CN106646861A - Proton exchange lithium niobate graded index distribution simulating method - Google Patents
Proton exchange lithium niobate graded index distribution simulating method Download PDFInfo
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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Abstract
The invention provides a proton exchange lithium niobate graded index distribution simulating method adapted to a proton exchange technology process. The proton exchange lithium niobate graded index distribution simulation method comprises steps that control over proton exchange and annealing technological process is carried out to construct a lithium niobate proton exchange model frame, and an effective refractive index having a mode supported by a waveguide after the annealing is calculated; the effective refractive index having the mode taking the lithium niobate graded index waveguide as a sample is constructed, and an evaluation function having the corresponding mode taking the effective refractive index as a foundation is calculated, and then parameter searching matching is carried out to construct a lithium niobate proton exchange model meeting an own technological condition, and therefore the accurate simulation of the lithium niobate graded index distribution under different technological conditions is realized. No extra technological steps are required, and crystal diffusion parameters based on an own research condition are acquired, and therefore high accuracy and high pertinence are provided, approximation and defects of conventional refractive index distribution reconstruction processes are overcome, and an of simulating the proton exchange lithium niobate graded index distribution and the optical characteristics accurately is achieved.
Description
Technical field
The present invention relates to proton exchange lithium niobate fiber waveguide technology, and in particular to one kind is mutually fitted with proton exchange process process
The lithium niobate graded--index planar waveguides answered and its emulation mode of optical characteristics.
Background technology
Lithium columbate crystal has excellent electro-optical characteristic, is a kind of widely used integrated optical material.Especially lithium niobate
The modulator that material makes has small volume, the advantage such as low, fast response time is lost, through development for many years, technology relative to into
It is ripe, get a lot of applications in optic communication, Fibre Optical Sensor, optical information processing field.In addition, lithium niobate related integrated device
Also it is widely applied in fields such as nonlinear optics, quantum opticeses.
Lithium niobate waveguides typically change the refractive index of material using the method for diffusion, by diffusion process in waveguide surface shape
Into the graded index wave guide structure that high refractive index and refractive index are gradually reduced with depth direction.It is general frequently with making side
Case has two kinds of titanium diffusion and proton exchange.The method of proton exchange is placed in lithium niobate crystal chip in proton source such as benzoic acid, by niobium
Lithium ion in sour crystalline lithium is cemented out with hydrogen ion, forms the planar waveguide for having certain refringence with lithium niobate base bottom,
As shown in Figure 1a.Now due to proton exchange process, the electro-optic coefficient of material declines, and the loss of simultaneous transmission light increases.Proton
Frequently with the method for high annealing after exchange, the recovery of lithium columbate crystal electro-optic coefficient and the reduction of optical loss, and shape are realized
Into the waveguiding structure of graded index, as shown in Figure 1 b.The program increased the refraction of extraordinary ray compared with titanium diffusion scheme
Rate, and the refractive index of ordinary light is constant or declines, therefore it can only support the optical transport of a polarization mode, with polarization well
It is selective.The lithium niobate waveguides of program processing simultaneously have the advantages such as high damage threshold, big nonlinear factor, therefore obtain
Extensively application, especially in optical fibre gyro phase-modulator.
In order to optimize the application such as the loss of lithium niobate waveguides or the electrode design of lithium niobate modulator, need to lithium niobate ripple
The index distribution led accurately models to describe the waveguiding structure of graded--index planar waveguides.Currently in order to obtaining graded index
The waveguiding structure parameter of distribution, it is to measure each pattern of graded index wave guide using optics m collimation methods to generally use more method
Effective refractive index, the reconstruct of index distribution is realized by WKB fittings or reverse-engineering.The first WKB is fitted scheme
It is assumed that index distribution is distributed using the Gaussian function of broad sense after annealing, the one kind in exponential function or error function to be retouching
State, the refractive index and other parameters for trying to achieve surface is fitted by WKB method.Another kind of scheme is using inverse WKB side
The method such as method or analytic transfer matrix is reconstructed waveguiding structure.
All there is more approximation and just can only can obtain by the waveguide after test annealing in the shortcoming of above scheme
Index distribution, it is impossible to realize the description that annealing process proton concentration spreads, also cannot just realize lithium niobate graded index point
The simulation and prediction of cloth and its optical characteristics.
The content of the invention
The purpose of the present invention is：A kind of emulation mode of proton exchange lithium niobate graded--index planar waveguides is proposed, matter is controlled
Sub- exchange process process, sets up the lithium niobate proton exchange model being adapted with technical process, realizes simulation calculation lithium niobate gradually
Variable refractivity distribution and its purpose of optical characteristics.Lithium niobate proton exchange model brings the guidance of theory for experimentation,
It is also simultaneously the basis of lithium niobate two-dimensional graded index waveguide modeling optimization.
For achieving the above object, solution of the invention is：
A kind of emulation mode of proton exchange lithium niobate graded--index planar waveguides：Proton exchange, high annealing are controlled first
Etc. technical process.Lithium niobate proton exchange model framework is then set up, graded index wave guide after annealing is calculated and is supported
The effective refractive index of pattern.The effective refractive index of measurement lithium niobate graded index wave guide sample, and build with lithium niobate gradual change
Evaluation based on pattern effective refractive index that index waveguide sample is measured and calculated corresponding modes effective refractive index
Function, carries out parameter search matching, and foundation meets the lithium niobate proton exchange model of itself process conditions.It is finally reached realization not
With the purpose that lithium niobate graded--index planar waveguides and its optical characteristics are accurately emulated under process conditions.
Described proton exchange and annealing process procedure is as follows：First, select to cut Y biographies for X or Z cuts the lithium niobate of Y biographies
Chip, being placed in lithium benzoate and benzoic constant temperature mixed liquor carries out proton exchange.Secondly, obtain after measurement proton exchange
The refractive index and exchange depth of the planar waveguide for arriving.Again, the lithium niobate crystal chip after in the environment of logical oxygen to proton exchange enters
Row high annealing.Finally, effective refraction of each pattern that the graded index wave guide obtained after high annealing is supported is tested
Rate.
Described lithium niobate proton exchange model includes following sections：First, Nonlinear Diffusion annealing module frame is set up
Frame, calculates graded--index planar waveguides after annealing.Then, optical numerical value emulation module is set up, graded--index planar waveguides waveguide is calculated
The effective refractive index of each pattern supported under test wavelength.Finally, build evaluation function go forward side by side line parameter search.Arrange
The parameters such as diffusion coefficient function, diffusion time coefficient carry out parameter search for variable, are passed judgment on by evaluation function, final to determine
Diffusion parameter, sets up the Nonlinear Diffusion annealing module for adapting to itself experiment condition.
The emulation mode of described proton exchange lithium niobate graded--index planar waveguides, its lithium niobate graded index wave guide sample
This only swap time or annealing time is different.Each sample data is included after the depth after proton exchange, refractive index and annealing
The effective refractive index of the waveguide mode that graded index wave guide is supported.
The emulation mode of described proton exchange lithium niobate graded--index planar waveguides, it adopts benzene first in the proton exchange stage
The mixed liquor of acid and lithium benzoate is used as proton source.To ensure technology stability, temperature fluctuation control should be less than 1 DEG C.In logical oxygen
Under conditions of carry out high annealing, chip crystalline phase must be in α phases after annealing.
The emulation mode of described proton exchange lithium niobate graded--index planar waveguides, its lithium niobate proton exchange model is initial
Condition setting mainly has planar waveguide depth, diffusion coefficient function, diffusion time coefficient, diffusion time step-length etc..
The emulation mode of described proton exchange lithium niobate graded--index planar waveguides, its Nonlinear Diffusion annealing module is by matter
The certain thickness planar waveguide that son is formed after exchanging as diffusion source, and with the difference of its refractive index and lithium niobate substrate refractive index
Normalization proton concentration.Nonlinear Diffusion model is selected to describe proton diffusion process, the distribution of proton concentration after being annealed, and
Again the index distribution of waveguide after annealing is converted to.
The emulation mode of described proton exchange lithium niobate graded--index planar waveguides, its evaluation function is to test lithium niobate gradually
The standard deviation of the effective refractive index of each pattern of variable refractivity waveguide sample and the effective refractive index of calculated corresponding each pattern
Sum mean value.
Present invention beneficial effect compared with prior art has：
1. proton exchange reduces proton exchange speed using with lithium benzoate and benzoic mixed liquor, after exchange
The planar waveguide refractive index substantially constant for arriving.Extra such as soft annealing processing step is not needed, it is ensured that the stability of technique
With the accuracy of model.
2. pair proton exchanges to the whole waveguide fabrication process of annealing and is controlled and modeling, and is carried out by experiment sample
Parameter search match, with higher accuracy and specific aim, overcome the approximate of existing scheme refractive index restructuring procedure with not
Foot.
3. can realize that the different depth that exchange are with different annealing under itself experiment condition by lithium niobate proton exchange model
The prediction of time lithium niobate graded--index planar waveguides and its calculating of optical characteristics, are that experimentation brings theoretical guidance,
It is also simultaneously the basis for realizing lithium niobate two-dimensional graded index waveguiding structure modeling optimization.
Description of the drawings
High index of refraction planar waveguide schematic diagram is formed after Fig. 1 a proton exchanges.
Graded index wave guide distribution schematic diagram after Fig. 1 b annealing.
The technological process that Fig. 2 is adapted with lithium niobate proton exchange model.
Fig. 3 builds the flow chart of lithium niobate proton exchange model.
Fig. 4 shows normalized proton concentration distribution schematic diagram before the annealing of lithium niobate proton exchange model.
The calculated proton concentration distribution schematic diagram of Nonlinear Diffusion annealing module after the annealing of Fig. 5 a lithium niobates.
The calculated refringence distribution schematic diagram of Nonlinear Diffusion annealing module after the annealing of Fig. 5 b lithium niobates.
Tri- sample waveguides of Fig. 6 are respectively adopted IWKB methods test (dotted line) and lithium niobate proton exchange model emulation is (real
Line) graded--index planar waveguides after the annealing that obtains.Fig. 6 a samples 1 (annealing 4 hours), Fig. 6 b samples 2 (annealing 4.5 hours), figure
6c samples 3 (annealing 5 hours).
Fig. 7 exchanges depth is after 0.685 micron of lithium niobate planar waveguide is annealed 5 hours, using IWKB methods test (void
Line) and the graded--index planar waveguides that obtain of lithium niobate proton exchange model emulation (solid line).
Specific embodiment
Below in conjunction with the accompanying drawings the present invention will be further described in detail with specific embodiment.
The present invention realizes the emulation mode of proton exchange lithium niobate graded--index planar waveguides, first to proton exchange process mistake
Journey is controlled, and using the mixed liquor of benzoic acid and lithium benzoate as the proton source of proton exchange, and lithium niobate crystal chip is moved back
Fire is to α phases.Test experiments sample is prepared for lithium niobate proton exchange model.Secondly, lithium niobate proton exchange model is set up, it is main
To include Nonlinear Diffusion annealing module and optical numerical value emulation module, itself process conditions is determined by way of parameter search
Under diffusion parameter, set up adapt to itself experiment condition Nonlinear Diffusion annealing module.Finally, using lithium niobate proton exchange
Non-linear annealing module and optical numerical value emulation module in model is capable of achieving lithium niobate gradient index under itself process conditions
Rate distribution and its emulation of optical characteristics.
First, the technological process being adapted with lithium niobate proton exchange model is as shown in Fig. 2 mainly include：
Step 201, using benzoic acid and lithium benzoate mixed liquor as proton exchange proton source.Select to cut Y biographies for X
Or Z cuts Y and passes lithium columbate crystal.Lithium niobate crystal chip is placed in into mol ratio for 0.5%～3.0% lithium benzoate and benzoic mixed
Closing in liquid carries out proton exchange 2～10 hours, obtains the planar waveguide of high index of refraction.Mixed liquor lithium benzoate proportioning too Gao Zekuo
Scattered speed is remarkably decreased, and the uniformity of the too low then proton exchange process of proportioning is poor.Exchange temperature should be higher than that benzoic molten point 122
DEG C and be less than 249 DEG C of its boiling point, the low impact diffusion rate of exchange temperature, at the same temperature be close to during benzoic boiling point then solution steam
Send out serious, cause solution concentration to change.General exchange temperature is selected as between 160 DEG C to 220 DEG C.It is simultaneously guarantee technique
Stability, temperature fluctuation control should be less than 1 DEG C.
Step 202, using the refractive index and exchange depth of prism-coupled instrument m line measurement planar waveguides after proton exchange.
Step 203, in the environment of logical oxygen to proton exchange after lithium niobate carry out high annealing, by annealing of wafer to α
Phase.Annealing temperature determines the transformation of diffusion rate and annealing crystalline phase.Annealing temperature is too low such as 275 DEG C, then larger, same proton is lost
Waveguide after exchange is compared almost unchanged.And high annealing temperature is conducive to crystalline phase to the transformation of α phases, α phases crystal structure and base
Bottom material closely, the dependence being substantially not present between cell parameter and concentration, with low waveguide loss, high non-linearity
The advantages of coefficient.Annealing temperature is generally 320 DEG C～380 DEG C, annealing time 2～10 hours.
Step 204, having for each pattern that graded index wave guide is supported is tested after high annealing with prism-coupled instrument
Effect refractive index.
Fig. 3 is the flow chart for building lithium niobate proton exchange model.
Step 301 Nonlinear Diffusion annealing module, calculates index distribution after annealing.
The primary condition of model is built first, carries out parameter setting.Here with the folding that planar waveguide is measured after proton exchange
Penetrate rate to normalize proton concentration with the refringence at lithium niobate base bottom, the index distribution of planar waveguide is mapped as into proton dense
Degree distribution.Diffusion coefficient is the function of proton concentration in Nonlinear Diffusion, and common diffusion coefficient function form mainly has following three
Plant D (C)=D0/ (1- α C), D (C)=D0[α+(1- α) exp (- β C)] and D (C)=D0(α+(1-α)/(βC+γ)).Wherein C is
Proton concentration, D0For diffusion constant, α, β, γ are the related constant of diffusion.More than the selection of process conditions and chip can affect
Parameter, can be passed judgment on by parameter search and using evaluation function, select diffusion coefficient function form the most suitable and parameter.
Lithium niobate planar waveguide high-temperature annealing process can be with one-dimensional Nonlinear Diffusion modelRetouch
State, namelyWherein C is proton concentration distribution, is the function of locus x and diffusion time coefficient t,
D (C) is diffusion coefficient, is the function of proton concentration C.In order to solve the model, can adopt semi-implicit finite difference algorithm or
The algorithm of person's fully implicit solution finite difference.Semi-implicit finite difference form isFully implicit solution has
Limiting difference form isWherein τ be diffusion time step-length, CtSubscript represents the proton of t
Concentration distribution, D (C) represents diffusion coefficient function, and it is the function of proton concentration C.Boundary condition selects Transparent Boundary,
Proton concentration is avoided to be diffused in the reflection effect on border so as to the fact that more meet actual lithium columbate crystal with thicker spending.
Proton concentration distribution situation after annealing can be calculated using the model, when annealing of wafer to α phases, now tapered waveguide refractive index
Linear relationship is can be considered with the refringence and proton concentration at lithium niobate base bottom, proton concentration distribution refraction can be again converted to
Rate is distributed.
Step 302 builds optical numerical value emulation module.Numerical simulation solves maxwell equation group and calculates graded index
Waveguide optical characteristics such as effective refractive index of each pattern under test wavelength, conventional method can adopt FInite Element or limited
Calculus of finite differences etc..Using finite-difference algorithm, there are two methods of full vector and half vector.Consideration lithium niobate waveguides are weak restriction ripple
Lead, its refringence is less, also there is higher precision using the method for half vector.Boundary condition can adopt Transparent Boundary
Or perfect domination set condition.The lithium niobate waveguides of proton exchange only support a kind of polarization mode and ignore mixed mode, for X
Cut Y biography lithium niobates and only support TE polarization modes, for Z cuts Y biography lithium niobate waveguides TM polarization modes are only supported.
Step 303 build evaluation function go forward side by side line parameter search.Evaluation function is gradual change actually measured under test wavelength
The standard deviation of each pattern effective refractive index of index waveguide sample and the effective refractive index of calculated corresponding each pattern
Sum mean value.The lithium niobate graded index wave guide sample of measurement must ensure that sample wafers select consistent, and proton free is exchanged
Time or the different outer proton exchange process of annealing time and annealing process procedure all same.Sample can fix the proton exchange time
With a variable in annealing time, the identical proton exchange time is such as selected, annealing time is variable, proton is tested respectively and is handed over
Change the effective refractive index of each pattern after rear plate waveguide index, exchange depth and annealing.Ensured using multigroup experiment sample
The diffusion parameter for obtaining can accurately reflect lithium niobate annealing diffusion process under itself experiment condition.
Diffusion coefficient function, diffusion step-length and diffusion time coefficient are carried out into parameter scanning or using heuristic for variable
Searching algorithm be scanned optimum diffusion parameter selected by evaluation function, set up and adapt to the non-linear of itself experiment condition
Diffusion annealing module.Common searching algorithm has ant colony algorithm, genetic algorithm, ant group algorithm, particle algorithm or differential evolution
Algorithm, improves the efficiency and accuracy of search.
Finally, can using the Nonlinear Diffusion annealing module and optical numerical value emulation module in lithium niobate proton exchange model
To calculate the effective of different swap times and different annealing time lithium niobate graded--index planar waveguides and its optical characteristics such as pattern
Mode distributions of refractive index and pattern etc..
The present invention adopts the mixed liquor of benzoic acid and lithium benzoate as proton source in the technical process proton exchange stage, can
Obtain refractive index substantially constant planar waveguide.The scheme as proton source using purified petroleum benzin formic acid is compared, using with lithium benzoate
Exchange velocity can be reduced with benzoic mixed liquor.Simultaneously because chip κ2Phase and β1Mutually there is different activation energies, diffusion coefficient
Difference is big, and exchange automatic stop itself terminates in κ2Phase and β1The border of phase, it is ensured that the refractive index substantially constant of the waveguide.Therefore be not necessary to adopt
The processing steps such as soft annealing are capable of achieving the proton exchange profile of stable and uniform, provide stable for follow-up technique and simulation calculation
Primary condition, increase the accuracy that model is calculated, and improve the stability and repeatability of technique.Additionally, annealing stage is
Ensure proton concentration and refringence has linear relation and waveguide has low loss, chip crystalline phase palpus after annealing
In α phases, largest refractive index difference generally should be smaller than 0.25.
Annealing process chip experiences various crystalline phases, and different crystalline phases has different physicochemical properties, therefore sets up here
The model of Nonlinear Diffusion is describing the process with higher accuracy.Prism-coupled instrument m collimation method test patterns are effectively reflected
The precision reachable ± 0.0003 of rate, and support having for pattern using the distribution of obtain and calculated waveguide index is tested
Effect refractive index, with this evaluation function is set up, as a result more reliable.Binding experiment sample data, by the way of parameter search come
Determine each diffusion parameter so that the model more meets actual dispersion process, finally realize that lithium niobate is gradually under itself process conditions
The Accurate Prediction of variable refractivity distribution and the calculating of optical characteristics.
Specific example is as follows：
1. in order to obtain the parameter of itself experiment condition, select three X to cut Y and pass lithium niobate crystal chip as sample, select to rub
Your ratio is 0.5% lithium benzoate and benzoic acid mixed liquor as proton source, and exchange temperature is 210 DEG C, proton exchange 3 hours.
2. to test after proton exchange and be respectively 2.3078 in the sample plates waveguide index of 632.8nm wavelength three, 2.3073,
2.3075, depth is respectively 0.8634 micron, 0.8616 micron and 0.8622 micron.
3. set three sample annealing times to be respectively 4 hours, 4.5 hours and 5 hours, annealing temperature is 380 DEG C.Sample
Remaining process conditions all same.Each pattern effective refractive index such as following table institute that three samples are measured in 632.8n m wavelength after annealing
Show.
4. the planar waveguide obtained after proton exchange and lithium niobate base bottom refringence are carried out the normalization of proton concentration.
Fig. 4 shows normalized proton concentration distribution schematic diagram before the annealing of lithium niobate proton exchange model.
5. D (C)=D is selected0(α+(1- α)/(β C+ γ)) describes spread condition for diffusion coefficient function.Select heredity
Algorithm carries out parameter search.The diffusion time coefficient t and each coefficient D in spread function is set0, α, β, γ swept for variable
Retouch, diffusion time step-length τ=1.Nonlinear Diffusion annealing model adopts semi-implicit finite difference Algorithm for Solving, Fig. 5 a and Fig. 5 b to divide
Do not show that the calculated proton concentration distribution of Nonlinear Diffusion annealing module and refringence distribution are shown after lithium niobate annealing
It is intended to.Optical module carries out solving the effective refractive index of TE polarization modes under wavelength 632.8nm using half vector finite difference.
6. the optimum parametric solution that genetic algorithm is obtained is adopted for t=15590, D using the evaluation function0=0.53, α
=0.164, β=30, γ=0.01.Fig. 6 a, Fig. 6 b and Fig. 6 c respectively illustrate three sample waveguides in the case where diffusion parameter is selected
Graded index point after the annealing that (dotted line) and lithium niobate proton exchange model emulation (solid line) are obtained is tested using IWKB methods
Cloth.
7. on the basis of calculated diffusion parameter, spreading module and optical module using non-linear annealing can calculate not
With the index distribution and optical characteristics that exchange the graded index wave guide that depth and annealing time are obtained.Fig. 7 shows exchange
Depth is to test (dotted line) and lithium niobate proton exchange using IWKB methods after 0.67 micron of lithium niobate planar waveguide is annealed 5 hours
The graded--index planar waveguides that model emulation (solid line) is obtained.Now adopt calculated each mould of lithium niobate proton exchange model
The effective refractive index of formula is respectively 2.2130,2.2090 and 2.2062.Experiments verify that the pattern effective refractive index that test is obtained
For 2.2134,2.2095 and 2.2067.Contrast is visible, and lithium niobate is put down under the lithium niobate proton exchange model realization process conditions
The isoparametric calculating of Accurate Prediction and its optical characteristics such as effective refractive index of the index distribution of board waveguide, with higher standard
True property.
Embodiment described above only expresses the several embodiments of the present invention, and its description is more concrete and detailed, but and
Therefore the restriction to the scope of the claims of the present invention can not be interpreted as.It should be pointed out that for one of ordinary skill in the art
For, without departing from the inventive concept of the premise, some deformations and improvement can also be made, these belong to the guarantor of the present invention
Shield scope.Therefore, the protection domain of patent of the present invention should be defined by claims.Invention unspecified part belongs to this
Art personnel's common knowledge.
Claims (8)
1. a kind of emulation mode of proton exchange lithium niobate graded--index planar waveguides, it is characterised in that control proton exchange first
And annealing process procedure, lithium niobate proton exchange model framework is then built, it is calculated graded index wave guide institute after annealing
The effective refractive index of support pattern, builds the pattern effective refractive index and calculating measured with lithium niobate graded index wave guide sample
Evaluation function based on the corresponding pattern effective refractive index for obtaining, carries out parameter search matching, and foundation meets itself technique
The lithium niobate proton exchange model of condition, realizes that proton exchange lithium niobate graded--index planar waveguides and its accurate of optical characteristics are imitated
Very.
2. the emulation mode of proton exchange lithium niobate graded--index planar waveguides according to claim 1, it is characterised in that matter
Son is exchanged and annealing process procedure is as follows：
First, select to cut Y biographies for X or Z cuts the lithium niobate crystal chip of Y biographies, be placed on lithium benzoate and benzoic constant temperature is mixed
Closing in liquid carries out proton exchange；
Secondly, measure the refractive index of the planar waveguide obtained after proton exchange and exchange depth；
Again, the lithium niobate crystal chip after in the environment of logical oxygen to proton exchange carries out high annealing；
Finally, the effective refractive index of each pattern that the graded index wave guide obtained after high annealing is supported is tested.
3. the emulation mode of proton exchange lithium niobate graded--index planar waveguides according to claim 2, it is characterised in that niobium
Sour lithium proton exchange model includes following sections：
First, Nonlinear Diffusion annealing module frame is set up, waveguide graded--index planar waveguides after annealing are calculated；
Then, optical numerical value emulation module is set up, graded--index planar waveguides waveguide after annealing is calculated and is supported under test wavelength
Each pattern effective refractive index；
Finally, build evaluation function to go forward side by side line parameter search, the Nonlinear Diffusion for completing to adapt to itself experiment condition is annealed module
Structure.Arrange diffusion coefficient function, diffusion time coefficient carries out parameter search for variable, is passed judgment on by evaluation function, most
Diffusion parameter is determined eventually.
4. the emulation mode of proton exchange lithium niobate graded--index planar waveguides according to claim 3, it is characterised in that niobium
Only swap time or annealing time are different between sour lithium graded index wave guide sample, each lithium niobate graded index wave guide sample
Data include effective folding of the waveguide mode that graded index wave guide is supported after the depth after proton exchange, refractive index and annealing
Penetrate rate.
5. the emulation mode of proton exchange lithium niobate graded--index planar waveguides according to claim 2, it is characterised in that
The proton exchange stage, temperature fluctuation control should be less than 1 DEG C, logical using the mixed liquor of benzoic acid and lithium benzoate as proton source
High annealing is carried out under conditions of oxygen, crystalline phase must be in α phases after annealing.
6. the emulation mode of proton exchange lithium niobate graded--index planar waveguides according to claim 3, it is characterised in that niobium
Sour lithium proton exchange model primary condition is set with planar waveguide depth, diffusion coefficient function, diffusion time coefficient, diffusion time
Step-length.
7. the emulation mode of proton exchange lithium niobate graded--index planar waveguides according to claim 3, it is characterised in that non-
Linear diffusion annealing module using the certain thickness planar waveguide formed after proton exchange as diffusion source, and with its refractive index and
The difference normalization proton concentration of lithium niobate substrate refractive index, selects Nonlinear Diffusion model to describe proton annealing diffusion process, obtains
The distribution of proton concentration to after annealing, and the index distribution of waveguide after annealing is converted to again.
8. the emulation mode of proton exchange lithium niobate graded--index planar waveguides according to claim 3, it is characterised in that comment
Valency function is the effective refractive index and calculated corresponding each pattern for testing each pattern of lithium niobate graded index wave guide sample
Effective refractive index standard deviation sum mean value.
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| CN109445025A (en) * | 2018-12-19 | 2019-03-08 | 武汉邮电科学研究院有限公司 | A kind of modification method and structure of optical mixer unit phase error |
| CN114690316A (en) * | 2022-04-12 | 2022-07-01 | 山东建筑大学 | Etching process method for waveguide in quantum communication |
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| CN109445025A (en) * | 2018-12-19 | 2019-03-08 | 武汉邮电科学研究院有限公司 | A kind of modification method and structure of optical mixer unit phase error |
| CN114690316A (en) * | 2022-04-12 | 2022-07-01 | 山东建筑大学 | Etching process method for waveguide in quantum communication |
| CN114690316B (en) * | 2022-04-12 | 2023-08-04 | 山东建筑大学 | Etching process method for waveguide in quantum communication |
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