveguides 104, so as to implement multiplexing of four optical wavelengths into two silicon optical waveguides 104, λ 1, λ 3 into one of the silicon optical waveguides 104, and λ 2, λ 4 into the other silicon optical waveguide 104. Then, the four optical wavelength signals in the two silicon optical waveguides 104 are multiplexed to the bidirectional grating vertical optical interface 103 thereof by a 1 × 2 mach-zehnder optical multiplexer 107, and finally the optical signals are coupled and output to a single-mode optical fiber 108 completely vertically packaged with the surface of the silicon substrate 100.
In fig. 1, four groups of different signal lights are taken as an example, if the bandwidth of each group of signal lights is 25G, the purpose of transmitting information up to 100G can be achieved; if 2N groups of signal lights with different wavelengths (corresponding to two 1 × N optical wavelength division multiplexers) are designed, and the bandwidth of each group of signal lights is 25G, the bandwidth output of 2N × 25G can be realized, where N is a positive integer not equal to zero. Here, it is worth noting that: in order to reduce the non-uniformity and optical crosstalk between different channels, the channel spacing needs to be designed to a reasonable value, which not only ensures that the wavelengths of the different channels are within 1-dB of the bidirectional grating complete perpendicular optical interface 103, but also ensures that the optical crosstalk between the different channels is less than-20 dB.
Fig. 2 is a schematic structural diagram of the silicon-based electro-optical modulator 102, and it can be seen that the silicon-based electro-optical modulator 102 mainly comprises a bidirectional grating complete vertical optical interface 103, a spot-size converter 202, two silicon optical waveguides 104, a silicon thermo-optical phase shifter 202, a silicon electro-optical phase shifter 203, an on-chip integrated transmission line termination load 204, an optical beam combiner 205, and a transmission line coplanar waveguide traveling wave electrode 206, where the bidirectional grating complete vertical optical interface 103 is used as both an optical coupling interface between the VCSEL laser 101 and the silicon-based electro-optical modulator 102 and a 3-dB optical beam splitter at an input end of the silicon-based electro-optical modulator 102. Then, through the silicon electro-optical phase shifter 203 integrated on the two silicon optical waveguides 104 and the MMI optical combiner 205 at the output end, the mach-zehnder-like optical structure of the silicon-based electro-optical modulator 102 can convert the phase modulation into intensity modulation. In order to realize high-speed modulation, the silicon electro-optical phase shifter 203 in the silicon-based electro-optical modulator 102 usually adopts a PN junction phase shift structure with higher speed, and simultaneously adopts the coplanar waveguide traveling wave electrode 206 and the on-chip integrated transmission line termination load 204 to realize impedance matching and microwave optical wave rate matching. Furthermore, to compensate for the effects of manufacturing errors on the device spectrum, the integrated silicon thermo-optic phase shifter 202 may be used to tune the operating wavelength to achieve matching of the modulator operating wavelength to the wavelength division multiplexed operating wavelength.
Fig. 3 is a schematic structural diagram of a 1 × 2 mach-zehnder optical multiplexer 107, and it can be seen that the optical multiplexer mainly includes a bidirectional grating complete vertical optical interface 103, a spot-size converter 201, two silicon optical waveguides 104, a silicon thermo-optical phase shifter 202, and a 2 × 2 optical coupler 302, where the bidirectional grating complete vertical optical interface 103 serves as both an output optical interface of the optical multiplexer and an optical beam combiner 205 at an output end. At two input ends of the 1 × 2 mach-zehnder type optical multiplexer 107, two optical signals with different wavelengths may pass through the 2 × 2 optical coupler 302 and the two silicon optical waveguides 104 with unequal arm lengths, and then be multiplexed to the same optical output after interference at the two-way grating output port and coupled into the single-mode fiber 108. Note that the wavelengths of the two optical inputs here need to be precisely aligned with the optical filter wavelengths of the devices to ensure the best optical wavelength division multiplexing performance. To facilitate tuning of the device filter wavelength to the optical input wavelength, silicon thermal phase shifters 304 are integrated on silicon optical waveguides 104 to compensate for possible manufacturing imperfections.
In order to expand the number of channels of the optical wavelength division multiplexer, the 1 × 2 mach-zehnder optical multiplexer 107 needs to match with two matched 1 × N optical wavelength division multiplexing demultiplexers to form an interleaved 1 × 2N optical wavelength division multiplexing demultiplexer, as shown in fig. 1. The two 1 × N optical wavelength division multiplexers may be implemented in many ways, such as AMMI wavelength division multiplexing devices, MZI wavelength division multiplexing devices, and micro-ring wavelength division multiplexing devices, and here we use a specific embodiment of the 1 × 2AMMI optical wavelength division multiplexer to illustrate the working principle of the interleaved optical wavelength division multiplexer. Fig. 4 is a schematic plan view of a 1 × 2AMMI optical wavelength division multiplexer, and it can be seen that the 1 × 2AMMI optical wavelength division multiplexer may be composed of two input tapered waveguides 405, two input waveguides 404, a multimode interference waveguide 403, an output tapered waveguide 401, and an output waveguide 402. The input and output waveguides are all at a certain included angle with the optical propagation axis direction of the multimode interference waveguide, and the input/output tapered waveguides are used for realizing the mode spot conversion and adiabatic optical transmission between the single-mode silicon optical waveguide and the input/output multimode silicon optical waveguide. By designing parameters such as the waveguide incident angle, the input/output waveguide width and position, the multi-mode interference waveguide width length and the like, a 1 × 2AMMI optical wavelength division multiplexer with two channel wavelengths staggered with each other can be realized, that is, the wavelength of the optical wavelength division multiplexing channel of AMMI1 is λ 1 and λ 3, and the wavelength of the optical wavelength division multiplexing channel of AMMI2 is λ 2 and λ 4. If the four wavelengths are uniformly spaced and the channel spacing is Δ λ, and the optical transmission spectrum FSR of the 1 × 2 mach-zehnder type optical multiplexer 107 is 2 Δ λ and the resonant wavelengths of the two input ends are exactly aligned to the four channel wavelengths, the cascaded 1 × 4 interleaved AMMI optical wavelength division multiplexer can implement the four-channel optical wavelength division multiplexing function.
The silicon-based electro-optical modulator 102 and the 1 × 2 mach-zehnder optical multiplexer 107 both have a bidirectional grating completely vertical optical interface 102, and are used as an input-output optical coupler, and also used as an input end 3-dB beam splitter and an output end 3-dB optical combiner. The optical coupling performance of the visible bidirectional grating completely vertical optical interface is a key device, and the optical coupling performance of the visible bidirectional grating completely vertical optical interface has great influence on the optical loss and the optical signal transmission quality of the whole WDM optical transmission module. For example, light reflection from a bi-directional grating perfectly perpendicular to the optical interface may induce strong fabry-perot resonance effects, thereby affecting the quality of the optical transmission eye. Therefore, in order to achieve the WDM optical transmission function well, the bidirectional grating fully-perpendicular optical interface must be specially designed to meet the performance requirement. Fig. 5 is a schematic diagram showing a top view structure and a side view structure of a bidirectional grating complete vertical optical interface based on grating apodization and a sub-wavelength grating structure, and for the specific embodiment in the figure, the whole grating structure 502 is in central axis symmetry and contains 20 periods, wherein the middle ten periods are of a common grating structure, and the ten periods near the waveguides 501 on both sides are of a sub-wavelength grating structure. In order to facilitate the design and manufacture of the sub-wavelength grating, all the sub-wavelength grating structures generally adopt a uniform sub-wavelength grating period and a sub-wavelength grating duty cycle. In order to obtain the optimal grating coupling performance, the period length and the duty ratio of each grating period in the grating and the period and the duty ratio of the sub-wavelength grating structure need to be structurally optimized. In addition, the thickness of the silica buried oxide layer 503 and the thickness of the silica upper cladding layer 504 above the silicon substrate 100 also affect the coupling performance of the grating, so that an optimal design is also required. Through numerical simulation analysis and structural design, the bidirectional grating complete vertical optical interface 103 can realize optimal grating coupling efficiency and lowest back reflection, thereby providing an optical input/output interface with good performance for the silicon-based WDM optical transmitter.
In order to perform preliminary simulation verification on system performance, simulation calculation is performed by adopting specific embodiments of each device, and finally performance verification is performed on the whole system through a system-level simulation model and an optoelectronic circuit-level simulation tool. All optical elements are replaced by optical 1 xN port S parameter matrix elements for line-level simulation, and the modulator electric phase shifter and the coplanar waveguide traveling wave electrode are subjected to photoelectric joint simulation analysis to obtain related physical models and parameters, so that the physical models and the parameters are introduced into system-level simulation analysis. In this embodiment, the WDM four channel wavelengths are 1540nm, 1550nm, 1560nm, 1570nm, respectively, which are also set to the emission wavelengths of the four VCSEL lasers 101 and the operating wavelengths of the four silicon-based electro-optic modulators 102, respectively. In order to simulate and test the dynamic eye diagram of the whole WDM optical transmitter, a PRBS signal generator and an NRZ code generator are adopted to carry out code type input on a silicon-based electro-optical modulator 102, and an eye diagram result is output by an eye diagram analyzer after the output end of the WDM wavelength division multiplexer is converted into an electric signal through a photoelectric detector. FIG. 6 shows the 20Gb/s eye diagram simulation results for the entire WDM optical transmitter system at four operating wavelengths, where the modulator drive voltage swing is only 1V, from-0.5V to 0.5V. As can be seen from the simulation results, the eye diagrams of the four channels are clearly visible and exhibit lower jitter and noise characteristics. The average signal amplitude of the eye pattern at both wavelengths of 1540nm and 1570nm is reduced from the roll-off of the grating coupling curve at both sides of the center wavelength, compared to both 1550nm and 1560 nm. Further, since the parasitic reflection of the grating interface gradually rises away from the center wavelength, the fabry perot resonance caused by the optical reflection causes signal level noise and jitter to become large, and the eye quality corresponding to 1540nm and 1570nm deteriorates compared to 1550nm and 1560 nm. To further improve the uniformity between channels, this can be achieved by appropriately reducing the WDM channel spacing without significantly sacrificing channel crosstalk and insertion loss. In addition, in order to further improve the eye extinction ratio, the driving voltage swing can be improved or a push-pull differential driving mode can be adopted.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description. The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (4)
1. Silicon-based WDM optical transmission device based on VCSEL array hybrid integration and optical fiber vertical packaging comprises a VCSEL laser (101), a silicon-based optical transmission chip, a silicon substrate (100) and a single-mode optical fiber (108), and is characterized in that: the VCSEL laser (101) is adopted to vertically emit light downwards and couple the light into the silicon-based light transmitting chip, and the module light output is completely vertically coupled and output into the vertically placed single-mode optical fiber (108), so that interconnection and intercommunication are realized with an external optical communication network;
the silicon-based optical transmitting chip comprises: the optical fiber laser comprises at least one silicon-based electro-optical modulator (102), at least one silicon optical waveguide (104), a first 1 xN optical wavelength division multiplexer (105), a second 1 xN optical wavelength division multiplexer (106), a 1 x 2 Mach-Zehnder type optical multiplexer (107) and a single-mode optical fiber (108), wherein the output end of the VCSEL laser (101) is connected with the input end of the 1 xN optical wavelength division multiplexer (105) through the silicon-based electro-optical modulator (102) and the silicon optical waveguide (104), and the output end of the 1 x 2 Mach-Zehnder type optical multiplexer (107) is coupled and output through the vertically arranged single-mode optical fiber (108);
the silicon-based electro-optical modulator (102) adopts a bidirectional grating complete vertical optical interface (103) as an optical coupling interface of the VCSEL laser (101) and the silicon-based electro-optical modulator (102); the bidirectional grating complete vertical optical interface (103) splits light and transmits the split light to the input end of the silicon-based electro-optic modulator (102);
the 1 × 2 Mach-Zehnder type optical multiplexer (107) adopts a bidirectional grating complete vertical optical interface (103) as an optical coupling interface of the 1 × 2 Mach-Zehnder type optical multiplexer (107) and the single-mode optical fiber (108); and the bidirectional grating complete vertical optical interface (103) is used for combining two beams of light in the 1 multiplied by 2 Mach-Zehnder optical multiplexer (107) and then transmitting the combined light to the single-mode optical fiber (108).
2. The silicon-based WDM optical transmission device based on VCSEL array hybrid integration and fiber vertical package of claim 1, wherein the silicon-based electro-optical modulator (102) is composed of the bi-directional grating all-vertical optical interface (103), the silicon optical waveguide (104), a silicon thermo-optical phase shifter (202), two silicon electro-optical phase shifters (203), an on-chip integrated termination matching load (204), a coplanar waveguide traveling wave electrode (206) and an optical combiner (205), and the VCSEL laser (101) outputs DC light which is coupled into the two silicon optical waveguides (104) through the bi-directional grating all-vertical optical interface (103) and passes through the silicon thermo-optical phase shifter (202) and the two silicon electro-optical phase shifters (206) to be connected with the optical combiner (205) and outputs modulated light.
3. A silicon-based WDM optical transmission apparatus based on VCSEL array hybrid integration and fiber vertical package according to claim 1, wherein the 1 x 2 mach-zehnder optical multiplexer (107) and the first 1 x N optical wavelength division multiplexer (105) and the second 1 x N optical wavelength division multiplexer (106) satisfy wavelength matching, and are cascaded to form an optical wavelength division multiplexing demultiplexer with a total channel number of 2N; the 1 × 2 mach-zehnder type optical multiplexer (107) is composed of the bidirectional grating complete vertical optical interface (103), the silicon optical waveguide (104), two silicon thermo-optical phase shifters (202) and a 2 × 2 optical coupler (302), and light passing through the 1 × 2 mach-zehnder type optical multiplexer (107) is coupled and output through the bidirectional grating complete vertical optical interface (103) and enters the vertically arranged single-mode optical fiber (108).
4. The silicon-based WDM optical transmission apparatus based on VCSEL array hybrid integration and fiber vertical package according to claim 1, wherein the bidirectional grating-based fully vertical optical interface (103) has two waveguide output ports and employs sub-wavelength grating and apodized grating structures to improve the grating directivity and mode-field matching between the grating diffraction field and the fiber mode field, thereby increasing the total coupling efficiency of the grating and reducing spurious optical reflections.
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| CN112864795A (en) * | 2021-01-26 | 2021-05-28 | 北京工业大学 | Optical chip structure integrated on VCSEL coherent array and MZI array chip and preparation method thereof |
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