CN1417621A - Proton exchange method and equipment for producing lithium niobate light waveguide - Google Patents
Proton exchange method and equipment for producing lithium niobate light waveguide Download PDFInfo
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Abstract
The present invention is proton exchange method and equipment for producing lithium niobate light waveguide. The production process includes cleaning substrate, preparing mask, photoetching to form waveguide pattern, proton exchnage, annealing, end polishing, regulating waveguide and inspection. The present invention uses lithium benzoate doluted benzoic acid solution as proteon source, and has high lithium ion density and low hydrogen ion density and thus low reeaction speed, low lithium ion exchanging amount, and refraction index difference between the waveguide and the substrate. The annealing results in refraction index distribution ever suitable for coupling with fiber, less corrosion of benzoic acid, less faults in waveguide and low waveguide loss.
Description
Technical Field
The present invention relates to a method for manufacturing optical waveguide and its equipment, in particular, it relates to a method for manufacturing lithium niobate optical waveguide by using proton exchange and its equipment.
Background
In recent years, the light communication technology has been rapidly developed, and people are full of vigorResearch and development of all-optical networks are proceeding, and lithium niobate optical waveguide devices play an important role therein. Lithium niobate optical waveguide devices that are widely used in optical communication systems include intensity modulators, phase modulators, couplers, optical switches and optical switch arrays, wavelength tunable filters, polarization controllers, and the like. The devices all need to manufacture optical waveguides on the lithium niobate crystal, and the electro-optic effect of the lithium niobate crystal is utilized to change the physical parameters of light waves in the waveguides, so that the functions of the devices are realized. Therefore, the key to the fabrication of these devices is the fabrication of optical waveguides on lithium niobate crystals. For the performance of optical waveguide, there are several main requirements from the process fabrication point of view: firstly, the waveguide of preparation self loss is little, the optical damage threshold value is high, avoids introducing defect and harmful impurity mainly in the waveguide manufacture process, reduces the scattering of waveguide to the light, absorbs. Secondly, the waveguide and the optical fiber are required to have higher coupling efficiency, and according to a coupling efficiency formula, the mode field determined by the refractive index distribution of the waveguide and the mode field of the optical fiber are closer to each other, so that the coupling efficiency is higher. Reasonable processing and processing parameters are key to achieving the desired refractive index profile. And thirdly, the electro-optic effect of the lithium niobate crystal in the waveguide region cannot be damaged in the waveguide forming process, and the electro-optic coefficient should not be lost. The optical waveguide of the existing lithium niobate modulator has two manufacturing approaches: titanium diffusion and proton exchange.1. The insertion loss of the process of manufacturing the waveguide by titanium diffusion and titanium diffusion is small, the electro-optic coefficient of the crystal cannot be damaged, and the method is LiNbO at present3The most used method for fabricating optical waveguides on a substrate. Can be used for X-cutting, Y-cutting and Z-cutting LiNbO3A substrate. The process of manufacturing the waveguide by the titanium diffusion method comprises the following steps: a layer of titanium film is firstly made on lithium niobate crystal by electron beam evaporation or radio frequency sputtering, then the non-waveguide area is etched by photoetching technology, and then the titanium film is diffused in a high temperature furnace. After the diffusion is completed, it is usually necessary to polish both ends of the substrate to form the waveguide end faces. The titanium diffuses into the lithium niobate crystal, so that the refractive indexes of ordinary light and extraordinary light of the crystal are increased, and a waveguide capable of simultaneously conducting two polarization modes is formed. The key to the fabrication of waveguides by titanium diffusion is the selected process conditions, including: the thickness of the evaporated or sputtered titanium film,Width of titanium film strip before diffusion, diffusion temperature and diffusion time. Typical process conditions are: the single-mode waveguide with the propagation wavelength near 1.55 mu m is manufactured, the width of the titanium film strip before diffusion is 4-8 mu m, the thickness of the titanium film is 30-100nm, the diffusion temperature is 900-1100 ℃, and the diffusion time is 4-10 hours. The titanium diffusion depth is about 2-3 μm. The high temperature of the diffusion process can cause Li in the crystal2Out-diffusion of O forms an undesirable slab waveguide. To suppress Li2Out-diffusion of O, during diffusion, rich in Li2O atmosphere and introducing wet oxygen. 2. Proton exchange without Li in titanium diffusion process2The out-diffusion phenomenon of O is a simple and easy waveguide manufacturing method. Proton exchange uses molten benzoic acid as a proton source. Pure benzoic acid melts corrode Y-cut wafers, and proton exchange can generally only be performed on X-cut, Z-cut substrates (although molten benzoic acid becomes less corrosive after dilution with lithium benzoate, and proton exchange can also be used for Y-cut wafers). The proton exchange manufacturing process comprises the following steps: making a layer of mask on the lithium niobate polishing substrate, wherein the mask can be a metal or dielectric film; the mask of the waveguide area is etched by a photolithography process,exposing a crystal surface for proton exchange; immersing the lithium niobate substrate with the mask pattern into molten benzoic acid to ensure that Li in the lithium niobate crystal+With H in benzoic acid+An exchange reaction is carried out. The chemical reaction formula for proton exchange is:
Δno＝0.007-0.40Δnethe ordinary ray refractive index is reduced after proton exchange is seen from the above formula. Therefore, the waveguide formed by proton exchange can only conduct the mode corresponding to the extraordinary ray, and is an optical waveguide with high polarization extinction ratio. H+Replacement of Li+To make LiNbO3CrystalWhen Li is distorted1-xHxNbO3X of greater than 0.12, this distortion and Li+The severe lack of (2) greatly reduces the electro-optic coefficient of the lithium niobate crystal and causes serious instability of the waveguide with respect to time and temperature. The index of refraction of the waveguide region increases by 0.1 after proton exchange, so that a large index difference results in a severe mismatch of the numerical apertures of the waveguide and the fiber. To obtain a reasonable mode field structure, the lattice deformation and Ii are restored+The proton exchange is usually coupled with an annealing process. Annealing to exchanged H+Diffusing to the deep of the substrate to reduce the concentration thereof in the waveguide region; li in the interior of the crystal+Diffusion into the waveguiding region, Li+The concentration is increased and the lattice distortion is reduced, restoring the electro-optic coefficient lost by exchange. The refractive index difference between the waveguide and the substrate is reduced from 0.1 to 0.01, and the waveguide mode field structure is more suitable for coupling with the optical fiber. Therefore, proton exchange can make waveguide with loss and electro-optic coefficient equivalent to that of the waveguide made by the titanium diffusion process, and becomes another choice of the waveguide manufacturing process. Such as: suchoski et al, LiNbO3 Integrated optical Components for fiber opticsgyrocopes ", SPIE. vol.993 Integrated Optical Circuit engineering VI (1988). The existing proton exchange process adopts pure benzoic acid exchange, the exchange amount is large, and H+The surface layer is rapidly enriched, the refractive index distribution is poor, and the coupling efficiency is low; the pure benzoic acid has stronger corrosion effect on the crystal surface, causes waveguide defects and can not reduce the insertion loss of devices; the crystal lattice of the waveguide region is distorted, the loss of Li atoms is serious, and the electro-optic coefficient is greatly reduced; the exchange reaction speed is high, the process is not easy to control and adjust, the repeatability is poor, and the yield is low. Although there is some improvement in refractive index profile and electro-optic efficiency in combination with the annealing process, the effect is not ideal.
Disclosure of Invention
The invention aims to solve the defects and provides a method and a device for manufacturing a lithium niobate optical waveguide, which can reduce the reaction speed and the lithium ion exchange amount and reduce the refractive index difference between the waveguide and a substrate, wherein the method for manufacturing the lithium niobate optical waveguide by proton exchange mainly comprises the steps of cleaning a substrate sheet, preparing a mask on the substrate sheet, photoetching a waveguide pattern, proton exchange, annealing, end face polishing, waveguide adjustment and inspection, and is characterized in that the proton exchange method in the proton exchange step comprises the following steps:
a. respectively cleaning a quartz clamp for loading a lithium niobate substrate, a quartz pipeline for containing an exchange solution and the lithium niobate substrate witha photoetching waveguide pattern;
b. mixing a proper amount of lithium benzoate and benzoic acid in a quartz tube by using a balance to obtain a benzoic acid mixed solution for proton exchange;
c. installing a thermocouple in a temperature measuring pipeline of the quartz pipeline, and putting the quartz pipeline into a heating furnace;
d. and starting the heating furnace to control the power supply, adjusting the heating voltage, heating the mixed solution in the quartz pipeline to 200 ℃, slowly heating to 250 ℃ and keeping the temperature stable.
e. D, loading the lithium niobate substrate on a quartz clamp while performing the step d, putting the quartz clamp into a beaker, putting the beaker provided with the lithium niobate substrate into an oven, preheating the beaker to 250 ℃ and completely burning the beaker;
f. after the temperature of the mixed solution in the quartz pipeline and the temperature of the lithium niobate substrate reach 250 ℃, quickly putting the quartz clamp provided with the lithium niobate substrate into the mixed solution in the quartz pipeline for proton exchange;
g. stirring the quartz clamp through a quartz pull rod to ensure that the mixed solution is fully and uniformly contacted with the lithium niobate substrate, and continuously carrying out proton exchange for 200 minutes in turn and then taking out the quartz clamp and the lithium niobate substrate;
h. after cooling to the temperature close to the room temperature, the quartz clamp and the lithium niobate substrate are placed in an ethanol solution for ultrasonic cleaning for 2 minutes, the lithium niobate substrate is taken down and then is subjected to ultrasonic cleaning twice by the ethanol solution.
The annealing method for manufacturing the lithium niobate optical waveguide comprises the following steps:
1) cleaning the lithium niobate substrate to be annealed;
2) the device is provided with an annealing furnace, oxygen is introduced into the annealing furnace, and the annealing furnace is heated to 300 ℃ and then is kept at a constant temperature;
3) loading the lithium niobate substrate on a quartz boat, pushing the lithium niobate substrate to a constant temperature area of an annealing furnace from a furnace mouth of the annealing furnace for a proper amount of time, and starting a timer;
4) adjusting a heating power supply of the annealing furnace to ensure that the temperature of the annealing furnace is constant at 350 +/-3 ℃;
5) and after the set annealing time is up, gradually pulling out the lithium niobate substrate from the constant temperature area, and taking down the lithium niobate substrate from the quartz boat.
The proton exchange device for realizing the proton exchange method comprises:
heating furnace;
the quartz pipeline is used for containing the benzoic acid mixed solution;
a quartz jig for loading a lithium niobate substrate;
a temperature tube and a thermocouple for monitoring temperature;
wherein the quartz tube is sleeved in the heating furnace, and the quartz clamp extends into the benzoic acid mixed solution of the quartz tube through the quartz pull rod; the thermocouple is extended into the temperature measuring tube which is positioned in the quartz pipeline, and the lower end of the temperature measuring tube is positioned in the benzoic acid mixed solution.
It isstill another object of the present invention to provide an annealing apparatus for manufacturing a lithium niobate optical waveguide, which is adapted to the above proton exchange to further ensure that the defects of the waveguide can be reduced, the loss of the waveguide itself can be reduced, and the waveguide has a refractive index distribution more suitable for coupling with an optical fiber.
The annealing device includes:
heating furnace;
a quartz tube;
a quartz boat for mounting the lithium niobate substrate;
a temperature tube and a thermocouple for monitoring temperature;
the quartz tube is sleeved in the heating furnace, the quartz boat is arranged in the quartz tube, the thermocouple extends into the temperature measuring tube, and the temperature measuring tube is positioned on the inner side wall of the quartz tube.
According to the invention, because the proton source of proton exchange adopts the benzoic acid mixed solution diluted by lithium benzoate, according to the chemical reaction principle of proton exchange, lithium benzoate is doped in benzoic acid to increase the lithium ion concentration in the solution, and H in the reaction is changed+To Li+Is balanced so that H+The concentration is reduced, thereby reducing the reaction rate and the amount of lithium ion exchange, resulting in a reduction in the difference in refractive index between the waveguide and the substrate. The refractive index distribution more suitable for coupling with the optical fiber is obtained by combining annealing, meanwhile, the corrosion effect of benzoic acid is reduced, the waveguide defect is reduced, and the loss of the waveguide is reduced. Benzyl benzeneThe doping of lithium oxide reduces the reaction speed, so that the exchange process is easy to control, and the waveguide manufactured under the same condition has better consistency. Meanwhile, dry oxygen is introduced during annealing, so as to prevent LiNbO3The chemical ratio of the medium oxygen atoms is reduced, and the effects of cleaning the furnace tube and reducing harmful impurities are achieved. Through the optimized conditions of proton exchange and annealing process, the coupling loss of the prepared waveguide is less than 3dB, the electro-optic coefficient is well recovered, and the voltage length product is less than 6 V.cm.
The manufacturing method, the device and the structural principle of the invention are explained in detail in the following with the accompanying drawings;
drawings
FIG. 1 is a schematic diagram of the construction of a proton exchange device according to the present invention;
FIG. 2 is a schematic structural view of an annealing apparatus according to the present invention;
Detailed Description
As shown in fig. 1, the proton exchange device according to the present invention includes:
a heating furnace 1;
a quartz pipe 2 for containing the benzoic acid mixed solution 7;
a quartz jig 6 for loading a lithium niobate substrate;
a temperature measuring tube 4 and a thermocouple 5 for monitoring temperature;
wherein the quartz tube 2 is sleeved in the heating furnace 1, and the quartz clamp 6 is extended into the benzoic acid mixed solution 7 of the quartz tube 2 through the quartz pull rod 3; the thermocouple 5 extends into the temperature measuring tube 4, the temperature measuring tube 4 is positioned in the quartz pipeline 2, and the lower end of the temperature measuring tube is positioned in the benzoic acid mixed solution 7.
The complete method for manufacturing the lithium niobate optical waveguide by proton exchange comprises the steps of preparing a polished substrate sheet, cleaning the substrate sheet, preparing a mask, preparing a waveguide pattern, exchanging protons, annealing, polishing an end face, adjusting and checking the optical waveguide and the like, wherein the invention is mainly characterized in two steps of proton exchange and annealing, and the rest steps are not greatly different from the prior art, can be realized by a person skilled in the art, and are not described in detail herein. The process flow for performing proton exchange by using the proton exchange device comprises the following steps:
a. respectively cleaning a quartz clamp for loading a lithium niobate substrate, a quartz pipeline for containing an exchange solution and the lithium niobate substrate with a photoetching waveguide pattern; the quartz clamp is cleaned by ultrasonic cleaning twice with deionized water and ethanol for 20 minutes each time; and then washing the quartz clamp by deionized water and ultrasonically cleaning for 20 minutes, and cleaning the quartz clamp for 15 times. The quartz pipeline is cleaned by adding 500ml of ethanol into the quartz pipeline, then filling deionized water into the quartz pipeline to a pipe opening, ultrasonically cleaning for 10 minutes, then washing with a large amount of deionized water, then filling water into the quartz pipeline, heating the quartz pipeline on an exchange furnace to about 80 ℃, ultrasonically cleaning for 10 minutes in an ultrasonic cleaning machine, then washing the quartz pipeline with a large amount of deionized water, repeatedly cleaning for 10 times, then cleaning the quartz pipeline, and cleaning the lithium niobate substrate:
(1) wiping the surface of the substrate with an ethanol cotton ball (if the substrate is dirty, soaking the substrate with a lotion for 10 minutes);
(2) putting the substrate in a water bath of carbon tetrachloride at the temperature of 80 ℃ for 10 minutes;
(3) heating the substrate in acetone at about 45 deg.C for 10 min;
(4) the substrate was placed in a water bath of ethanol at 80 ℃ for 10 minutes. Then, deionized water is used for rinsing twice;
(5) placing the substrate in a mixed solution of ammonia water, hydrogen peroxide and water in a ratio of 1: 7, performing water bath at 80 ℃ for 10 minutes, and washing the substrate twice by deionized water;
(6) the substrate is put into a mixed solution of hydrochloric acid, hydrogen peroxide and water in a ratio of 1: 7 for water bath at 80 ℃ for 10 minutes, washed with deionized water for three times and soaked in the deionized water for standby.
b. Mixing a proper amount of lithium benzoate and benzoic acid in a quartz tube by using a balance scale, and preparing to obtain a benzoic acid mixed solution for proton exchange; the preparation of the mixed solution of benzoic acid in this step is carried out by mixing 200g of benzoic acid and 4g of lithium benzoate to obtain a mixed solution of benzoic acid with 2% of lithium benzoate as a proton source for proton exchange.
c. Placing a thermocouple wire into a temperature measuring pipeline of a quartz pipeline for exchange, connecting a digital meter for monitoring, placing a cold end of the thermocouple into an ice bottle, and then placing the quartz pipeline into a heating furnace;
d. starting a heating furnace to control a power supply, setting higher heating power, heating the mixed solution in the quartz pipeline to 200 ℃, then reducing the heating temperature to slowly raise the temperature of the mixed solution to 250 ℃, and then repeatedly finely adjusting the heating power to stabilize the temperature of the mixed solution at 250 ℃;
e. d, loading the lithium niobate substrate on a quartz clamp while performing the step d, putting the quartz clamp into a beaker, putting the beaker provided with the lithium niobate substrate into an oven, preheating the beaker to 250 ℃ and completely burning the beaker;
f. after the temperature of the mixed solution in the quartz pipeline and the temperature of the lithium niobate substrate reach 250 ℃, hooking the quartz clamp by using a quartz hook, and quickly putting the quartz clamp provided with the lithium niobate substrate and the quartz hook into the mixed solution in the quartz pipeline for proton exchange;
g. slightly moving the quartz clamp up and down through a quartz pull rod every few minutes (generally 5 minutes) to ensure that the mixed solution is fully and uniformly contacted with the lithium niobate substrate, and continuously carrying out proton exchange for 200 minutes and then taking out the quartz clamp and the lithium niobate substrate;
h. after cooling to the temperature close to the room temperature, the quartz clamp and the lithium niobate substrate are placed in an ethanol solution for ultrasonic cleaning for 2 minutes, the lithium niobate substrate is taken down, and then the lithium niobate substrate is subjected to ultrasonic cleaning twice by the ethanol solution. And simultaneously soaking the quartz pipeline in an ethanol solution for the next exchange cleaning.
As shown in fig. 2, the annealing apparatus of the present invention includes:
a heating furnace 21;
a quartz pipe 22;
a quartz boat 23 for mounting the lithium niobate substrate 8;
a temperature measuring tube 25 and a thermocouple 24 for monitoring temperature;
wherein the quartz tube 22 is sleeved in the heating furnace 21, the quartz boat 23 is arranged in the quartz tube 22, the thermocouple 24 extends into the temperature measuring tube 25, and the temperature measuring tube 25 is positioned on the inner side wall of the quartz tube 22.
The annealing method comprises the following steps:
1) cleaning the lithium niobate substrate to be annealed; the step of cleaning the lithium niobate substrate comprises the steps of ultrasonically cleaning the lithium niobate substrate which is just exchanged by ethanol for 2 minutes, boiling in water bath for 5 minutes, repeatedly boiling for two times, drying by using a nitrogen gun after cleaning, and roasting by using an infrared lamp for standby.
2) The annealing furnace is arranged, oxygen is introduced into the annealing furnace, wherein the flow of the introduced oxygen is 3 liters/minute, a thermocouple of the annealing furnace is monitored by a digital voltmeter, and the temperature of the annealing furnace is raised to 300 ℃ and then is kept constant;
3) loading the lithium niobate substrate on a quartz boat, pushing the lithium niobate substrate to a constant temperature area of an annealing furnace from a furnace mouth of the annealing furnace for a proper amount of time, wherein in the step, the lithium niobate substrate is pushed once by a push rod every minute for 5-10 minutes from the furnace mouth to the constant temperature area, and starting a timer;
4) adjusting a heating power supply of the annealing furnace to ensure that the temperature of the annealing furnace is constant at 350 +/-3 ℃; while the temperature was recorded every 10 minutes.
5) And pulling once per minute after the set annealing time (generally 3 hours) to gradually pull the lithium niobate substrate out of the constant temperature area, wherein the pulling-out time is generally 5-10 minutes, and taking down the lithium niobate substrate from the quartz boat.
Claims (4)
1. A method for manufacturing lithium niobate optical waveguide by proton exchange mainly comprises the steps of cleaning a substrate, preparing a mask on the substrate, photoetching a waveguide pattern, proton exchange, annealing, end surface polishing, waveguide adjustment and inspection, and is characterized in that the proton exchange method in the proton exchange step comprises the following steps:
a. respectively cleaning a quartz clamp for loading a lithium niobate substrate, a quartz pipeline for containing an exchange solution and the lithium niobate substrate with a photoetching waveguide pattern;
b. mixing a proper amount of lithium benzoate and benzoic acid in a quartz tube by using a balance to obtain a benzoic acid mixed solution for proton exchange;
c. installing a thermocouple in a temperature measuring pipeline of the quartz pipeline, and putting the quartz pipeline into a heating furnace;
d. and starting the heating furnace to control the power supply, adjusting the heating voltage, heating the mixed solution in the quartz pipeline to 200 ℃, slowly heating to 250 ℃ and keeping the temperature stable.
e. D, loading the lithium niobate substrate on a quartz clamp while performing the step d, putting the quartz clamp into a beaker, putting the beaker provided with the lithium niobate substrate into an oven, preheating the beaker to 250 ℃ and completely burning the beaker;
f. after the temperature of the mixed solution in the quartz pipeline and the temperature of the lithium niobate substrate reach 250 ℃, quickly putting the quartz clamp provided with the lithium niobate substrate into the mixed solution in the quartz pipeline for proton exchange;
g. stirring the quartz clamp through a quartz pull rod to ensure that the mixed solution is fully and uniformly contacted with the lithium niobate substrate, and continuously carrying out proton exchange for 200 minutes in turn and then taking out the quartz clamp and the lithium niobate substrate;
h. after cooling to the temperature close to the room temperature, the quartz clamp and the lithium niobate substrate are placed in ethanol solution for ultrasonic cleaning for 2 minutes, the lithium niobate substrate is taken down and then is subjected to ultrasonic cleaning twice by the ethanol solution.
2. The method of manufacturing a lithium niobate optical waveguide by proton exchange as set forth in claim 1, wherein the annealing step comprises the steps of:
1) cleaning the lithium niobate substrate to be annealed;
2) the device is provided with an annealing furnace, oxygen is introduced into the annealing furnace, and the annealing furnace is heated to 300 ℃ and then is kept at a constant temperature;
3) loading the lithium niobate substrate on a quartz boat, pushing the lithium niobate substrate to a constant temperature area of an annealing furnace from a furnace mouth of the annealing furnace for a proper amount of time, and starting a timer;
4) adjusting a heating power supply of the annealing furnace to ensure that the temperature of the annealing furnace is constant at 350 +/-3 ℃;
5) and after the set annealing time is up, gradually pulling out the lithium niobate substrate from the constant temperature area, and taking down the lithium niobate substrate from the quartz boat.
3. A proton exchange device for carrying out the proton exchange step of claim 1, comprising:
heating furnace;
the quartz pipeline is used for containing the benzoic acid mixed solution;
a quartz jig for loading a lithium niobate substrate;
a temperature tube and a thermocouple for monitoring temperature;
wherein the quartz tube is sleeved in the heating furnace, and the quartz clamp extends into the benzoic acid mixed solution of the quartz tube through the quartz pull rod; the thermocouple is extended into the temperature measuring tube which is positioned in the quartz pipeline, and the lower end of the temperature measuring tube is positioned in the benzoic acid mixed solution.
4. An annealing apparatus for carrying out the annealing step of claim 2, comprising:
heating furnace;
a quartz tube;
a quartz boat for mounting the lithium niobate substrate;
a temperature tube and a thermocouple for monitoring temperature;
the quartz tube is sleeved in the heating furnace, the quartz boat is arranged in the quartz tube, the thermocouple extends into the temperature measuring tube, and the temperature measuring tube is positioned on the innerside wall of the quartz tube.
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| CN 01140590 CN1218206C (en) | 2001-11-11 | 2001-11-11 | Proton exchange method and equipment for producing lithium niobate light waveguide |
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| CN 01140590 CN1218206C (en) | 2001-11-11 | 2001-11-11 | Proton exchange method and equipment for producing lithium niobate light waveguide |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100458478C (en) * | 2007-09-21 | 2009-02-04 | 中国航天时代电子公司 | Method for manufacturing Y wave-guide integrated optics device lithium niobate chip |
| CN100510814C (en) * | 2007-12-29 | 2009-07-08 | 上海亨通光电科技有限公司 | Method for manufacturing high temperature uron commutative LiNbO* optical waveguide |
| CN103676219A (en) * | 2013-12-20 | 2014-03-26 | 北京航天时代光电科技有限公司 | Low polarization dependent loss lithium niobate straight-bar waveguide phase modulator and manufacturing method thereof |
| CN106646861A (en) * | 2016-08-23 | 2017-05-10 | 中国航空工业集团公司西安飞行自动控制研究所 | Proton exchange lithium niobate graded index distribution simulating method |
| CN108493746A (en) * | 2018-05-14 | 2018-09-04 | 南京信息工程大学 | A kind of production method of miniature ridge waveguide and the laser with the waveguide |
| CN109610005A (en) * | 2018-12-11 | 2019-04-12 | 武汉光谷信息光电子创新中心有限公司 | A kind of proton exchange furnace and its application method |
| CN110286146A (en) * | 2019-06-18 | 2019-09-27 | 北京航空航天大学 | A kind of lithium niobate base plate clamp and proton exchange method with detecting liquid level function |
| CN110764188A (en) * | 2019-10-23 | 2020-02-07 | 天津大学 | Preparation method of lithium niobate ridge type optical waveguide |
| CN110842961A (en) * | 2019-11-28 | 2020-02-28 | 湖南率为控制科技有限公司 | Mechanical arm control clamp for chip proton exchange and use method thereof |
| CN114690316A (en) * | 2022-04-12 | 2022-07-01 | 山东建筑大学 | Etching process method for waveguide in quantum communication |
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2001
- 2001-11-11 CN CN 01140590 patent/CN1218206C/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100458478C (en) * | 2007-09-21 | 2009-02-04 | 中国航天时代电子公司 | Method for manufacturing Y wave-guide integrated optics device lithium niobate chip |
| CN100510814C (en) * | 2007-12-29 | 2009-07-08 | 上海亨通光电科技有限公司 | Method for manufacturing high temperature uron commutative LiNbO* optical waveguide |
| CN103676219A (en) * | 2013-12-20 | 2014-03-26 | 北京航天时代光电科技有限公司 | Low polarization dependent loss lithium niobate straight-bar waveguide phase modulator and manufacturing method thereof |
| CN103676219B (en) * | 2013-12-20 | 2017-01-25 | 北京航天时代光电科技有限公司 | Low polarization dependent loss lithium niobate straight-bar waveguide phase modulator and manufacturing method thereof |
| CN106646861B (en) * | 2016-08-23 | 2018-12-14 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of emulation mode of proton exchange lithium niobate graded--index planar waveguides |
| CN106646861A (en) * | 2016-08-23 | 2017-05-10 | 中国航空工业集团公司西安飞行自动控制研究所 | Proton exchange lithium niobate graded index distribution simulating method |
| CN108493746A (en) * | 2018-05-14 | 2018-09-04 | 南京信息工程大学 | A kind of production method of miniature ridge waveguide and the laser with the waveguide |
| CN109610005A (en) * | 2018-12-11 | 2019-04-12 | 武汉光谷信息光电子创新中心有限公司 | A kind of proton exchange furnace and its application method |
| CN110286146A (en) * | 2019-06-18 | 2019-09-27 | 北京航空航天大学 | A kind of lithium niobate base plate clamp and proton exchange method with detecting liquid level function |
| CN110764188A (en) * | 2019-10-23 | 2020-02-07 | 天津大学 | Preparation method of lithium niobate ridge type optical waveguide |
| CN110842961A (en) * | 2019-11-28 | 2020-02-28 | 湖南率为控制科技有限公司 | Mechanical arm control clamp for chip proton exchange and use method thereof |
| CN114690316A (en) * | 2022-04-12 | 2022-07-01 | 山东建筑大学 | Etching process method for waveguide in quantum communication |
| CN114690316B (en) * | 2022-04-12 | 2023-08-04 | 山东建筑大学 | Etching process method for waveguide in quantum communication |
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